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    SYSTEMS AND METHODS FOR NITRIDE-CONTAINING FILM REMOVAL
    2.
    发明申请
    SYSTEMS AND METHODS FOR NITRIDE-CONTAINING FILM REMOVAL 有权

    公开(公告)号：US20220254648A1

    公开(公告)日：2022-08-11

    申请号：US17173329

    申请日：2021-02-11

    申请人： Applied Materials, Inc.

    发明人： Baiwei Wang ,  Oliver Jan ,  Rohan Puligoru Reddy ,  Xiaolin Chen ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/3213 ,  H01J37/32

    摘要： Exemplary etching methods may include flowing an oxygen-containing precursor into a remote plasma region of a semiconductor processing chamber while striking a plasma to produce oxygen plasma effluents. The methods may include contacting a substrate housed in a processing region with the oxygen plasma effluents. The substrate may define an exposed region of titanium nitride. The contacting may produce an oxidized surface on the titanium nitride. The methods may include flowing a halogen-containing precursor into a remote plasma region of a semiconductor processing chamber while striking a plasma to produce halogen plasma effluents. The methods may include contacting the oxidized surface on the titanium nitride with the halogen plasma effluents. The methods may include removing the oxidized surface on the titanium nitride.

    METAL ETCH IN HIGH ASPECT-RATIO FEATURES
    4.
    发明申请
    METAL ETCH IN HIGH ASPECT-RATIO FEATURES 有权

    公开(公告)号：US20220359214A1

    公开(公告)日：2022-11-10

    申请号：US17307636

    申请日：2021-05-04

    申请人： Applied Materials, Inc.

    发明人： Baiwei Wang ,  Xiaolin C. Chen ,  Rohan Puligoru Reddy ,  Oliver Jan ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/3065 ,  H01L27/1157 ,  H01J37/305

    摘要： Exemplary methods of etching may include flowing a fluorine-containing precursor and a secondary gas into a processing region of a semiconductor processing chamber. The secondary gas may be or include oxygen or nitrogen. A flow rate ratio of the fluorine-containing precursor to the secondary gas may be greater than or about 1:1. The methods may include contacting a substrate with the fluorine-containing precursor and the secondary gas. The substrate may include an exposed metal. The substrate may define a high aspect-ratio structure. The methods may include etching the exposed metal within the high aspect-ratio structure.

    SELECTIVE REMOVAL OF TRANSITION METAL NITRIDE MATERIALS
    6.
    发明申请
    SELECTIVE REMOVAL OF TRANSITION METAL NITRIDE MATERIALS 有权

    公开(公告)号：US20230010978A1

    公开(公告)日：2023-01-12

    申请号：US17373161

    申请日：2021-07-12

    申请人： Applied Materials, Inc.

    发明人： Baiwei Wang ,  Xiaolin C. Chen ,  Rohan Puligoru Reddy ,  Oliver Jan ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/3213 ,  H01J37/32

    摘要： Exemplary etching methods may include flowing an oxygen-containing precursor into a processing region of a semiconductor processing chamber. The methods may include contacting a substrate housed in the processing region with the oxygen-containing precursor. The substrate may include an exposed region of a transition metal nitride and an exposed region of a metal. The contacting may form an oxidized portion of the transition metal nitride and an oxidized portion of the metal. The methods may include forming a plasma of a fluorine-containing precursor and a hydrogen-containing precursor to produce fluorine-containing plasma effluents. The methods may include removing the oxidized portion of the transition metal nitride to expose a non-oxidized portion of the transition metal nitride. The methods may include forming a plasma of a chlorine-containing precursor to produce chlorine-containing plasma effluents. The methods may include removing the non-oxidized portion of the transition metal nitride.

    HIGHLY CONFORMAL METAL ETCH IN HIGH ASPECT RATIO SEMICONDUCTOR FEATURES
    7.
    发明公开
    HIGHLY CONFORMAL METAL ETCH IN HIGH ASPECT RATIO SEMICONDUCTOR FEATURES 审中-公开

    公开(公告)号：US20230386830A1

    公开(公告)日：2023-11-30

    申请号：US17827356

    申请日：2022-05-27

    申请人： Applied Materials, Inc.

    发明人： Xiaolin C. Chen ,  Baiwei Wang ,  Rohan Puligoru Reddy ,  Wanxing Xu ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/02 ,  H01L29/423 ,  H01L29/49 ,  H01L21/311

    CPC分类号： H01L21/02244 ,  H01L29/42392 ,  H01L29/495 ,  H01L21/31122

    摘要： Exemplary semiconductor processing methods may include providing an oxygen-containing precursor to a semiconductor processing chamber, where a substrate may be positioned. The substrate may include a trench formed between two columns and molybdenum-containing metal regions in a plurality of recesses formed in at least one of the columns. At least two of the molybdenum-containing metal regions may be connected by a molybdenum-containing first liner formed on at least a portion of a sidewall of the trench. The methods may include forming a plasma of the oxygen-containing precursor. The methods may include contacting the molybdenum-containing first liner with plasma effluents of the oxygen-containing precursor, thereby forming an oxidized portion of molybdenum. The methods may include providing a halide precursor. The methods may include contacting oxidized portion of the molybdenum with plasma effluents of the halide precursor, thereby removing the oxidized portion of molybdenum from the sidewall of the trench.

    METAL OXIDE DIRECTIONAL REMOVAL
    8.
    发明申请
    METAL OXIDE DIRECTIONAL REMOVAL 有权

    公开(公告)号：US20230015080A1

    公开(公告)日：2023-01-19

    申请号：US17376337

    申请日：2021-07-15

    申请人： Applied Materials, Inc.

    发明人： Baiwei Wang ,  Rohan Puligoru Reddy ,  Xiaolin C. Chen ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/311 ,  H01J37/32

    摘要： Exemplary etching methods may include modifying an exposed surface of a layer of metal oxide on a substrate housed in a processing region of a semiconductor processing chamber to produce a modified portion of metal oxide. The methods may include contacting the modified portion of metal oxide with a fluorine-containing precursor. The contacting may produce a metal oxy-fluoride material. The methods may include flowing an etchant precursor into the processing region. The methods may include contacting the metal oxy-fluoride material with the etchant precursor. The methods may include removing the metal oxy-fluoride material.

    SELECTIVE REMOVAL OF RUTHENIUM-CONTAINING MATERIALS
    9.
    发明申请
    SELECTIVE REMOVAL OF RUTHENIUM-CONTAINING MATERIALS 有权

    公开(公告)号：US20220344172A1

    公开(公告)日：2022-10-27

    申请号：US17240149

    申请日：2021-04-26

    申请人： Applied Materials, Inc.

    发明人： Baiwei Wang ,  Xiaolin C. Chen ,  Rohan Puligoru Reddy ,  Oliver Jan ,  Zhenjiang Cui ,  Anchuan Wang

    IPC分类号： H01L21/3213 ,  H01L21/306 ,  H01L21/02 ,  C23F4/02

    摘要： Exemplary etching methods may include flowing an oxygen-containing precursor into a processing region of a semiconductor processing chamber. The methods may include contacting a substrate housed in the processing region with the oxygen-containing precursor. The substrate may include an exposed region of ruthenium, and the contacting may produce ruthenium tetroxide. The methods may include vaporizing the ruthenium tetroxide from a surface of the exposed region of ruthenium. An amount of oxidized ruthenium may remain. The methods may include contacting the oxidized ruthenium with a hydrogen-containing precursor. The methods may include removing the oxidized ruthenium.