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    Dry Etching Agent and Dry Etching Method Using the Same
    1.
    发明申请
    Dry Etching Agent and Dry Etching Method Using the Same 有权
    干蚀刻剂和干法蚀刻方法

    公开(公告)号：US20120298911A1

    公开(公告)日：2012-11-29

    申请号：US13576093

    申请日：2011-01-25

    申请人： Yasuo Hibino ,  Tomonori Umezaki ,  Akiou Kikuchi ,  Isamu Mori ,  Satoru Okamoto

    发明人： Yasuo Hibino ,  Tomonori Umezaki ,  Akiou Kikuchi ,  Isamu Mori ,  Satoru Okamoto

    IPC分类号： C09K13/00

    CPC分类号： H01L21/31055 ,  C09K13/00 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/32136

    摘要： A dry etching agent according to the present invention contains (A) a fluorinated propyne represented by the chemical formula: CF3CCX where X is H, F, Cl, Br, I, CH3, CFH2 or CF2H; and either of: (B) at least one kind of gas selected from the group consisting of O2, O3, CO, CO2, COCl2 and COF2; (C) at least one kind of gas selected from the group consisting of F2, NF3, Cl2, Br2, I2 and YFn where Y is Cl, Br or I; and n is an integer of 1 to 5; and (D) at least one kind of gas selected from the group consisting of CF4, CHF3, C2F6, C2F5H, C2F4H2, C3F8, C3F4H2, C3ClF3H and C4F8. This dry etching agent has a small environmental load and a wide process window and can be applied for high-aspect-ratio processing without special operations such as substrate excitation.

    摘要翻译： 根据本发明的干蚀刻剂包含（A）由化学式CF3CCX表示的氟化丙炔，其中X是H，F，Cl，Br，I，CH 3，CFH 2或CF 2 H; 和（B）选自O 2，O 3，CO，CO 2，COCl 2和COF 2中的至少一种气体; （C）选自由F2，NF3，Cl2，Br2，I2和YFn组成的组中的至少一种气体，其中Y是Cl，Br或I; n为1〜5的整数。 和（D）选自CF4，CHF3，C2F6，C2F5H，C2F4H2，C3F8，C3F4H2，C3ClF3H和C4F8中的至少一种气体。 这种干蚀刻剂具有小的环境负荷和宽的工艺窗口，并且可以应用于高纵横比处理，而不需要诸如基板激励的特殊操作。

    Process For Production Of 2-Chloro-3,3,3-Trifluoropropene
    2.
    发明申请
    Process For Production Of 2-Chloro-3,3,3-Trifluoropropene 失效
    2-氯-3,3,3-三氟丙烯的制备方法

    公开(公告)号：US20120123173A1

    公开(公告)日：2012-05-17

    申请号：US13383708

    申请日：2010-07-16

    申请人： Yasuo Hibino ,  Fumihiro Kawagoe ,  Fuyuhiko Sakyu

    发明人： Yasuo Hibino ,  Fumihiro Kawagoe ,  Fuyuhiko Sakyu

    IPC分类号： C07C19/08

    CPC分类号： C07C17/23 ,  B01J21/18 ,  B01J23/44 ,  B01J23/628 ,  B01J23/6447 ,  C07C21/18

    摘要： There is provided according the present invention a process for producing 2-chloro-3,3,3-trifluoropropene, comprising: hydrogenating 1,2-dichloro-3,3,3-trifluoropropene with hydrogen (H2) in the presence of a catalyst having a transition metal and a poisoning substance supported on a support. The present production process is industrially advantageous as the target 2-chloro-3,3,3-trifluoropropene can be obtained with high selectivity and high yield under moderate reaction conditions and with easy waste treatment.

