公开(公告)号：US20210035767A1

公开(公告)日：2021-02-04

申请号：US16525465

申请日：2019-07-29

申请人： Applied Materials, Inc.

发明人： Gang Grant PENG ,  Wai-Fan YAU ,  David W. GROECHEL ,  Frank F. HOOSHDARAN ,  Tom K. CHO ,  Yao-Hung YANG

IPC分类号： H01J9/24 ,  B23K26/082 ,  B23K26/12 ,  B23K26/352

摘要： Embodiments of the present disclosure generally relate to a method for forming and treating a component in semiconductor manufacturing. In one embodiment, a method for treating a chamber component used in vacuum processing includes obtaining the chamber component including a recess formed in a surface of the chamber component, the surface being fabricated from a metal, and the recess has a depth ranging from about 0.5 mm to about 10 mm and a width ranging from about 1 mm to about 15 mm. The method further includes polishing the bottom surface of the recess using a laser to form a polished bottom surface having an Ra number of 1 micron or less. The laser can achieve high quality surface finishing.

公开(公告)号：US20180104767A1

公开(公告)日：2018-04-19

申请号：US15729360

申请日：2017-10-10

申请人： Applied Materials, Inc.

发明人： Gang PENG ,  David W. GROECHEL

IPC分类号： B23K26/00 ,  B23K26/12 ,  H01J37/32

CPC分类号： B23K26/355 ,  B23K26/123 ,  B23K2103/56 ,  H01J37/32504

摘要： A method of providing a texture to a surface of a component for use in a semiconductor processing chamber is provided. The method includes directing a beam of photons at the surface of the component and scanning the beam of photons across a first region of the surface of the component to form a plurality of features on the surface within the first region. The features that are formed are depressions, protuberances, or combinations thereof.

公开(公告)号：US20220238355A1

公开(公告)日：2022-07-28

申请号：US17161557

申请日：2021-01-28

申请人： Applied Materials, Inc.

发明人： Richard Wells PLAVIDAL ,  Scott OSTERMAN ,  David W. GROECHEL ,  Gang Grant PENG ,  John Z. SMITH

IPC分类号： H01L21/67 ,  B08B3/02 ,  H01L21/02

摘要： Embodiments of a methods and cleaning systems for cleaning components for use in substrate processing equipment are provided herein. In some embodiments, a cleaning system includes a boiler having a heater configured to heat a fluid; a clean chamber fluidly coupled to the boiler via at least one of a gas line and a liquid line, wherein the clean chamber includes one or more fixtures in an interior volume therein for holding at least one component to be cleaned, and wherein the clean chamber includes a heater for heating the interior volume; and an expansion chamber fluidly coupled to the clean chamber via a release line for evacuating the clean chamber, wherein the release line includes a release valve to selectively open or close a flow path between the expansion chamber and the clean chamber, and wherein the expansion chamber includes a chiller and a vacuum port.

公开(公告)号：US20190352775A1

公开(公告)日：2019-11-21

申请号：US16412798

申请日：2019-05-15

申请人： Applied Materials, Inc.

发明人： Gang PENG ,  Halbert CHONG ,  Marcus PEREIRA ,  David W. GROECHEL

IPC分类号： C23C16/44 ,  H01L21/67 ,  H01J37/32 ,  B08B7/02

摘要： Embodiments described herein relate to a gas line cleaning system and a method of cleaning gas lines. The gas line cleaning system includes a connector having a first end and a second end, and a fluid system. The fluid system includes a fluid source configured to flow a fluid through a fluid conduit connected to the first end, and an ultrasonic transducer coupled to the fluid conduit configured to apply an ultrasonic energy to the fluid conduit to agitate the fluid. The ultrasonic energy creates a mechanical energy that reverberates in the fluid conduit and propagates into the fluid to remove particles that may have formed on an inside surface of a gas line connected to the second end and carry away particles inside the gas line.

公开(公告)号：US20200255946A1

公开(公告)日：2020-08-13

申请号：US16778642

申请日：2020-01-31

申请人： Applied Materials, Inc.

发明人： Gang Grant PENG ,  David W. GROECHEL ,  Han WANG

IPC分类号： C23C16/56 ,  H01J37/32 ,  C23C16/40 ,  H01J37/34

摘要： One example of the disclosure provides a method of fabricating a chamber component with a coating comprising a yttrium containing material with desired film properties. In one example, the method of fabricating a coating material includes providing a base structure comprising an aluminum containing material. The method further includes forming a coating layer that includes a yttrium containing material on the base structure. The method also includes thermal treating the coating layer to form a treated coating layer.

公开(公告)号：US20180257172A1

公开(公告)日：2018-09-13

申请号：US15955503

申请日：2018-04-17

申请人： Applied Materials, Inc.

