公开(公告)号：US20120086925A1

公开(公告)日：2012-04-12

申请号：US13267663

申请日：2011-10-06

申请人： Dieter KRAUS ,  Dirk Heinrich EHM ,  Stefan-Wolfgang SCHMIDT ,  Stefan WIESNER ,  Almut CZAP ,  Stefan KOEHLER ,  Hin Yiu Anthony CHUNG

发明人： Dieter KRAUS ,  Dirk Heinrich EHM ,  Stefan-Wolfgang SCHMIDT ,  Stefan WIESNER ,  Almut CZAP ,  Stefan KOEHLER ,  Hin Yiu Anthony CHUNG

IPC分类号： G03B27/52

CPC分类号： G03F7/70933 ,  G03F7/70041 ,  G03F7/70916

摘要： A method for preventing contaminating gaseous substances (18) from passing through an opening (17b) in a housing (4a) of an EUV lithography apparatus (1), wherein at least one optical element for guiding EUV radiation (6) is arranged in the housing (4a). The method involves: generating at least one gas flow (21a, 21b) which deflects the contaminating substances (18, 18′), and in particular is directed counter to the flow direction (Z) thereof, in the region of the opening (17b). The gas flow (21a, 21b) and the EUV radiation (6) are generated in pulsed fashion and the pulse rate of the gas flow (21a, 21b) is defined in a manner dependent on the pulse rate of the contaminating substances (18, 18′) released under the action of the pulsed EUV radiation (6), wherein both pulse rates are preferably equal in magnitude, and wherein, in the region of the opening (17b), the gas pulses temporally overlap the pulses of the contaminating substances (18, 18′). An associated EUV lithography apparatus at which the method can be carried out is also disclosed.

摘要翻译： 一种用于防止污染气体物质（18）穿过EUV光刻设备（1）的壳体（4a）中的开口（17b）的方法，其中至少一个用于引导EUV辐射（6）的光学元件布置在 住房（4a）。 该方法包括：产生使污染物质（18,18'）偏转的至少一个气流（21a，21b），特别是在开口（17b）的区域中相对于其流动方向（Z）反向 ）。 以脉冲方式产生气流（21a，21b）和EUV辐射（6），气流（21a，21b）的脉率以取决于污染物质（18， 18'）在脉冲EUV辐射（6）的作用下释放，其中两个脉冲速率优选地相等，并且其中在开口区域（17b）中，气体脉冲在时间上与污染物质的脉冲重叠 （18,18'）。 还公开了可以执行该方法的相关EUV光刻设备。

公开(公告)号：US20100071720A1

公开(公告)日：2010-03-25

申请号：US12234447

申请日：2008-09-19

申请人： Dirk Heinrich Ehm ,  Stefan Schmidt ,  Dieter Kraus ,  Stefan Wiesner ,  Stefan Koehler ,  Almut Czap ,  Hin Yiu Anthony Chung

发明人： Dirk Heinrich Ehm ,  Stefan Schmidt ,  Dieter Kraus ,  Stefan Wiesner ,  Stefan Koehler ,  Almut Czap ,  Hin Yiu Anthony Chung

IPC分类号： B08B5/04 ,  B08B7/00 ,  C03C25/70

CPC分类号： B08B7/00 ,  B08B7/0071 ,  G03F7/70925

摘要： Inside a vacuum chamber 200 a cleaning unit 204 provides atomic hydrogen or atomic deuterium for cleaning a surface 202 at a pressure of less than 10−4 Torr or of more than 10−3 Torr. The surface 202 is heated by the heating unit 203 to a temperature of at least 50° C. This allows achieving cleaning rates of more than 60 Å/h. Preferably, the surface 202 is the surface of a multilayer mirror 201 as used in an EUV lithography apparatus.

摘要翻译： 在真空室200内，清洁单元204提供原子氢或原子氘，以在小于10-4乇或大于10-3乇的压力下清洁表面202。 表面202由加热单元203加热到至少50℃的温度。这样可实现大于60埃/小时的清洁率。 优选地，表面202是在EUV光刻设备中使用的多层反射镜201的表面。

公开(公告)号：US07237529B2

公开(公告)日：2007-07-03

申请号：US10555453

申请日：2004-05-28

申请人： Thomas Hannewald ,  Stefan Koehler

发明人： Thomas Hannewald ,  Stefan Koehler

IPC分类号： F02D11/10 ,  F02D9/08

CPC分类号： F02D11/10 ,  F02D9/1065 ,  F16K1/221 ,  F16K1/226

摘要： A throttle valve positioning device is disclosed, The device has a housing with a bearing for a throttle valve shaft and a throttle valve support, within which a throttle valve pivots which sits on the throttle valve shaft, running into a shaft passage in the support. With the device, air leakage may be avoided, such that the periphery of the throttle valve is arranged at a separation from a passage for the throttle valve shaft in. the throttle valve support.

