3D integration of a MIM capacitor and a resistor
    1.
    发明授权
    3D integration of a MIM capacitor and a resistor 有权
    MIM电容和电阻的3D集成

    公开(公告)号:US08901705B2

    公开(公告)日:2014-12-02

    申请号:US13126233

    申请日:2009-10-22

    摘要: The present invention relates to an electronic component, that comprises, on a substrate, at least one integrated MIM capacitor, (114) an electrically insulating first cover layer (120) which partly or fully covers the top capacitor electrode (118) and is made of a lead-containing dielectric material, and a top barrier layer (122) on the first cover layer. The top barrier layer serves for avoiding a reduction of lead atoms comprised by the first cover layer under exposure of the first cover layer to a reducing substance. An electrically insulating second cover layer (124) on the top barrier layer has a dielectric permittivity smaller than that of the first cover layer establishes a low parasitic capacitance of the cover-layer structure. The described cover-layer structure with the intermediate top barrier layer allows to fabricate a high-accuracy resistor layer (126.1) on top.

    摘要翻译: 电子部件技术领域本发明涉及一种电子部件,其在基板上包括至少一个集成MIM电容器,(114)部分地或完全覆盖顶部电容器电极(118)并被制成的电绝缘的第一覆盖层(120) 的含铅介电材料,以及在第一覆盖层上的顶部阻挡层(122)。 顶部阻挡层用于避免在第一覆盖层暴露于还原物质时第一覆盖层所包含的引线原子的还原。 在顶部阻挡层上的电绝缘的第二覆盖层(124)的介电常数比第一覆盖层的介电常数小,从而形成覆盖层结构的低寄生电容。 所描述的具有中间顶部阻挡层的覆盖层结构允许在顶部制造高精度电阻层(126.1)。

    3D INTEGRATION OF A MIM CAPACITOR AND A RESISTOR
    2.
    发明申请
    3D INTEGRATION OF A MIM CAPACITOR AND A RESISTOR 有权
    MIM电容器和电阻器的3D集成

    公开(公告)号:US20110204480A1

    公开(公告)日:2011-08-25

    申请号:US13126233

    申请日:2009-10-22

    IPC分类号: H01L29/92 H01L21/02

    摘要: The present invention relates to an electronic component, that comprises, on a substrate, at least one integrated MIM capacitor, (114) an electrically insulating first cover layer (120) which partly or fully covers the top capacitor electrode (118) and is made of a lead-containing dielectric material, and a top barrier layer (122) on the first cover layer. The top barrier layer serves for avoiding a reduction of lead atoms comprised by the first cover layer under exposure of the first cover layer to a reducing substance. An electrically insulating second cover layer (124) on the top barrier layer has a dielectric permittivity smaller than that of the first cover layer establishes a low parasitic capacitance of the cover-layer structure. The described cover-layer structure with the intermediate top barrier layer allows to fabricate a high-accuracy resistor layer (126.1) on top.

    摘要翻译: 电子部件技术领域本发明涉及一种电子部件,其在基板上包括至少一个集成MIM电容器,(114)部分地或完全覆盖顶部电容器电极(118)并被制成的电绝缘的第一覆盖层(120) 的含铅介电材料,以及在第一覆盖层上的顶部阻挡层(122)。 顶部阻挡层用于避免在第一覆盖层暴露于还原物质时第一覆盖层所包含的引线原子的还原。 在顶部阻挡层上的电绝缘的第二覆盖层(124)的介电常数比第一覆盖层的介电常数小,从而形成覆盖层结构的低寄生电容。 所描述的具有中间顶部阻挡层的覆盖层结构允许在顶部制造高精度电阻层(126.1)。

    GENERATING AND EXPLOITING AN ASYMMETRIC CAPACITANCE HYSTERESIS OF FERROELECTRIC MIM CAPACITORS
    3.
    发明申请
    GENERATING AND EXPLOITING AN ASYMMETRIC CAPACITANCE HYSTERESIS OF FERROELECTRIC MIM CAPACITORS 有权
    生成和开发电磁MIM电容器的不对称电容滞后

    公开(公告)号:US20110198725A1

    公开(公告)日:2011-08-18

    申请号:US13125822

    申请日:2009-10-24

    IPC分类号: H01L27/06 G01R31/12 G11C11/22

    摘要: The present invention relates to an electric component comprising at least one first MIM capacitor having a ferroelectric insulator with a dielectric constant of at least 100 between a first capacitor electrode of a first electrode material and a second capacitor electrode of a second electrode material. The first and second electrode materials are selected such that the first MIM capacitor exhibits, as a function of a DC voltage applicable between the first and second electrodes, an asymmetric capacity hysteresis that lets the first MIM capacitor, in absence of the DC voltage, assume one of at least two possible distinct capacitance values, in dependence on a polarity of a switching voltage last applied to the capacitor, the switching voltage having an amount larger than a threshold-voltage amount. The invention is applicable for ESD sensors, memories and high-frequency devices.

