摘要:
An optical mask layer for a CT detector is disclosed and is disposed between the photodiode array and scintillator array of a CT detector. The optical mask layer, which may extend along the x-axis, z-axis, or both, is designed to absorb and/or reflect light emitted the scintillators of the scintillator array. Through this absorption and/or reflection, transference of light photons from a scintillator to the photodiode corresponding to a neighboring scintillator is reduced. This reduction in cross-talk reduces artifacts in a reconstructed image and therefore improves the diagnostic value of the image.
摘要:
A method of fabricating a thin film transistor (TFT) includes the steps of forming a gate conductor on a substrate; depositing a gate dielectric layer of silicon nitride over the gate conductor; treating the exposed silicon nitride on the surface of the gate dielectric layer with a hydrogen plasma at a power level of at least 44 mW/cm.sup.2 for at least 5 minutes; depositing a layer of amorphous silicon semiconductor material over the gate dielectric layer; depositing a layer of n+ doped silicon over the treated amorphous silicon surface; depositing a layer of source/drain metallization over the n+ doped layer; and patterning the source/drain metallization and portions of the underlying n+ doped layer to form source and drain electrodes. The deposition of the TFT material layers and the hydrogen plasma treatment is preferably by plasma enhanced chemical vapor deposition.
摘要:
The TFT structure formed in accordance with this invention includes a TFT body that has channel plug end sidewalls separated by a distance equal to or less than the width of the source/drain address lines and such that no residual doped semiconductor material adheres to the sidewalls. Similarly, the intrinsic semiconductor material layer is shaped such that no residual doped semiconductor material adheres to the sidewalls of the intrinsic semiconductor material layer underlying the channel plug ends.
摘要:
Positive control over the length of the overlap between the gate electrode and the source and drain electrodes in a thin film transistor is provided by a gate conductor layer comprising two different conductors having differing etching characteristics. As part of the gate conductor pattern definition process, both gate conductors are etched to expose the underlying material and the upper gate conductor layer is etched back to expose the first gate conductor layer in accordance with the desired overlap between the gate electrode and the source and drain electrodes. Thereafter, the remainder of the device is fabricated with the source and drain electrodes self-aligned with respect to the second gate conductor layer using a planarization and non-selective etch method.
摘要:
A thin film FET switching element, particularly useful in liquid crystal displays (LCDs) employs particular materials and is fabricated via a particular process to ensure chemical compatibility and the formation of good electrical contact to an amorphous silicon layer while also producing FETs with desirable electrical properties for LCDs. These materials include the use of titanium as a gate electrode material and the use of N.sup.+ amorphous silicon as a material to enhance electrical contact between molybdenum source and drain pads and an underlying layer of amorphous silicon. The process of the present invention provides enhanced fabrication yield and device performance.
摘要:
A thin film FET switching element, particularly useful in liquid crystal displays, employs a set of special materials to ensure compatibility with the indium tin oxide of a pixel electrode layer used as transparent conductive material in liquid crystal display devices. These materials include the use of titanium as a gate electrode material and the use of aluminum as a material to enhance electrical contact between source and drain pads and an underlying layer of amorphous silicon. The apparatus and process of the present invention provide enhanced fabrication yield and device reliability.
摘要:
The gate electrode in an inverted field effect transistor (FET) is fabricated with titanium to provide an FET which is particularly suitable for use as the switching element in a matrix addressed liquid crystal display. More particularly, the resist employed in gate electrode patterning is plasma ashed in an oxygen atmosphere to toughen the titanium gate material and render it more amenable to subsequent processing steps.
摘要:
An improved target for storage of electric charge, in an electron beam addressable memory, utilizes an anodic oxide grown upon a semiconductor layer, forming part of a semiconductor diode structure. The anodic oxide is overlayed with a planar film of conductive material and the target structure is scanned with an electron beam for writing of electric charge storage therein and reading of the electron charge patterns therefrom over relatively greater numbers of erase/write operations relative to a target having a thermally-grown oxide layer.
摘要:
A method for randomly scrambling the physical address of a block of data, within a memory subject to data site deterioration, by utilizing an auxiliary correspondence memory to pair each logical input/output address with a physical memory address at a random time. Apparatus for implementing the novel method is also disclosed.
摘要:
An imaging system includes a gantry having a bore therethrough designed to receive a patient being translated through the bore an x-ray source disposed in the gantry and configured to emit x-rays toward the patient, and a detector module disposed in the gantry to receive x-rays attenuated by the patient. The detector module includes a scintillator configured to absorb the x-rays and to convert the x-rays into optical photons, a device configured to receive the optical photons and to convert the optical photons to electrical signals, and an adaptive data acquisition system (DAS) configured to switch an operating mode of the device from a charge integrating mode to a photon counting mode, and vice versa.