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    Film bulk acoustic resonator having an air gap and a method for manufacturing the same
    1.
    发明授权
    Film bulk acoustic resonator having an air gap and a method for manufacturing the same 有权
    具有气隙的薄膜体声共振器及其制造方法

    公开(公告)号：US07119638B2

    公开(公告)日：2006-10-10

    申请号：US10827348

    申请日：2004-04-20

    申请人： Chan-bong Jun ,  O-gweon Seo

    发明人： Chan-bong Jun ,  O-gweon Seo

    IPC分类号： H03H9/15 ,  H03H3/02

    CPC分类号： H03H9/173 ,  H03H3/02 ,  H03H2003/021 ,  Y10T29/42

    摘要： A film bulk acoustic resonator (FBAR) includes a resistance layer deposited on the upper surface of a semiconductor substrate and having a recess therein, a membrane layer on the upper surfaces of the resistance layer and the recess, thereby forming an air gap between the membrane layer and the semiconductor substrate, and a resonator having a lower electrode, a piezoelectric layer, and an upper electrode deposited on the membrane layer. The resistance layer may include first and second resistance layers, the first resistance layer having the recess therein and the second resistance layer being deposited on the upper surfaces of the recess. Thus, the air gap is formed without etching the semiconductor substrate, enhancing the resonant characteristics of the FBAR. Active and/or passive devices can be formed underneath the air gap to be integrated with the FBAR.

    摘要翻译： 薄膜体声波谐振器（FBAR）包括沉积在半导体衬底的上表面上并具有凹部的电阻层，电阻层的上表面上的膜层和凹部，从而在膜之间形成气隙 层和半导体衬底，以及具有沉积在膜层上的下电极，压电层和上电极的谐振器。 电阻层可以包括第一和第二电阻层，第一电阻层具有凹部，第二电阻层沉积在凹部的上表面上。 因此，在不蚀刻半导体衬底的情况下形成气隙，增强了FBAR的谐振特性。 有源和/或无源器件可以形成在气隙下面以与FBAR集成。

    MULTI-DISPLAY APPARATUS AND METHOD OF MANUFACTURING THEREOF
    3.
    发明申请
    MULTI-DISPLAY APPARATUS AND METHOD OF MANUFACTURING THEREOF 审中-公开
    多显示装置及其制造方法

    公开(公告)号：US20080144173A1

    公开(公告)日：2008-06-19

    申请号：US11832921

    申请日：2007-08-02

    申请人： Ki-deok Bae ,  Jun-seong Kim ,  Euk-che Hwang ,  Chan-bong Jun

    发明人： Ki-deok Bae ,  Jun-seong Kim ,  Euk-che Hwang ,  Chan-bong Jun

    IPC分类号： G03B21/56

    CPC分类号： G03B21/56

    摘要： A multi-display apparatus includes a plurality of panels connected to each other and displaying an image, wherein the plurality of panels comprise a top emission type display apparatus and a bottom emission type display apparatus, and the top emission type display apparatus and the bottom emission type display apparatus are connected to each other such that the top emission type display apparatus and the bottom emission type display apparatus emit light in a same direction, and the top emission type display apparatus and the bottom emission type display apparatus are arranged with a step difference therebetween such that pixel boundaries of adjacent side boundary surfaces of the top emission type display apparatus and of the bottom emission type display apparatus overlap each other.

    摘要翻译： 多显示装置包括彼此连接并显示图像的多个面板，其中多个面板包括顶部发射型显示装置和底部发射型显示装置，并且顶部发射型显示装置和底部发射 上述发光型显示装置和底部发光型显示装置以相同的方向发光，顶部发光型显示装置和底部发光型显示装置以阶差形式配置 使得顶部发射型显示装置和底部发射型显示装置的相邻侧边界面的像素边界彼此重叠。

    Method of forming a via hole through a glass wafer
    4.
    发明授权
    Method of forming a via hole through a glass wafer 有权
    通过玻璃晶片形成通孔的方法

    公开(公告)号：US07084073B2

    公开(公告)日：2006-08-01

    申请号：US10681217

    申请日：2003-10-09

    申请人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

    发明人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

    IPC分类号： H01L21/302

    CPC分类号： B81C1/00087 ,  H01L21/486 ,  H01L23/13 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method of forming a via hole through a glass wafer includes depositing a material layer on an outer surface of the glass wafer, the material layer having a selection ratio higher than that of the glass wafer, forming a via-patterned portion on one side of the material layer, performing a first etching in which the via-patterned portion is etched to form a preliminary via hole, eliminating any remaining patterning material used in the formation of the via-patterned portion, performing a second etching in which the preliminary via hole is etched to form a via hole having a smooth surface and extending through the glass wafer, and eliminating the material layer. The method according to the present invention is able to form a via hole through a glass wafer without allowing formation of an undercut or minute cracks, thereby increasing the yield and reliability of MEMS elements.