    摘要翻译： 根据本发明提供了一种2-氯-3,3,3-三氟丙烯的制备方法，包括：在催化剂存在下用氢气（H 2）氢化1,2-二氯-3,3,3-三氟丙烯 具有负载在载体上的过渡金属和中毒物质。 本发明的制备方法在工业上是有利的，因为在中等反应条件下容易的废物处理可以以高选择性和高收率获得目标2-氯-3,3,3-三氟丙烯。

    Dehydration Process of Hydrofluorocarbon or Hydrochlorofluorocarbon and Production Method of 1,3,3,3-Tetrafluoropropene Using the Dehydration Process
    3.
    发明申请
    Dehydration Process of Hydrofluorocarbon or Hydrochlorofluorocarbon and Production Method of 1,3,3,3-Tetrafluoropropene Using the Dehydration Process 有权
    氢氟碳化合物或氟氯烃的脱水工艺及使用脱水工艺制备1,3,3,3-四氟丙烯的方法

    公开(公告)号：US20120065435A1

    公开(公告)日：2012-03-15

    申请号：US13188884

    申请日：2011-07-22

    申请人： Yoshio NISHIGUCHI ,  Yasuo HIBINO

    发明人： Yoshio NISHIGUCHI ,  Yasuo HIBINO

    IPC分类号： C07C21/18 ,  F25J3/00

    CPC分类号： C07C17/38 ,  C07C17/206 ,  C07C17/21 ,  C07C17/25 ,  C07C17/383 ,  C07C21/18 ,  C07C19/08

    摘要： A process for dehydrating a hydrofluorocarbon or hydrochlorofluorocarbon, which can be done by simple equipment, and a continuous process of producing 1,3,3,3-tetrafluoropropene using the dehydration process. The dehydration process includes cooling the hydrofluorocarbon or hydrochlorofluorocarbon in gaseous form containing water with a heat exchanger, thereby condensing and liquefying the hydrofluorocarbon or hydrochlorofluorocarbon while freezing and solidifying the water. The 1,3,3,3-tetrafluoropropene production method includes a first step for fluorinating 1-chloro-3,3,3-trifluoropropene with hydrogen fluoride to obtain a mixture of 1,3,3,3-tetrafluoropropene, unreacted 1-chloro-3,3,3-trifluoropropene, hydrogen fluoride, hydrogen chloride and by-products, or dehydrofluorinating 1,1,1,3,3-pentafluoropropane to obtain a mixture of 1,3,3,3-tetrafluoropropene, unreacted 1,1,1,3,3-pentafluoropropane and by-products, a second step for removing acidic components, a third step for dehydrating the 1,3,3,3-tetrafluoropropene by the above dehydration process, and a fourth step for purifying the 1,3,3,3-tetrafluoropropene by distillation.

    摘要翻译： 可以通过简单的设备进行氢氟碳化合物或氢氯氟烃的脱水方法，以及使用脱水方法生产1,3,3,3-四氟丙烯的连续方法。 脱水过程包括用热交换器冷却含有水的气态碳氢氟烃或氢氯氟烃，从而在冷凝和固化水的同时冷凝和液化氢氟碳化合物或氢氯氟烃。 1,3,3,3-四氟丙烯制备方法包括用氟化氢氟化1-氯-3,3,3-三氟丙烯的第一步骤，得到1,3,3,3-四氟丙烯，未反应的1- 氯-3,3,3-三氟丙烯，氟化氢，氯化氢和副产物，或脱氢氟化1,1,1,3,3-五氟丙烷，得到1,3,3,3-四氟丙烯，未反应的1 ，1,1,3,3-五氟丙烷和副产物，用于除去酸性成分的第二步骤，通过上述脱水方法使1,3,3,3-四氟丙烯脱水的第三步骤和第四步纯化 1,3,3,3-四氟丙烯。

    Method of Purifying (Z)-1-Chloro-3,3,3-Trifluoropropene
    5.
    发明申请
    Method of Purifying (Z)-1-Chloro-3,3,3-Trifluoropropene 有权
    纯化（Z）-1-氯-3,3,3-三氟丙烯的方法

