Non-volatile electrical phase change memory device comprising interfacial control layer and method for the preparation thereof
    7.
    发明授权
    Non-volatile electrical phase change memory device comprising interfacial control layer and method for the preparation thereof 有权
    包含界面控制层的非易失性电相变存储器件及其制备方法

    公开(公告)号:US07851778B2

    公开(公告)日:2010-12-14

    申请号:US11805827

    申请日:2007-05-24

    IPC分类号: H01L47/00 H01L21/00

    摘要: The present invention relates to a non-volatile electrical phase change memory device comprising a substrate, a first interlayer dielectric film deposited on the substrate, a bottom electrode layer formed on the first dielectric layer, a second interlayer dielectric film formed on the bottom electrode layer, a phase change material layer deposited on the second interlayer dielectric film, and a top electrode layer formed on said phase change material layer, the bottom electrode layer being brought into contact with the phase change material layer through a contact hole which is formed in the second interlayer dielectric film and filled with the phase change material or bottom electrode material, so that the phase change layer and the bottom electrode layer come into close contact with each other,wherein an interfacial control layer is formed at the interface of the contact hole between the phase change layer and the bottom electrode layer, said interfacial control layer having strong chemical bonds with the phase change material as well as electrical resistivity and thermal conductivity values lower than those of the bottom electrode material.

    摘要翻译: 本发明涉及一种非挥发性电相变存储器件,其包括衬底,沉积在衬底上的第一层间电介质膜,形成在第一介电层上的底部电极层,形成在底部电极层上的第二层间电介质膜 沉积在第二层间电介质膜上的相变材料层和形成在所述相变材料层上的顶部电极层,所述底部电极层通过形成在所述相变材料层中的接触孔与所述相变材料层接触, 第二层间电介质膜,并填充有相变材料或底部电极材料,使得相变层和底部电极层彼此紧密接触,其中界面控制层形成在接触孔的界面处, 相变层和底部电极层,所述界面控制层具有强的作用 与相变材料的化学键以及电阻率和热导率值低于底部电极材料。

    Non-volatile electrical phase change memory device comprising interfacial control layer and method for the preparation thereof
    8.
    发明申请
    Non-volatile electrical phase change memory device comprising interfacial control layer and method for the preparation thereof 有权
    包含界面控制层的非易失性电相变存储器件及其制备方法

    公开(公告)号:US20070272987A1

    公开(公告)日:2007-11-29

    申请号:US11805827

    申请日:2007-05-24

    IPC分类号: H01L29/76 H01L29/00

    摘要: The present invention relates to a non-volatile electrical phase change memory device comprising a substrate, a first interlayer dielectric film deposited on the substrate, a bottom electrode layer formed on the first dielectric layer, a second interlayer dielectric film formed on the bottom electrode layer, a phase change material layer deposited on the second interlayer dielectric film, and a top electrode layer formed on said phase change material layer, the bottom electrode layer being brought into contact with the phase change material layer through a contact hole which is formed in the second interlayer dielectric film and filled with the phase change material or bottom electrode material, so that the phase change layer and the bottom electrode layer come into close contact with each other, wherein an interfacial control layer is formed at the interface of the contact hole between the phase change layer and the bottom electrode layer, said interfacial control layer having strong chemical bonds with the phase change material as well as electrical resistivity and thermal conductivity values lower than those of the bottom electrode material.

    摘要翻译: 本发明涉及一种非挥发性电相变存储器件,其包括衬底,沉积在衬底上的第一层间电介质膜,形成在第一介电层上的底部电极层,形成在底部电极层上的第二层间电介质膜 沉积在第二层间电介质膜上的相变材料层和形成在所述相变材料层上的顶部电极层,所述底部电极层通过形成在所述相变材料层中的接触孔与所述相变材料层接触, 第二层间电介质膜,并填充有相变材料或底部电极材料,使得相变层和底部电极层彼此紧密接触,其中界面控制层形成在接触孔的界面处, 相变层和底部电极层,所述界面控制层具有强的作用 与相变材料的化学键以及电阻率和热导率值低于底部电极材料。