CMUTS WITH A HIGH-K DIELECTRIC
    1.
    发明申请
    CMUTS WITH A HIGH-K DIELECTRIC 有权
    具有高K电介质的CMUTS

    公开(公告)号:US20100202254A1

    公开(公告)日:2010-08-12

    申请号:US12671108

    申请日:2008-07-31

    IPC分类号: B06B1/06

    CPC分类号: B06B1/0292

    摘要: A capacitive ultrasound transducer includes a first electrode, a second electrode, and a third electrode, the third electrode including a central region disposed in collapsibly spaced relation with the first electrode, and a peripheral region disposed outward of the central region and disposed in collapsibly spaced relation with the second electrode. The transducer further includes a layer of a high dielectric constant material disposed between the third electrode and the first electrode, and between the third electrode and the second electrode. The transducer may be operable in a collapsed mode wherein the peripheral region of the third electrode oscillates relative to the second electrode, and the central region of the third electrode is fully collapsed with respect to the first electrode such that the dielectric layer is sandwiched therebetween. Piezoelectric actuation, such as d31 and d33 mode piezoelectric actuation, may further be included. A medical imaging system includes an array of such capacitive ultrasound transducers disposed on a common substrate.

    摘要翻译: 电容式超声波换能器包括第一电极,第二电极和第三电极,所述第三电极包括与所述第一电极以可折叠间隔开的关系设置的中心区域,以及设置在所述中心区域外侧的周边区域, 与第二电极的关系。 换能器还包括设置在第三电极和第一电极之间以及第三电极和第二电极之间的高介电常数材料层。 换能器可以以折叠模式操作,其中第三电极的周边区域相对于第二电极振荡,并且第三电极的中心区域相对于第一电极完全折叠,使得介电层夹在其间。 可以进一步包括诸如d31和d33模式压电致动的压电致动。 医疗成像系统包括设置在公共基底上的这种电容式超声换能器阵列。

    Oscillator device
    4.
    发明授权
    Oscillator device 有权
    振荡器装置

    公开(公告)号:US08717111B2

    公开(公告)日:2014-05-06

    申请号:US13122754

    申请日:2009-10-08

    IPC分类号: H03B5/32 H01L41/08

    CPC分类号: H03B5/30 G01C19/56

    摘要: An oscillator device comprises a resonator mass which is connected by a spring arrangement to a substrate and a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected between the resonator mass and the substrate. The invention provides an oscillator device in which the two parts (resonator and circuit to close the oscillation loop) are combined inside one single oscillator device, which can be a MEMS device.

    摘要翻译: 振荡器装置包括通过弹簧装置连接到基板的谐振器质量块和用于控制谐振器质量块的振荡的反馈元件,该谐振器组件包括连接在谐振器体和基片之间的压阻元件。 本发明提供了一种振荡器装置,其中两个部分(谐振器和闭合振荡环路的电路)组合在一个可以是MEMS器件的单个振荡器装置内。

    Oscillator based on piezoresistive resonators
    5.
    发明授权
    Oscillator based on piezoresistive resonators 有权
    基于压阻谐振器的振荡器

    公开(公告)号:US07750745B2

    公开(公告)日:2010-07-06

    申请号:US12088722

    申请日:2006-09-21

    IPC分类号: H03B5/30

    CPC分类号: H03B5/30

    摘要: An oscillator circuit has a first and a second piezoresistive resonator (1,2), each having a resonant frequency, each piezoresistive resonator having an input for driving the resonator, and each piezoresistive resonator having its input coupled directly to an output of the other of the resonators, to provide feedback according to a resistance of the respective resonator without amplification and without a phase shifter. This enables feedback without the need for another component to provide the phase shift. This means a simpler circuit can be used, which can facilitate greater integration and hence lower costs. By using piezoresistive resonators the need for an external crystal can be avoided, enabling greater integration and lower costs.

