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1.发明授权Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge 失效卷帘快门光开关装置带有快门上的凹坑，光口处的环形边缘和缩短的快门附件边缘公开(公告)号：US06829399B2
公开(公告)日：2004-12-07
申请号：US09799826
申请日：2001-03-05
IPC分类号： G02B626
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译： 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。
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公开(公告)号：US08515221B2
公开(公告)日：2013-08-20
申请号：US12693181
申请日：2010-01-25
IPC分类号： G02B6/26
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤端接和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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3.发明授权Optical system active alignment process including alignment structure attach, position search, and deformation 有权光学系统主动对准过程包括对准结构连接，位置搜索和变形公开(公告)号：US06559464B1
公开(公告)日：2003-05-06
申请号：US09648148
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： G01N2186
CPC分类号： G02B27/62 , G02B6/32 , G02B6/327 , G02B6/3586 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4201 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4243 , G02B6/4249 , G02B6/4256 , G02B7/003
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06416937B1
公开(公告)日：2002-07-09
申请号：US09648349
申请日：2000-08-25
申请人： Dale C. Flanders , Peter S. Whitney
发明人： Dale C. Flanders , Peter S. Whitney
IPC分类号： C25D100
CPC分类号： G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3656 , G02B6/3692 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4244 , G02B6/4249 , G02B7/003 , G02B27/62
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06407376B1
公开(公告)日：2002-06-18
申请号：US09648267
申请日：2000-08-25
申请人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
发明人： Jeffrey Korn , Dale C. Flanders , Peter S. Whitney
IPC分类号： H04B1008
CPC分类号： G02B6/29358 , G02B6/29361 , G02B6/29395 , G02B6/4226 , G02B6/4246 , H04B10/077 , H04B10/07955 , H04B2210/078
摘要： An optical monitoring system provides for out-of-band calibration. As a result, calibration can be performed simultaneously with monitoring. This can be used to accomplish faster and/or more accurate scanning. In addition, the need for complex switching and/or multiplexing capabilities can be avoided. The system comprises a signal source of an optical signal having spectrally separated channels, which are distributed within a spectral band, such as a WDM signal. A reference source generates a reference signal outside of the spectral band. A tunable filter filters the optical signal and the reference signal. A reference signal detector then detects the filtered reference signal, while an optical signal detector detects the filtered optical signal.
摘要翻译： 光学监控系统提供带外校准。 因此，可以同时监视校准。 这可以用于实现更快和/或更准确的扫描。 此外，可以避免对复杂的开关和/或复用能力的需要。 该系统包括具有频谱分离的信道的光信号的信号源，其分布在诸如WDM信号的频谱带内。 参考源在频谱带外产生参考信号。 可调谐滤波器对光信号和参考信号进行滤波。 参考信号检测器然后检测滤波的参考信号，而光信号检测器检测滤波的光信号。
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6.发明申请Method and System for Avoiding Package Induced Failure in Swept Semiconductor Source 有权扫描半导体源避免封装引发故障的方法和系统公开(公告)号：US20120257210A1
公开(公告)日：2012-10-11
申请号：US13428826
申请日：2012-03-23
申请人： Peter S. Whitney , Dale C. Flanders
发明人： Peter S. Whitney , Dale C. Flanders
CPC分类号： H01S5/026 , G01B9/02091 , H01S5/022 , H01S5/02216 , H01S5/0222 , H01S5/02224 , H01S5/02248 , H01S5/02284 , H01S5/02415 , H01S5/02438 , H01S5/068 , H01S5/06825 , H01S5/141 , H01S5/183
摘要： Dry oxygen, dry air, or other gases such as ozone are hermetically sealed within the package of the external cavity laser or ASE swept source to avoid packaging-induced failure or PIF. PIF due to hydrocarbon breakdown at optical interfaces with high power densities is believed to occur at the SLED and/or SOA facets as well as the tunable Fabry-Perot reflector/filter elements and/or output fiber. Because the laser is an external cavity tunable laser and the configuration of the ASE swept sources, the power output can be low while the internal power at surfaces can be high leading to PIF at output powers much lower than the 50 mW.
摘要翻译： 干氧，干燥空气或其他气体（如臭氧）密封在外腔激光器或ASE扫描源的封装内，以避免包装引起的故障或PIF。 相信在SLED和/或SOA面以及可调谐法布里 - 珀罗反射器/滤波器元件和/或输出光纤处发生由于在具有高功率密度的光学接口处的烃破坏引起的PIF。 因为激光器是外部可调谐激光器和ASE扫频源的配置，所以功率输出可能很低，而表面的内部功率可能很高，导致PIF的输出功率远低于50 mW。
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公开(公告)号：US20110182550A1
公开(公告)日：2011-07-28
申请号：US12693181
申请日：2010-01-25
CPC分类号： G01Q60/22 , A61B5/0066 , A61B5/0084 , A61B5/02007 , A61B2562/12 , G02B23/2469
摘要： An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
摘要翻译： 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤，包括纵向延伸的光纤槽的硅光学台，其保持光纤的光纤终端和反射 表面，其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法，其包括在诸如SOI（绝缘体上硅）晶片的复合晶片材料的第一层中形成折射透镜，并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
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公开(公告)号：US06385382B1
公开(公告)日：2002-05-07
申请号：US09689349
申请日：2000-10-12
IPC分类号： G02B700
CPC分类号： G02B6/4226 , Y10S269/903
摘要： A mechanical interface between a manipulation system and an optical component in which manipulation system jaws are adapted to engage an optical component at a handle and then deform the component. In some applications, an optical component is translationally or rotationally deformed. In one example, the jaws are moved towards each other in an opposed fashion such that teeth engage the optical component at the handle. Then, the jaws are collectively actuated so that they are moved in substantially the same direction. This results, typically, in the deformation of the optical component so that the optical element held by the optical mounting structure is moved into an improved alignment position. In another example, a V-shaped slot in one of the jaws is used to grasp the optical element, e.g., fiber, to move the element.
摘要翻译： 操作系统和光学部件之间的机械接口，其中操作系统爪适于在手柄处接合光学部件，然后使部件变形。 在一些应用中，光学部件是平移或旋转变形的。 在一个示例中，钳口以相反的方式朝向彼此移动，使得齿与手柄处的光学部件接合。 然后，夹爪被集体地致动，使得它们沿大致相同的方向移动。 这通常导致光学部件的变形，使得由光学安装结构保持的光学元件移动到改进的对准位置。 在另一示例中，使用一个夹爪中的V形槽来抓住光学元件（例如光纤）以移动元件。
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公开(公告)号：US06341039B1
公开(公告)日：2002-01-22
申请号：US09648060
申请日：2000-08-25
IPC分类号： G02B2700
CPC分类号： G02B26/02 , G01J3/26 , G02B7/188 , G02B26/00 , G02B26/001
摘要： A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. A voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The tether pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.
摘要翻译： 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 施加到跨过静电腔的电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺从集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 系绳图案可以使得直的或径向的系绳将内膜与外部主体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。
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10.发明授权公开(公告)号：US09036235B2
公开(公告)日：2015-05-19
申请号：US13467787
申请日：2012-05-09
CPC分类号： G02B26/001 , G02B26/0825
摘要： An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.
摘要翻译： 光学膜装置包括基底，在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中，光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中，光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡，以最小化对重力场中的取向的敏感性。
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