公开(公告)号：US08570805B2

公开(公告)日：2013-10-29

申请号：US13029518

申请日：2011-02-17

申请人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

发明人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

IPC分类号： G11C16/04

CPC分类号： G11C16/107 ,  G11C16/0483 ,  G11C16/10 ,  G11C2213/71 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/7926

摘要： Provided is a programming method of a nonvolatile memory device. The nonvolatile memory device includes a substrate and a plurality of memory cells which are stacked in the direction perpendicular to the substrate. The programming method applies a first voltage to a selected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be programmed, applies a second voltage to an unselected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be program-prohibited, applies a third voltage to a selected string selection line connected to at least two memory strings in same row, applies a fourth voltage to an unselected string selection line connected to at least two memory strings in same row, and applies a program operation voltage to a plurality of word lines, each word line connected to each corresponding memory cell in the memory string, wherein the first to third voltages are positive voltages.

公开(公告)号：US20110199829A1

公开(公告)日：2011-08-18

申请号：US13029518

申请日：2011-02-17

申请人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

发明人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

IPC分类号： G11C16/04 ,  G11C16/10

CPC分类号： G11C16/107 ,  G11C16/0483 ,  G11C16/10 ,  G11C2213/71 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/7926

摘要： Provided is a programming method of a nonvolatile memory device. The nonvolatile memory device includes a substrate and a plurality of memory cells which are stacked in the direction perpendicular to the substrate. The programming method applies a first voltage to a selected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be programmed, applies a second voltage to an unselected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be program-prohibited, applies a third voltage to a selected string selection line connected to at least two memory strings in same row, applies a fourth voltage to an unselected string selection line connected to at least two memory strings in same row, and applies a program operation voltage to a plurality of word lines, each word line connected to each corresponding memory cell in the memory string, wherein the first to third voltages are positive voltages.

摘要翻译： 提供了一种非易失性存储器件的编程方法。 非易失性存储器件包括基板和沿垂直于基板的方向堆叠的多个存储单元。 编程方法将第一电压施加到连接到包括要编程的多个存储器单元的存储单元的同一列中的至少两个存储器串的选定位线，将第二电压施加到连接至少两个的未选定位线 包含要被编程禁止的多个存储单元的存储单元的同一列中的存储器串向同一行中连接到至少两个存储器串的所选择的串选择线施加第三电压，将第四电压施加到未选择的串 选择线连接到同一行中的至少两个存储器串，并且将编程操作电压施加到多个字线，每个字线连接到存储器串中的每个对应的存储单元，其中第一至第三电压是正电压。

公开(公告)号：US08929145B2

公开(公告)日：2015-01-06

申请号：US14043256

申请日：2013-10-01

申请人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

发明人： Changhyun Lee ,  Jinman Han ,  Doogon Kim ,  Sunghoi Hur ,  Jongin Yun

IPC分类号： G11C16/04 ,  H01L27/115 ,  G11C16/10 ,  H01L29/792

CPC分类号： G11C16/107 ,  G11C16/0483 ,  G11C16/10 ,  G11C2213/71 ,  H01L27/11578 ,  H01L27/11582 ,  H01L29/7926

摘要： Provided is a programming method of a nonvolatile memory device. The nonvolatile memory device includes a substrate and a plurality of memory cells which are stacked in the direction perpendicular to the substrate. The programming method applies a first voltage to a selected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be programmed, applies a second voltage to an unselected bit line connected to at least two memory strings in same column including a memory cell of the plurality of memory cell to be program-prohibited, applies a third voltage to a selected string selection line connected to at least two memory strings in same row, applies a fourth voltage to an unselected string selection line connected to at least two memory strings in same row, and applies a program operation voltage to a plurality of word lines, each word line connected to each corresponding memory cell in the memory string, wherein the first to third voltages are positive voltages.

