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1.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09530612B2
公开(公告)日：2016-12-27
申请号：US14314222
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.
摘要翻译： 本发明涉及一种带电粒子束系统，其包括带电粒子束源，带电粒子柱，样品室，布置在带电粒子柱中的任一个中的多个电动设备，带电粒子束源和 样品室和至少一个第一转换器，以将电AC电压功率转换成电DC电压。 第一转换器位于与带电粒子束源，带电粒子柱和带电粒子室中的任一个相距一定距离处，并且当在带电粒子束源的操作期间操作时，多个电动装置的所有元件是 配置为由转换器提供的直流电压专门供电。
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2.发明申请CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权充电颗粒束系统和操作充电颗粒束系统的方法公开(公告)号：US20150008342A1
公开(公告)日：2015-01-08
申请号：US14314222
申请日：2014-06-25
IPC分类号： H01J37/08
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.
摘要翻译： 本发明涉及一种带电粒子束系统，其包括带电粒子束源，带电粒子柱，样品室，布置在带电粒子柱中的任一个中的多个电动设备，带电粒子束源和 样品室和至少一个第一转换器，以将电AC电压功率转换成电DC电压。 第一转换器位于与带电粒子束源，带电粒子柱和带电粒子室中的任一个相距一定距离处，并且当在带电粒子束源的操作期间操作时，多个电动装置的所有元件是 配置为由转换器提供的直流电压专门供电。
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3.发明申请CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权充电颗粒束系统和操作充电颗粒束系统的方法公开(公告)号：US20150008332A1
公开(公告)日：2015-01-08
申请号：US14314317
申请日：2014-06-25
发明人： John A. Notte, IV , Weijie Huang , Raymond Hill , FHM-Faridur Rahman , Alexander Groholski , Shawn McVey
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。
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4.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09530611B2
公开(公告)日：2016-12-27
申请号：US14314219
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
摘要翻译： 本发明涉及带电粒子束系统，其包括惰性气体场离子束源，带电粒子束柱和限定第一真空区域和第二真空区域的壳体。 惰性气体场离子束源设置在第一真空区域内。 第一机械真空泵功能地附接到第一真空区域，离子吸气剂泵连接到带电粒子束柱，并且气体供应附着到构造成向惰性气体场离子供应惰性气体的第一真空区域 光束源。
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公开(公告)号：US20130256532A1
公开(公告)日：2013-10-03
申请号：US13892772
申请日：2013-05-13
发明人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall G. Percival , Billy W. Ward
IPC分类号： H01J37/304
CPC分类号： H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
摘要翻译： 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端的能力（例如尖端顶点上的原子数）。 这可以提高性能（例如，增加可靠性，稳定性等）。
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6.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09536699B2
公开(公告)日：2017-01-03
申请号：US14314317
申请日：2014-06-25
发明人： John A. Notte, IV , Weijie Huang , Raymond Hill , FHM-Faridur Rahman , Alexander Groholski , Shawn McVey
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。
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公开(公告)号：US09029765B2
公开(公告)日：2015-05-12
申请号：US13892772
申请日：2013-05-13
发明人： Richard Comunale , Alexander Groholski , John A. Notte, IV , Randall G. Percival , Billy W. Ward
IPC分类号： H01J37/304 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/305
CPC分类号： H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
摘要： Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
摘要翻译： 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端的能力（例如尖端顶点上的原子数）。 这可以提高性能（例如，增加可靠性，稳定性等）。
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8.发明申请CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权充电颗粒束系统和操作充电颗粒束系统的方法公开(公告)号：US20150008341A1
公开(公告)日：2015-01-08
申请号：US14314219
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
摘要翻译： 本发明涉及带电粒子束系统，其包括惰性气体场离子束源，带电粒子束柱和限定第一真空区域和第二真空区域的壳体。 惰性气体场离子束源设置在第一真空区域内。 第一机械真空泵功能地附接到第一真空区域，离子吸气剂泵连接到带电粒子束柱，并且气体供应附着到构造成向惰性气体场离子供应惰性气体的第一真空区域 光束源。
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