DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS
    1.
    发明申请
    DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS 有权
    执行等离子体辅助工艺的装置

    公开(公告)号:US20100116644A1

    公开(公告)日:2010-05-13

    申请号:US12691408

    申请日:2010-01-21

    IPC分类号: C23C14/35

    摘要: A device for carrying out a plasma enhanced process includes, within a vacuum chamber, at least one magnetron electrode (32) constituting an unbalanced magnetron having a flat magnetron face (20) with peripheral and central magnetic poles of opposite polarities connected to a source (34) of alternating voltage. The device further includes a device for positioning a substrate (25), the substrate having a surface to be treated facing the magnetron face (20), and a gas supply device for supplying a process gas or process gas mixture to the space between the magnetron face (20) and the treated surface. The distance between the magnetron face (20) and the treated surface is adapted to the magnetic field created by the magnetron electrode (32) such that there is a visible plasma band running between darker tunnels formed by magnetic field lines extending between peripheral and central magnetic poles of the magnetron face (20) and the treated surface, the plasma band having a minimum width but having homogeneous brightness towards the treated surface.

    摘要翻译: 用于进行等离子体增强处理的装置包括在真空室内的构成不平衡磁控管的至少一个磁控管电极(32),所述磁控管具有平坦的磁控管面(20),其具有连接到源极的相反极性的外围和中心磁极 34)交流电压。 所述装置还包括用于定位衬底(25)的装置,所述衬底具有面对磁控管面(20)的待处理表面,以及气体供应装置,用于将处理气体或处理气体混合物供应到磁控管 面(20)和处理过的表面。 磁控管面(20)和被处理表面之间的距离适应于由磁控管电极(32)产生的磁场,使得存在可见的等离子体带,该等离子带在由周边和中心磁体之间延伸的磁场线形成的较暗的隧道之间运行 磁控管面(20)和被处理表面的极点,等离子体带具有最小宽度但具有朝向被处理表面的均匀亮度。

    DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS
    2.
    发明申请
    DEVICE FOR CARRYING OUT A PLASMA-ASSISTED PROCESS 审中-公开
    执行等离子体辅助工艺的装置

    公开(公告)号:US20080060933A1

    公开(公告)日:2008-03-13

    申请号:US11934939

    申请日:2007-11-05

    IPC分类号: C23C14/35

    摘要: A device for carrying out a plasma enhanced process includes, within a vacuum chamber, at least one magnetron electrode (32) constituting an unbalanced magnetron having a flat magnetron face (20) with peripheral and central magnetic poles of opposite polarities connected to a source (34) of alternating voltage. The device further includes a device for positioning a substrate (25), the substrate having a surface to be treated facing the magnetron face (20), and a gas supply device for supplying a process gas or process gas mixture to the space between the magnetron face (20) and the treated surface. The distance between the magnetron face (20) and the treated surface is adapted to the magnetic field created by the magnetron electrode (32) such that there is a visible plasma band running between darker tunnels formed by magnetic field lines extending between peripheral and central magnetic poles of the magnetron face (20) and the treated surface, the plasma band having a minimum width but having homogeneous brightness towards the treated surface.

    摘要翻译: 用于进行等离子体增强处理的装置包括在真空室内的构成不平衡磁控管的至少一个磁控管电极(32),所述磁控管具有平坦的磁控管面(20),其具有连接到源极的相反极性的外围和中心磁极( 34)交流电压。 所述装置还包括用于定位衬底(25)的装置,所述衬底具有面对磁控管面(20)的待处理表面,以及气体供应装置,用于将处理气体或处理气体混合物供应到磁控管 面(20)和处理过的表面。 磁控管面(20)和被处理表面之间的距离适应于由磁控管电极(32)产生的磁场,使得存在可见的等离子体带,该等离子带在由周边和中心磁体之间延伸的磁场线形成的较暗的隧道之间运行 磁控管面(20)和被处理表面的极点,等离子体带具有最小宽度但具有朝向被处理表面的均匀亮度。