    摘要翻译: 本发明涉及一种电气部件,包括至少一个第一MIM电容器,其具有在第一电极材料的第一电容器电极和第二电极材料的第二电容器电极之间具有至少100的介电常数的铁电绝缘体。 选择第一和第二电极材料,使得第一MIM电容器作为可应用于第一和第二电极之间的DC电压的函数表现出不对称的电容滞后,使第一MIM电容器在没有直流电压的情况下呈现 根据最后施加到电容器的开关电压的极性,开关电压具有大于阈值电压量的量的至少两个可能的不同电容值中的一个。 本发明适用于ESD传感器,存储器和高频器件。

    CMUTs with a high-k dielectric
    4.
    发明授权
    CMUTs with a high-k dielectric 有权
    具有高k电介质的CMUT

    公开(公告)号:US08203912B2

    公开(公告)日:2012-06-19

    申请号:US12671108

    申请日:2008-07-31

    IPC分类号: H04R19/00 H04R17/00

    CPC分类号: B06B1/0292

    摘要: A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.

    摘要翻译: 电容式超声波换能器包括第一电极,第二电极和第三电极,所述第三电极包括与所述第一电极以可折叠间隔开的关系设置的中心区域,以及设置在所述中心区域外侧的周边区域, 与第二电极的关系。 换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。 换能器可以以折叠模式操作,其中第三电极的周边区域相对于第二电极振荡,并且第三电极的中心区域相对于第一电极完全折叠,使得介电层夹在其间。 可以进一步包括诸如d31和d33模式压电致动的压电致动。 医疗成像系统包括设置在公共基底上的这种电容式超声换能器阵列。

    CMUTS WITH A HIGH-K DIELECTRIC
    5.
    发明申请
    CMUTS WITH A HIGH-K DIELECTRIC 有权
    具有高K电介质的CMUTS

    公开(公告)号:US20100202254A1

    公开(公告)日:2010-08-12

    申请号:US12671108

    申请日:2008-07-31

    IPC分类号: B06B1/06

    CPC分类号: B06B1/0292

    摘要: A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.

    摘要翻译: 电容式超声波换能器包括第一电极,第二电极和第三电极,所述第三电极包括与所述第一电极以可折叠间隔开的关系设置的中心区域,以及设置在所述中心区域外侧的周边区域, 与第二电极的关系。 换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。 换能器可以以折叠模式操作,其中第三电极的周边区域相对于第二电极振荡,并且第三电极的中心区域相对于第一电极完全折叠,使得介电层夹在其间。 可以进一步包括诸如d31和d33模式压电致动的压电致动。 医疗成像系统包括设置在公共基底上的这种电容式超声换能器阵列。

    Generating and exploiting an asymmetric capacitance hysteresis of ferroelectric MIM capacitors
    6.
    发明授权
    Generating and exploiting an asymmetric capacitance hysteresis of ferroelectric MIM capacitors 有权
    产生和利用铁电MIM电容器的非对称电容滞后

    公开(公告)号:US08531862B2

    公开(公告)日:2013-09-10

    申请号:US13125822

    申请日:2009-10-24

    IPC分类号: G11C11/22 H02H3/22 H03B5/20

    摘要: The present invention relates to an electric component comprising at least one first MIM capacitor having a ferroelectric insulator with a dielectric constant of at least 100 between a first capacitor electrode of a first electrode material and a second capacitor electrode of a second electrode material. The first and second electrode materials are selected such that the first MIM capacitor exhibits, as a function of a DC voltage applicable between the first and second electrodes, an asymmetric capacitance hysteresis that lets the first MIM capacitor, in absence of the DC voltage, assume one of at least two possible distinct capacitance values, in dependence on a polarity of a switching voltage last applied to the capacitor, the switching voltage having an amount larger than a threshold-voltage amount. The invention is applicable for ESD sensors, memories and high-frequency devices.

    摘要翻译: 本发明涉及一种电气部件,包括至少一个第一MIM电容器,其具有在第一电极材料的第一电容器电极和第二电极材料的第二电容器电极之间具有至少100的介电常数的铁电绝缘体。 选择第一和第二电极材料,使得第一MIM电容器作为可应用于第一和第二电极之间的DC电压的函数表现出不对称电容滞后,其使第一MIM电容器在没有DC电压的情况下呈现 根据最后施加到电容器的开关电压的极性,开关电压具有大于阈值电压量的量的至少两个可能的不同电容值中的一个。 本发明适用于ESD传感器,存储器和高频器件。

    Sensor system for measuring a velocity of a fluid including a heating element a resonant circuit and a transducer
    8.
    发明授权
    Sensor system for measuring a velocity of a fluid including a heating element a resonant circuit and a transducer 有权
    用于测量包括加热元件的谐振电路和换能器的流体速度的传感器系统

    公开(公告)号:US09188469B2

    公开(公告)日:2015-11-17

    申请号:US13502386

    申请日:2010-10-15

    摘要: A sensor system for measuring a velocity of a fluid flowing through a channel includes a heating element for heating the fluid. The heating element is provided with a predetermined level of power during operation. The sensor system further includes a primary electronic circuit having a primary resonance frequency which is temperature dependent. The temperature of the primary electronic circuit is determined by heat transferred from the heating element to the fluid flowing through the channel. In addition, the sensor system also includes a transducer arrangement configured to generate a measurement signal indicative of the velocity of the fluid flowing through the channel. The measurement signal is based on the primary resonance frequency.