    公开(公告)号：US20110270001A1

    公开(公告)日：2011-11-03

    申请号：US13142531

    申请日：2010-01-25

    申请人： Akira Ishihara ,  Yasuo Hibino ,  Ryoichi Tamai

    发明人： Akira Ishihara ,  Yasuo Hibino ,  Ryoichi Tamai

    IPC分类号： C07C17/386

    CPC分类号： C07C17/386 ,  C07C21/18

    摘要： Disclosed is a method of purifying (Z)-1-chloro-3,3,3-trifluoropropene of the formula [1], comprising: distilling a mixture containing (Z)-1-chloro-3,3,3-trifluoropropene and 1-chloro-1,3,3,3-tetrafluoropropane (CF3CH2CHClF), wherein the distilling is performed by extractive distillation of the mixture in the coexistence of at least one kind of compound selected from the group consisting of halogenated hydrocarbons of the formula [2], halogenated unsaturated hydrocarbons, nitriles, ketones, carbonates, ethers, esters and alcohols as an extractant [Chem. 8] CFnCl3-nCHXCClFmH2-m  [2] where X represents a hydrogen atom (H), a fluorine atom (F) or a chlorine atom (Cl); n represents an integer of 0 to 3; and m represents an integer of 0 to 2.

    摘要翻译： 公开了一种纯化式[1]的（Z）-1-氯-3,3,3-三氟丙烯的方法，其包括：蒸馏含有（Z）-1-氯-3,3,3-三氟丙烯和 1-氯-1,3,3,3-四氟丙烷（CF 3 CH 2 CHClF），其中通过萃取蒸馏混合物进行蒸馏，所述混合物共存于至少一种选自式[ 2]，卤代不饱和烃，腈，酮，碳酸酯，醚，酯和醇作为萃取剂[Chem。 8] CF nCl 3-n CHXCClFmH 2-m [2]其中X表示氢原子（H），氟原子（F）或氯原子（Cl）; n表示0〜3的整数， m表示0〜2的整数。

    Polyol composition for hard polyurethane foam and method for producing hard polyurethane foam
    8.
    发明申请
    Polyol composition for hard polyurethane foam and method for producing hard polyurethane foam 审中-公开
    用于硬质聚氨酯泡沫的多元醇组合物和用于生产硬质聚氨酯泡沫的方法

    公开(公告)号：US20060235102A1

    公开(公告)日：2006-10-19

    申请号：US10561862

    申请日：2004-06-09

    申请人： Hiroyuki Anzai ,  Natsuko Anraku ,  Masahiro Jinno ,  Fumio Shiroo ,  Yasuo Hibino ,  Toshio Hesaka

    发明人： Hiroyuki Anzai ,  Natsuko Anraku ,  Masahiro Jinno ,  Fumio Shiroo ,  Yasuo Hibino ,  Toshio Hesaka

    IPC分类号： C08J3/28

    CPC分类号： C08J9/149 ,  C08G18/48 ,  C08G2101/0025 ,  C08J2203/142 ,  C08J2205/10 ,  C08J2375/04

    摘要： The present invention provides a polyol composition for hard polyurethane foam in which HFC-245fa is used as a blowing agent and its vapor pressure is suppressed, and a method for producing a hard polyurethane foam. The polyol composition for hard polyurethane foam comprises at least a polyol compound, a blowing agent, a foam stabilizer and a catalyst, which is mixed with an isocyanate component containing a polyisocyanate compound, followed by foaming and curing to form a hard polyurethane foam, and the blowing agent is 1,1,1,3,3-pentafluoropropane (HFC-245fa) and further comprises at least one compatibilizer selected from the group consisting of DMA, NMP, GBL and MPA, and 1,1,1,3,3-pentafluorobutane (HFC-365mfc) in a predetermined ratio.

    摘要翻译： 本发明提供一种用于硬质聚氨酯泡沫的多元醇组合物，其中使用HFC-245fa作为发泡剂并且其蒸气压被抑制，以及硬质聚氨酯泡沫的制造方法。 用于硬质聚氨酯泡沫的多元醇组合物至少包含多元醇化合物，发泡剂，泡沫稳定剂和催化剂，其与含有多异氰酸酯化合物的异氰酸酯组分混合，然后发泡和固化以形成硬质聚氨酯泡沫，以及 发泡剂为1,1,1,3,3-五氟丙烷（HFC-245fa），还包含至少一种选自DMA，NMP，GBL和MPA的增容剂和1,1,1,3， 3-氟五氟丁烷（HFC-365mfc）。

    Method for purifying crude 1,1,1,3,3-pentafluoropropane
    9.
    发明授权
    Method for purifying crude 1,1,1,3,3-pentafluoropropane 失效
    纯化1,1,1,3,3-五氟丙烷粗品的方法

