公开(公告)号：US20110229656A1

公开(公告)日：2011-09-22

申请号：US12671773

申请日：2009-03-02

申请人： Kenji Shibata ,  Toshihisa Shimo ,  Kyoko Kumagai ,  Hidetaka Hayashi ,  Shinya Okuda ,  Shinfuku Nomura ,  Hiromichi Toyota

发明人： Kenji Shibata ,  Toshihisa Shimo ,  Kyoko Kumagai ,  Hidetaka Hayashi ,  Shinya Okuda ,  Shinfuku Nomura ,  Hiromichi Toyota

IPC分类号： H05H1/48

CPC分类号： C23C16/509 ,  C23C16/26 ,  C23C16/4485 ,  H01J37/32357

摘要： In an in-liquid plasma film-forming apparatus having: a vessel 1 being capable of accommodating a substrate “S” and a liquid “L” including raw material therein; an electrode 2 for in-liquid plasma, electrode 2 which is disposed in the vessel 1; an electric power device 3 for supplying electricity to the electrode 2 for in-liquid plasma; the electrode 2 for in-liquid plasma is equipped with: a main electrode 21 having a discharging end 22; an auxiliary electrode 26 not only facing the discharging end 22 but also being disposed between the discharging end 22 and the substrate “S” that face each other; and a plasma generating unit 29 having a space that is demarcated by a surface 22a of the discharging end 22 and a surface 26a of the auxiliary electrode 26 facing the surface 22a, and being for generating plasma by means of electricity being supplied to the main electrode 21. And, a decomposed component of the raw material is deposited onto a surface of the substrate “S” by contacting the plasma, which has generated at the plasma generating unit 29, with the substrate “S.”By means of the present construction, it becomes feasible to generate plasma in liquid without ever using a second electrode that serves as a substrate.

摘要翻译： 在液体等离子体成膜装置中，具有容纳基材“S”的容器1和包含原料的液体“L” 用于液体内等离子体的电极2，设置在容器1中的电极2; 用于向用于液体内等离子体的电极2供电的电力装置3; 用于液体内等离子体的电极2装备有：具有放电端22的主电极21; 辅助电极26不仅面向放电端22，而且还设置在放电端22和彼此相对的衬底“S”之间; 以及等离子体产生单元29，其具有由排放端22的表面22a和辅助电极26的面向表面22a的表面26a划分的空间，并且用于通过向主电极供电的方式产生等离子体 并且，通过使在等离子体产生单元29产生的等离子体与基板“S”接触，将原料的分解成分沉积在基板“S”的表面上。借助于本构造 在不用使用作为基板的第二电极的情况下，可以在液体中产生等离子体。

公开(公告)号：US20090123657A1

公开(公告)日：2009-05-14

申请号：US11887704

申请日：2006-03-27

申请人： Hitotoshi Murase ,  Toshihisa Shimo ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Hiroshi Yamashita ,  Makoto Kuramoto

发明人： Hitotoshi Murase ,  Toshihisa Shimo ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Hiroshi Yamashita ,  Makoto Kuramoto

IPC分类号： B05D1/00

CPC分类号： C23C16/26 ,  B01J19/088 ,  B01J2219/0809 ,  B01J2219/083 ,  B01J2219/0877 ,  H05H1/46 ,  H05H1/48 ,  H05H2001/466

摘要： The process for producing an amorphous carbon film of the present invention is a process for producing an amorphous carbon film comprising contacting a surface of a substrate S with bubbles B which have been formed in a liquid L containing an organic compound and inside which plasma has been generated, so as to form an amorphous carbon film on the surface of the substrate S, and the liquid L contains one or more selected from phenols and alcohols having a carbon number of from 1 to 12. According to the present invention, a hard amorphous carbon film can be formed easily.

