Abstract:
Coatings of refractory metal oxides are provided over the surface of semiconductor devices for chemical and mechanical passivation. The oxide coatings are formed by depositing a layer of refractory metal and oxidizing in situ. In a specific example, the refractory metal is zirconium.
Abstract:
The specification describes an improved barrier layer device which utilizes an oxide guard ring around the barrier layer. An insulating guard ring is shown to be superior to the PN junction guard ring of the prior art. Manufacturing methods for forming oxide guard rings are also discussed. These involve forming the oxide layer by exposure to an oxygen plasma.
Abstract:
An insulated gate field-effect transistor is made which utilizes both Schottky barrier connections and ion-implanted zones. The resultant structure incorporates source and drain zones, which are formed by ion implantation and whose spacing is fixed by the gate electrode, and source and drain electrodes which make ohmic connection to the implanted source and drain zones and rectifying connections to unimplanted material.
Abstract:
PINHOLE SHORTS ARE ELIMINATED IN AN AIR-ISOLATED CROSSOVER BY INCLUDING A COMPRESSIVELY STRESSED LAYER IN THE UPPER CONDUCTOR. WHEN A FILLER MATERIAL BETWEEN THE UPPER AND LOWER CONDUCTORS IS ETCHED AWAY, THE STRESSED LAYER WILL EXPAND, CAUSING THE UPPER CONDUCTOR TO ARCH AWAY FROM THE LOWER CONDUCTOR AND BREAKING AND PINHOLE SHORTS BETWEEN THE TWO CONDUCTORS.
Abstract:
1,082,319. Semi-conductor devices. WESTERN ELECTRIC CO. Inc. Oct. 14, 1964 [Dec. 17, 1963; Feb. 25, 1964; Aug. 7, 1964], No. 8614/67. Divided out of 1,082,317. Heading H1K. An integrated circuit consists of an array of substrate bodies (e.g. of semi-conductor material, though a thin-film circuit in which the substrate is of carbon or ceramic material is also envisaged), the bodies being joined by a pattern of metal contacts which extend substantially in one plane over the surfaces of the bodies and provide bridges between them. The bridging portions are of sufficient thickness to provide the only mechanical support necessary to maintain the bodies in their appropriate relative positions in the array. Each separate body may contain one or more elements of the circuit. The elements of the circuit are first formed (e.g. by conventional diffusion techniques) in a single substrate member and metallic deposits 117, 118 &c. are then laid down to provide the interconnections between the various elements. Such deposits may consist of sequentially deposited " active " and " contact " metals as described in Specification 1,082,317. The portions of these deposits which will ultimately provide the bridges 119, 120 &c. between the separate bodies are then built up by further deposition, e.g. to a thickness of 100,000 Š as against 1000 to 5000 Š for the deposits elsewhere. The electrode portion (the initial deposits) may be of platinum on titanium and the thickening produced by masked deposition of gold. The substrate material underlying the bridging portions is then removed, e.g. by etching with wax masking-though mechanical abrasion or ionic bombardment are also mentioned in this connection.
Abstract:
The specification describes an improved barrier layer device which utilizes an oxide guard ring around the barrier layer. An insulating guard ring is shown to be superior to the PN junction guard ring of the prior art. Manufacturing methods for forming oxide guard rings are also discussed. These involve forming the oxide layer by exposure to an oxygen plasma.