公开(公告)号：US09090722B2

公开(公告)日：2015-07-28

申请号：US13256397

申请日：2010-06-23

申请人： Toru Fujimori ,  Koji Shirakawa ,  Toshihiro Usa ,  Kenji Sugiyama ,  Takayuki Ito ,  Hideaki Tsubaki ,  Katsuhiro Nishimaki ,  Shuji Hirano ,  Hidenori Takahashi

发明人： Toru Fujimori ,  Koji Shirakawa ,  Toshihiro Usa ,  Kenji Sugiyama ,  Takayuki Ito ,  Hideaki Tsubaki ,  Katsuhiro Nishimaki ,  Shuji Hirano ,  Hidenori Takahashi

IPC分类号： C08F20/50 ,  G03F7/00 ,  G03F7/039 ,  B82Y10/00 ,  B82Y40/00 ,  B29C59/02 ,  B29C33/38 ,  B29C33/42 ,  G03F7/004

CPC分类号： C08F20/50 ,  B29C33/38 ,  B29C2033/426 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0397

摘要： A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.

摘要翻译： 提供了用于制备模具的化学增幅抗蚀剂组合物，以及使用该组合物的模具制备方法和抗蚀剂膜。

公开(公告)号：US08031436B2

公开(公告)日：2011-10-04

申请号：US12393117

申请日：2009-02-26

申请人： Toshihiro Usa ,  Kazunori Komatsu

发明人： Toshihiro Usa ,  Kazunori Komatsu

IPC分类号： G11B5/82

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y30/00 ,  G11B5/743 ,  G11B5/82 ,  G11B5/865 ,  G11B9/10 ,  Y10S430/143

摘要： When performing writing on a substrate applied with a resist by rapidly vibrating electron beam in a direction orthogonal to a radial direction of the substrate and X-Y deflecting the electron beam while rotating the substrate in one direction, a long element is written by scanning the electron beam with the middle position of a 2-bit signal length as the center position of the electron beam so as to completely fill the area of the writing length reduced by a predetermined ratio and an unwritten portion of predetermined width remaining on each side of the long element with respect to a final 2-bit signal length on a magnetic disk medium.

摘要翻译： 当通过在与基板的径向正交的方向上快速振动电子束在施加有抗蚀剂的基板上进行写入时，并且在使基板沿一个方向旋转的同时XY偏转电子束，通过扫描电子束来写入长元件 以2位信号长度的中间位置作为电子束的中心位置，以便完全填充以预定比率减小的写入长度的区域，并且在长元件的每一侧残留预定宽度的未写入部分 相对于磁盘介质上最后的2位信号长度。

公开(公告)号：US20110188353A1

公开(公告)日：2011-08-04

申请号：US13017301

申请日：2011-01-31

申请人： IKUO TAKANO ,  TOSHIHIRO USA

发明人： IKUO TAKANO ,  TOSHIHIRO USA

IPC分类号： G11B11/00

CPC分类号： G11B11/00

摘要： Irradiation of an electron beam onto a base plate having resist coated thereon is controlled by ON/OFF signals output to a blanking element. Beam deflecting operations are controlled by deflecting signals output to a deflecting element. Patterns of servo areas and data areas are scanned and drawn on the base plate over a plurality of rotations. The electron beam is scanned in two directions so as to fill the shapes of patterns in the servo areas during a specific rotation, patterns in the data area are drawn as a continuous line or broken line with a single electron beam emission. The patterns of the data area are not drawn during other rotations, by shielding irradiation of the electron beam.

摘要翻译： 将电子束照射到其上涂覆有抗蚀剂的基板上通过输出到消隐元件的ON / OFF信号来控制。 光束偏转操作通过偏转输出到偏转元件的信号来控制。 伺服区域和数据区域的图案在多个转动中在基板上扫描和绘制。 电子束在两个方向扫描，以在特定旋转期间填充伺服区域中的图案的形状，数据区域中的图案被绘制为具有单个电子束发射的连续线或虚线。 通过屏蔽电子束的照射，数据区的图案在其它旋转期间不绘制。

公开(公告)号：US20100237262A1

公开(公告)日：2010-09-23

申请号：US12724856

申请日：2010-03-16

申请人： Toshihiro USA ,  Kenji SUGIYAMA

发明人： Toshihiro USA ,  Kenji SUGIYAMA

IPC分类号： G21K5/00

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3023 ,  H01J37/3174

摘要： When performing pattern writing by emitting an electron beam, a fixed frequency component, which is a component of a variation in an encoder signal from the encoder in one rotation of the rotation stage that commonly appears in a plurality of different rotational speeds of the rotation stage, is compensated for by deflection correcting the electron beam in a circumferential direction, and a variable frequency component, which is a component of the variation in the encoder signal other than the fixed frequency component, is compensated for by changing the clock frequency of a write clock.