摘要翻译： 公开了一种节流阀定位装置。该装置具有壳体，其具有用于节流阀轴和节流阀支撑件的轴承，节气门枢转地位于节流阀轴上，该节气门位于支撑件中的轴通道中。 利用该装置，可以避免空气泄漏，使得节流阀的周边布置成与节流阀轴在节流阀支撑件中的通道分开。

公开(公告)号：US20060178759A1

公开(公告)日：2006-08-10

申请号：US11300191

申请日：2005-12-13

申请人： Stefan Koehler

发明人： Stefan Koehler

IPC分类号： G05B11/01

CPC分类号： H03H17/0621 ,  H03H17/0275 ,  H03H2017/0247 ,  H04L27/2092 ,  H04L27/2627

摘要： A signal converter for converting a start signal into an end signal includes means for copying the start signal to obtain a plurality of copied start signals, wherein a copied start signal may be fed into a processing branch as a branch signal. Further, the signal converter includes a first branch processing means in a first processing branch for processing a first branch signal according to a first processing regulation to obtain a first processed branch signal. Further, the signal converter includes a second branch processing means in a second processing branch for processing a second branch signal according to a second processing regulation to obtain a second processed branch signal, wherein the second processing regulation is different from the first processing regulation and wherein the first processing regulation and the second processing regulation are implemented to cause a low-pass polyphase filtering of the copied start signals. Finally, the signal converter includes selection means for sequentially selecting the first processed branch signal and then the second processed branch signal in order to obtain the end signal.

公开(公告)号：US08503958B2

公开(公告)日：2013-08-06

申请号：US12305689

申请日：2007-06-20

申请人： Alfonso Carrera ,  Stefan Koehler ,  Guenter Rohmer

发明人： Alfonso Carrera ,  Stefan Koehler ,  Guenter Rohmer

IPC分类号： H04B1/18

CPC分类号： H04B1/0085

摘要： A signal processor for processing a receiving signal having a first usable frequency band and a second usable frequency band includes a first mixer for mixing the receiving signal with a first local oscillator signal, wherein a frequency of the first local oscillator signal is asymmetrical between the first usable frequency band and the second usable frequency band. The first mixer is implemented to obtain an in-phase signal and a quadrature signal, having a first signal portion representing a mixed image of the first usable frequency band, and having a second signal portion representing a mixed image of the second usable frequency band. The signal processor comprises a second mixer) for mixing the in-phase signal and the quadrature signal by using the second local oscillator signal. A frequency of the second local oscillator signal is selected such that the mixed image of the first usable frequency band and the mixed image of the second usable frequency band are at least partly image bands of each other with regard to the second local oscillator signal. The second mixer is implemented to separately provide information content of the first usable frequency band and the second usable frequency band at its output, for obtaining a first output signal, which substantially comprises information content of the first usable frequency band, and for obtaining a second output signal which substantially comprises information content of the second usable frequency band.

摘要翻译： 一种用于处理具有第一可用频带和第二可用频带的接收信号的信号处理器，包括用于将接收信号与第一本地振荡器信号进行混合的第一混频器，其中第一本机振荡器信号的频率在第一 可用频带和第二可用频带。 实现第一混频器以获得具有表示第一可用频带的混合图像的第一信号部分并且具有表示第二可用频带的混合图像的第二信号部分的同相信号和正交信号。 信号处理器包括第二混频器，用于通过使用第二本机振荡器信号来混合同相信号和正交信号。 选择第二本地振荡器信号的频率，使得第一可用频带和第二可用频带的混合图像的混合图像相对于第二本机振荡器信号至少部分是彼此的图像频带。 第二混频器被实现为在其输出处分别提供第一可用频带和第二可用频带的信息内容，以获得基本包括第一可用频带的信息内容的第一输出信号，并且用于获得第二可用频带 输出信号，其基本上包括第二可用频带的信息内容。

