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    Method and system for treating a hard mask to improve etch characteristics
    1.
    发明授权
    Method and system for treating a hard mask to improve etch characteristics 失效
    用于处理硬掩模以改善蚀刻特性的方法和系统

    公开(公告)号：US07291446B2

    公开(公告)日：2007-11-06

    申请号：US10801571

    申请日：2004-03-17

    申请人： Aelan Mosden ,  Dung Phan

    发明人： Aelan Mosden ,  Dung Phan

    IPC分类号： G03F7/26

    CPC分类号： G03F7/091 ,  G03F7/0752 ,  G03F7/11 ,  G03F7/40 ,  G03F7/405 ,  G03F7/427 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31133 ,  H01L21/31144 ,  H01L21/32139

    摘要： During pattern transfer to a film stack, the hard mask layer, such as a tunable etch resistant antireflective coating (TERA), is consumed when etching the underling layer(s), leading to reduced etch performance and potential damage to the underlying layer(s), such as lack of profile control. A method of and system for preparing a structure on a substrate is described comprising: preparing a film stack comprising a thin film, a hard mask formed on the thin film, and a layer of light-sensitive material formed on the hardmask; forming a pattern in the layer of light-sensitive material; transferring the pattern to the hard mask; removing the layer of light-sensitive material; treating the surface layer of the hard mask in order to modify the surface; and transferring the pattern to the thin film.

    摘要翻译： 在图案转印到薄膜叠层中，当蚀刻底层时，硬掩模层（例如可调蚀抗蚀抗反射涂层（TERA））被消耗，导致降低的蚀刻性能和对下层的潜在损伤 ），如缺少配置文件控制。 描述了一种用于在衬底上制备结构的方法和系统，其包括：制备包括薄膜，形成在薄膜上的硬掩模和形成在硬掩模上的感光材料层的薄膜叠层; 在感光材料层中形成图案; 将图案转移到硬掩模; 去除感光材料层; 处理硬掩模的表面层以改变表面; 并将图案转印到薄膜上。

    Method and system for treating a hard mask to improve etch characteristics
    2.
    发明申请
    Method and system for treating a hard mask to improve etch characteristics 失效
    用于处理硬掩模以改善蚀刻特性的方法和系统

    公开(公告)号：US20050208434A1

    公开(公告)日：2005-09-22

    申请号：US10801571

    申请日：2004-03-17

    申请人： Aelan Mosden ,  Dung Phan

    发明人： Aelan Mosden ,  Dung Phan

    IPC分类号： G03F7/00 ,  G03F7/075 ,  G03F7/09 ,  G03F7/11 ,  G03F7/36 ,  G03F7/40 ,  G03F7/42 ,  H01L21/033 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213

    CPC分类号： G03F7/091 ,  G03F7/0752 ,  G03F7/11 ,  G03F7/40 ,  G03F7/405 ,  G03F7/427 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31133 ,  H01L21/31144 ,  H01L21/32139

    摘要： During pattern transfer to a film stack, the hard mask layer, such as a tunable etch resistant antireflective coating (TERA), is consumed when etching the underling layer(s), leading to reduced etch performance and potential damage to the underlying layer(s), such as lack of profile control. A method of and system for preparing a structure on a substrate is described comprising: preparing a film stack comprising a thin film, a hard mask formed on the thin film, and a layer of light-sensitive material formed on the hardmask; forming a pattern in the layer of light-sensitive material; transferring the pattern to the hard mask; removing the layer of light-sensitive material; treating the surface layer of the hard mask in order to modify the surface; and transferring the pattern to the thin film.

    摘要翻译： 在图案转印到薄膜叠层中，当蚀刻底层时，硬掩模层（例如可调蚀抗蚀抗反射涂层（TERA））被消耗，导致降低的蚀刻性能和对下层的潜在损伤 ），如缺少配置文件控制。 描述了一种用于在衬底上制备结构的方法和系统，其包括：制备包括薄膜，形成在薄膜上的硬掩模和形成在硬掩模上的感光材料层的薄膜叠层; 在感光材料层上形成图案; 将图案转移到硬掩模; 去除感光材料层; 处理硬掩模的表面层以改变表面; 并将图案转印到薄膜上。

    Solving large-scale security-constrained economic dispatch problem in real-time
    3.
    发明授权
    Solving large-scale security-constrained economic dispatch problem in real-time 失效
    实时解决大规模安全约束的经济调度问题

    公开(公告)号：US08606420B2

    公开(公告)日：2013-12-10

    申请号：US13183865

    申请日：2011-07-15

    申请人： Jayant R. Kalagnanam ,  Dung Phan

    发明人： Jayant R. Kalagnanam ,  Dung Phan

    IPC分类号： G05D11/00

    CPC分类号： G05B13/02 ,  G06Q50/06 ,  H02J1/14 ,  H02J3/00

    摘要： A system, a method and a computer program product for determining an amount of an electric power to be generated in an electric power system and determining a total cost for generating the amount of electric power while satisfying at least one contingency constraint and one or more customer request. The system creates an optimization problem for calculating amount of the electric power to be generated and a total cost for generating the calculated amount of the electric power while meeting the at least one contingency constraint. The system runs the optimization problem in real-time. The system outputs, from the optimization problem, an output specifying the calculated amount of the electric power and the total cost to generate the calculated amount of the electric power.

