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公开(公告)号：US20120141693A1
公开(公告)日：2012-06-07
申请号：US13356854
申请日：2012-01-24
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/256 , H01J37/28 , H01J37/304 , H01J37/3053 , H01J37/3056 , H01J2237/08 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/31701 , H01J2237/3174 , H01J2237/3175 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
摘要翻译： 公开了离子源，系统和方法。
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公开(公告)号：US07786451B2
公开(公告)日：2010-08-31
申请号：US11599973
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Alexander Groholski , Richard Comunale
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Alexander Groholski , Richard Comunale
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07557358B2
公开(公告)日：2009-07-07
申请号：US11599954
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/02 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07554096B2
公开(公告)日：2009-06-30
申请号：US11599879
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07518122B2
公开(公告)日：2009-04-14
申请号：US11600646
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Ulrich Mantz , Michael Steigerwald
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
摘要翻译： 公开了离子源，系统和方法。
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公开(公告)号：US07495232B2
公开(公告)日：2009-02-24
申请号：US11600515
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US07485873B2
公开(公告)日：2009-02-03
申请号：US11600361
申请日：2006-11-15
申请人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
发明人： Billy W. Ward , John A. Notte, IV , Louis S. Farkas, III , Randall G. Percival , Raymond Hill , Klaus Edinger , Lars Markwort , Dirk Aderhold , Ulrich Mantz
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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公开(公告)号：US08563954B2
公开(公告)日：2013-10-22
申请号：US13336274
申请日：2011-12-23
IPC分类号： H01J49/00
CPC分类号： H01J37/28 , H01J37/05 , H01J37/08 , H01J37/265 , H01J2237/057 , H01J2237/0807 , H01J2237/24514
摘要： Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
摘要翻译： 公开了离子显微镜的方法和系统。 通常，这些系统和方法提供了高离子束稳定性。
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公开(公告)号：US20120097849A1
公开(公告)日：2012-04-26
申请号：US13336274
申请日：2011-12-23
CPC分类号： H01J37/28 , H01J37/05 , H01J37/08 , H01J37/265 , H01J2237/057 , H01J2237/0807 , H01J2237/24514
摘要： Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
摘要翻译： 公开了离子显微镜的方法和系统。 通常，这些系统和方法提供了高离子束稳定性。
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公开(公告)号：US07554097B2
公开(公告)日：2009-06-30
申请号：US11599915
申请日：2006-11-15
CPC分类号： H01J37/08 , B82Y10/00 , B82Y40/00 , H01J27/26 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J49/142 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/3174 , H01J2237/31755
摘要： Ion sources, systems and methods are disclosed.
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