Semiconductor memory device and method for manufacturing the same
    2.
    发明授权
    Semiconductor memory device and method for manufacturing the same 有权
    半导体存储器件及其制造方法

    公开(公告)号:US09431400B2

    公开(公告)日:2016-08-30

    申请号:US13359529

    申请日:2012-01-27

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    摘要: A highly integrated DRAM is provided. A bit line is formed over a first insulator, a second insulator is formed over the bit line, third insulators which are in a stripe shape and the like are formed over the second insulator, and a semiconductor region and a gate insulator are formed to cover one of the third insulators. The bit line is connected to the semiconductor region through first contact plugs. Then, a conductive film is formed and subjected to anisotropic etching to form word lines at side surfaces of the third insulators, and a second contact plug is formed to be connected to a capacitor at a top of the one of the third insulators. By synchronizing the word lines, electric charge is accumulated or released through the capacitor. With such a structure, the area of a memory cell can be 4F2.

    摘要翻译: 提供高度集成的DRAM。 在第一绝缘体上形成位线,在位线上形成第二绝缘体,在第二绝缘体上形成条形等的第三绝缘体,形成半导体区域和栅极绝缘体以覆盖 第三绝缘子之一。 位线通过第一接触插塞连接到半导体区域。 然后,形成导电膜并进行各向异性蚀刻以在第三绝缘体的侧表面处形成字线,并且形成第二接触插塞以连接到第三绝缘体之一的顶部的电容器。 通过使字线同步,通过电容器蓄积或释放电荷。 利用这种结构,存储单元的面积可以是4F2。

    Semiconductor device and a method for driving the same
    3.
    发明授权
    Semiconductor device and a method for driving the same 有权
    半导体装置及其驱动方法

    公开(公告)号:US09001564B2

    公开(公告)日:2015-04-07

    申请号:US13532117

    申请日:2012-06-25

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    摘要: It is an object to reduce power consumption of a 2Tr1C type semiconductor memory device. The absolute value of the threshold voltage of a reading transistor is made larger than a fluctuation range of a data potential of a bit line (or the fluctuation range of the data potential of the bit line is made smaller than the absolute value of the threshold voltage of the reading transistor), whereby the potential of a source line can be fixed, a fluctuation in a potential of a writing word line can be made smaller, and a potential of a reading word line is fluctuated only at the time of reading. Further, a gate of such a transistor the absolute value of the threshold voltage of which is large is formed using a material having a high work function, such as indium nitride.

    摘要翻译: 本发明的目的是降低2Tr1C型半导体存储器件的功耗。 使读取晶体管的阈值电压的绝对值大于位线的数据电位的波动范围(或位线的数据电位的波动范围小于阈值电压的绝对值 的读取晶体管),由此可以固定源极线的电位,可以使写入字线的电位的波动变小,并且读取字线的电位仅在读取时波动。 此外,使用具有高功函数的材料,例如氮化铟,形成这种晶体管的阈值电压大的绝对值的栅极。

    Memory element and signal processing circuit
    4.
    发明授权
    Memory element and signal processing circuit 有权
    存储元件和信号处理电路

    公开(公告)号:US08982607B2

    公开(公告)日:2015-03-17

    申请号:US13608512

    申请日:2012-09-10

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    摘要: In a memory element including a pair of inverters, a capacitor which holds data, and a switching element which controls accumulating and releasing of electric charge of the capacitor are provided. For example, one electrode of the capacitor is connected to a first node, which is an input or output terminal of one of the pair of inverters, and the other electrode of the capacitor is connected to one electrode the switching element. The other electrode of the switching element is connected to a second node, which is the output or input terminal of the one of the pair of inverters. With such a connection structure, the absolute value of the potential difference between the first node and the second node at the time of data restoring can be large enough, whereby errors at the time of data restoring can be reduced.

    摘要翻译: 在包括一对反相器,保持数据的电容器和控制电容器的电荷的累积和释放的开关元件的存储元件中, 例如,电容器的一个电极连接到第一节点,第一节点是一对逆变器之一的输入或输出端子,电容器的另一个电极连接到开关元件的一个电极。 开关元件的另一个电极连接到作为该对逆变器中的一个的输出端或输入端的第二节点。 利用这样的连接结构,数据恢复时的第一节点与第二节点之间的电位差的绝对值可以足够大,从而可以减少数据恢复时的错误。

    SEMICONDUCTOR DEVICE AND A METHOD FOR DRIVING THE SAME
    6.
    发明申请
    SEMICONDUCTOR DEVICE AND A METHOD FOR DRIVING THE SAME 有权
    半导体器件及其驱动方法

    公开(公告)号:US20130003441A1

    公开(公告)日:2013-01-03

    申请号:US13532117

    申请日:2012-06-25

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    IPC分类号: G11C11/24

    摘要: It is an object to reduce power consumption of a 2Tr1C type semiconductor memory device. The absolute value of the threshold voltage of a reading transistor is made larger than a fluctuation range of a data potential of a bit line (or the fluctuation range of the data potential of the bit line is made smaller than the absolute value of the threshold voltage of the reading transistor), whereby the potential of a source line can be fixed, a fluctuation in a potential of a writing word line can be made smaller, and a potential of a reading word line is fluctuated only at the time of reading. Further, a gate of such a transistor the absolute value of the threshold voltage of which is large is formed using a material having a high work function, such as indium nitride.

