Microfabricated radiation detector assemblies methods of making and using same and interface circuit for use therewith
    1.
    发明申请
    Microfabricated radiation detector assemblies methods of making and using same and interface circuit for use therewith 有权
    微型辐射探测器组合件的制作和使用方法以及与其一起使用的接口电路

    公开(公告)号:US20050242291A1

    公开(公告)日:2005-11-03

    申请号:US10837068

    申请日:2004-04-30

    IPC分类号: G01T1/18

    CPC分类号: G01T1/18

    摘要: Microfabricated, gas-filled radiation detector assemblies, methods of making and using same and interface circuit for use therewith are provided. The assembly includes a micromachined radiation detector including a set of spaced-apart electrodes and an ionization gas between the electrodes. A housing has a chamber for housing the detector including the gas. The housing of the assembly also includes a window which allows passage of charged particles therethrough to ionize the gas to create electrons which, in turn, create an electron cascade in the gas between the electrodes when the set of electrodes is biased.

    摘要翻译: 提供了微型的,充气的辐射探测器组件,制造和使用它们的方法以及与其一起使用的接口电路。 组件包括微加工的辐射检测器,其包括一组间隔开的电极和电极之间的电离气体。 壳体具有用于容纳包括气体的检测器的室。 组件的壳体还包括允许带电粒子通过其中的电离气体以产生电子的窗口,该电子反过来在电极组中的气体中产生电子级联,当电极组被偏置时。

    Antenna stent device for wireless, intraluminal monitoring
    2.
    发明申请
    Antenna stent device for wireless, intraluminal monitoring 有权
    天线支架装置用于无线,管腔内监测

    公开(公告)号:US20050080346A1

    公开(公告)日:2005-04-14

    申请号:US10939684

    申请日:2004-09-13

    CPC分类号: B23H9/00 A61F2/91

    摘要: Disclosed herein is a stent device useful for maintaining the patency of a lumen while monitoring an intraluminal characteristic. The device includes a structure having a set of extendible bands that are capable of plastic deformation to form a scaffolding having an inductance, and further includes a capacitance coupled to the set of extendible bands and responsive to the intraluminal characteristic. The capacitance and the inductance form a tank circuit after the plastic deformation of the set of extendible bands to enable wireless transmission of an indication of the intraluminal characteristic.

    摘要翻译: 本文公开了一种支架装置,用于在监测管腔内特征的同时维持管腔通畅。 该装置包括具有能够塑性变形以形成具有电感的脚手架的一组可延伸带的结构,并且还包括耦合到该组可延伸带并响应于管腔内特征的电容。 电容和电感在一组可扩展带的塑性变形之后形成储能电路,以使得能够无线传输管腔内特征的指示。

    Micro-discharge optical source apparatus and method and system for analyzing a sample
    4.
    发明申请
    Micro-discharge optical source apparatus and method and system for analyzing a sample 有权
    微放电光源装置及分析样品的方法和系统

    公开(公告)号:US20050093417A1

    公开(公告)日:2005-05-05

    申请号:US10937918

    申请日:2004-09-10

    摘要: A micro-discharge optical source apparatus and a method and system which utilizes the apparatus to analyze a sample are provided. The apparatus includes a substrate and an anode electrode and a cathode electrode supported on the substrate. One of the electrodes, such as the cathode, is preferably a liquid electrode. The electrodes are spaced apart to define an inter-electrode gap therebetween. The apparatus further includes a voltage source for applying a voltage between the electrodes sufficient to generate a glow micro-discharge in the gap to cause a first emission having a first desired excitation spectrum. An optical element is integrated with the substrate to direct the first emission to travel along an optical path including an axis. In one embodiment, the system detects the direct fluorescence of a sample such as tryptophan and other amino acids. In another embodiment, the system detects fluorescence of dye-labeled biochemicals.

    摘要翻译: 提供一种微放电光源装置以及利用该装置分析样品的方法和系统。 该装置包括基板和支撑在基板上的阳极电极和阴极电极。 诸如阴极的电极之一优选为液体电极。 电极间隔开以限定它们之间的电极间间隙。 该装置还包括用于在电极之间施加足以在间隙中产生辉光微放电以产生具有第一期望激发光谱的第一发射的电压的电压源。 光学元件与衬底集成以引导第一发射沿着包括轴的光路行进。 在一个实施方案中,系统检测样品如色氨酸和其它氨基酸的直接荧光。 在另一个实施方案中,该系统检测染料标记的生物化学物质的荧光。

    MICRODISCHARGE-BASED PRESSURE SENSOR AND METHOD
    5.
    发明申请
    MICRODISCHARGE-BASED PRESSURE SENSOR AND METHOD 有权
    基于压力传感器的压力传感器和方法

    公开(公告)号:US20110128010A1

    公开(公告)日:2011-06-02

    申请号:US12789601

    申请日:2010-05-28

    IPC分类号: G01L21/30

    CPC分类号: G01L9/0072

    摘要: A microdischarge-based pressure sensor that includes an anode, two cathodes, a drive circuit connected to the electrodes, and a measurement circuit that permits sensing of transient current pulses flowing through at least one of the electrodes. One of the cathodes is interposed between the anode and other cathode, and it includes a central opening which permits a microdischarge to occur between the anode and each cathode in response to applied voltage pulses from the drive circuit. Changes in relative current between the two cathodes are indicative of changes in ambient pressure in the microdischarge chamber. In other embodiments, a sealed chamber can be used with one of the electrodes acting as a diaphragm which deflects based on external pressure and changes its inter-electrode spacing, thereby altering the relative cathode currents.