摘要翻译： 本发明的无定形碳膜的制造方法是使非晶质碳膜的制造方法，其特征在于，使基材S的表面与形成于含有有机化合物的液体L中形成的气泡B接触， 产生，以在基材S的表面上形成无定形碳膜，液体L含有选自碳数为1至12的酚和醇的一种或多种。根据本发明，硬的无定形 可以容易地形成碳膜。

公开(公告)号：US08685360B2

公开(公告)日：2014-04-01

申请号：US12068527

申请日：2008-02-07

申请人： Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

发明人： Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

IPC分类号： C01B31/06 ,  B01J3/06 ,  B01J19/12

CPC分类号： H05H1/46 ,  B01J19/126 ,  B01J2219/1242 ,  B01J2219/1269 ,  B01J2219/1281 ,  C01B32/25

摘要： This invention is to provide a method for the production of diamond at a high rate and in a high efficiency using in-liquid plasma. The present invention is a method for the production of diamond using electromagnetic waves irradiated to a liquid containing carbon, hydrogen and oxygen in which the ratio of hydrogen atoms to the sum of carbon atoms and hydrogen atoms is from 0.75 to 0.82 and the ratio of carbon atoms to the sum of carbon atoms and oxygen atoms is from 0.47 to 0.58 so as to generate plasma in the liquid.

摘要翻译： 本发明是提供一种使用液体内等离子体以高速率和高效率生产金刚石的方法。 本发明是使用照射到含有碳，氢和氧的液体的电磁波来制造金刚石的方法，其中氢原子与碳原子和氢原子之和的比例为0.75至0.82，碳的比例 原子与碳原子和氧原子之和为0.47至0.58，以便在液体中产生等离子体。

公开(公告)号：US08607732B2

公开(公告)日：2013-12-17

申请号：US12671773

申请日：2009-03-02

申请人： Kenji Shibata ,  Toshihisa Shimo ,  Kyoko Kumagai ,  Hidetaka Hayashi ,  Shinya Okuda ,  Shinfuku Nomura ,  Hiromichi Toyota

发明人： Kenji Shibata ,  Toshihisa Shimo ,  Kyoko Kumagai ,  Hidetaka Hayashi ,  Shinya Okuda ,  Shinfuku Nomura ,  Hiromichi Toyota

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/509 ,  C23C16/26 ,  C23C16/4485 ,  H01J37/32357

摘要： In an in-liquid plasma film-forming apparatus having: a vessel 1 being capable of accommodating a substrate “S” and a liquid “L” including raw material therein; an electrode 2 for in-liquid plasma, electrode 2 which is disposed in the vessel 1; an electric power device 3 for supplying electricity to the electrode 2 for in-liquid plasma; the electrode 2 for in-liquid plasma is equipped with: a main electrode 21 having a discharging end 22; an auxiliary electrode 26 not only facing the discharging end 22 but also being disposed between the discharging end 22 and the substrate “S” that face each other; and a plasma generating unit 29 having a space that is demarcated by a surface 22a of the discharging end 22 and a surface 26a of the auxiliary electrode 26 facing the surface 22a, and being for generating plasma by means of electricity being supplied to the main electrode 21.

摘要翻译： 在液体等离子体成膜装置中，具有容纳基材“S”的容器1和包含原料的液体“L” 用于液体内等离子体的电极2，设置在容器1中的电极2; 用于向用于液体内等离子体的电极2供电的电力装置3; 用于液体内等离子体的电极2装备有：具有放电端22的主电极21; 辅助电极26不仅面向放电端22，而且还设置在放电端22和彼此相对的衬底“S”之间; 以及等离子体产生单元29，其具有由排放端22的表面22a和辅助电极26的面向表面22a的表面26a划分的空间，并且用于通过向主电极供电的方式产生等离子体 21。

公开(公告)号：US08653404B2

公开(公告)日：2014-02-18

申请号：US11792174

申请日：2005-12-02

申请人： Hitotoshi Murase ,  Toshihisa Shimo ,  Hiroaki Takashima ,  Hiromichi Toyota ,  Shinfuku Nomura ,  Tsunehiro Maehara

发明人： Hitotoshi Murase ,  Toshihisa Shimo ,  Hiroaki Takashima ,  Hiromichi Toyota ,  Shinfuku Nomura ,  Tsunehiro Maehara

