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1.发明授权Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge 失效卷帘快门光开关装置带有快门上的凹坑，光口处的环形边缘和缩短的快门附件边缘公开(公告)号：US06829399B2
公开(公告)日：2004-12-07
申请号：US09799826
申请日：2001-03-05
IPC分类号： G02B626
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译： 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。
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公开(公告)号：US5784189A
公开(公告)日：1998-07-21
申请号：US569158
申请日：1995-12-21
申请人： Carl O. Bozler , Steven Rabe
发明人： Carl O. Bozler , Steven Rabe
CPC分类号： G02B26/02 , G02B26/0833 , G02B26/0841 , G09F9/372 , G01J3/0232 , H01H2001/0042 , H01H2059/0018 , H01H2059/0081 , H01H59/0009
摘要： A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.
摘要翻译： PCT No.PCT / US93 / 06342 Sec。 371 1995年12月21日第 102（e）日期1995年12月21日PCT提交1993年7月2日PCT公布。 出版物WO95 / 0162400 日期1995年1月12日一种由可移动电极形成的空间光调制器，该可移动电极与固定电极相对设置，并且在施加电极两端的电场之后被偏置成在优选方向上滚动以产生光阀或光闸。 在一个实施例中，可移动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。
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3.发明授权Wide band and radio frequency waveguide and hybrid integration in a silicon package 有权宽带和射频波导以及混合集成在硅封装中公开(公告)号：US08587106B2
公开(公告)日：2013-11-19
申请号：US11761108
申请日：2007-06-11
申请人： Carl O. Bozler , Jeremy Muldavin , Peter W. Wyatt , Craig L. Keast , Steven Rabe
发明人： Carl O. Bozler , Jeremy Muldavin , Peter W. Wyatt , Craig L. Keast , Steven Rabe
IPC分类号： H01L23/02
CPC分类号： H01P3/08 , B81B7/0064 , B81B2201/014 , B81B2207/07 , B81C2203/0109 , B81C2203/036 , H01L2924/0002 , H01L2924/00
摘要： A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.
摘要翻译： 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱，并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积，该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度，使得传输线的阻抗取决于空腔的宽度和高度，或者传输线的阻抗取决于腔内的中心导体的宽度。
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4.发明申请WIDE BAND AND RADIO FREQUENCY WAVEGUIDE AND HYBRID INTEGRATION IN A SILICON PACKAGE 有权宽带和无线电频率波形和硅包装中的混合集成公开(公告)号：US20100019872A1
公开(公告)日：2010-01-28
申请号：US11761108
申请日：2007-06-11
申请人： Carl O. Bozler , Jeremy Muldavin , Peter W. Wyatt , Craig L. Keast , Steven Rabe
发明人： Carl O. Bozler , Jeremy Muldavin , Peter W. Wyatt , Craig L. Keast , Steven Rabe
CPC分类号： H01P3/08 , B81B7/0064 , B81B2201/014 , B81B2207/07 , B81C2203/0109 , B81C2203/036 , H01L2924/0002 , H01L2924/00
摘要： A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.
摘要翻译： 一种器件包括具有形成在其上的电路部件并且具有形成在其中的通孔的器件晶片和结合到器件晶片的帽晶片。 盖晶片在其中具有空腔。 空腔具有形成在其中的柱，并且柱被定位成机械地支撑形成在器件晶片中的通孔。 空腔具有体积，该体积基本上包围形成在器件晶片上的电路部件。 空腔具有宽度和高度，使得传输线的阻抗取决于空腔的宽度和高度，或者传输线的阻抗取决于腔内的中心导体的宽度。
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5.发明授权Rolling shutter optical switch device with latch electrode and slits in shutter 失效具有闩锁电极的卷帘快门光开关装置和快门中的狭缝公开(公告)号：US06907153B2
公开(公告)日：2005-06-14
申请号：US09799923
申请日：2001-03-05
申请人： Carl O. Bozler , Steven Rabe
发明人： Carl O. Bozler , Steven Rabe
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译： 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。
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公开(公告)号：US5959763A
公开(公告)日：1999-09-28
申请号：US31487
申请日：1998-02-26
申请人： Carl O. Bozler , Steven Rabe
发明人： Carl O. Bozler , Steven Rabe
CPC分类号： G02B26/02 , G02B26/0833 , G02B26/0841 , G09F9/372 , G01J3/0232 , H01H2001/0042 , H01H2059/0018 , H01H2059/0081 , H01H59/0009
摘要： A spatial light modulator formed of a moveable electrode which is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the moveable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness.