    摘要翻译： 通过玻璃晶片形成通孔的方法包括在玻璃晶片的外表面上沉积材料层，该材料层的选择比率高于玻璃晶片的选择比，在玻璃晶片的一侧上形成通孔图案部分 所述材料层进行蚀刻所述通路图案部分以形成预备通孔的第一蚀刻，消除在形成所述通路图案部分中使用的剩余图案材料，进行第二蚀刻，其中所述预通孔 被蚀刻以形成具有光滑表面并延伸穿过玻璃晶片的通孔，并且消除材料层。 根据本发明的方法能够通过玻璃晶片形成通孔，而不会形成底切或微小的裂缝，从而提高MEMS元件的成品率和可靠性。

    INKJET PRINTHEAD HEATER AND METHOD OF MANUFACTURE
    5.
    发明申请
    INKJET PRINTHEAD HEATER AND METHOD OF MANUFACTURE 审中-公开
    INKJET PRINTHEAD加热器及其制造方法

    公开(公告)号：US20080094455A1

    公开(公告)日：2008-04-24

    申请号：US11742756

    申请日：2007-05-01

    申请人： Jung-hyun LEE ,  Sang-jun Choi ,  Hyung-jin Bae ,  Chan-bong Jun

    发明人： Jung-hyun LEE ,  Sang-jun Choi ,  Hyung-jin Bae ,  Chan-bong Jun

    IPC分类号： B41J2/05 ,  G11B5/127

    CPC分类号： B41J2/14129 ,  B41J2/1603 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/03

    摘要： An inkjet printhead heater including a plurality of unit heater layers each including a first nitride layer and a second nitride layer stacked on the first nitride layer, and an inkjet printhead including the heater, and a method of manufacturing an inkjet printhead heater including stacking a plurality of unit heater layers, each including a substrate having a first nitride layer and a second nitride layer stacked on the first nitride layer.

    摘要翻译： 一种喷墨打印头加热器，包括多个单元加热器层，每个单元加热器层包括堆叠在第一氮化物层上的第一氮化物层和第二氮化物层，以及包括该加热器的喷墨打印头，以及制造喷墨打印头加热器的方法， 的每个单元加热器层，每个单元加热器层包括具有堆叠在第一氮化物层上的第一氮化物层和第二氮化物层的基板。

    Method for manufacturing metal structure having different heights
    6.
    发明授权
    Method for manufacturing metal structure having different heights 有权
    具有不同高度的金属结构的制造方法

    公开(公告)号：US07148141B2

    公开(公告)日：2006-12-12

    申请号：US11012312

    申请日：2004-12-16

    申请人： Dong-sik Shim ,  Chan-bong Jun ,  Hyung Choi ,  Hoon Song

    发明人： Dong-sik Shim ,  Chan-bong Jun ,  Hyung Choi ,  Hoon Song

    IPC分类号： H01L21/44

    CPC分类号： H01L21/76885 ,  H01L21/2885 ,  H01L24/11 ,  H01L24/12 ,  H01L2224/0401 ,  H01L2224/0603 ,  H01L2224/13099 ,  H01L2224/1403 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01078 ,  H01L2924/181 ,  H01L2924/00

    摘要： Disclosed is a method for forming a plurality of metal structures having different heights on a semiconductor substrate. The disclosed method for manufacturing a metal structure having different heights includes: forming a plurality of seed layers, to have heights corresponding to the metal structure to be formed, on a semiconductor substrate so that those layers can be electrically separated, performing a plating process using a plating mold, and applying different currents to the respective seed layers so that the plating thickness can be adjusted for each of the seed layers. Accordingly, a plurality of metal structures having different heights can be obtained by a plating mold forming process and a plating process that are performed just once, respectively.

    摘要翻译： 公开了一种在半导体衬底上形成具有不同高度的多个金属结构体的方法。 所公开的制造具有不同高度的金属结构体的方法包括：在半导体衬底上形成多个种子层以具有与要形成的金属结构相对应的高度，使得这些层可以电分离，使用 电镀模具，并且向相应的种子层施加不同的电流，使得可以针对每个种子层调整镀层厚度。 因此，可以通过分别进行一次的电镀模具成型工序和电镀工序来获得具有不同高度的多个金属结构体。

    ORGANIC ELECTRO-LUMINESCENT DISPLAY AND METHOD OF MANUFACTURING THE SAME
    7.
    发明申请
    ORGANIC ELECTRO-LUMINESCENT DISPLAY AND METHOD OF MANUFACTURING THE SAME 审中-公开
    有机电致发光显示器及其制造方法

    公开(公告)号：US20080106189A1

    公开(公告)日：2008-05-08

    申请号：US11780084

    申请日：2007-07-19

    申请人： Ki-deok Bae ,  Chang-seung Lee ,  Chan-bong Jun

    发明人： Ki-deok Bae ,  Chang-seung Lee ,  Chan-bong Jun

    IPC分类号： H01J1/62 ,  H01J17/49 ,  H01L51/54 ,  H01L51/56

    CPC分类号： H01L27/3283

    摘要： An organic electro-luminescent display (“OELD”) and a method of manufacturing the OELD include: a substrate; a plurality of anodes substantially parallel with one another in a first direction and disposed on the substrate; a plurality of cathodes disposed substantially parallel with one another in a second direction orthogonal to the plurality of anodes; organic electro-luminescent parts disposed at intersections between the anodes and the cathodes; and cathode separators disposed between the cathodes. Upper portions of the cathode separators are wider than lower portions of the cathode separators; and protrusions protrude from sides of the upper portions of the cathode separators.

    摘要翻译： 有机电致发光显示器（“OELD”）和制造OELD的方法包括：基板; 多个阳极，在第一方向上彼此基本平行并且设置在所述基板上; 在与所述多个阳极正交的第二方向上彼此大致平行地设置的多个阴极; 设置在阳极和阴极之间的交叉处的有机电致发光部件; 和设置在阴极之间的阴极分离器。 阴极隔板的上部比阴极隔板的下部更宽; 并且突起从阴极隔板的上部的侧面突出。