IPC分类号： B23K10/00

CPC分类号： B01J19/088 ,  B01J2219/0809 ,  B01J2219/0835 ,  B01J2219/0877 ,  H05H1/46 ,  H05H1/48 ,  H05H2001/466

摘要： An in-liquid plasma electrode according to the present invention is an in-liquid plasma electrode for generating plasma in a liquid and has an electrically conductive member having an electric discharge end surface in contact with the liquid, and an electrically insulating member covering an outer periphery of the conductive member at least except the electric discharge end surface. Preferably, d and x satisfy −2d≦x≦2d, where d is a length of a minor axis of the cross section when a conductive end portion of the electrically conductive member having the electric discharge end surface has an approximately circular cross section, or d is a length of a short side of the cross section when the conductive end portion has an approximately rectangular cross section, and x is a distance from a reference plane to a plane containing the electric discharge end surface when the reference plane is an end surface of the electrically insulating member that is approximately parallel with the electric discharge end surface. Owing to this construction, it is possible to provide an in-liquid plasma electrode which can simply generate plasma in a wide variety of liquids including a conductive liquid such as water and alcohol, and furthermore an in-liquid plasma generating apparatus having this electrode, and an in-liquid plasma generating method using this electrode.

摘要翻译： 根据本发明的液体内等离子体电极是用于在液体中产生等离子体并具有与液体相接触的放电端面的导电构件的液体内等离子体电极，以及覆盖外部的电绝缘构件 至少除了放电端面之外，导电构件的周边。 优选地，d和x满足-2d @ x @ 2d，其中d是当具有放电端表面的导电构件的导电端部具有大致圆形横截面时横截面的短轴的长度，或 d是当导电端部具有大致矩形横截面时横截面的短边长度，x是当基准面为端面时，从基准面到包含放电端面的面的距离 所述电绝缘构件与所述放电端面大致平行。 由于这种结构，可以提供一种液体等离子体电极，其可以简单地在包括诸如水和醇的导电液体的各种液体中产生等离子体，此外还提供具有该电极的液体内等离子体产生装置， 以及使用该电极的液体内等离子体生成方法。

公开(公告)号：US08541068B2

公开(公告)日：2013-09-24

申请号：US11887704

申请日：2006-03-27

申请人： Hitotoshi Murase ,  Toshihisa Shimo ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Hiroshi Yamashita ,  Makoto Kuramoto

发明人： Hitotoshi Murase ,  Toshihisa Shimo ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Hiroshi Yamashita ,  Makoto Kuramoto

IPC分类号： H05H1/24 ,  C23C16/00 ,  B05D1/18

CPC分类号： C23C16/26 ,  B01J19/088 ,  B01J2219/0809 ,  B01J2219/083 ,  B01J2219/0877 ,  H05H1/46 ,  H05H1/48 ,  H05H2001/466

摘要： The process for producing an amorphous carbon film of the present invention is a process for producing an amorphous carbon film comprising contacting a surface of a substrate S with bubbles B which have been formed in a liquid L containing an organic compound and inside which plasma has been generated, so as to form an amorphous carbon film on the surface of the substrate S, and the liquid L contains one or more selected from phenols and alcohols having a carbon number of from 1 to 12. According to the present invention, a hard amorphous carbon film can be formed easily.

摘要翻译： 本发明的无定形碳膜的制造方法是使非晶质碳膜的制造方法，其特征在于，使基材S的表面与形成于含有有机化合物的液体L中形成的气泡B接触， 产生，以在基材S的表面上形成无定形碳膜，液体L含有选自碳数为1至12的酚和醇的一种或多种。根据本发明，硬的无定形 可以容易地形成碳膜。

公开(公告)号：US07067204B2

公开(公告)日：2006-06-27

申请号：US10507919

申请日：2003-03-31

申请人： Shinfuku Nomura ,  Toyota Hiromichi

发明人： Shinfuku Nomura ,  Toyota Hiromichi

IPC分类号： B01J19/08 ,  B01J19/10 ,  D01D19/00

CPC分类号： H05H1/46 ,  A62D3/13 ,  A62D3/17 ,  A62D3/19 ,  A62D2101/22 ,  A62D2101/28 ,  A62D2203/10 ,  B01D19/0084 ,  B01J10/002 ,  B01J19/088 ,  B01J19/10 ,  B01J19/12 ,  B01J2219/0877 ,  B01J2219/0896 ,  B01J2219/1215 ,  B01J2219/1293 ,  C23C16/26 ,  C23C16/27 ,  C23C16/50 ,  C23C16/511 ,  H05H2001/463

摘要： A method and apparatus for generating plasma in a liquid. The apparatus includes an ultrasonic wave generator for generating bubbles in the liquid, and an electromagnetic wave generator for continuously irradiating electromagnetic waves to the liquid from within the liquid in order to generate plasma. The method of generating plasma in a liquid includes the steps of generating bubbles in the liquid by irradiating ultrasonic waves in the liquid, and generating plasma in the bubbles by continuously irradiating electromagnetic waves from within the liquid to the bubbles.

