摘要:
A fluid sensor includes a base body 2 having a vibrating portion 7, a piezoelectric element 3 which is fixed onto one surface of the vibrating portion 7 and has a piezoelectric film 4 and at least a pair of electrodes 5a, 5b which are disposed in contact with the piezoelectric film 4, an electrode terminal 6 which is disposed on the surface of the base body 2 and electrically connected to the pair of electrodes 5a, 5b, a coating material 8 which is disposed on the surface of the base body 2 in the periphery of the electrode terminal 6; pressure plates 14a, 14b, and a sealing member 12 which is held between the base body 2 and the pressure plates 14a, 14b and formed so as to surround the electrode terminal 6, wherein the electrode terminal 6 is held gas-tightly and/or liquid-tightly with respect to a fluid to be measured by holding the sealing member 12 between the coating material 8 and the pressure plates 14a, 14b.
摘要:
A ceramic compact is provided having a patterned conductor is obtained by coating the patterned conductor with a slurry and then hardening the slurry. The slurry is prepared by mixing a thermosetting resin precursor, a ceramic powder, and a medium. In the ceramic compact, an isocyanate- or isothiocyanate-containing gelling agent and a hydroxyl-containing polymer are reacted and hardened to produce a thermosetting resin. The hydroxyl-containing polymer is preferably a butyral resin, an ethylcellulose-based resin, a polyethyleneglycol-based resin, or a polyether-based resin.
摘要:
A vector-signal processing circuit can be operated with low power consumption and can be configured so as to be cheap. Sensor signals in three-axial directions are individually rectified by full-wave-rectifier circuits individually formed by combining four diodes. Subsequently, the outputs of the above are added by an adder circuit and are further processed by a comparator, thereby generating digital signals. Forward-voltage-falling characteristics of the individual diodes used in the full-wave rectifier circuits are set to 0.3 V, and a threshold of the comparator is set to 0.6 V.
摘要:
A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.
摘要:
A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.
摘要:
A ceramic compact having a patterned conductor is obtained by coating the patterned conductor with a slurry and then by hardening the slurry. The slurry is prepared by mixing a thermosetting resin precursor, a ceramic powder, and a medium. In the ceramic compact, an isocyanate- or isothiocyanate-containing gelling agent and a hydroxyl-containing polymer are reacted and hardened to produce a thermosetting resin. The hydroxyl-containing polymer is preferably a butyral resin, an ethylcellulose-based resin, a polyethyleneglycol-based resin, or a polyether-based resin.
摘要:
A ceramic compact having a patterned conductor is obtained by coating the patterned conductor with a slurry and then by hardening the slurry. The slurry is prepared by mixing a thermosetting resin precursor, a ceramic powder, and a medium. In the ceramic compact, an isocyanate- or isothiocyanate-containing gelling agent and a hydroxyl-containing polymer are reacted and hardened to produce a thermosetting resin. The hydroxyl-containing polymer is preferably a butyral resin, an ethylcellulose-based resin, a polyethyleneglycol-based resin, or a polyether-based resin.
摘要:
A piezoelectric/electrostrictive (P/E) device includes at least one actuator section secured to thin plate sections with an adhesive. The actuator section includes a multilayered member including at least three actuator films, each of which include a P/E layer and electrode films. One or more holes or recesses are formed in portions of the thin plate sections on which the P/E elements are formed. The electrode films contact upper and lower surfaces of respective P/E layers and alternately extend to opposite surfaces thereof. End surface electrodes electrically connect an electrode film that contacts one of the P/E layers and an electrode film that contacts another one of the P/E layers. The end surface electrodes are electrically connected to terminals which are provided on a surface of an outermost layer of the P/E layers, and which are separated from one another by a predetermined distance.
摘要:
A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism includes a cavity portion formed in the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, wherein the forward end of the stopper member extends into the cavity portion.
摘要:
A sensor unit is provided for detecting a physical quantity with improved accuracy while maintaining acceptable detection limits. The sensor unit includes at least three three-axis sensors for three-dimensionally detecting the magnitude and direction of a physical quantity wherein the three sensors are disposed in one plane. Each three-axis sensor includes: an operating member; a supporting base having a hollow with the operating member being located at the center of the hollow; and a flexible plate having a piece of piezoelectric material in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base, the operating member being suspended at the center of the hollow by the flexible plate. The three three-axis sensors are assigned the X, Y, and Z directions, respectively, of a three-dimensional coordinate system so that the physical quantity applied from the outside is detected for each component in the X, Y, and Z directions independently of each other.