摘要翻译： 由可移动电极形成的空间光调制器，所述可移动电极与固定电极相对设置，并且在跨过电极施加电场以偏置以在优选方向上滚动以产生光阀或光闸。 在一个实施例中，可移动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。
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公开(公告)号：US5233459A
公开(公告)日：1993-08-03
申请号：US665345
申请日：1991-03-06
申请人： Carl O. Bozler , Steven Rabe
发明人： Carl O. Bozler , Steven Rabe
CPC分类号： G02B26/02 , G02B26/0833 , G02B26/0841 , G09F9/372 , G01J3/0232 , H01H2001/0042 , H01H2059/0018 , H01H2059/0081 , H01H59/0009
摘要： A bistable electrostatic light valve display in which a movable electrode is disposed opposite a fixed electrode and is biased to move in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter. In one embodiment, the movable electrode is restrained at one end and coils about the fixed end in a preferential roll direction. The bias is achieved by inducing anisotropic stress or anisotropic stiffness. In another embodiment, the moveable electrode is restrained at both ends and is biased upwardly by anisotropic stress or stiffening.
摘要翻译： 一种双稳态静电光阀显示器，其中可动电极与固定电极相对地设置并且在施加电场两端的电场之后被偏置以沿优选方向移动以产生光阀或光闸。 在一个实施例中，可动电极被限制在一端并以优先的滚动方向围绕固定端盘绕。 通过诱发各向异性压力或各向异性刚度来实现偏置。 在另一个实施例中，可移动电极在两端被限制并且由各向异性的应力或加强向上偏置。
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8.发明授权Permeable base transistor having an electrode configuration for heat dissipation 失效具有用于散热的电极配置的可渗透的基底晶体管
公开(公告)号：US5155561A
公开(公告)日：1992-10-13
申请号：US140820
申请日：1988-01-05
IPC分类号： H01L21/28 , H01L21/335 , H01L29/06 , H01L29/41 , H01L29/737 , H01L29/772
CPC分类号： H01L29/66454 , H01L21/28 , H01L29/0649 , H01L29/0692 , H01L29/41 , H01L29/7371 , H01L29/7722
摘要： The base layer of a power permeable base transistor is formed as comb structures with grating teeth of the combs extending into active regions of semiconductor material. Extended active regions are separated by inactive regions over which collector contacts extend. Large devices have digitated base layers. The comb structures are fabricated by sputtering a uniform layer of tungsten and forming a nickel mask over the tungsten by both X-ray and photolithography techniques. The tungsten exposed by the nickel mask is then etched to leave the comb structures.
摘要翻译： 功率可透的基极晶体管的基极层形成为具有延伸到半导体材料的有源区域中的梳状光栅齿的梳结构。 扩展的活动区域由收集器触点延伸的非活动区域分开。 大型设备具有数字化的基础层。 通过X射线和光刻技术通过溅射均匀的钨层并在钨上形成镍掩模来制造梳状结构。 然后蚀刻由镍掩模曝光的钨离开梳结构。
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公开(公告)号：US20200319355A1
公开(公告)日：2020-10-08
申请号：US16778042
申请日：2020-01-31
申请人： Brian F. AULL , Joseph S. Ciampi , Renee D. Lambert , Christopher Leitz , Karl Alexander McIntosh , Steven Rabe , Kevin Ryu , Daniel R. SCHUETTE , David Volfson
发明人： Brian F. AULL , Joseph S. Ciampi , Renee D. Lambert , Christopher Leitz , Karl Alexander McIntosh , Steven Rabe , Kevin Ryu , Daniel R. SCHUETTE , David Volfson
IPC分类号： G01T1/24 , H01L27/146
摘要： A chip-to-chip integration process for rapid prototyping of silicon avalanche photodiode (APD) arrays has been developed. This process has several advantages over wafer-level 3D integration, including: (1) reduced cost per development cycle since a dedicated full-wafer read-out integrated circuit (ROIC) fabrication is not needed, (2) compatibility with ROICs made in previous fabrication runs, and (3) accelerated schedule. The process provides several advantages over previous processes for chip-to-chip integration, including: (1) shorter processing time as the chips can be diced, bump-bonded, and then thinned at the chip-level faster than in a wafer-level back-illumination process, and (2) the CMOS substrate provides mechanical support for the APD device, allowing integration of fast microlenses directly on the APD back surface. This approach yields APDs with low dark count rates (DCRs) and higher radiation tolerance for harsh environments and can be extended to large arrays of APDs.
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