    Packaging laminate with gas and aroma barrier properties
    4.
    发明授权
    Packaging laminate with gas and aroma barrier properties 失效
    包装层压板具有气体和香气阻隔性能

    公开(公告)号:US06338870B1

    公开(公告)日:2002-01-15

    申请号:US09544220

    申请日:2000-04-07

    申请人: Bertrand Jaccoud

    发明人: Bertrand Jaccoud

    IPC分类号: B05D312

    摘要: A packaging laminate (10) including a substrate film (15) coated with a carbon containing silicon oxide layer (16, 17) on both surfaces is disclosed herein. A method for producing the laminate (10), and blanks and packages fabricated from the laminate are also disclosed herein. The PECVD process of the present invention strains the substrate film (15) during deposition thereby creating a very thin oxide layer with superior durability, oxygen and aroma barrier properties. The carbon-containing silicon oxide coating (16, 17) has a stoichiometry of SiOxCy in which x is witin the range of 1.5-2.2 and y is within the range of 0.15-0.80. The substrate film (15) may include a core layer (12) of a material selected from the group consisting of paper, paperboard, a foamed core, polyethylene terephtalate, polyamide, polyethylene and polypropylene.

    摘要翻译: 本文公开了包括在两面上涂覆有碳氧化硅层(16,17)的基底膜(15)的包装层压体(10)。 本发明还公开了一种层叠体(10)的制造方法以及由层压体制造的坯料和包装件。 本发明的PECVD方法在沉积期间使基底膜(15)变形,从而形成具有优异的耐久性,氧气和香气阻隔性能的非常薄的氧化物层。 含碳氧化硅涂层(16,17)具有SiO xCy的化学计量,其中x在1.5-2.2的范围内,y在0.15-0.80的范围内。 基底膜(15)可以包括选自纸,纸板,发泡芯,聚对苯二甲酸乙二醇酯,聚酰胺,聚乙烯和聚丙烯的材料的芯层(12)。

    Packaging laminate with gas and aroma barrier properties
    8.
    发明授权
    Packaging laminate with gas and aroma barrier properties 失效
    包装层压板具有气体和香气阻隔性能

    公开(公告)号:US07115310B2

    公开(公告)日:2006-10-03

    申请号:US10692851

    申请日:2003-10-27

    申请人: Bertrand Jaccoud

    发明人: Bertrand Jaccoud

    摘要: A packaging laminate (10) including a substrate film (15) coated with a carbon containing silicon oxide layer (16, 17) on both surfaces is disclosed herein. A method for producing the laminate (10), and blanks and packages fabricated from the laminate are also disclosed herein. The PECVD process of the present invention strains the substrate film (15) during deposition thereby creating a very thin oxide layer with superior durability, oxygen and aroma barrier properties. The carbon-containing silicon oxide coating (16, 17) has a stoichiometry of SiOxCy in which x is witin the range of 1.5–2.2 and y is within the range of 0.15–0.80. The substrate film (15) may include a core layer (12) of a material selected from the group consisting of paper, paperboard, a foamed core, polyethylene terephtalate, polyamide, polyethylene and polypropylene.

    摘要翻译: 本文公开了包括在两面上涂覆有碳氧化硅层(16,17)的基底膜(15)的包装层压体(10)。 本发明还公开了一种层叠体(10)的制造方法以及由层压体制造的坯料和包装件。 本发明的PECVD方法在沉积期间使基底膜(15)变形,从而形成具有优异的耐久性,氧气和香气阻隔性能的非常薄的氧化物层。 含碳氧化硅涂层(16,17)具有SiO xCy的化学计量,其中x在1.5-2.2的范围内,y在0.15-0.80的范围内。 基底膜(15)可以包括选自纸,纸板,发泡芯,聚对苯二甲酸乙二醇酯,聚酰胺,聚乙烯和聚丙烯的材料的芯层(12)。

