公开(公告)号：US07710542B2

公开(公告)日：2010-05-04

申请号：US11936768

申请日：2007-11-07

申请人： Wolfgang Hummel ,  Jürgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Wolfgang Hummel ,  Jürgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/42 ,  G03B27/52

CPC分类号： G03F7/70258 ,  G03F7/70825

摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

摘要翻译： 用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。 线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。 至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

公开(公告)号：US20090141258A1

公开(公告)日：2009-06-04

申请号：US12363065

申请日：2009-01-30

申请人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/54 ,  G02B15/14

CPC分类号： G03F7/70258 ,  G03F7/70825

摘要： An imaging device in a projection exposure machine for microlithography includes at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. The linear drive has at least one moving element, the moving element having a shearing part and a lifting part. The shearing part is arranged to move the optical element and the lifting part is arranged to move the shearing part. The linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

摘要翻译： 用于微光刻的投影曝光机中的成像装置包括至少一个光学元件和至少一个操纵器，用于操纵光学元件的位置的线性驱动器。 线性驱动器具有至少一个移动元件，移动元件具有剪切部分和提升部分。 剪切部分被布置成移动光学元件，并且提升部分被布置成移动剪切部分。 线性驱动器具有支撑元件，该支撑元件在通过提升部分移动剪切部分的同时与光学元件接触并防止其移动。

公开(公告)号：US20090009892A1

公开(公告)日：2009-01-08

申请号：US12211978

申请日：2008-09-17

申请人： Klaus Beck ,  Bernhard Gellrich ,  Hubert Holderer ,  Thomas Petasch ,  Cornelia Roesch ,  Alexander Kohl

发明人： Klaus Beck ,  Bernhard Gellrich ,  Hubert Holderer ,  Thomas Petasch ,  Cornelia Roesch ,  Alexander Kohl

IPC分类号： G02B7/04

CPC分类号： G03F7/70258 ,  G02B7/023 ,  G03F7/70825

摘要： A arrangement serves for the adjustment of an optical element (1), in particular of a lens in an optical system, in particular in a projection lens system for semiconductor lithography. The optical element (1) is mounted in a mount (3) by means of a number of bearing feet (2) distributed over the circumference of the optical element (1) and is selectively deformable by actuators (5). At least some of the bearing feet (2) are engaged by the actuators (5) in a region of the respective bearing foot (2) in such a way that the respective bearing foot (2) can be displaced in the direction of the optical axis (7).

摘要翻译： 一种布置用于调整光学元件（1），特别是光学系统中的透镜的调整，特别是用于半导体光刻的投影透镜系统中。 光学元件（1）通过分布在光学元件（1）的圆周上的多个轴承脚（2）安装在安装件（3）中，并且可由致动器（5）选择性地变形。 至少一些轴承脚（2）在相应的轴承座（2）的区域中被致动器（5）接合，使得相应的轴承座（2）可以沿着光学方向 轴（7）。

公开(公告)号：US20080100930A1

公开(公告)日：2008-05-01

申请号：US12002694

申请日：2007-12-17

申请人： Hubert Holderer ,  Werner Lang ,  Alexander Kohl ,  Bernhard Gellrich ,  Hartmut Brandenburg ,  Johannes Rau ,  Armin Schoeppach

发明人： Hubert Holderer ,  Werner Lang ,  Alexander Kohl ,  Bernhard Gellrich ,  Hartmut Brandenburg ,  Johannes Rau ,  Armin Schoeppach

IPC分类号： G02B17/00 ,  G02B7/02

CPC分类号： G03F7/70591 ,  G02B27/62 ,  G03F7/70258

摘要： An optical measuring system is provided with a measuring machine that has at least one measuring element for determining locations and at least one measuring element for determining angles. At least one common reference surface is provided for the location-determining measuring element and the angle-determining measuring element.

摘要翻译： 光学测量系统设置有测量机，该测量机具有用于确定位置的至少一个测量元件和用于确定角度的至少一个测量元件。 为位置确定测量元件和角度确定测量元件提供至少一个公共参考表面。

公开(公告)号：US07123427B2

公开(公告)日：2006-10-17

申请号：US10484866

申请日：2002-07-20

申请人： Alexander Kohl ,  Hubert Holderer ,  Werner Lang ,  Hartmut Brandenburg

发明人： Alexander Kohl ,  Hubert Holderer ,  Werner Lang ,  Hartmut Brandenburg

IPC分类号： G02B7/02 ,  G02B7/182

CPC分类号： G03F7/70225 ,  G02B27/62 ,  G03F7/70258 ,  G03F7/70825

摘要： The invention relates to an objective, particularly a projection objective for use in semiconductor lithography, comprising optical elements such as lenses (16) and mirrors (11a). According to the invention, at least a portion of the optical elements (16, 11a) is provided with a reflective surface outside of the optically active area serving as the reference surface (12) for a the optical element inside the objective (8).