摘要翻译： 当通过发射电子束执行图案写入时，固定频率分量是作为编码器信号的变化的一部分的编码器信号的一部分，所述编码器信号来自编码器，所述编码器信号在所述旋转平台的一次旋转中，所述编码器信号通常以旋转台 通过在圆周方向校正电子束的偏转进行补偿，并且通过改变写入的时钟频率来补偿作为除了固定频率分量之外的编码器信号的变化的分量的可变频率分量 时钟。

公开(公告)号：US07641822B2

公开(公告)日：2010-01-05

申请号：US11311402

申请日：2005-12-20

申请人： Kazunori Komatsu ,  Toshihiro Usa

发明人： Kazunori Komatsu ,  Toshihiro Usa

IPC分类号： B29D17/00

CPC分类号： B82Y10/00 ,  G11B5/65 ,  G11B5/743 ,  G11B5/82 ,  G11B5/865 ,  Y10S425/81

摘要： A method of producing a master information carrier by scanning a track a number of times. The method produces a master information carrier has a pattern of a magnetic layer representing information to be transferred to a high-density recording slave medium where the track width is not larger than 0.3 μm. The pattern is drawn by scanning a given track a plurality of times with an electron beam whose drawing diameter is smaller than the track width.

摘要翻译： 一种通过扫描轨道多次来产生主信息载体的方法。 该方法产生主信息载体具有表示要传送到轨道宽度不大于0.3μm的高密度记录从属介质的信息的磁性层的图案。 通过用拉丝直径小于轨道宽度的电子束扫描给定的轨迹来绘制图案。

公开(公告)号：US20090140163A1

公开(公告)日：2009-06-04

申请号：US12277627

申请日：2008-11-25

申请人： Kazunori KOMATSU ,  Toshihiro Usa

发明人： Kazunori KOMATSU ,  Toshihiro Usa

IPC分类号： H01J3/14 ,  G03F7/20 ,  A61N5/00

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S430/143

摘要： When writing elements of a fine pattern on a substrate applied with a resist by scanning an electron beam on the substrate, the electron beam is scan controlled so as to completely fill the shape of each of the elements by vibrating the electron beam rapidly in a radius direction of the rotation stage and at the same time deflecting in a direction orthogonal to the radius direction of the rotation stage faster than a rotational speed thereof, thereby sequentially writing the elements.

摘要翻译： 当通过扫描基板上的电子束来在施加有抗蚀剂的基板上写入精细图案的元件时，电子束被扫描控制，以通过以半径快速振动电子束来完全填充每个元件的形状 旋转台的方向并且同时在与旋转台的半径方向正交的方向上偏转比其旋转速度快，从而顺序地写入元件。

公开(公告)号：US20090140162A1

公开(公告)日：2009-06-04

申请号：US12277544

申请日：2008-11-25

申请人： Kazunori KOMATSU ,  Toshihiro Usa

发明人： Kazunori KOMATSU ,  Toshihiro Usa

IPC分类号： H01J3/14 ,  A61N5/00 ,  G01N13/10

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865

摘要： When writing a fine pattern on a substrate applied with a resist by scanning an electron beam on the substrate such that each element of the fine pattern is completely filled by the electron beam, the rotational speed of the rotation stage is controlled so as to be fast in writing on an inner circumferential track and slow in writing on an outer circumferential track in inversely proportional to the radius of the writing position. A write control signal of the electron beam is generated based on a writing clock signal generated in association with the rotation of the rotation stage, and the number of clocks of the writing clock signal in one rotation of the rotation stage is maintained at a constant value for each track irrespective of the radius of the writing position.

摘要翻译： 当通过扫描基板上的电子束使得精细图案的每个元素被电子束完全填充而在施加有抗蚀剂的基板上写入精细图案时，旋转台的旋转速度被控制为快 在内圆周轨道上书写，并且在写入位置的半径上成反比例地在外周轨道上书写缓慢。 基于与旋转级的旋转相关联地生成的写入时钟信号来生成电子束的写入控制信号，并且旋转级的一个旋转中的写入时钟信号的时钟数保持在恒定值 对于每个轨道，而与写入位置的半径无关。

公开(公告)号：US20090034124A1

公开(公告)日：2009-02-05

申请号：US12143533

申请日：2008-06-20

申请人： Kenji Ichikawa ,  Toshihiro Usa

发明人： Kenji Ichikawa ,  Toshihiro Usa

IPC分类号： G11B5/82 ,  B29C59/02

CPC分类号： G11B5/82 ,  G11B5/855

摘要： An imprint mold structure of the present invention is for producing a magnetic recording medium having servo areas each of which has a preamble area where servo data for synchronization with a clock cycle is recorded, and data areas where user data is written, and contains a first convexo-concave pattern corresponding to the servo areas and a second convexo-concave pattern corresponding to the data areas, wherein a ratio L/S of a width “L” in the circumferential direction of a convex portion corresponding to a non-magnetic portion formed in the preamble area to a width “S” in the circumferential direction of a concave portion corresponding to a magnetic portion formed in the preamble area varies depending on a distance “R” from a center of the imprint mold structure to a center of a pattern unit composed of the convex portion and the concave portion in the first convexo-concave pattern.

