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1.发明申请公开(公告)号：US20070287081A1
公开(公告)日：2007-12-13
申请号：US11695469
申请日：2007-04-02
IPC分类号： G03F9/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/703 , G03F7/70633 , G03F7/70783 , G03F9/7003 , G03F9/7092
摘要： The present invention is directed towards a method for determining deformation parameters that a patterned device would undergo to minimize dimensional variations between a recorded pattern thereon and a reference pattern, the method including, inter alia, comparing spatial variation between features of the recorded pattern with respect to corresponding features of the reference pattern; and determining deformation forces to apply to the patterned device to attenuate the dimensional variations, with the forces having predetermined constraints, wherein a summation of a magnitude of the forces is substantially zero and a summation of moment of the forces is substantially zero.
摘要翻译： 本发明涉及一种用于确定图案化装置将经历以使其上的记录图案与参考图案之间的尺寸变化最小化的变形参数的方法，该方法尤其包括将记录图案的特征与相对于 参考图案的相应特征; 以及确定施加到所述图案化装置上的变形力以衰减所述尺寸变化，其中所述力具有预定的约束，其中所述力的大小的总和基本上为零，并且所述力的力矩的总和基本上为零。
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公开(公告)号：US20060172549A1
公开(公告)日：2006-08-03
申请号：US11108208
申请日：2005-04-18
申请人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
发明人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/6875 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/6838 , Y10S977/887
摘要： The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.
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3.发明申请公开(公告)号：US20060001857A1
公开(公告)日：2006-01-05
申请号：US11142839
申请日：2005-06-01
IPC分类号： G03B27/58
CPC分类号： G03F7/0002 , B82Y10/00
摘要： The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
摘要翻译： 本发明涉及一种改变基底的尺寸的系统，例如具有图案化模具的模板。 为此，系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员 以及致动器子组件，其通过柔性构件弹性地联接到基板卡盘。 所述致动器组件包括多个杠杆子组件，其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。 多个杠杆组件中的一个适于改变主体和相对主体之间的距离。 以这种方式，可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。 柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。
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4.发明申请System for magnification and distortion correction during nano-scale manufacturing 审中-公开纳米尺寸制造中的放大和失真校正系统公开(公告)号：US20050270516A1
公开(公告)日：2005-12-08
申请号：US10999898
申请日：2004-11-30
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03B27/58
摘要： The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
摘要翻译： 本发明涉及一种改变基底的尺寸的系统，例如具有图案化模具的模板。 为此，系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员 以及致动器子组件，其通过柔性构件弹性地联接到基板卡盘。 所述致动器组件包括多个杠杆子组件，其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。 多个杠杆组件中的一个适于改变主体和相对主体之间的距离。 以这种方式，可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。 柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。
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5.发明申请公开(公告)号：US20050269745A1
公开(公告)日：2005-12-08
申请号：US11142834
申请日：2005-06-01
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03B27/58
摘要： The present invention is directed toward a method to vary dimensions of a substrate supported by a chuck. The method includes applying compressive forces to the substrate with the actuator assembly while facilitating movement of the actuator assembly with respect to the substrate to minimize reactive forces generated in response to the compressive forces being sensed by the chuck.
摘要翻译： 本发明涉及一种改变由卡盘支撑的基底的尺寸的方法。 该方法包括使用致动器组件向基板施加压缩力，同时促进致动器组件相对于基板的移动，以最小化响应于卡盘感测到的压缩力产生的反作用力。
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6.发明申请公开(公告)号：US20060001194A1
公开(公告)日：2006-01-05
申请号：US11142808
申请日：2005-06-01
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03B27/58
摘要： The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting Forces sensed by the substrate chuck generated in response to the compressive forces.
摘要翻译： 本发明涉及一种改变基底的尺寸的系统，例如具有图案化模具的模板。 为此，系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员 以及致动器子组件，其通过柔性构件弹性地联接到基板卡盘。 所述致动器组件包括多个杠杆子组件，其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。 多个杠杆组件中的一个适于改变主体和相对主体之间的距离。 以这种方式，可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。 柔性构件被构造成衰减由响应于压缩力产生的衬底卡盘感测到的结果力的大小。
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7.发明申请公开(公告)号：US20050082253A1
公开(公告)日：2005-04-21
申请号：US10687562
申请日：2003-10-16
IPC分类号： B05D20060101 , B05D1/04 , C23F1/00 , G03F7/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： The present invention comprises a method for applying a liquid, such as imprinting material, to a substrate that features use of an electromagnetic field to rapidly spread the liquid over a desired portion of the substrate, while confining the same to the desired region.
摘要翻译： 本发明包括用于将液体（例如压印材料）施加到特征为使用电磁场的衬底的方法，以将液体快速地扩散到衬底的期望部分上，同时将其限定在所需区域。
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8.发明申请System and method for improvement of alignment and overlay for microlithography 有权用于微光刻的对准和覆盖的改进的系统和方法公开(公告)号：US20050271955A1
公开(公告)日：2005-12-08
申请号：US11143076
申请日：2005-06-02
CPC分类号： G03F7/70783 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/703 , G03F7/70633 , G03F9/7003 , G03F9/7092
摘要： The present invention provides a method for determining the forces to be applied to a substrate in order to deform the same and correct for overlay misalignment.
摘要翻译： 本发明提供了一种用于确定施加到基底上的力以使其变形并且对于重叠失准进行校正的方法。
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公开(公告)号：US20050275251A1
公开(公告)日：2005-12-15
申请号：US11142838
申请日：2005-06-01
CPC分类号： G03F7/0002 , B29C43/021 , B29C2043/025 , B29C2043/5858 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of flexure arms is connected between the support body and the floating body to transfer a load therebetween in parallel. To that end, the flexure arms have first and second sets of flexure joints. The first set of flexure joints facilitate rotational movement of said flexure arm about a first axis extending along a first direction. The second set of flexure joints are arranged to facilitate rotational movement of the flexure arm about a second axis, extending along a second direction that is transverse to the first direction. The flexure joints are revolute joints.
摘要翻译： 本发明涉及一种包括支撑体，浮体和多个弯曲臂的柔性装置。 多个挠曲臂中的每一个连接在支撑体和浮体之间，以在它们之间平行地传送负载。 为此，弯曲臂具有第一组和第二组挠曲接头。 第一组弯曲接头便于围绕围绕第一方向延伸的第一轴线的所述弯曲臂的旋转运动。 第二组弯曲接头被布置成便于弯曲臂围绕第二轴线的旋转运动，第二轴线沿着横向于第一方向的第二方向延伸。 挠性接头是旋转接头。
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10.发明申请Method and system to control movement of a body for nano-scale manufacturing 审中-公开用于控制身体运动的方法和系统用于纳米级制造公开(公告)号：US20060005657A1
公开(公告)日：2006-01-12
申请号：US11142825
申请日：2005-06-01
IPC分类号： G05G11/00
CPC分类号： G03F7/0002 , B29C43/021 , B29C59/022 , B29C2043/025 , B29C2043/5858 , B29C2059/023 , B82Y10/00 , B82Y40/00 , Y10T74/20341
摘要： The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extends parallel to the plane in which the body translates. This facilitates proper orientation of the body with respect to a surface spaced-apart therefrom.
摘要翻译： 本发明涉及一种控制耦合到致动系统的主体的运动的方法和系统，其特征在于，通过相对于两个间隔开的轴线在致动系统中施加角运动而延伸的平面中的本体运动。 具体地说，在两个间隔开的平面中产生旋转运动，其中一个平行于主体平移的平面。 这有助于身体相对于与其间隔开的表面的适当取向。
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