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    Process to fabricate an integrated micro-fluidic system on a single wafer
    2.
    发明授权
    Process to fabricate an integrated micro-fluidic system on a single wafer 有权
    在单个晶片上制造集成的微流体系统的过程

    公开(公告)号：US06716661B2

    公开(公告)日：2004-04-06

    申请号：US10147006

    申请日：2002-05-16

    申请人： Quanbo Zou ,  Yu Chen ,  Janak Singh ,  Tit Meng Lim ,  Tie Yan ,  Chew Kiat Heng

    发明人： Quanbo Zou ,  Yu Chen ,  Janak Singh ,  Tit Meng Lim ,  Tie Yan ,  Chew Kiat Heng

    IPC分类号： H01L2100

    CPC分类号： B81C1/00214 ,  B81C2201/0132 ,  F04B43/043

    摘要： Formation of micro-fluidic systems is normally achieved using a multi-wafer fabrication procedure. The present invention teaches how a complete micro-fluidic system can be implemented on a single chip. The invention uses only dry etch processes to form micro-chambers. In particular, it makes use of deep reactive ion etching whereby multiple trenches of differing depths may be formed simultaneously. Buried micro-chambers are formed by isotropically increasing trench widths using an etchant that does not attack the mask so the trenches grow wider beneath the surface until they merge. Deposition of a dielectric layer over the trenches allows some trenches to be sealed and some to be left open. Micro-pumps are formed by including in the micro-chamber roof a layer that is used to change chamber volume either through electrostatically induced motion or through thermal mismatch as a result of its being heated.

    摘要翻译： 微流体系统的形成通常使用多晶片制造程序来实现。 本发明教导了如何在单个芯片上实现完整的微流体系统。 本发明仅使用干蚀刻工艺来形成微室。 特别地，它利用深反应离子蚀刻，从而可以同时形成不同深度的多个沟槽。 通过使用不侵蚀掩模的蚀刻剂各向同性地增加沟槽宽度来形成掩埋的微室，使得沟槽在表面下方变得更宽，直到它们合并。 电介质层沉积在沟槽上方允许一些沟槽被密封，有些则被打开。 通过在微室顶中包含用于通过静电诱导运动或通过其被加热的结果的热失配来改变室容积的层而形成微泵。

    Miniaturized thermal cycler
    6.
    发明授权
    Miniaturized thermal cycler 失效
    小型化热循环仪

    公开(公告)号：US06509186B1

    公开(公告)日：2003-01-21

    申请号：US09846126

    申请日：2001-05-01

    申请人： Quanbo Zou ,  Uppili Sridhar ,  Yu Chen ,  Tit Meng Lim ,  Emmanuel Selvanayagam Zachariah ,  Tie Yan

    发明人： Quanbo Zou ,  Uppili Sridhar ,  Yu Chen ,  Tit Meng Lim ,  Emmanuel Selvanayagam Zachariah ,  Tie Yan

    IPC分类号： C12M136

    CPC分类号： B01L3/5027 ,  B01L3/5025 ,  B01L7/52 ,  B01L2200/147 ,  B01L2300/0816 ,  B01L2300/0877 ,  B01L2300/1827 ,  B01L2300/1883 ,  B01L2400/0487 ,  B01L2400/0688

    摘要： The invention describes a thermal cycler which permits simultaneous treatment of multiple individual samples in independent thermal protocols, so as to implement large numbers of DNA experiments simultaneously in a short time. The chamber is thermally isolated from its surroundings, heat flow in and out of the unit being limited to one or two specific heat transfer areas. All heating elements are located within these transfer areas and at least one temperature sensor per heating element is positioned close by. Fluid bearing channels that facilitate sending fluid into, and removing fluid from, the chamber are provided. The chambers may be manufactured as integrated arrays to form units in which each cycler chamber has independent temperature and fluid flow control. Two embodiments of the invention are described together with a process for manufacturing them as well as two schemes for making connections to the outside world.

    摘要翻译： 本发明描述了一种热循环仪，其允许在独立热方案中同时处理多个单个样品，从而在短时间内同时实现大量的DNA实验。 该室与其周围热隔离，进出单元的热流限于一个或两个特定的传热区域。 所有加热元件位于这些转移区域内，每个加热元件至少有一个温度传感器靠近。 提供了便于将流体输送到腔室中并从腔室中除去流体的流体轴承通道。 腔室可以被制成集成阵列以形成其中每个循环器腔具有独立温度和流体流量控制的单元。 本发明的两个实施例与制造它们的方法以及用于连接到外部世界的两种方案一起被描述。

    Miniaturized thermal cycler
    7.
    发明授权
    Miniaturized thermal cycler 失效
    小型化热循环仪

    公开(公告)号：US06432695B1

    公开(公告)日：2002-08-13

    申请号：US09785588

    申请日：2001-02-16

    申请人： Quanbo Zou ,  Uppili Sridhar ,  Yu Chen ,  Tit Meng Lim ,  Emmanuel Selvanayagam Zachariah ,  Tie Yan

    发明人： Quanbo Zou ,  Uppili Sridhar ,  Yu Chen ,  Tit Meng Lim ,  Emmanuel Selvanayagam Zachariah ,  Tie Yan

    IPC分类号： C12M134

    CPC分类号： B01L3/5027 ,  B01L3/5025 ,  B01L7/52 ,  B01L2200/147 ,  B01L2300/0816 ,  B01L2300/0877 ,  B01L2300/1827 ,  B01L2300/1883 ,  B01L2400/0487 ,  B01L2400/0688

    摘要： The invention describes a thermal cycler which permits simultaneous treatment of multiple individual samples in independent thermal protocols, so as to implement large numbers of DNA experiments simultaneously in a short time. The chamber is thermally isolated from its surroundings, heat flow in and out of the unit being limited to one or two specific heat transfer areas. All heating elements are located within these transfer areas and at least one temperature sensor per heating element is positioned close by. Fluid bearing channels that facilitate sending fluid into, and removing fluid from, the chamber are provided. The chambers may be manufactured as integrated arrays to form units in which each cycler chamber has independent temperature and fluid flow control. Two embodiments of the invention are described together with a process for manufacturing them.

    摘要翻译： 本发明描述了一种热循环仪，其允许在独立热方案中同时处理多个单个样品，从而在短时间内同时实现大量的DNA实验。 该室与其周围热隔离，进出单元的热流限于一个或两个特定的传热区域。 所有加热元件位于这些转移区域内，每个加热元件至少有一个温度传感器靠近。 提供了便于将流体输送到腔室中并从腔室中除去流体的流体轴承通道。 腔室可以被制成集成阵列以形成其中每个循环器腔具有独立温度和流体流量控制的单元。 本发明的两个实施例与其制造方法一起被描述。