摘要翻译： 一种用于在液体中产生等离子体的方法和装置。 该装置包括用于在液体中产生气泡的超声波发生器和用于从液体内向液体中持续照射电磁波以产生等离子体的电磁波发生器。 在液体中产生等离子体的方法包括以下步骤：通过在液体中照射超声波在液体中产生气泡，并通过从液体内的电磁波连续照射到气泡来产生气泡中的等离子体。

公开(公告)号：US09440213B2

公开(公告)日：2016-09-13

申请号：US14114033

申请日：2012-04-24

申请人： Yoshiaki Hattori ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

发明人： Yoshiaki Hattori ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

IPC分类号： B01J19/12 ,  C01G9/02 ,  H05H1/46 ,  B22F9/14 ,  B82Y40/00 ,  C01F5/14 ,  B82Y30/00 ,  B01J19/08

CPC分类号： B01J19/12 ,  B01J19/088 ,  B01J19/126 ,  B01J2219/0811 ,  B01J2219/082 ,  B01J2219/0841 ,  B01J2219/089 ,  B01J2219/0894 ,  B01J2219/1233 ,  B01J2219/1239 ,  B01J2219/1269 ,  B22F9/14 ,  B22F2999/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01F5/14 ,  C01G9/02 ,  C01P2002/72 ,  C01P2002/84 ,  C01P2004/03 ,  C01P2004/24 ,  C01P2004/64 ,  H05H1/46 ,  H05H2001/4622 ,  H05H2001/463 ,  H05H2245/125 ,  B22F2202/13

摘要： A nanometer-size-particle production apparatus is provided which can prevent the occurrence of waste fluids, and which makes quick and continuous syntheses feasible while suppressing damages to the electrode.The present invention is a nanometer-size-particle production apparatus for synthesizing nanometer-size particles in a liquid by means of plasma in liquid, and comprises: a container for accommodating the liquid therein; an electromagnetic-wave generation device for generating a high-frequency wave, or a microwave; an electrode conductor whose leading end makes contact with the liquid to supply the high-frequency wave or the microwave to the liquid; a covering portion being disposed into the liquid so as to cover a leading-end upside of the electrode conductor; a metallic chip being composed of a metal making a raw material of nanometer-size particles, and having a leading end that is disposed to face to a leading-end section of the electrode conductor; and a feed device for feeding out the leading end of the metallic chip with respect to the leading-end section of the electrode conductor; the leading end of the electrode conductor having a configuration that is a non-edge configuration; and the electrode conductor, except for the leading end, having an axially-orthogonal cross-sectional area that is larger than an axially-orthogonal cross-sectional area of the metallic chip.

摘要翻译： 本发明是一种通过液体中的等离子体在液体中合成纳米尺寸颗粒的纳米尺寸颗粒生产装置，包括：用于在其中容纳液体的容器; 用于产生高频波的电磁波产生装置或微波; 电极导体，其前端与液体接触，将高频波或微波提供给液体; 覆盖部分设置在液体中以覆盖电极导体的前端上侧; 金属芯片，由制造纳米尺寸颗粒的原料的金属构成，并且具有设置成面对所述电极导体的前端部的前端; 以及馈送装置，用于相对于电极导体的前端部分输出金属片的前端; 电极导体的前端具有非边缘构造的构造; 所述电极导体除了所述前端以外，具有比所述金属芯片的轴向正交截面积大的轴向正交的截面积。