公开(公告)号：US20100297975A1

公开(公告)日：2010-11-25

申请号：US12305689

申请日：2007-06-20

申请人： Alfonso Carrera ,  Stefan Koehler ,  Guenter Rohmer

发明人： Alfonso Carrera ,  Stefan Koehler ,  Guenter Rohmer

IPC分类号： H04B1/16 ,  H04B1/10

CPC分类号： H04B1/0085

摘要： A signal processor for processing a receiving signal having a first usable frequency band and a second usable frequency band includes a first mixer for mixing the receiving signal with a first local oscillator signal, wherein a frequency of the first local oscillator signal is asymmetrical between the first usable frequency band and the second usable frequency band. The first mixer is implemented to obtain an in-phase signal and a quadrature signal, having a first signal portion representing a mixed image of the first usable frequency band, and having a second signal portion representing a mixed image of the second usable frequency band. The signal processor comprises a second mixer) for mixing the in-phase signal and the quadrature signal by using the second local oscillator signal. A frequency of the second local oscillator signal is selected such that the mixed image of the first usable frequency band and the mixed image of the second usable frequency band are at least partly image bands of each other with regard to the second local oscillator signal. The second mixer is implemented to separately provide information content of the first usable frequency band and the second usable frequency band at its output, for obtaining a first output signal, which substantially comprises information content of the first usable frequency band, and for obtaining a second output signal which substantially comprises information content of the second usable frequency band.

摘要翻译： 一种用于处理具有第一可用频带和第二可用频带的接收信号的信号处理器，包括用于将接收信号与第一本地振荡器信号进行混合的第一混频器，其中第一本地振荡器信号的频率在第一 可用频带和第二可用频带。 实现第一混频器以获得具有表示第一可用频带的混合图像的第一信号部分并且具有表示第二可用频带的混合图像的第二信号部分的同相信号和正交信号。 信号处理器包括第二混频器，用于通过使用第二本机振荡器信号来混合同相信号和正交信号。 选择第二本地振荡器信号的频率，使得第一可用频带和第二可用频带的混合图像的混合图像相对于第二本机振荡器信号至少部分是彼此的图像频带。 第二混频器被实现为在其输出处分别提供第一可用频带和第二可用频带的信息内容，以获得基本包括第一可用频带的信息内容的第一输出信号，并且用于获得第二可用频带 输出信号，其基本上包括第二可用频带的信息内容。

公开(公告)号：US07557902B2

公开(公告)日：2009-07-07

申请号：US10577163

申请日：2003-09-27

申请人： Udo Dinger ,  Frank Eisert ,  Stefan Koehler ,  Andreas Ochse ,  Johannes Zellner ,  Martin Lowisch ,  Timo Laufer

发明人： Udo Dinger ,  Frank Eisert ,  Stefan Koehler ,  Andreas Ochse ,  Johannes Zellner ,  Martin Lowisch ,  Timo Laufer

IPC分类号： G03B27/54 ,  G06K7/10

CPC分类号： G03F7/70958 ,  B82Y10/00 ,  G02B1/00 ,  G02B5/0891 ,  G02B7/181 ,  G03F7/70891 ,  G21K1/062 ,  G21K2201/065

摘要： A projection objective 1 for short wavelengths, in particular for wavelengths λ

摘要翻译： 用于短波长的投影物镜1，特别是波长λ<157nm的投影物镜1设有多个相对于光轴5精确定位的镜子[M1，M2，M3，M4，M5和M6]。 镜子[M1，M2，M3，M4，M5和M6]具有多层涂层。 提供了至少两种不同的镜材料，其热膨胀系数的上升与热膨胀系数的过零区域中的温度的函数不同，特别是大小的符号。

公开(公告)号：US07039421B2

公开(公告)日：2006-05-02

申请号：US10416094

申请日：2001-10-31

申请人： Sylvie Couronne ,  Stefan Koehler ,  Guenter Rohmer ,  Thomas Von Der Gruen ,  Ingmar Bretz ,  Heinz Gerhaeuser

发明人： Sylvie Couronne ,  Stefan Koehler ,  Guenter Rohmer ,  Thomas Von Der Gruen ,  Ingmar Bretz ,  Heinz Gerhaeuser

IPC分类号： H04Q7/20

CPC分类号： G01S5/14 ,  G01C21/206

摘要： A system for determining the position of an object, comprising a reference transmitter device (202) disposed in a fixed position, the reference transmitter device (202) having a reference time supplying means for supplying a reference time signal that indicates a reference time, at least two transmitter/receiver devices (302) disposed in fixed positions with respect to each other and to the reference transmitter device (202), each transmitter/receiver device (302) having a time supplying means for supplying a time signal indicating a time, a receiver means for receiving the reference time signal from the reference transmitter device (202) and a synchronization means for processing the time signal and the reference time signal, as well as a position determining device (502) on the object for determining the position of the object.