    摘要翻译： 一种用于确定在电力系统中产生的电力的量的系统，方法和计算机程序产品，并且在满足至少一个应急限制的同时确定用于产生电力的总成本并且一个或多个客户 请求。 该系统产生用于计算要生成的电力的量的优化问题，以及在满足至少一个应急约束的同时产生计算出的电力的总成本。 系统实时运行优化问题。 系统根据优化问题输出指定计算出的电力量的总和成本以计算电力的计算量的总输出。

    SOLVING LARGE-SCALE SECURITY-CONSTRAINED ECONOMIC DISPATCH PROBLEM IN REAL-TIME
    4.
    发明申请
    SOLVING LARGE-SCALE SECURITY-CONSTRAINED ECONOMIC DISPATCH PROBLEM IN REAL-TIME 失效
    实时解决大规模安全经济调控问题

    公开(公告)号：US20130018517A1

    公开(公告)日：2013-01-17

    申请号：US13183865

    申请日：2011-07-15

    申请人： Jayant R. Kalagnanam ,  Dung Phan

    发明人： Jayant R. Kalagnanam ,  Dung Phan

    IPC分类号： G06F1/30

    CPC分类号： G05B13/02 ,  G06Q50/06 ,  H02J1/14 ,  H02J3/00

    摘要： A system, a method and a computer program product for determining an amount of an electric power to be generated in an electric power system and determining a total cost for generating the amount of electric power while satisfying at least one contingency constraint and one or more customer request. The system creates an optimization problem for calculating amount of the electric power to be generated and a total cost for generating the calculated amount of the electric power while meeting the at least one contingency constraint. The system runs the optimization problem in real-time. The system outputs, from the optimization problem, an output specifying the calculated amount of the electric power and the total cost to generate the calculated amount of the electric power.

    摘要翻译： 一种用于确定在电力系统中产生的电力的量的系统，方法和计算机程序产品，并且在满足至少一个应急限制的同时确定用于产生电力的总成本并且一个或多个客户 请求。 该系统产生用于计算要生成的电力的量的优化问题，以及在满足至少一个应急约束的同时产生计算出的电力的总成本。 系统实时运行优化问题。 系统根据优化问题输出指定计算出的电力量的总和成本以计算电力的计算量的总输出。

    Method and apparatus for applying a material to a wide high-speed web
    5.
    发明申请
    Method and apparatus for applying a material to a wide high-speed web 审中-公开
    将材料施加到宽高速网上的方法和装置

    公开(公告)号：US20070029060A1

    公开(公告)日：2007-02-08

    申请号：US11386647

    申请日：2006-03-23

    申请人： Tyrone Murray ,  Frederic Chapuis ,  Dung Phan

    发明人： Tyrone Murray ,  Frederic Chapuis ,  Dung Phan

    IPC分类号： D21F11/00

    CPC分类号： D21H23/50 ,  A24C5/005 ,  A24D1/025 ,  B05B15/50 ,  B05C5/0254 ,  B05C5/027 ,  B05C11/1013 ,  B65H35/02 ,  D21F11/006 ,  D21G9/0036 ,  D21H19/36 ,  D21H19/68 ,  D21H23/28 ,  D21H23/78

    摘要： A high-speed apparatus for applying material to cigarette paper during manufacture uses at least two independently operable, moving orifice devices, each positioned to deposit horizontal bands of material on a paper web at the dry end of a Fourdrinier wire. The resulting web may be cut into multiple webs, each web having a width corresponding to the effective width of a moving orifice device. Dynamic optical inspection apparatus evaluates add-on band uniformity, thickness, and/or spacing and adjusts operation of the apparatus accordingly. The apparatus can simultaneously produce both banded and unbanded paper for wrapping tobacco during cigarette manufacturing.

    摘要翻译： 用于在制造过程中将材料施加到卷烟纸上的高速装置使用至少两个可独立操作的移动孔口装置，每个装置定位成在长网线干燥端的纸幅上沉积水平条带。 所得到的纤维网可以被切割成多个纤维网，每个纤维网的宽度对应于移动孔口装置的有效宽度。 动态光学检查装置评估附加带的均匀性，厚度和/或间隔，并相应地调整装置的操作。 该设备可以在卷烟制造期间同时生产用于包裹烟草的带状和无带纸。