摘要翻译： 本发明涉及一种目的，特别是用于半导体光刻的投影物镜，包括诸如透镜（16）和反射镜（11a）之类的光学元件。 根据本发明，光学元件（16,11a）的至少一部分在用作物镜（8）内的光学元件的基准面（12）的光学有效区域外面设置有反射表面， 。

公开(公告)号：US20110199597A1

公开(公告)日：2011-08-18

申请号：US13096112

申请日：2011-04-28

申请人： Wolfgang Hummel ,  Jurgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Wolfgang Hummel ,  Jurgen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schöngart ,  Markus Neumaier ,  Bärbel Trossbach ,  Ulrich Weber ,  Michael Mühlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/52

CPC分类号： G03F7/70258 ,  G03F7/70825

摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

摘要翻译： 用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。 线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。 至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

公开(公告)号：US20060164619A1

公开(公告)日：2006-07-27

申请号：US11316160

申请日：2005-12-21

申请人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

发明人： Stephan Back ,  Wolfgang Hummel ,  Juergen Fischer ,  Karl-Eugen Aubele ,  Erich Merz ,  Raoul Reiner ,  Klaus Rief ,  Stefan Schoengart ,  Markus Neumaier ,  Baerbel Schwaer ,  Ulrich Weber ,  Michael Muehlbeyer ,  Hubert Holderer ,  Alexander Kohl ,  Jochen Weber ,  Johannes Lippert ,  Thorsten Rassel

IPC分类号： G03B27/54

CPC分类号： G03F7/70825 ,  G03F7/70258

摘要： An imaging device in a projection exposure machine for microlithography comprises at least one optical element and at least one manipulator, a linear drive for manipulating the position of the optical element. Said linear drive has at least one moving element, said moving element having a shearing part and a lifting part. Said shearing part is arranged to move the optical element and said lifting part is arranged to move said shearing part. Said linear drive has a supporting element which is in contact with and prevents movement of the optical element while the shearing part is moved by the lifting part.

摘要翻译： 用于微光刻的投影曝光机中的成像装置包括至少一个光学元件和至少一个操纵器，用于操纵光学元件的位置的线性驱动器。 所述线性驱动器具有至少一个移动元件，所述移动元件具有剪切部分和提升部分。 所述剪切部分被布置成移动光学元件，并且所述提升部分被布置成移动所述剪切部分。 所述线性驱动器具有支撑元件，该支撑元件在剪切部分被提升部分移动的同时与光学元件接触并防止其移动。

公开(公告)号：US07079331B2

公开(公告)日：2006-07-18

申请号：US11109316

申请日：2005-04-19

申请人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

发明人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer ,  Armin Schoeppach ,  Erwin Gaber ,  Winfried Kaiser ,  Reiner Garreis ,  Toralf Gruner ,  Chris Reed ,  Dragos Pariza ,  Mike Meehan

IPC分类号： G02B7/02 ,  G02B27/10 ,  G02B27/14 ,  G02B7/18 ,  G02F1/01

CPC分类号： G03F7/70825 ,  G02B7/008 ,  G02B7/1805 ,  G03F7/70891

摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的外壳中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件

公开(公告)号：US20060012893A1

公开(公告)日：2006-01-19

申请号：US10530689

申请日：2003-08-13

申请人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer

发明人： Ulrich Weber ,  Alexander Kohl ,  Hubert Holderer

IPC分类号： G02B7/02

CPC分类号： G03F9/7096 ,  G02B7/004 ,  G02B7/023 ,  G03F7/70833

摘要： An objective, in particular a projection objective in microlithography for producing semiconductor components, is assembled from a number of individual housing structures (4, 5), optical elements being arranged in each housing structure (4, 5), and a number of optical axes (15, 16, 18, 35) being formed by the housing structures (4, 5). At least one first housing structure (4) is provided with seats (22, 23, 24, 25) on which one or more further housing structures (5) and/or optical subassemblies (6, 8, 11, 14) are adjusted and are connected to the first housing structure (4).

摘要翻译： 特别是用于制造半导体部件的微光刻中的投影物镜的目的是从多个单独的外壳结构（4,5）组装，设置在每个外壳结构（4,5）中的光学元件，以及多个光轴 （15,16,18，35）由所述壳体结构（4,5）形成。 至少一个第一壳体结构（4）设置有座（22,23,24,25），其上调整了一个或多个另外的壳体结构（5）和/或光学子组件（6,8,11,14），并且 连接到第一壳体结构（4）。

公开(公告)号：US20050264786A1

公开(公告)日：2005-12-01

申请号：US11101235

申请日：2005-04-07

申请人： Martin Brunotte ,  Jurgen Hartmaier ,  Hubert Holderer ,  Winfried Kaiser ,  Alexander Kohl ,  Jens Kugler ,  Manfred Maul ,  Christian Wagner

发明人： Martin Brunotte ,  Jurgen Hartmaier ,  Hubert Holderer ,  Winfried Kaiser ,  Alexander Kohl ,  Jens Kugler ,  Manfred Maul ,  Christian Wagner

IPC分类号： G02B7/02 ,  G02B1/02 ,  G02B5/30 ,  G03F7/20 ,  H01L21/027 ,  G03B27/54

CPC分类号： G02B1/08 ,  G02B1/02 ,  G02B5/3083 ,  G03F7/70241 ,  G03F7/70825 ,  G03F7/70966

摘要： A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.