公开(公告)号：US20140042011A1

公开(公告)日：2014-02-13

申请号：US14114033

申请日：2012-04-24

申请人： Yoshiaki Hattori ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

发明人： Yoshiaki Hattori ,  Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

IPC分类号： B01J19/12

CPC分类号： B01J19/12 ,  B01J19/088 ,  B01J19/126 ,  B01J2219/0811 ,  B01J2219/082 ,  B01J2219/0841 ,  B01J2219/089 ,  B01J2219/0894 ,  B01J2219/1233 ,  B01J2219/1239 ,  B01J2219/1269 ,  B22F9/14 ,  B22F2999/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01F5/14 ,  C01G9/02 ,  C01P2002/72 ,  C01P2002/84 ,  C01P2004/03 ,  C01P2004/24 ,  C01P2004/64 ,  H05H1/46 ,  H05H2001/4622 ,  H05H2001/463 ,  H05H2245/125 ,  B22F2202/13

摘要： A nanometer-size-particle production apparatus is provided which can prevent the occurrence of waste fluids, and which makes quick and continuous syntheses feasible while suppressing damages to the electrode.The present invention is a nanometer-size-particle production apparatus for synthesizing nanometer-size particles in a liquid by means of plasma in liquid, and comprises: a container for accommodating the liquid therein; an electromagnetic-wave generation device for generating a high-frequency wave, or a microwave; an electrode conductor whose leading end makes contact with the liquid to supply the high-frequency wave or the microwave to the liquid; a covering portion being disposed into the liquid so as to cover a leading-end upside of the electrode conductor; a metallic chip being composed of a metal making a raw material of nanometer-size particles, and having a leading end that is disposed to face to a leading-end section of the electrode conductor; and a feed device for feeding out the leading end of the metallic chip with respect to the leading-end section of the electrode conductor; the leading end of the electrode conductor having a configuration that is a non-edge configuration; and the electrode conductor, except for the leading end, having an axially-orthogonal cross-sectional area that is larger than an axially-orthogonal cross-sectional area of the metallic chip.

摘要翻译： 提供了能够防止废液的发生的纳米尺寸粒子的制造装置，能够快速连续地进行合成，同时抑制对电极的破坏。 本发明是一种通过液体中的等离子体在液体中合成纳米尺寸颗粒的纳米尺寸颗粒生产装置，包括：用于在其中容纳液体的容器; 用于产生高频波的电磁波产生装置或微波; 电极导体，其前端与液体接触，将高频波或微波提供给液体; 覆盖部分设置在液体中以覆盖电极导体的前端上侧; 金属芯片，由制造纳米尺寸颗粒的原料的金属构成，并且具有设置成面对所述电极导体的前端部的前端; 以及馈送装置，用于相对于电极导体的前端部分输出金属片的前端; 电极导体的前端具有非边缘构造的构造; 所述电极导体除了所述前端以外，具有比所述金属芯片的轴向正交截面积大的轴向正交的截面积。

公开(公告)号：US20090200157A1

公开(公告)日：2009-08-13

申请号：US12068527

申请日：2008-02-07

申请人： Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

发明人： Shinfuku Nomura ,  Hiromichi Toyota ,  Shinobu Mukasa

IPC分类号： C01B31/06

CPC分类号： H05H1/46 ,  B01J19/126 ,  B01J2219/1242 ,  B01J2219/1269 ,  B01J2219/1281 ,  C01B32/25

摘要： [Problems] An object of this invention is to provide a method for the production of diamond at a high rate and in a high efficiency using in-liquid plasma.[Solving Means] In order to solve the above problems, the present invention relates to a method for the production of diamond, characterized in that, electromagnetic wave is irradiated to a liquid containing carbon, hydrogen and oxygen in which the ratio of hydrogen atoms to the sum of carbon atoms and hydrogen atoms is from 0.75 to 0.82 and the ratio of carbon atoms to the sum of carbon atoms and oxygen atoms is from 0.47 to 0.58 so as to generate plasma in the liquid whereby diamond is manufactured.

摘要翻译： 发明内容本发明的目的是提供一种使用液体内等离子体以高速率和高效率生产金刚石的方法。 为了解决上述问题，本发明涉及金刚石的制造方法，其特征在于，将电磁波照射到含有碳，氢和氧的液体中，其中氢原子与 碳原子和氢原子之和为0.75〜0.82，碳原子与碳原子和氧原子之和的比例为0.47〜0.58，在液体中产生等离子体，由此制造金刚石。