Storage node, phase change memory device and methods of operating and fabricating the same
    1.
    发明授权
    Storage node, phase change memory device and methods of operating and fabricating the same 有权
    存储节点,相变存储器件及其操作和制造方法

    公开(公告)号:US08742514B2

    公开(公告)日:2014-06-03

    申请号:US13348333

    申请日:2012-01-11

    IPC分类号: H01L21/00

    摘要: A storage node may include a lower electrode, a phase change layer on the lower electrode and an upper electrode on the phase change layer, and the lower electrode and the upper electrode may be composed of thermoelectric materials having a melting point higher than that of the phase change layer, and having different conductivity types. An upper surface of the lower electrode may have a recessed shape, and a lower electrode contact layer may be provided between the lower electrode and the phase change layer.

    摘要翻译: 存储节点可以包括下电极,下电极上的相变层和相变层上的上电极,下电极和上电极可以由熔点高于 相变层,并具有不同的导电类型。 下电极的上表面可以具有凹陷形状,并且下电极接触层可以设置在下电极和相变层之间。