公开(公告)号：US08917022B2

公开(公告)日：2014-12-23

申请号：US12993640

申请日：2009-05-21

申请人： Akinori Ebe ,  Yasunori Ando ,  Masanori Watanabe

发明人： Akinori Ebe ,  Yasunori Ando ,  Masanori Watanabe

IPC分类号： H01J7/24 ,  H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32174 ,  H01J37/32183 ,  H01J37/3266

摘要： A flange, which forms a portion of a vacuum container, has a rectangular opening surrounded by an insulating frame. A plate-shaped radio-frequency antenna conductor 13 is provided so as to cover the opening, with the insulating frame clamped thereby. In this structure, a radio-frequency power source is connected via a matching box to one end along the length of the radio-frequency antenna conductor, the other end is connected to ground, and electric power is supplied so that a radio-frequency current flows from one end of the radio-frequency antenna conductor to the other. By this method, the impedance of the radio-frequency antenna conductor can be lowered, and high-density plasma with a low electron temperature can be efficiently generated.

摘要翻译： 形成真空容器的一部分的凸缘具有由绝缘框架包围的矩形开口。 设置板状射频天线导体13，以覆盖开口，绝缘框被夹持。 在这种结构中，射频电源经由匹配盒连接到沿着射频天线导体的长度的一端，另一端连接到地，并且提供电力使得射频电流 从射频天线导体的一端流向另一端。 通过该方法，可以降低射频天线导体的阻抗，能够有效地产生电子温度低的高密度等离子体。

公开(公告)号：US20140150975A1

公开(公告)日：2014-06-05

申请号：US13820876

申请日：2010-09-06

申请人： Akinori Ebe ,  Masanori Watanabe

发明人： Akinori Ebe ,  Masanori Watanabe

IPC分类号： H01J37/32

CPC分类号： H01J37/32082 ,  H01J37/3211 ,  H05H1/46 ,  H05H2001/4652

摘要： The present invention provides an internal antenna type plasma processing device which is easily maintained and capable of producing stable plasma. The plasma processing device has a plurality of antenna units 20 provided in the top wall 111 of a vacuum chamber 11. Each of the antenna units 20 includes: a dielectric housing 21 provided to protrude into the vacuum chamber 11 from the top wall 111 of the vacuum chamber 11; a cover 22 having a second gas discharge port 25 for discharging the atmosphere in the housing to the outside of the vacuum chamber; and a radio-frequency antenna 23 formed by a conductor tube which is fixed to the cover 22 by way of a feedthrough 24 and has gas passage holes 232 in its tube walls. An inert gas is supplied into the tube of the radio-frequency antenna 23, and the inside of the housing 21 is filled with the inert gas provided through the gas passage holes 232. The inert gas is discharged to the outside of the vacuum chamber 11 through the second gas discharge port 25.

摘要翻译： 本发明提供一种易于维护并能够产生稳定等离子体的内部天线型等离子体处理装置。 等离子体处理装置具有设置在真空室11的顶壁111中的多个天线单元20.每个天线单元20包括：电介质壳体21，其被设置为从顶壁111突出到真空室11中 真空室11; 具有用于将壳体中的气氛排出到真空室的外部的第二气体排出口25的盖22; 以及由导体管形成的射频天线23，该导体管通过馈通24固定到盖22，并且在其管壁中具有气体通过孔232。 惰性气体被供给到射频天线23的管中，并且壳体21的内部填充有通过气体通过孔232提供的惰性气体。惰性气体被排出到真空室11的外部 通过第二气体排出口25。

公开(公告)号：US20110115380A1

公开(公告)日：2011-05-19

申请号：US12993640

申请日：2009-05-21

申请人： Akinori Ebe ,  Yasunori Ando ,  Masanori Watanabe

发明人： Akinori Ebe ,  Yasunori Ando ,  Masanori Watanabe

IPC分类号： H05H1/46 ,  H05H1/24

CPC分类号： H05H1/46 ,  H01J37/32091 ,  H01J37/321 ,  H01J37/3211 ,  H01J37/32174 ,  H01J37/32183 ,  H01J37/3266

摘要： A flange, which forms a portion of a vacuum container, has a rectangular opening surrounded by an insulating frame. A plate-shaped radio-frequency antenna conductor 13 is provided so as to cover the opening, with the insulating frame clamped thereby. In this structure, a radio-frequency power source is connected via a matching box to one end along the length of the radio-frequency antenna conductor, the other end is connected to ground, and electric power is supplied so that a radio-frequency current flows from one end of the radio-frequency antenna conductor to the other. By this method, the impedance of the radio-frequency antenna conductor can be lowered, and high-density plasma with a low electron temperature can be efficiently generated.