    公开(公告)号：US6120652A

    公开(公告)日：2000-09-19

    申请号：US38146

    申请日：1998-03-10

    申请人： Yasuo Hibino ,  Ryouichi Tamai

    发明人： Yasuo Hibino ,  Ryouichi Tamai

    IPC分类号： C07C17/386 ,  B01D3/40

    CPC分类号： C07C17/386

    摘要： The invention relates to a method for purifying a crude 1,1,1,3,3-pentafluoropropane (HFC-245fa) containing HFC-245fa and 1-chloro-3,3,3-trifluoro-trans-1-propene (HCFC-1233zd(t)), by distillation. This method is characterized in that the distillation is conducted in the presence of a solvent having a boiling point which is higher than that of HCFC-1233zd(t), thereby to substantially remove HCFC-1233zd(t) from the crude HFC-245fa. This solvent may be selected from carbon chlorides, chlorohydrocarbons, fluorochlorohydrocarbons, saturated hydrocarbons, and mixtures thereof. With the use of this solvent, it becomes possible to substantially easily separate HFC-245fa from HCFC-1233zd(t).

    摘要翻译： 本发明涉及一种纯化含有HFC-245fa和1-氯-3,3,3-三氟 - 反-1-丙烯（HCFC）的粗制1,1,1,3,3-五氟丙烷（HFC-245fa）的方法 -1233zd（t））。 该方法的特征在于在沸点高于HCFC-1233zd（t）的溶剂的存在下进行蒸馏，从而从粗HFC-245fa基本上除去HCFC-1233zd（t）。 该溶剂可以选自氯化碳，氯代烃，氟氯烃，饱和烃及其混合物。 通过使用该溶剂，可以基本上容易地将HFC-245fa与HCFC-1233zd（t）分离。

    Dry etching agent and dry etching method using the same
    10.
    发明授权
    Dry etching agent and dry etching method using the same 有权
    干蚀刻剂和干蚀刻法使用该方法

    公开(公告)号：US09093388B2

    公开(公告)日：2015-07-28

    申请号：US13576093

    申请日：2011-01-25

    申请人： Yasuo Hibino ,  Tomonori Umezaki ,  Akiou Kikuchi ,  Isamu Mori ,  Satoru Okamoto

    发明人： Yasuo Hibino ,  Tomonori Umezaki ,  Akiou Kikuchi ,  Isamu Mori ,  Satoru Okamoto

    IPC分类号： C09K13/00 ,  C09K13/04 ,  C09K13/08 ,  B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  C23F3/00 ,  H01L21/311

    CPC分类号： H01L21/31055 ,  C09K13/00 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/32136

    摘要： A dry etching agent according to the present invention contains (A) a fluorinated propyne represented by the chemical formula: CF3C≡CX where X is H, F, Cl, Br, I, CH3, CFH2 or CF2H; and either of: (B) at least one kind of gas selected from the group consisting of O2, O3, CO, CO2, COCl2 and COF2; (C) at least one kind of gas selected from the group consisting of F2, NF3, Cl2, Br2, I2 and YFn where Y is Cl, Br or I; and n is an integer of 1 to 5; and (D) at least one kind of gas selected from the group consisting of CF4, CHF3, C2F6, C2F5H, C2F4H2, C3F8, C3F4H2, C3ClF3H and C4F8. This dry etching agent has a small environmental load and a wide process window and can be applied for high-aspect-ratio processing without special operations such as substrate excitation.

    摘要翻译： 根据本发明的干蚀刻剂包含（A）由化学式CF 3C≡CX表示的氟化丙炔，其中X为H，F，Cl，Br，I，CH 3，CFH 2或CF 2 H; 和（B）选自O 2，O 3，CO，CO 2，COCl 2和COF 2中的至少一种气体; （C）选自由F2，NF3，Cl2，Br2，I2和YFn组成的组中的至少一种气体，其中Y是Cl，Br或I; n为1〜5的整数。 和（D）选自CF4，CHF3，C2F6，C2F5H，C2F4H2，C3F8，C3F4H2，C3ClF3H和C4F8中的至少一种气体。 这种干蚀刻剂具有小的环境负荷和宽的工艺窗口，并且可以应用于高纵横比处理，而不需要诸如基板激励的特殊操作。