    摘要翻译: 用于测量流过通道的流体的速度的传感器系统包括用于加热流体的加热元件。 在操作期间,加热元件具有预定水平的功率。 传感器系统还包括具有温度依赖性的初级共振频率的初级电子电路。 主电子电路的温度由从加热元件传递到流过通道的流体的热量来确定。 此外,传感器系统还包括被配置为产生指示流过通道的流体的速度的测量信号的换能器装置。 测量信号基于初级共振频率。

    METHOD AND ARRANGEMENT FOR GENERATING OXYGEN
    9.
    发明申请
    METHOD AND ARRANGEMENT FOR GENERATING OXYGEN 有权
    用于产生氧气的方法和装置

    公开(公告)号:US20130333563A1

    公开(公告)日:2013-12-19

    申请号:US14002213

    申请日:2012-02-27

    IPC分类号: C01B13/02

    摘要: The invention relates to a method of generating oxygen. The method comprises the steps of: intermittently guiding a stream of oxygen comprising gas through at least one adsorption chamber (12) being equipped with an oxygen separation adsorbent (16), thereby defining an adsorption mode and a desorption mode of the at least one adsorption chamber (12), and thereby enriching the oxygen comprising gas with respect to oxygen, guiding the enriched oxygen comprising gas to a primary side of a dense membrane (52), heating the dense membrane(52) to a temperature at which it is permeable for oxygen, generating an oxygen flow through the dense membrane (52) to its secondary side, thereby separating the oxygen from the enriched oxygen comprising gas and forming a stream of oxygen. According to the invention, the invention further comprises the step of guiding at least a part of the generated oxygen through the at least one adsorption chamber (12) being in desorption mode. The method according to the invention allows generating oxygen in a high purity, thereby being energy saving, cost saving and being performable in a compact device.

    摘要翻译: 本发明涉及一种产生氧气的方法。 该方法包括以下步骤:间歇地引导包含气体的氧气通过装有氧分离吸附剂(16)的至少一个吸附室(12),从而限定至少一种吸附剂的吸附模式和解吸模式 (12),从而使相对于氧气的包含气体的氧富集,将富含氧气的气体引导到致密膜(52)的初级侧,将致密膜(52)加热至可渗透的温度 用于氧气,产生通过致密膜(52)到其次级侧的氧气流,从而将氧气与富氧的含氧气体分离并形成氧气流。 根据本发明,本发明还包括通过处于解吸模式的至少一个吸附室(12)引导至少一部分产生的氧的步骤。 根据本发明的方法允许产生高纯度的氧,从而在紧凑的装置中节能,成本节约和可执行。

    SENSOR DETERMINING A PHYSICAL OR PHYSIOLOGICAL PARAMETER
    10.
    发明申请
    SENSOR DETERMINING A PHYSICAL OR PHYSIOLOGICAL PARAMETER 有权
    传感器确定物理或生理参数

    公开(公告)号:US20120296224A1

    公开(公告)日:2012-11-22

    申请号:US13521768

    申请日:2011-01-10

    IPC分类号: A61B5/026

    摘要: The present invention relates to determining or measuring a biological, physical or physiological parameter of an object (10) by a sensor (2). It may be beneficial to constantly monitor or determine a biological, physical or physiological parameter of an object (10) by a sensor (2), subsequently allowing for a preferred removal of the sensor (2) from object (10) when the monitoring is no longer required. Accordingly, a sensor (2) is provided, e.g. a flow sensor, employing a degradable adhesive (8) for attachment of the sensor (2) to the object (10). The degradable adhesive (8) may be degradable e.g. by time, by exposure to a certain measure, e.g. induced heat, or substance for detaching the sensor (2) from the object (10) for subsequent removal of the sensor (2).

    摘要翻译: 本发明涉及通过传感器(2)来确定或测量物体(10)的生物,物理或生理参数。 通过传感器(2)持续地监测或确定物体(10)的生物,物理或生理参数可能是有益的,随后允许当监测是(...)时将传感器(2)从对象(10)中移除, 不再需要。 因此,提供传感器(2),例如 流量传感器,使用用于将传感器(2)附接到物体(10)的可降解粘合剂(8)。 可降解粘合剂(8)可以是降解的。 通过暴露于某种措施,例如, 感应的热量或用于将传感器(2)从物体(10)分离以用于随后去除传感器(2)的物质。