摘要翻译： 形成真空容器的一部分的凸缘具有由绝缘框架包围的矩形开口。 设置板状射频天线导体13，以覆盖开口，绝缘框被夹持。 在这种结构中，射频电源经由匹配盒连接到沿着射频天线导体的长度的一端，另一端连接到地，并且提供电力使得射频电流 从射频天线导体的一端流向另一端。 通过该方法，可以降低射频天线导体的阻抗，能够有效地产生电子温度低的高密度等离子体。

公开(公告)号：US20130043128A1

公开(公告)日：2013-02-21

申请号：US13583417

申请日：2011-03-08

申请人： Akinori Ebe ,  Masanori Watanabe

发明人： Akinori Ebe ,  Masanori Watanabe

IPC分类号： C23C14/34

CPC分类号： C23C14/3407 ,  C23C14/3464 ,  H01J37/34 ,  H01J37/3488

摘要： The present invention aims at providing a sputtering system capable of efficiently generating high-density plasma near the surface of a sputter target and forming a film at a high rate. It also aims at providing a large-area sputtering system and a plasma processing system having a simple structure and allowing the sputter target to be easily attached/detached, maintained, or operated otherwise. The present invention provides a sputtering system in which an inductively-coupled antenna conductor plate is attached to a portion of a vacuum chamber, wherein: a sputter target plate is attached to the inductively-coupled antenna conductor on its plasma formation space side; one end of the antenna conductor is connected to a radio-frequency power source; and the other end is grounded through a capacitor. A plurality of antenna conductors may be provided to form a large-area sputtering system.

摘要翻译： 本发明的目的在于提供一种溅射系统，其能够在溅射靶的表面附近有效地生成高密度等离子体并以高速率形成膜。 它还旨在提供具有简单结构的大面积溅射系统和等离子体处理系统，并且允许溅射靶容易地附接/分离，维持或操作。 本发明提供一种溅射系统，其中感应耦合的天线导体板附着在真空室的一部分上，其中：溅射靶板安装在其等离子体形成空间侧的电感耦合天线导体上; 天线导体的一端连接到射频电源; 另一端通过电容器接地。 可以提供多个天线导体以形成大面积溅射系统。

公开(公告)号：US09363463B2

公开(公告)日：2016-06-07

申请号：US14107403

申请日：2013-12-16

申请人： Satoshi Taneichi ,  Takeshi Ito ,  Masanori Watanabe

发明人： Satoshi Taneichi ,  Takeshi Ito ,  Masanori Watanabe

IPC分类号： H04N5/77 ,  H04N21/6587 ,  H04N21/414 ,  H04N21/4728 ,  H04N21/2743 ,  H04N21/4223 ,  H04N21/83 ,  H04N1/327 ,  H04N5/765 ,  H04N5/76 ,  H04N1/00 ,  H04N1/32 ,  H04N21/81

CPC分类号： H04N5/23238 ,  H04N1/00217 ,  H04N1/32101 ,  H04N1/32776 ,  H04N5/2628 ,  H04N5/76 ,  H04N5/765 ,  H04N5/772 ,  H04N21/2743 ,  H04N21/41407 ,  H04N21/4223 ,  H04N21/4728 ,  H04N21/6587 ,  H04N21/8153 ,  H04N2201/3226 ,  H04N2201/325 ,  H04N2201/3276

摘要： The present invention is concerning to an image management system that communicates with a first communication terminal via a communication network, the image management system comprising: an image storage unit configured to store image data; a receiving unit configured to receive, from the first communication terminal, link information that includes image identification information for identifying the image data and includes predetermined-area information that indicates a predetermined area in the image data; and a transmitting unit configured to transmit, to the first communication terminal, the image data that is indicated by the image identification information included in the link information received by the receiving unit and the predetermined-area information included in the link information.