    摘要翻译: 振荡器电路具有第一和第二压阻谐振器(1,2),每个具有谐振频率,每个压阻谐振器具有用于驱动谐振器的输入端,并且每个压阻谐振器的输入直接耦合到另一个的输出端 谐振器,以根据各个谐振器的电阻而无需放大而不使用移相器来提供反馈。 这使得反馈不需要另一个组件来提供相移。 这意味着可以使用更简单的电路,这可以促进更大的集成度,从而降低成本。 通过使用压阻谐振器,可以避免对外部晶体的需求,从而实现更高的集成度和更低的成本。

    Spring Structure For Mems Device
    6.
    发明申请
    Spring Structure For Mems Device 有权
    Mems设备的弹簧结构

    公开(公告)号:US20080135385A1

    公开(公告)日:2008-06-12

    申请号:US11718130

    申请日:2005-10-24

    IPC分类号: H01H57/00

    摘要: A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.

    摘要翻译: MEM器件具有可移动元件(30),一对电极(e 1,e 2),用于移动可移动元件,一个电极具有可独立移动的部分(e 3),弹性地联接到相应电极的其余部分 提供对电极拉动的附加阻力。 这可以实现更高的释放电压Vrel,从而降低静电的风险。 此外,可以减小Vpi与Vrel的比率,因此更大的电压范围可用于可移动元件的移动。 这样可以实现更快的切换。 可独立移动部分的面积小于电极的其余部分,并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。 或者,可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分,以在其接触基板时提供额外的拉入阻力。

    Electronic device
    7.
    发明授权
    Electronic device 有权
    电子设备

    公开(公告)号:US06538874B2

    公开(公告)日:2003-03-25

    申请号:US09782664

    申请日:2001-02-13

    IPC分类号: H01G430

    CPC分类号: H03H3/00 H03H7/0115

    摘要: An electronic device having a resonance frequency with a margin of error sufficiently small for high frequency applications. The electronic device includes a first capacitor electrode in a first electrically conducting layer, a dielectric including a layer of dielectric material and a distinct electrically insulating material, and a second capacitor electrode in a second electrically conducting layer.

    摘要翻译: 具有对于高频应用具有足够小的误差裕度的共振频率的电子装置。 电子器件包括在第一导电层中的第一电容器电极,包括介电材料层和不同电绝缘材料的电介质,以及在第二导电层中的第二电容器电极。

    Resonator
    9.
    发明授权
    Resonator 有权
    谐振器

    公开(公告)号:US08294534B2

    公开(公告)日:2012-10-23

    申请号:US12888185

    申请日:2010-09-22

    IPC分类号: H03H9/02 H01L21/00

    摘要: A resonator comprising a beam formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, wherein the ratio of the cross sectional area of the first material to the cross sectional area of the second material varies along the length of the beam, the cross sectional areas being measured substantially perpendicularly to the beam.

    摘要翻译: 一种谐振器,包括由具有第一杨氏模量和第一杨氏模量的第一温度系数的第一材料形成的梁,以及具有第二杨氏模量和第二杨氏模量的第二温度系数的第二材料, 所述第二温度系数至少在所述谐振器的操作条件下与所述第一温度系数的符号相反,其中所述第一材料的横截面积与所述第二材料的横截面面积的比率沿着所述梁的长度变化 横截面面积基本上垂直于梁测量。

    Oscillator based on piezoresistive resonators
    10.
    发明授权
    Oscillator based on piezoresistive resonators 有权
    基于压阻谐振器的振荡器

    公开(公告)号:US07898148B2

    公开(公告)日:2011-03-01

    申请号:US12159769

    申请日:2006-09-08

    IPC分类号: H01L41/09

    CPC分类号: H03B5/32

    摘要: An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the π/2 phase shift of the piezoresistive resonator.

    摘要翻译: 描述了包括压阻谐振器和相变装置的振荡器电路。 具有压阻谐振器的振荡器电路确实具有这样的优点:它们可以执行自维持振荡,而不需要额外的有源器件,例如, 晶体管,因为它们可以用作放大器。 使用相变装置作为电容器,线圈和其它压阻谐振器,以便补偿压阻谐振器的&pgr / / 2相移。