    Device for carrying out a plasma-assisted process
    9.
    发明申请
    Device for carrying out a plasma-assisted process 审中-公开
    用于进行等离子体辅助处理的装置

    公开(公告)号:US20060008593A1

    公开(公告)日:2006-01-12

    申请号:US10529531

    申请日:2003-09-09

    IPC分类号: C23C16/00

    摘要: A device for carrying out a plasma enhanced process includes, within a vacuum chamber, at least one magnetron electrode (32) constituting an unbalanced magnetron having a flat magnetron face (20) with peripheral and central magnetic poles of opposite polarities connected to a source (34) of alternating voltage. The device further includes a device for positioning a substrate (25), the substrate having a surface to be treated facing the magnetron face (20), and a gas supply device for supplying a process gas or process gas mixture to the space between the magnetron face (20) and the treated surface. The distance between the magnetron face (20) and the treated surface is adapted to the magnetic field created by the magnetron electrode (32) such that there is a visible plasma band running between darker tunnels formed by magnetic field lines extending between peripheral and central magnetic poles of the magnetron face (20) and the treated surface, the plasma band having a minimum width but having homogeneous brightness towards the treated surface.

    摘要翻译: 用于进行等离子体增强处理的装置包括在真空室内的构成不平衡磁控管的至少一个磁控管电极(32),所述磁控管具有平坦的磁控管面(20),其具有连接到源极的相反极性的外围和中心磁极 34)交流电压。 所述装置还包括用于定位衬底(25)的装置,所述衬底具有面对磁控管面(20)的待处理表面,以及气体供应装置,用于将处理气体或处理气体混合物供应到磁控管 面(20)和处理过的表面。 磁控管面(20)和被处理表面之间的距离适应于由磁控管电极(32)产生的磁场,使得存在可见的等离子体带,该等离子带在由周边和中心磁体之间延伸的磁场线形成的较暗的隧道之间运行 磁控管面(20)和被处理表面的极点,等离子体带具有最小宽度但具有朝向被处理表面的均匀亮度。

    Package possessing superior barrier properties
    10.
    发明授权
    Package possessing superior barrier properties 失效
    包装具有优越的阻隔性能

    公开(公告)号:US5721027A

    公开(公告)日:1998-02-24

    申请号:US736400

    申请日:1996-10-24

    摘要: A package possessing superior tightness properties against gases, in particular oxygen gas, for the distribution of goods. The package, which, for example, may be a plastic bottle, has a coating applied on the outer walls of the package, the coating comprising a silicon oxide compound of the general chemical formula SiO.sub.x, where x may vary from 1.8 to 2.2. The silicon oxide coating is deposited on the package walls by vacuum deposition, preferably chemical plasma vapor deposition (CPVD), by means of which the coating is deposited in the form of a very thin but nevertheless extremely tight continuous coating of a thickness of less than 2000 .ANG.. After one occasion of use, the package may be cleaned using conventional washing and rinsing solutions which efficiently remove the preceding coating, whereafter the package is provided with a new coating prior to a new product filling.

    摘要翻译: 一种具有优异的气体特性的包装,特别是氧气,用于分配货物。 该包装例如可以是塑料瓶,其具有施加在包装外壁上的涂层,该涂层包含一般化学式SiO x的氧化硅化合物,其中x可以在1.8至2.2之间变化。 通过真空沉积,优选化学等离子体气相沉积(CPVD)将氧化硅涂层沉积在封装壁上,通过该沉积(CPVD),涂层以非常薄但仍然非常紧密的连续涂层的形式沉积,厚度小于 2000 ANGSTROM。 在使用一次之后,可以使用常规的洗涤和冲洗溶液来清洁包装,其有效地去除先前的涂层,之后在新产品填充之前在包装上提供新的涂层。