    摘要翻译: 一种基于微放电的压力传感器,其包括阳极,两个阴极,连接到电极的驱动电路,以及允许感测流过至少一个电极的瞬态电流脉冲的测量电路。 一个阴极介于阳极和其他阴极之间,并且其包括中央开口,其响应于来自驱动电路的施加的电压脉冲,允许在阳极和每个阴极之间发生微放电。 两个阴极之间的相对电流变化表示微放电室中环境压力​​的变化。 在其他实施例中,可以使用密封室,其中一个电极用作隔膜,其基于外部压力而偏转并改变其电极间间隔,从而改变相对阴极电流。

    Mechanical self-reciprocating oscillator and mechanism and a method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components
    7.
    发明申请
    Mechanical self-reciprocating oscillator and mechanism and a method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components 有权
    机械自动往复振荡器和机构以及用于在没有任何电子部件的帮助下建立和保持微机械装置的常规来回移动的方法

    公开(公告)号:US20050168101A1

    公开(公告)日:2005-08-04

    申请号:US11038873

    申请日:2005-01-20

    IPC分类号: F03G7/06 H02M3/16 H02N10/00

    CPC分类号: F03G7/06 F05B2250/82 H02M3/16

    摘要: A mechanical self-reciprocating oscillator and mechanism and method for establishing and maintaining regular back and forth movement of a micromachined device without the aid of any electronic components are provided. The fully mechanical micromachined oscillator and mechanism are driven using only a DC power source on at least one substrate such as a semiconductor chip. The oscillator and mechanism preferably include an electrothermal actuator, that, when actuated, opens a switch to cut off supply current to the actuator. Two Versions of the oscillator and mechanism are provided using distinct hysteresis mechanisms, one structural and the other thermal.

    摘要翻译: 提供一种用于在没有任何电子部件的帮助下建立和保持微加工装置的常规来回运动的机械自往往振荡器和机构和方法。 全机械微加工振荡器和机构仅在至少一个基板(例如半导体芯片)上使用直流电源驱动。 振荡器和机构优选地包括电热致动器,当致动时,打开开关以切断对致动器的供电电流。 使用不同的滞后机制提供了两个版本的振荡器和机构,一个结构和另一个热。

    Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate
    8.
    发明申请
    Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate 有权
    微机械探针装置及其制造和使用它们的方法来表征流体通道中的液体,并将嵌入的电荷映射到基板上的样品中

    公开(公告)号:US20050017172A1

    公开(公告)日:2005-01-27

    申请号:US10852058

    申请日:2004-05-24

    摘要: A micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate are provided. The probe apparatus includes an integrated scanning tip and a dither actuation mechanism. The actuation is achieved using a bent-beam electrothermal actuator, and the probe tip is insulated from the actuator with a wide isolation gap. The device is fabricated by a modified micro electro-discharge machining process which allows electrical isolation within the micromachined structure using an epoxy plug. The apparatus may be used to measure changes in the external surface potential of a microfluidic channel as a function of varying pH of liquid inside the channel. The apparatus also may be used to map embedded charge in a thin layer on a substrate, showing it to be suitable for monitoring microelectronics manufacturing processes.

    摘要翻译: 提供一种微加工探针装置及其制造和使用它们以表征流体通道中的液体并将嵌入的电荷映射到基板上的样品中的方法。 探针装置包括集成的扫描尖端和抖动致动机构。 使用弯梁电热致动器实现致动,并且探针尖端与致动器绝缘,具有宽的隔离间隙。 该器件通过改进的微电子放电加工工艺制造,其允许使用环氧树脂插塞在微加工结构内进行电隔离。 该装置可用于测量微流体通道的外表面电位的变化,作为通道内液体pH变化的函数。 该装置还可以用于将嵌入的电荷映射到衬底上的薄层中,表明其适于监测微电子制造工艺。

    Systems and methods for thin film thermal diagnostics with scanning thermal microstructures
    10.
    发明申请
    Systems and methods for thin film thermal diagnostics with scanning thermal microstructures 有权
    具有扫描热结构的薄膜热诊断系统和方法

    公开(公告)号:US20060051884A1

    公开(公告)日:2006-03-09

    申请号:US11219141

    申请日:2005-09-01

    IPC分类号: H01L21/66

    摘要: Systems and methods are described for identifying characteristics and defects in material such as semiconductors. Methods include scanning a thermal probe in the vicinity of a semiconductor sample, applying stimuli to the thermal probe, and monitoring the interaction of the thermal probe and the semiconductor. The stimulus can be applied by a variety of methods, including Joule heating of a resistor in the proximity of the probe tip, or optically heating a tip of the thermal probe using a laser. Applications of the invention include identification of voids in metallic layers in semiconductors; mapping dopant concentration in semiconductors; measuring thickness of a sample material; mapping thermal hot spots and other characteristics of a sample material.

    摘要翻译: 描述了用于识别诸如半导体的材料中的特征和缺陷的系统和方法。 方法包括在半导体样品附近扫描热探针,向热探针施加刺激,并监测热探针和半导体的相互作用。 可以通过各种方法施加刺激,包括在探针尖端附近的电阻器的焦耳加热,或者使用激光来光学加热热探针的尖端。 本发明的应用包括在半导体中鉴定金属层中的空隙; 映射半导体中的掺杂剂浓度; 测量样品材料的厚度; 绘制热点等特点的样品材料。