Fluid sensor
    1.
    发明授权
    Fluid sensor 失效
    流体传感器

    公开(公告)号:US5877411A

    公开(公告)日:1999-03-02

    申请号:US857337

    申请日:1997-05-16

    摘要: A fluid sensor includes a base body 2 having a vibrating portion 7, a piezoelectric element 3 which is fixed onto one surface of the vibrating portion 7 and has a piezoelectric film 4 and at least a pair of electrodes 5a, 5b which are disposed in contact with the piezoelectric film 4, an electrode terminal 6 which is disposed on the surface of the base body 2 and electrically connected to the pair of electrodes 5a, 5b, a coating material 8 which is disposed on the surface of the base body 2 in the periphery of the electrode terminal 6; pressure plates 14a, 14b, and a sealing member 12 which is held between the base body 2 and the pressure plates 14a, 14b and formed so as to surround the electrode terminal 6, wherein the electrode terminal 6 is held gas-tightly and/or liquid-tightly with respect to a fluid to be measured by holding the sealing member 12 between the coating material 8 and the pressure plates 14a, 14b.

    摘要翻译: 流体传感器包括具有振动部分7的基体2,固定在振动部分7的一个表面上的压电元件3,并且具有压电薄膜4和至少一对电极5a,5b 与压电薄膜4同样地设置有电极端子6,该电极端子6设置在基体2的表面并与该对电极5a,5b电连接,涂覆材料8设置在基体2的表面上 电极端子6的周边; 压板14a,14b和保持在基体2和压板14a,14b之间并形成为围绕电极端子6的密封构件12,其中电极端子6气密地保持和/或 通过将密封构件12保持在涂覆材料8和压力板14a,14b之间,相对于要测量的流体液密。

    Vector-signal processing circuit
    3.
    发明授权
    Vector-signal processing circuit 失效
    矢量信号处理电路

    公开(公告)号:US06366152B1

    公开(公告)日:2002-04-02

    申请号:US09664649

    申请日:2000-09-19

    IPC分类号: G06G725

    CPC分类号: G06G7/22

    摘要: A vector-signal processing circuit can be operated with low power consumption and can be configured so as to be cheap. Sensor signals in three-axial directions are individually rectified by full-wave-rectifier circuits individually formed by combining four diodes. Subsequently, the outputs of the above are added by an adder circuit and are further processed by a comparator, thereby generating digital signals. Forward-voltage-falling characteristics of the individual diodes used in the full-wave rectifier circuits are set to 0.3 V, and a threshold of the comparator is set to 0.6 V.

    摘要翻译: 矢量信号处理电路可以以低功耗操作,并且可以被配置成便宜。 三轴传感器信号通过组合四个二极管单独形成的全波整流电路单独整流。 随后,上述的输出由加法器电路相加,并由比较器进一步处理,从而产生数字信号。 在全波整流电路中使用的各个二极管的正向电压降特性设定为0.3V,比较器的阈值设定为0.6V。

    Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor
    4.
    发明授权
    Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor 失效
    振动陀螺仪传感器,组合传感器及振动陀螺传感器的制造方法

    公开(公告)号:US06321599B2

    公开(公告)日:2001-11-27

    申请号:US09812087

    申请日:2001-03-19

    IPC分类号: G01C1900

    摘要: A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.

    摘要翻译: 振动陀螺传感器的构造如下。 也就是说,检测压电/电致伸缩元件12,其在振动器旋转时检测在垂直于振动器2的振动方向的方向上产生的位移。 检测部由与振动器2一起的陶瓷一体化的烧制品和支撑基座4构成。检测部由比振动器2更薄的第一板状部6构成, 其主表面在振动方向上延伸。 压电/电致伸缩元件12根据成膜方法以一体的方式形成在第一板状部分6上。 此外,为了降低振动方向的刚度而减少振动器2的振动而设置的薄壁的第二板状部分8以一体的方式形成,使得其主表面沿垂直于 振动的方向。 因此,可以获得振动器的特性几乎不受环境磁场的影响,易于进行加工或加工的具有优异的灵敏度的陶瓷制的振动陀螺仪传感器,并且可以有利地调整电特性 。

    Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor

    公开(公告)号:US06244110B1

    公开(公告)日:2001-06-12

    申请号:US09545688

    申请日:2000-04-07

    IPC分类号: G01C1900

    摘要: A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.

