ELECTROSTATIC DISCHARGE PROTECTION DEVICE INCLUDING PARASITIC MOSFET FORMED USING TRENCH

    公开(公告)号:US20240170478A1

    公开(公告)日:2024-05-23

    申请号:US18058318

    申请日:2022-11-23

    CPC classification number: H01L27/0274

    Abstract: In one aspect, a semiconductor device includes a first region, a second region and a trench separating the first and the second regions. The trench includes a trench liner that includes a dielectric, and a semiconductor material surrounded by the trench liner. The first region includes a first buried layer implanted in a substrate, a first stack of layers that includes a first middle layer located above the first buried layer, a first well located on and in contact with the first middle layer and a second well in contact with the first well. The second region includes a second stack of layers. In response to a voltage difference between the first and the second regions exceeding a threshold voltage, a conduction current is formed. A distance of the first stack of layers to the trench controls the conduction current to activate a transistor to function as a voltage clamp.

    Double-diffused metal-oxide-semiconductor transistor including a recessed dielectric

    公开(公告)号:US12249646B2

    公开(公告)日:2025-03-11

    申请号:US17695029

    申请日:2022-03-15

    Abstract: In one aspect, a double-diffused metal oxide semiconductor (DMOS) includes a region of a semiconductor having a first region of a semiconductor having a first-type dopant, a first well having a second-type dopant, a dielectric within the first well, the dielectric having a bottom surface and a top surface opposite the bottom surface, a gate disposed on the top surface of the dielectric. The gate, the dielectric and the first well are configured to form a first reduced surface field (RESURF). The bottom surface of the dielectric has a first portion and a second portion, and the first portion of the bottom surface of the dielectric is closer to the top surface of the dielectric than the second portion of the bottom surface of the dielectric.

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