Method of manufacturing thin quartz crystal wafer
    1.
    发明授权
    Method of manufacturing thin quartz crystal wafer 失效
    薄型石英晶片的制造方法

    公开(公告)号:US07174620B2

    公开(公告)日:2007-02-13

    申请号:US10746400

    申请日:2003-12-26

    IPC分类号: H04R31/00

    摘要: A method of manufacturing a thin quartz crystal wafer from a quartz crystal block which is cut from a crystal body of synthetic quartz crystal and has a flat principal surface, comprises the steps of (a) converging a laser beam at a region in said quartz crystal block at a predetermined depth from the principal surface thereof to cause multiphoton phenomenon state, thereby breaking Si—O—Si bonds of quartz crystal in said region to form voids in said region, and (b) peeling said thin quartz crystal wafer from a body of said quartz crystal block along said voids. The above process is repeatedly performed on one quartz crystal block to peel off a plurality of thin quartz crystal wafers successively from the principal surface of the quartz crystal block. Each of the thin quartz crystal wafers is divided into individual quartz crystal blanks for making quartz crystal units.

    摘要翻译: 从由合成石英晶体切割并具有平坦主表面的石英晶体块制造薄晶体晶片的方法包括以下步骤:(a)将激光束会聚在所述石英晶体的区域 在其主表面的预定深度处阻挡以产生多光子现象状态,从而破坏所述区域中的石英晶体的Si-O-Si键,以在所述区域中形成空隙,并且(b)将所述薄的石英晶片从主体 的所述石英晶体块。 上述过程在一个石英晶体块上重复进行,从石英晶体块的主表面连续地剥离多个薄的石英晶片。 每个薄的石英晶片被分成用于制造石英晶体单元的单独的石英晶体空白。

    Crystal unit having stacked structure
    2.
    发明授权
    Crystal unit having stacked structure 失效
    具有堆叠结构的水晶单元

    公开(公告)号:US07564177B2

    公开(公告)日:2009-07-21

    申请号:US11964403

    申请日:2007-12-26

    IPC分类号: H01L41/047 H01L41/053

    CPC分类号: H03H9/1035 H03H9/0595

    摘要: A stacked crystal unit includes: a first crystal plate in which a vibration member links to an outer circumferential frame portion, and a pair of extending electrode extends to the frame portion from excitation electrodes; and a second and third crystal plates which have a concave portion in an area opposite to the vibration member and whose open end surfaces are joined by direct bonding to both principal surfaces of the frame portion in the first crystal plate. The extending electrodes are electrically extended to an outer surface of at least one of the second and third crystal plates via electrode through-holes provided in the frame portion. The electrode through-hole includes: a first electrode through-hole penetrating through the frame portion from the principal surface of the frame portion where the extending electrode extends; and a second electrode through-hole provided in the second or third crystal plate.

    摘要翻译: 层叠晶体单元包括:第一晶体板,其中振动部件连接到外周框架部分,一对延伸电极从激励电极延伸到框架部分; 以及第二和第三晶体板,其在与振动部件相反的区域中具有凹部,并且其开口端面通过直接接合到第一晶体板的框架部分的两个主表面而接合。 延伸电极通过设置在框架部分中的电极通孔电延伸到第二和第三晶体板中的至少一个的外表面。 电极通孔包括:从延伸电极延伸的框架部分的主表面穿过框架部分的第一电极通孔; 以及设置在第二或第三晶体板中的第二电极通孔。

    CRYSTAL UNIT HAVING STACKED STRUCTURE
    3.
    发明申请
    CRYSTAL UNIT HAVING STACKED STRUCTURE 失效
    具有堆叠结构的水晶单元

    公开(公告)号:US20080150398A1

    公开(公告)日:2008-06-26

    申请号:US11964403

    申请日:2007-12-26

    IPC分类号: H01L41/02

    CPC分类号: H03H9/1035 H03H9/0595

    摘要: A stacked crystal unit includes: a first crystal plate in which a vibration member links to an outer circumferential frame portion, and a pair of extending electrode extends to the frame portion from excitation electrodes; and a second and third crystal plates which have a concave portion in an area opposite to the vibration member and whose open end surfaces are joined by direct bonding to both principal surfaces of the frame portion in the first crystal plate. The extending electrodes are electrically extended to an outer surface of at least one of the second and third crystal plates via electrode through-holes provided in the frame portion. The electrode through-hole includes: a first electrode through-hole penetrating through the frame portion from the principal surface of the frame portion where the extending electrode extends; and a second electrode through-hole provided in the second or third crystal plate.

    摘要翻译: 层叠晶体单元包括:第一晶体板,其中振动部件连接到外周框架部分,一对延伸电极从激励电极延伸到框架部分; 以及第二和第三晶体板,其在与振动部件相反的区域中具有凹部,并且其开口端面通过直接接合到第一晶体板的框架部分的两个主表面而接合。 延伸电极通过设置在框架部分中的电极通孔电延伸到第二和第三晶体板中的至少一个的外表面。 电极通孔包括:从延伸电极延伸的框架部分的主表面穿过框架部分的第一电极通孔; 以及设置在第二或第三晶体板中的第二电极通孔。

    Load sensor with use of crystal resonator
    4.
    发明授权
    Load sensor with use of crystal resonator 失效
    使用晶体谐振器的负载传感器

    公开(公告)号:US06880407B2

    公开(公告)日:2005-04-19

    申请号:US10163858

    申请日:2002-06-05

    CPC分类号: G01G3/13

    摘要: Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.