    Piezoelectric/electrostrictive device and method of manufacturing same
    8.
    发明授权
    Piezoelectric/electrostrictive device and method of manufacturing same 失效
    压电/电致伸缩器件及其制造方法

    公开(公告)号:US06915547B2

    公开(公告)日:2005-07-12

    申请号:US10210309

    申请日:2002-08-01

    摘要: A piezoelectric/electrostrictive (P/E) device includes at least one actuator section secured to thin plate sections with an adhesive. The actuator section includes a multilayered member including at least three actuator films, each of which include a P/E layer and electrode films. One or more holes or recesses are formed in portions of the thin plate sections on which the P/E elements are formed. The electrode films contact upper and lower surfaces of respective P/E layers and alternately extend to opposite surfaces thereof. End surface electrodes electrically connect an electrode film that contacts one of the P/E layers and an electrode film that contacts another one of the P/E layers. The end surface electrodes are electrically connected to terminals which are provided on a surface of an outermost layer of the P/E layers, and which are separated from one another by a predetermined distance.

    摘要翻译: 压电/电致伸缩(P / E)装置包括用粘合剂固定到薄板部分的至少一个致动器部分。 致动器部分包括包括至少三个致动器膜的多层构件,每个致动器膜包括P / E层和电极膜。 在其上形成有P / E元件的薄板部分的部分中形成一个或多个孔或凹部。 电极膜接触相应P / E层的上表面和下表面,并交替地延伸到其相对表面。 端面电极电连接与P / E层之一接触的电极膜和接触另一个P / E层的电极膜。 端面电极电连接到设置在P / E层的最外层的表面上并且彼此分开预定距离的端子。

    Piezoelectric/electrostrictive device and method of manufacturing same
    9.
    发明授权
    Piezoelectric/electrostrictive device and method of manufacturing same 失效
    压电/电致伸缩器件及其制造方法

    公开(公告)号:US06455984B1

    公开(公告)日:2002-09-24

    申请号:US09671587

    申请日:2000-09-27

    IPC分类号: H01L4108

    摘要: A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixing section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixing section. The piezoelectric/electrostrictive device has a mechanism for restricting amplitude of the thin plate sections. The mechanism includes a cavity portion formed in the inner wall of the movable section and a stopper member provided on the inner wall of the fixing section, wherein the forward end of the stopper member extends into the cavity portion.

    摘要翻译: 压电/电致伸缩装置包括一对相互相对的薄板部分,可移动部分和用于支撑薄板部分和可移动部分的固定部分。 压电/电致伸缩元件布置在该对薄板部分的至少一个薄板部分上。 一对薄壁部分的内壁,可移动部分的内壁和固定部分的内壁都由一个孔形成。 压电/电致伸缩装置具有用于限制薄板部分的振幅的机构。 该机构包括形成在可动部分的内壁中的空腔部分和设置在固定部分的内壁上的止动部件,其中止动件的前端延伸到空腔部分中。

    Sensor unit having multiple sensors each providing independent detection
of a force component
    10.
    发明授权
    Sensor unit having multiple sensors each providing independent detection of a force component 失效
    具有多个传感器的传感器单元各自提供对力分量的独立检测

    公开(公告)号:US5959209A

    公开(公告)日:1999-09-28

    申请号:US46813

    申请日:1998-03-24

    摘要: A sensor unit is provided for detecting a physical quantity with improved accuracy while maintaining acceptable detection limits. The sensor unit includes at least three three-axis sensors for three-dimensionally detecting the magnitude and direction of a physical quantity wherein the three sensors are disposed in one plane. Each three-axis sensor includes: an operating member; a supporting base having a hollow with the operating member being located at the center of the hollow; and a flexible plate having a piece of piezoelectric material in contact with at least one pair of electrodes and extending across the hollow at an end of the supporting base, the operating member being suspended at the center of the hollow by the flexible plate. The three three-axis sensors are assigned the X, Y, and Z directions, respectively, of a three-dimensional coordinate system so that the physical quantity applied from the outside is detected for each component in the X, Y, and Z directions independently of each other.

    摘要翻译: 提供了一种传感器单元,用于在保持可接受的检测限度的同时以更高的精度检测物理量 传感器单元包括用于三维地检测物理量的大小和方向的至少三个三轴传感器,其中三个传感器设置在一个平面中。 每个三轴传感器包括:操作构件; 具有中空的支撑基座,所述操作构件位于所述中空部的中心; 以及柔性板,其具有与至少一对电极接触并且在所述支撑基座的端部处延伸穿过所述中空部分的压电材料片,所述操作构件通过所述柔性板悬挂在所述中空部分的中心。 三个三轴传感器分别分配三维坐标系的X,Y和Z方向,从而独立地对X,Y和Z方向上的每个分量检测从外部施加的物理量 的对方