摘要翻译： 一种用于确定对象的位置的系统，包括设置在固定位置的参考发射机设备（202），所述参考发射机设备（202）具有参考时间提供装置，用于提供指示参考时间的参考时间信号， 至少两个相对于彼此和参考发射机设备固定位置的发射机/接收机设备（302），每个发射机/接收机设备（302）具有时间提供装置，用于提供指示时间的时间信号， 用于从参考发射机设备（202）接收参考时间信号的接收机装置和用于处理时间信号和参考时间信号的同步装置，以及在物体上的位置确定装置（502），用于确定 物体。

公开(公告)号：US08885141B2

公开(公告)日：2014-11-11

申请号：US13088299

申请日：2011-04-15

申请人： Wolfgang Singer ,  Yim-Bun-Patrick Kwan ,  Stefan-Wolfgang Schmidt ,  Dirk Heinrich Ehm ,  Dieter Kraus ,  Stefan Wiesner ,  Stefan Koehler ,  Almut Czap ,  Hin Yiu Anthony Chung

发明人： Wolfgang Singer ,  Yim-Bun-Patrick Kwan ,  Stefan-Wolfgang Schmidt ,  Dirk Heinrich Ehm ,  Dieter Kraus ,  Stefan Wiesner ,  Stefan Koehler ,  Almut Czap ,  Hin Yiu Anthony Chung

IPC分类号： G03B27/52 ,  G03B27/42 ,  G03F7/20 ,  G03F1/86 ,  G03F1/82

CPC分类号： G03F7/70925 ,  G03F1/82 ,  G03F1/86 ,  G03F7/70733 ,  G03F7/7085 ,  G03F7/70866

摘要： An EUV lithography device including an illumination device for illuminating a mask at an illumination position in the EUV lithography device and a projection device for imaging a structure provided on the mask onto a light-sensitive substrate. The EUV lithography device has a processing device (15) for processing an optical element (6a), in particular the mask, preferably in a locally resolved manner, at a processing position in the EUV lithography device. For activating at least one gas component of the gas stream (27), the processing device (15) includes a particle generator (30) for generating a particle beam, in particular an electron beam (30a), and/or a high-frequency generator.

摘要翻译： 一种EUV光刻设备，包括用于在EUV光刻设备中的照明位置处照射掩模的照明设备和用于将设置在掩模上的结构成像到感光基板上的投影设备。 EUV光刻设备具有处理装置（15），用于在EUV光刻设备中的处理位置优选地以局部分辨的方式处理光学元件（6a），特别是掩模。 为了激活气体流（27）的至少一种气体成分，处理装置（15）包括用于产生粒子束（特别是电子束（30a））和/或高频的粒子发生器（30） 发电机。

公开(公告)号：US08815039B2

公开(公告)日：2014-08-26

申请号：US12810079

申请日：2008-12-23

申请人： Markus Paul Wild ,  Stefan Koehler

发明人： Markus Paul Wild ,  Stefan Koehler

IPC分类号： B32B38/10

CPC分类号： B24B9/16 ,  B24B9/161 ,  B24B9/167 ,  Y10T29/49817 ,  Y10T29/49822 ,  Y10T156/1153

摘要： A next processing pin is applied as a follow-on pin to a stone, wherein the stone is held by a preceding pin and fixed to the stone by way of a first adhesive bonding location. The preceding pin is separated from the stone. The follow-on pin is fixed to the stone by way of a second adhesive bonding location spaced from the first adhesive bonding location. The follow-on pin frontally receives a fluid adhesive at a spacing from the stone and the spacing between the adhesive-coated front end and the stone is reduced until the adhesive front end contacts the stone. The adhesive is hardened at the contact location as the second adhesive bonding location and heat is transferred by way of the preceding pin to the first adhesive bonding location A force component is exerted on the preceding pin to release the pin from the stone and to hold the stone with the next pin.

摘要翻译： 下一个加工销作为后续销应用于石头，其中石头由前一个销钉固定，并通过第一粘合位置固定到石头上。 前面的针与石头分开。 后续销通过与第一粘合粘合位置间隔开的第二粘合位置固定到石头上。 后续销以与石头间隔的方式接收流体粘合剂，并且减少粘合剂涂覆的前端和石头之间的间隔，直到粘合剂前端接触石头。 粘合剂在接触位置被硬化，因为第二粘合粘合位置并且热量通过前面的销被转移到第一粘合剂粘合位置。力分量施加在前面的销上以将销从石头释放并保持 石头与下一个针。