摘要翻译： 本发明涉及一种通过通信网络与第一通信终端通信的图像管理系统，所述图像管理系统包括：图像存储单元，被配置为存储图像数据; 接收单元，被配置为从第一通信终端接收包括用于识别图像数据的图像识别信息的链接信息，并且包括指示图像数据中的预定区域的预定区域信息; 以及发送单元，被配置为向所述第一通信终端发送由所述接收单元接收到的链接信息中包括的图像识别信息所指示的图像数据和所述链接信息中包含的预定区域信息。

公开(公告)号：US08643341B2

公开(公告)日：2014-02-04

申请号：US13207495

申请日：2011-08-11

申请人： Hiroshi Hamaguchi ,  Masanori Watanabe

发明人： Hiroshi Hamaguchi ,  Masanori Watanabe

IPC分类号： H02J7/04

CPC分类号： H01M10/052 ,  B60L3/0007 ,  B60L3/0046 ,  B60L11/187 ,  H01M10/486 ,  H01M10/613 ,  H01M10/615 ,  H01M10/625 ,  H01M10/633 ,  H01M10/6563 ,  H01M10/6571 ,  Y02E60/122 ,  Y02T10/7011 ,  Y02T10/705

摘要： Disclosed is a battery system wherein safety of a lithium secondary battery can be enhanced by efficiently deactivating (inactivating) lithium metal deposited on a negative electrode of the lithium secondary battery. Also disclosed is an automobile. Specifically disclosed is a battery system comprising a lithium ion secondary battery and a temperature control unit for controlling the temperature of the lithium ion secondary battery. The temperature control unit performs such a control that the temperature T of the lithium ion secondary battery is maintained within the following range: 55° C.

摘要翻译： 公开了一种电池系统，其中可以通过有效地使沉积在锂二次电池的负极上的锂金属失活（失活）来提高锂二次电池的安全性。 还公开了一种汽车。 具体公开了包括锂离子二次电池和用于控制锂离子二次电池的温度的温度控制单元的电池系统。 温度控制单元进行这样的控制，使得锂离子二次电池的温度T保持在以下范围内：55℃

公开(公告)号：US08485310B2

公开(公告)日：2013-07-16

申请号：US13044133

申请日：2011-03-09

申请人： Yosuke Tanabe ,  Masanori Watanabe ,  Akira Goto ,  Shigeyasu Tsubaki ,  Masahiko Usui ,  Akio Idei

发明人： Yosuke Tanabe ,  Masanori Watanabe ,  Akira Goto ,  Shigeyasu Tsubaki ,  Masahiko Usui ,  Akio Idei

IPC分类号： F01N1/04 ,  F24F13/24 ,  F01N1/00 ,  F24F13/00

CPC分类号： G10K11/172 ,  H05K7/20718

摘要： Silencing equipment provided with one or more flow channels through which cooling air flows has a flow channel forming member that forms the flow channel, and an acoustic absorbent member that is fixed to the flow channel forming member. A resonance type silencer is formed on a wall surface of the flow channel by providing a cavity for the resonance type silencer in the acoustic absorbent member and an aperture for the resonance type silencer in a portion of the flow channel forming member. The resonance type silencer sets a frequency of noise necessary to be reduced based on a peak frequency of noise generated by a fan. The silencing equipment further has a slide member which slides by a slide mechanism to adjust the area of the top of the aperture. The silencing equipment for electronic devices capable of cooling heat generating sections thereof with air has a small and simple structure and can improve a silencing effect by blowing air.

摘要翻译： 设置有冷却空气流过的一个或多个流动通道的沉降设备具有形成流路的流路形成部件，以及固定在流路形成部件上的吸声部件。 通过在吸声部件中设置共振型消音器的空腔，在流路形成部件的一部分设置共振型消音器的开口，在流路的壁面上形成共振型消音器。 谐振型消声器基于由风扇产生的噪声的峰值频率来设定需要减小的噪声频率。 消音装置还具有滑动构件，滑动构件通过滑动机构滑动以调节孔的顶部的面积。 能够用空气冷却发热部的电子设备的消音装置结构简单，结构简单，能够通过吹送空气来提高消音效果。

公开(公告)号：US07958717B2

公开(公告)日：2011-06-14

申请号：US12155704

申请日：2008-06-09

申请人： Susumu Nakano ,  Masaya Ichinose ,  Masanori Watanabe ,  Kuniyoshi Tsubouchi ,  Toshihiko Fukushima ,  Masatoshi Watanabe

发明人： Susumu Nakano ,  Masaya Ichinose ,  Masanori Watanabe ,  Kuniyoshi Tsubouchi ,  Toshihiko Fukushima ,  Masatoshi Watanabe