    摘要翻译: 本发明的目的是降低2Tr1C型半导体存储器件的功耗。 使读取晶体管的阈值电压的绝对值大于位线的数据电位的波动范围(或位线的数据电位的波动范围小于阈值电压的绝对值 的读取晶体管),由此可以固定源极线的电位,可以使写入字线的电位的波动变小,并且读取字线的电位仅在读取时波动。 此外,使用具有高功函数的材料,例如氮化铟,形成这种晶体管的阈值电压大的绝对值的栅极。

    SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR DRIVING THE SAME
    8.
    发明申请
    SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR DRIVING THE SAME 有权
    半导体存储器件及其驱动方法

    公开(公告)号:US20120275213A1

    公开(公告)日:2012-11-01

    申请号:US13449456

    申请日:2012-04-18

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    IPC分类号: G11C11/24

    摘要: In a semiconductor memory device, one electrode of a capacitor is connected to a bit line, and the other electrode of the capacitor is connected to a drain of a cell transistor. A source of the cell transistor is connected to a source line. When a stack capacitor, for example, is used in this structure, one electrode of the capacitor is used as part of the bit line. An impurity region formed on the semiconductor substrate or a wiring parallel to a word line can be used as the source line; thus, the structure of a DRAM is simplified.

    摘要翻译: 在半导体存储器件中,电容器的一个电极连接到位线,电容器的另一个电极连接到单元晶体管的漏极。 单元晶体管的源极连接到源极线。 例如,当使用堆叠电容器时,电容器的一个电极用作位线的一部分。 可以使用形成在半导体衬底上的杂质区域或与字线平行的布线作为源极线; 因此,DRAM的结构被简化。

    FIELD-EFFECT TRANSISTOR, AND MEMORY AND SEMICONDUCTOR CIRCUIT INCLUDING THE SAME
    9.
    发明申请
    FIELD-EFFECT TRANSISTOR, AND MEMORY AND SEMICONDUCTOR CIRCUIT INCLUDING THE SAME 有权
    场效应晶体管,以及包括其的存储器和半导体电路

    公开(公告)号:US20120241739A1

    公开(公告)日:2012-09-27

    申请号:US13428008

    申请日:2012-03-23

    IPC分类号: H01L29/78

    摘要: Provided is a field-effect transistor (FET) having small off-state current, which is used in a miniaturized semiconductor integrated circuit. The field-effect transistor includes a thin oxide semiconductor which is formed substantially perpendicular to an insulating surface and has a thickness of greater than or equal to 1 nm and less than or equal to 30 nm, a gate insulating film formed to cover the oxide semiconductor, and a strip-like gate which is formed to cover the gate insulating film and has a width of greater than or equal to 10 nm and less than or equal to 100 nm. In this structure, three surfaces of the thin oxide semiconductor are covered with the gate, so that electrons injected from a source or a drain can be effectively removed, and most of the space between the source and the drain can be a depletion region; thus, off-state current can be reduced.

    摘要翻译: 提供了一种具有小截止电流的场效应晶体管(FET),其用于小型化的半导体集成电路中。 场效应晶体管包括形成为基本上垂直于绝缘表面并且具有大于或等于1nm且小于或等于30nm的厚度的薄氧化物半导体,形成为覆盖氧化物半导体的栅极绝缘膜 以及形成为覆盖栅极绝缘膜并且具有大于或等于10nm且小于或等于100nm的宽度的条状栅极。 在这种结构中,薄氧化物半导体的三个表面被栅极覆盖,使得可以有效地去除从源极或漏极注入的电子,并且源极和漏极之间的大部分空间可以是耗尽区; 因此,可以减小截止电流。

    CAPACITOR AND SEMICONDUCTOR DEVICE
    10.
    发明申请
    CAPACITOR AND SEMICONDUCTOR DEVICE 有权
    电容器和半导体器件

    公开(公告)号:US20120193759A1

    公开(公告)日:2012-08-02

    申请号:US13346172

    申请日:2012-01-09

    申请人: Yasuhiko Takemura

    发明人: Yasuhiko Takemura

    IPC分类号: H01L29/02

    摘要: A capacitor that has an electrode of an n-type semiconductor that is provided in contact with one surface of a dielectric, has a work function of 5.0 eV or higher, preferably 5.5 eV or higher, and includes nitrogen and at least one of indium, tin, and zinc. Since the electrode has a high work function, the dielectric can have a high potential barrier, and thus even when the dielectric is as thin as 10 nm or less, a sufficient insulating property can be maintained. In particular, a striking effect can be obtained when the dielectric is formed of a high-k material.

    摘要翻译: 具有与电介质的一个表面接触的n型半导体的电极的电容器的功函数为5.0eV以上,优选为5.5eV以上,并且包括氮和铟, 锡和锌。 由于电极具有高的功函数,所以电介质可以具有高的势垒,因此即使当电介质薄到10nm以下时,也能够维持足够的绝缘性。 特别地,当电介质由高k材料形成时,可以获得显着的效果。