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公开(公告)号：US07521693B2
公开(公告)日：2009-04-21
申请号：US11599935
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Shawn McVey , Johannes Bihr
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Shawn McVey , Johannes Bihr
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07554097B2
公开(公告)日：2009-06-30
申请号：US11599915
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J49/142 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07488952B2
公开(公告)日：2009-02-10
申请号：US11600535
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Lars Markwort , Dirk Aderhold
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Lars Markwort , Dirk Aderhold
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US08110814B2
公开(公告)日：2012-02-07
申请号：US12364259
申请日：2009-02-02
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
摘要翻译： 公开了离子源，系统和方法。
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公开(公告)号：US07557360B2
公开(公告)日：2009-07-07
申请号：US11600861
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Lars Markwort , Dirk Aderhold
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Lars Markwort , Dirk Aderhold
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07511279B2
公开(公告)日：2009-03-31
申请号：US11600250
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07504639B2
公开(公告)日：2009-03-17
申请号：US11600252
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07786452B2
公开(公告)日：2010-08-31
申请号：US11600873
申请日：2006-11-15
CPC分类号： H01J27/26 , H01J37/08 , H01J2237/0807
摘要： Ion sources, systems and methods are disclosed.
摘要翻译： 公开了离子源，系统和方法。
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公开(公告)号：US07557361B2
公开(公告)日：2009-07-07
申请号：US11600874
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , G01N23/2255 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07557359B2
公开(公告)日：2009-07-07
申请号：US11600711
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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