IPC分类号： F02C7/12

CPC分类号： F02C7/32 ,  F02C7/12 ,  F05D2260/96

摘要： A gas turbine power generator plant, intended to reduce its noise by making small the intake and exhaust outlets of the cooing air channel of a case, comprises an engine core in which a turbine, a compressor and a generator are installed on the same axis, a combustor for burning air for combustion compressed by the compressor and supplying the air to the turbine, a radiator for cooling a coolant or a lubricant, a cooling fan for ventilating the radiator with cooling air, an electric power converter for converting electric power generated by the generator, and the case for housing these constituent elements. And, a combustion air channel passing the compressor, the combustor and the turbine and a cooling air channel passing the radiator, the cooling fan and the electric power converter are formed as mutually independent channels from intake to exhaust.

摘要翻译： 旨在通过小型壳体的冷却空气通道的进气和排气出口来减小噪音的燃气轮机发电机组包括其中涡轮机，压缩机和发电机安装在同一轴线上的发动机机芯， 用于燃烧由压缩机压缩的燃烧空气并将空气供给到涡轮机的燃烧器，用于冷却冷却剂或润滑剂的散热器，用于使用冷却空气使散热器通风的冷却风扇，用于转换由 发电机和用于容纳这些组成元件的壳体。 并且，通过压缩机，燃烧器和涡轮机的燃烧空气通道和通过散热器，冷却风扇和电力转换器的冷却空气通道被形成为从进气到排气的相互独立的通道。

公开(公告)号：US07665541B2

公开(公告)日：2010-02-23

申请号：US12230910

申请日：2008-09-08

申请人： Masato Sakai ,  Satoru Matsuno ,  Masanori Watanabe ,  Chikai Yoshimizu

发明人： Masato Sakai ,  Satoru Matsuno ,  Masanori Watanabe ,  Chikai Yoshimizu

IPC分类号： B25D11/04

CPC分类号： B25F5/029 ,  B25B21/02 ,  Y10S173/02

摘要： A cover which covers outer peripheries of fastening screws are disposed on an outer periphery of a hammer case. A stopper which detachably positions and fixes the cover to the outer periphery of the hammer case is disposed.

摘要翻译： 覆盖紧固螺钉的外周的盖设置在锤壳的外周上。 设置有可拆卸地将盖定位并固定到锤壳的外周的止动件。

公开(公告)号：US07558306B2

公开(公告)日：2009-07-07

申请号：US11134519

申请日：2005-05-23

申请人： Masanori Watanabe ,  Shinichi Kawato ,  Mitsuhiro Matsumoto

发明人： Masanori Watanabe ,  Shinichi Kawato ,  Mitsuhiro Matsumoto

IPC分类号： H01S5/00

CPC分类号： H01S5/2231 ,  B82Y20/00 ,  H01S5/028 ,  H01S5/0287 ,  H01S5/0425 ,  H01S5/1014 ,  H01S5/1039 ,  H01S5/162 ,  H01S5/168 ,  H01S5/2022 ,  H01S5/2214 ,  H01S5/2219 ,  H01S5/3211 ,  H01S5/34326 ,  H01S5/3436 ,  H01S2301/18

摘要： In a semiconductor laser device of the invention, a ridge portion 150 forms a waveguide, and guided light goes along the ridge portion 150. A tail of the guided layer is present also at first side portions 151, while second side portions 152 are regions which the tail of the guided light does not reach. Meanwhile, scattered light generated from the ridge portion 150 goes through the first side portions 15, spreading into the second side portions 152. In the second side portions 152, a light absorption layer 127 serving as a light absorber is formed on the first upper clad layer 108, where the scattered light is absorbed. As a result of the absorption of scattered light in the second side portions 152, ripples of radiation light are reduced. Also since the light absorption layer 127 is in electrical contact with a p-side ohmic electrode 125, the problem of charge accumulation to the light absorption layer 127 can be avoided.

摘要翻译： 在本发明的半导体激光装置中，脊部150形成波导管，导光部沿着脊部150延伸。被引导层的尾部也存在于第一侧部151，而第二侧部152是 引导灯的尾巴没有达到。 同时，从脊部150产生的散射光穿过第一侧部15，扩展到第二侧部152.在第二侧部152中，作为光吸收体的光吸收层127形成在第一上部包层 层108，其中散射的光被吸收。 作为第二侧部152中散射光的吸收的结果，辐射光的波纹减小。 此外，由于光吸收层127与p侧欧姆电极125电接触，因此可以避免对光吸收层127的电荷积聚的问题。