发明人： Gang PENG ,  David W. GROECHEL ,  Jenn C. CHOW ,  Tuochuan HUANG ,  Han WANG

IPC分类号： B23K26/00 ,  B23K26/12 ,  H01J37/32

CPC分类号： B23K26/355 ,  B23K26/123 ,  H01J37/32477 ,  H01J37/32504

摘要： A system to provide a texture to a surface of a component for use in a semiconductor processing chamber is provided. The system includes an enclosure comprising a processing region, a support disposed in the processing region, a photon light source to generate a stream of photons, an optical module operably coupled to the photon light source, and a lens. The optical module includes a beam modulator to create a beam of photons from the stream of photons generated from the photon light source, and a beam scanner to scan the beam of photons across the surface of the component. The lens is used to receive the beam of photons from the beam scanner and distribute the beam of photons at a wavelength in a range between about 345 nm and about 1100 nm across the surface of the component to form a plurality of features on the component.

公开(公告)号：US20230023764A1

公开(公告)日：2023-01-26

申请号：US17786520

申请日：2020-12-15

申请人： APPLIED MATERIALS, INC.

发明人： David W. GROECHEL ,  Michael R. RICE ,  Gang Grant PENG ,  Rui CHENG ,  Zubin HUANG ,  Han WANG ,  Karthik JANAKIRAMAN ,  Diwakar KEDLAYA ,  Paul L. BRILLHART ,  Abdul Aziz KHAJA

IPC分类号： H01L21/285 ,  H01L21/67

摘要： Methods and apparatus for surface profiling and texturing of chamber components for use in a process chamber, such surface-profiled or textured chamber components, and method of use of same are provided herein. In some embodiments, a method includes measuring a parameter of a reference substrate or a heated pedestal using one or more sensors and modifying a surface of a chamber component physically based on the measured parameter.

公开(公告)号：US20210249280A1

公开(公告)日：2021-08-12

申请号：US17051071

申请日：2019-05-02

申请人： Applied Materials, Inc.

发明人： Tuochuan HUANG ,  Gang PENG ,  David W. GROECHEL ,  Vijay D. PARKHE ,  Shinnosuke KAWAGUCHI ,  David BENJAMINSON

IPC分类号： H01L21/67 ,  H01L21/683 ,  B08B3/12

摘要： Embodiments described herein relate a cleaning fixture and method to prevent chemical solutions from contacting the various substrate supporting member features and penetrating into the holes and the metal plate of the substrate supporting surface. The cleaning fixture includes a mounting plate having a plurality of thru-holes arranged on a bolt circle and configured to align with a plurality of thread holes disposed in an electrostatic chuck, a recess formed in the mounting plate, and a gas port formed through the mounting plate. A sealed plenum is formed between the recess of the mounting plate and a lower surface of the electrostatic chuck when the electrostatic chuck is coupled to the mounting plate. The gas port is fluidly coupled to the sealed plenum.

公开(公告)号：US20210156789A1

公开(公告)日：2021-05-27

申请号：US16690576

申请日：2019-11-21

申请人： APPLIED MATERIALS, INC.

发明人： Gang Grant PENG ,  Robert Douglas MIKKOLA ,  David BRITZ ,  Lance SCUDDER ,  David W. GROECHEL

IPC分类号： G01N17/02 ,  G01N17/00 ,  G01N27/00 ,  G01N27/02

摘要： A method for detecting corrosion on a conductive object includes submerging a surface of the conductive object at least partially in an aqueous solution, flowing current through the surface of the conductive object by forming a voltage differential across the surface, varying the voltage differential across the surface while monitoring the current through the surface of the conductive object, determining a total charge corresponding to a corrosion level of the surface of the conductive object based on current versus voltage levels. The corrosion level may further be utilized in selecting a cleaning process to remediate the corrosion of the surface based on the corrosion level and in applying a protective corrosion barrier to on at least part of the surface after the cleaning process.

公开(公告)号：US20230047031A1

公开(公告)日：2023-02-16

申请号：US17977019

申请日：2022-10-31

申请人： Applied Materials, Inc.

发明人： Gang Grant PENG ,  David W. GROECHEL ,  Han WANG

IPC分类号： C23C16/56 ,  H01J37/34 ,  C23C16/40 ,  H01J37/32

摘要： One example of the disclosure provides a method of fabricating a chamber component with a coating comprising a yttrium containing material with desired film properties. In one example, the method of fabricating a coating material includes providing a base structure comprising an aluminum containing material. The method further includes forming a coating layer that includes a yttrium containing material on the base structure. The method also includes thermal treating the coating layer to form a treated coating layer.