摘要翻译： 本发明的压印模具结构是用于制造具有伺服区域的磁记录介质，每个伺服区域具有记录与时钟周期同步的伺服数据的前同步码区域和写入用户数据的数据区域， 对应于伺服区域的凸凹图案和对应于数据区域的第二凸凹图案，其中与形成的非磁性部分相对应的凸部的圆周方向上的宽度“L”的比率L / S 在前导区域中，与形成在前置区域中的磁性部分对应的凹部的圆周方向的宽度“S”根据从压印模具结构的中心到图案的中心的距离“R”而变化 单元，其由第一凸凹图案中的凸部和凹部构成。

公开(公告)号：US07973297B2

公开(公告)日：2011-07-05

申请号：US12364838

申请日：2009-02-03

申请人： Toshihiro Usa ,  Kazunori Komatsu

发明人： Toshihiro Usa ,  Kazunori Komatsu

IPC分类号： H01J3/14 ,  G11B5/02

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/20214 ,  H01J2237/24578 ,  H01J2237/30 ,  H01J2237/3045

摘要： When writing a hard disk pattern on a substrate applied with a resist by scanning an electron beam on the substrate while rotating a rotation stage, writing is started with respect to each radial direction position of each area based on a predetermined encoder pulse for each radial direction position among those generated according to the rotational angle of the rotation stage that occurs after a predefined encoder pulse that occurs ahead in a rotational direction of a radial direction position whose write start position in a circumferential direction in each area arrives first at the writing position as the rotation stage rotates and ahead of the write start position in the circumferential direction with respect to each radial direction position, and after a predetermined time from the predetermined encoder pulse.

摘要翻译： 当通过在转动旋转台的同时扫描基板上的电子束来在施加有抗蚀剂的基板上写入硬盘图案时，基于每个半径方向的预定的编码器脉冲相对于每个区域的每个径向位置开始写入 在根据旋转台的旋转角度产生的位置之间发生的位置之间发生的预定的编码器脉冲之后发生的预定的编码器脉冲，其沿着在每个区域的圆周方向上的写入开始位置首先到达写入位置的径向位置的旋转方向的旋转方向上发生， 旋转台相对于每个径向位置在周向方向上旋转并在写入开始位置之前，并且在从预定编码器脉冲起的预定时间之后旋转。

公开(公告)号：US20100149673A1

公开(公告)日：2010-06-17

申请号：US12636145

申请日：2009-12-11

申请人： Kenji ICHIKAWA ,  Atsushi TATSUGAWA ,  Toshihiro USA

发明人： Kenji ICHIKAWA ,  Atsushi TATSUGAWA ,  Toshihiro USA

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/855 ,  G11B2220/2516

摘要： A method for testing a mold structure including magnetically transferring a magnetic signal according to a concavo-convex pattern for a servo area in a mold structure to a perpendicular magnetic recording medium; electrically reproducing ≧50 tracks of the magnetic signal of servo data transferred onto the perpendicular magnetic recording medium using a magnetic head to obtain a reproduction signal; and calculating a pattern drawing accuracy radially from the reproduction signal to evaluate a performance of the mold structure including a disc-shaped base material; and the concavo-convex pattern for the servo area and a concavo-convex pattern for a data area formed on a base material surface following a desired design pattern. The concavo-convex patterns for the servo area are aligned in the radial direction of the base material, and the concavo-convex pattern for the data area are aligned in the circumferential direction between the concavo-convex patterns for the servo area.

摘要翻译： 一种用于测试模具结构的方法，包括根据用于模具结构中的伺服区域的垂直磁记录介质的凹凸图案磁转移磁信号; 使用磁头电磁再现传送到垂直磁记录介质上的伺服数据的磁信号的50个磁道，以获得再现信号; 并从再现信号径向计算图形绘制精度，以评估包括盘形基材的模具结构的性能; 以及用于伺服区域的凹凸图案和在所需设计图案之后形成在基材表面上的数据区域的凹凸图案。 伺服区域的凹凸图案在基材的径向上排列，数据区域的凹凸图案在伺服区域的凹凸图案之间的圆周方向上排列。