Method for manufacturing pressure sensing device
    1.
    发明授权
    Method for manufacturing pressure sensing device 有权
    制造压力传感装置的方法

    公开(公告)号:US09046549B2

    公开(公告)日:2015-06-02

    申请号:US13710718

    申请日:2012-12-11

    摘要: According to one embodiment, a method for manufacturing a pressure sensing device includes preparing a sensor unit and a mounting substrate. The sensor unit includes: a membrane body; and an element unit provided on the membrane body. The element unit includes: a first electrode; a second electrode; and a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction. The mounting substrate includes: a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad. The method further includes joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit.

    摘要翻译: 根据一个实施例,用于制造压力感测装置的方法包括制备传感器单元和安装基板。 传感器单元包括:膜体; 以及设置在膜体上的元件单元。 元件单元包括:第一电极; 第二电极; 以及设置在第一电极和第二电极之间并且在第一方向上具有磁化的第一磁性层。 安装基板包括:基座; 设置在基座上的第一电极焊盘; 以及设置在基座上并与第一电极焊盘分开设置的第二电极焊盘。 该方法还包括在加热时将第一电极焊盘接合到第一电极,并且在加热时将第二电极焊盘接合到第二电极,沿着施加到传感器单元的第一方向的外部磁场。

    Magnetoresistance effect element, magnetic head and magnetic reproducing system
    5.
    发明授权
    Magnetoresistance effect element, magnetic head and magnetic reproducing system 有权
    磁阻效应元件,磁头和磁再现系统

    公开(公告)号:US06914757B2

    公开(公告)日:2005-07-05

    申请号:US09961171

    申请日:2001-09-24

    摘要: A magnetoresistance effect element includes a magnetization fixed layer in which the direction of magnetization is substantially fixed to one direction, a magnetization free layer in which the direction of magnetization varies in response to an external magnetic field, and a non-magnetic intermediate layer formed between the magnetization fixed layer and the magnetization free layer. The magnetoresistance effect element has a resistance varying in response to a relative angle between the direction of magnetization in the magnetization fixed layer and the direction of magnetization in the magnetization free layer, the resistance being detected when a sense current is applied to the film planes of the magnetization fixed layer, the non-magnetic intermediate layer, and the magnetization free layer in a direction substantially perpendicular thereto. The film area of the non-magnetic intermediate layer is smaller than the film area of each of the magnetization fixed layer and the magnetization free layer, the magnetoresistance effect element has a single conductive part with a film area smaller than the film area of each of the magnetoresistance effect element, and the magnetoresistance effect element is configured such that the sense current flows only through the single conductive part.

    摘要翻译: 磁阻效应元件包括其中磁化方向基本上固定到一个方向的磁化固定层,其中磁化方向响应于外部磁场而变化的磁化自由层以及形成在其间的非磁性中间层 磁化固定层和无磁化层。 磁阻效应元件具有响应于磁化固定层中的磁化方向与磁化自由层中的磁化方向之间的相对角度而变化的电阻,当感测电流施加到膜平面时,检测电阻 磁化固定层,非磁性中间层和与磁化自由层基本垂直的方向。 非磁性中间层的膜面积小于磁化固定层和磁化自由层的膜面积,磁阻效应元件具有单个导电部分,其膜面积小于膜面积 磁阻效应元件和磁阻效应元件被构造成使得感测电流仅流过单个导电部件。

    Magnetoresistance effect element having resistance adjusting layer and thin-film insertion layer
    6.
    发明授权
    Magnetoresistance effect element having resistance adjusting layer and thin-film insertion layer 有权
    具有电阻调节层和薄膜插入层的磁阻效应元件

    公开(公告)号:US08085511B2

    公开(公告)日:2011-12-27

    申请号:US12236331

    申请日:2008-09-23

    IPC分类号: G11B5/39 H01L29/82

    摘要: A magnetoresistance effect element includes a magnetoresistance effect film including a magnetically pinned layer having a magnetic material film whose direction of magnetization is pinned substantially in one direction, a magnetically free layer having a magnetic material film whose direction of magnetization changes in response to an external magnetic field, and a nonmagnetic metal intermediate layer located between said pinned layer and said free layer. The element also includes a pair of electrodes electrically connected to the magnetoresistance effect film to supply a sense current perpendicularly to a film plane of the magnetoresistance effect film. At least one of the pinned layer and the free layer may include a thin-film insertion layer. The nonmagnetic metal intermediate layer includes a resistance adjusting layer including at least one of oxides, nitrides and fluorides, and the thin-film insertion layer includes at least one element selected from the group consisting of iron (Fe), cobalt (Co) and nickel (Ni).