    摘要翻译: 励磁电极分别固定在长板状AT切割晶体谐振器的两个表面的中心部分,当电信号施加到晶体谐振器的中心部分时,中心部分在晶体谐振器的长度方向上开始厚度剪切振荡 晶体谐振器通过激发电极。 并且,在晶体谐振器的中心部分和端部之间的中间部分上分别在板宽度方向上形成横截面的通道形状,半圆形或梯形槽。 这些槽通过公知的蚀刻技术如光蚀刻等形成为相对于晶体谐振器的厚度方向中心位置对称。

    Surface mount crystal unit and surface mount crystal oscillator
    5.
    发明授权
    Surface mount crystal unit and surface mount crystal oscillator 失效
    表面贴装晶体单元和表面贴装晶体振荡器

    公开(公告)号:US07034441B2

    公开(公告)日:2006-04-25

    申请号:US10706517

    申请日:2003-11-12

    申请人: Kozo Ono Akio Chiba

    发明人: Kozo Ono Akio Chiba

    IPC分类号: H01L41/08

    摘要: A surface mount crystal unit comprising a crystal blank, a planar mounting substrate made of silicon and a cover having a shape with a recess and made of glass containing ions having high mobility. The mounting substrate and the cover are bonded by means of anode bonding and the crystal blank is hermetically sealed in a case made up of the mounting substrate and the cover. The mounting substrate has connection electrodes used for a connection with the crystal blank and external terminals to be used to surface-mount the crystal unit. The connection electrodes and external terminals are electrically connected.

    摘要翻译: 一种表面贴装晶体单元,包括晶体坯,由硅制成的平面安装基板和具有凹陷形状的盖,该玻璃包含具有高迁移率的离子的玻璃。 安装基板和盖通过阳极接合结合,并且在由安装基板和盖组成的壳体中气密地密封晶体坯料。 安装基板具有用于与晶体坯件的连接的连接电极和用于表面安装晶体单元的外部端子。 连接电极和外部端子电连接。

    Load sensor with use of crystal resonator
    6.
    发明申请

    公开(公告)号:US20050139016A1

    公开(公告)日:2005-06-30

    申请号:US11065209

    申请日:2005-02-22

    CPC分类号: G01G3/13

    摘要: Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.

    Piezoelectric devices and methods for manufacturing same
    7.
    发明授权
    Piezoelectric devices and methods for manufacturing same 失效
    压电器件及其制造方法

    公开(公告)号:US07728491B2

    公开(公告)日:2010-06-01

    申请号:US12251312

    申请日:2008-10-14

    IPC分类号: H01L41/053

    摘要: Piezoelectric devices and associated fabrication methods are disclosed. An exemplary piezoelectric device includes a piezoelectric vibrating piece having first and second electrodes and first and second surfaces, a glass base having first and second surfaces, and a lid. These three parts also form the device package. The first surface of the piezoelectric vibrating piece is mounted to the base, and the lid is mounted to the second surface of the piezoelectric vibrating piece to seal the package. The glass base includes first and second metal wires having ends that protrude from the surfaces of the base. The side surfaces of the protruding wire ends are connected to the first and the second electrodes, respectively. Manufacture is performed using whole wafers that are processed, sandwiched, bonded, and then cut to produce individual devices.

    摘要翻译: 公开了压电器件和相关的制造方法。 示例性压电装置包括具有第一和第二电极以及第一和第二表面的压电振动片,具有第一和第二表面的玻璃基底和盖。 这三个部分也构成了器件封装。 将压电振动片的第一表面安装到基座上,并且将盖安装到压电振动片的第二表面以密封封装。 玻璃基座包括从底座的表面突出的端部的第一和第二金属线。 突出的线端部的侧表面分别连接到第一和第二电极。 使用加工,夹层,粘合,然后切割以生产各种装置的整个晶片进行制造。

    Surface-mounted oscillator
    10.
    发明申请
    Surface-mounted oscillator 有权
    表面振荡器

    公开(公告)号:US20050017811A1

    公开(公告)日:2005-01-27

    申请号:US10897977

    申请日:2004-07-22

    IPC分类号: H03B5/32 H03H9/02 H03B5/12

    CPC分类号: H03B5/32

    摘要: A surface-mounted oscillator configured by integrally accommodating an oscillation element, an IC chip, and a circuit element in a surface-mounted package is characterized in that the oscillation element, the IC chip, and the circuit element are arranged in positions in a direction vertical to a mounting surface of the surface-mounted oscillator. The oscillation element may be an oscillation element using bulk wave oscillation, or an oscillation element using surface wave oscillation.

    摘要翻译: 将表面安装的振荡元件,IC芯片和电路元件整体地容纳在表面安装封装中的表面安装振荡器的特征在于,振荡元件,IC芯片和电路元件被布置在方向 垂直于表面安装振荡器的安装表面。 振荡元件可以是使用体波振荡的振荡元件,也可以是使用表面波振荡的振荡元件。