    摘要翻译: 磁阻效应元件包括磁阻效应膜,该磁阻效应膜包括具有磁性材料膜的磁性被钉扎层,该磁性材料膜的磁化方向基本上被固定在一个方向上;磁性层,具有响应于外部磁性的磁化方向变化的磁性材料膜 以及位于所述被钉扎层和所述自由层之间的非磁性金属中间层。 元件还包括电连接到磁阻效应膜的一对电极,以提供垂直于磁阻效应膜的膜平面的感测电流。 被钉扎层和自由层中的至少一个可以包括薄膜插入层。 非磁性金属中间层包括电阻调节层,其包含氧化物,氮化物和氟化物中的至少一种,薄膜插入层包括选自铁(Fe),钴(Co)和镍中的至少一种元素 (Ni)。

    Magnetoresistance effect element, and magnetic head and magnetic recording and/or reproducing system utilizing the magnetoresistance element
    8.
    发明授权
    Magnetoresistance effect element, and magnetic head and magnetic recording and/or reproducing system utilizing the magnetoresistance element 有权
    磁阻效应元件以及利用磁电阻元件的磁头和磁记录和/或再现系统

    公开(公告)号:US07483245B2

    公开(公告)日:2009-01-27

    申请号:US12042166

    申请日:2008-03-04

    IPC分类号: G11B5/33 G11B5/127

    摘要: There is provided a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers to be controlled, and a magnetic head and magnetic recording and/or reproducing system using the same. In a magnetoresistance effect element wherein a sense current is caused to flow in a direction perpendicular to the plane of the film, if a pinned layer and a free layer have a stacked construction of a magnetic layer and a non-magnetic layer or a stacked construction of a magnetic layer and a magnetic layer, it is possible to provide a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers, while effectively utilizing the scattering effect depending on spin.

    摘要翻译: 提供了一种具有适当的电阻值的实用磁阻效应元件,其可以被敏化并且具有少量的要控制的磁性层,以及使用该电阻的磁头和磁记录和/或再现系统。 在其中使感应电流在垂直于膜的平面的方向上流动的磁阻效应元件中,如果被钉扎层和自由层具有磁性层和非磁性层的层叠结构或堆叠结构 的磁性层和磁性层,可以提供具有适当的电阻值的实用的磁阻效应元件,其可以被敏化并且具有少量的磁性层,同时有效地利用依赖于旋转的散射效应 。

    Magnetoresistance effect element, magnetic head and magnetic recording and/or reproducing system
    10.
    发明授权
    Magnetoresistance effect element, magnetic head and magnetic recording and/or reproducing system 有权
    磁阻效应元件,磁头和磁记录和/或再现系统

    公开(公告)号:US07359162B2

    公开(公告)日:2008-04-15

    申请号:US10970278

    申请日:2004-10-22

    IPC分类号: G11B5/39 G01R33/02

    摘要: There is provided a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers to be controlled, and a magnetic head and magnetic recording and/or reproducing system using the same. In a magnetoresistance effect element wherein a sense current is caused to flow in a direction perpendicular to the plane of the film, if a pinned layer and a free layer have a stacked construction of a magnetic layer and a non-magnetic layer or a stacked construction of a magnetic layer and a magnetic layer, it is possible to provide a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers, while effectively utilizing the scattering effect depending on spin.

    摘要翻译: 提供了一种具有适当的电阻值的实用磁阻效应元件,其可以被敏化并且具有少量的要控制的磁性层,以及使用该磁阻的磁头和磁记录和/或再现系统。 在其中使感应电流在垂直于膜的平面的方向上流动的磁阻效应元件中,如果被钉扎层和自由层具有磁性层和非磁性层的层叠结构或堆叠结构 的磁性层和磁性层,可以提供具有适当的电阻值的实用的磁阻效应元件,其可以被敏化并且具有少量的磁性层,同时有效地利用依赖于旋转的散射效应 。