摘要翻译： 提供了一种非易失性存储器件的编程方法。 非易失性存储器件包括基板和沿垂直于基板的方向堆叠的多个存储单元。 编程方法将第一电压施加到连接到包括要编程的多个存储器单元的存储单元的同一列中的至少两个存储器串的选定位线，将第二电压施加到连接至少两个的未选定位线 包含要被编程禁止的多个存储单元的存储单元的同一列中的存储器串向同一行中连接到至少两个存储器串的所选择的串选择线施加第三电压，将第四电压施加到未选择的串 选择线连接到同一行中的至少两个存储器串，并且将编程操作电压施加到多个字线，每个字线连接到存储器串中的每个对应的存储单元，其中第一至第三电压是正电压。

公开(公告)号：US08278170B2

公开(公告)日：2012-10-02

申请号：US13165576

申请日：2011-06-21

申请人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

发明人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

IPC分类号： H01L21/336

CPC分类号： G11C16/28 ,  G11C16/14 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/7889 ,  H01L29/7926

摘要： Methods of forming nonvolatile memory devices according to embodiments of the invention include techniques to form highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.

摘要翻译： 形成根据本发明的实施例的非易失性存储器件的方法包括形成非易失性存储器单元的高度集成的垂直堆叠的技术。 这些垂直堆叠的存储器单元可以利用虚拟存储器单元来补偿当相对大量的存储单元垂直地堆叠在半导体衬底上时使用电连接的多个垂直子串的过程伪像，否则会产生相对较差的功能性存储单元串 系列。

公开(公告)号：US08546869B2

公开(公告)日：2013-10-01

申请号：US13600829

申请日：2012-08-31

申请人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

发明人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

IPC分类号： H01L21/8239

CPC分类号： G11C16/28 ,  G11C16/14 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/7889 ,  H01L29/7926

摘要： Methods of forming nonvolatile memory devices according to embodiments of the invention include techniques to form highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.

摘要翻译： 形成根据本发明的实施例的非易失性存储器件的方法包括形成非易失性存储器单元的高度集成的垂直堆叠的技术。 这些垂直堆叠的存储器单元可以利用虚拟存储器单元来补偿当相对大量的存储单元垂直地堆叠在半导体衬底上时使用电连接的多个垂直子串的过程伪像，否则会产生相对较差的功能性存储单元串 系列。

公开(公告)号：US20120327715A1

公开(公告)日：2012-12-27

申请号：US13600829

申请日：2012-08-31

申请人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

发明人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

IPC分类号： G11C16/06

CPC分类号： G11C16/28 ,  G11C16/14 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/7889 ,  H01L29/7926

摘要： Methods of forming nonvolatile memory devices according to embodiments of the invention include techniques to form highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.

摘要翻译： 形成根据本发明的实施例的非易失性存储器件的方法包括形成非易失性存储器单元的高度集成的垂直堆叠的技术。 这些垂直堆叠的存储器单元可以利用虚拟存储器单元来补偿当相对大量的存储单元垂直地堆叠在半导体衬底上时使用电连接的多个垂直子串的过程伪像，否则会产生相对较差的功能性存储单元串 系列。

公开(公告)号：US08644064B2

公开(公告)日：2014-02-04

申请号：US13107206

申请日：2011-05-13

申请人： Byungkyu Cho ,  Changhyun Lee ,  Sunghoi Hur

发明人： Byungkyu Cho ,  Changhyun Lee ,  Sunghoi Hur

IPC分类号： G11C16/04

CPC分类号： G11C16/3427 ,  G11C16/0483 ,  G11C16/26

摘要： In a read step or a program (write) verification step of a semiconductor memory device, read voltages different from one another are applied to a pair of word lines respectively disposed on both sides of a selected word line to suppress the enlargement of program distribution.

摘要翻译： 在半导体存储器件的读取步骤或程序（写入）验证步骤中，彼此不同的读取电压被施加到分别设置在所选字线的两侧上的一对字线，以抑制程序分配的扩大。

公开(公告)号：US20140016408A1

公开(公告)日：2014-01-16

申请号：US14024844

申请日：2013-09-12

申请人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

发明人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

IPC分类号： G11C16/28

CPC分类号： G11C16/28 ,  G11C16/14 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/7889 ,  H01L29/7926

摘要： Nonvolatile memory devices according to embodiments of the invention include highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.

摘要翻译： 根据本发明的实施例的非易失性存储器件包括高度集成的非易失性存储器单元的垂直堆叠。 这些垂直堆叠的存储器单元可以利用虚拟存储器单元来补偿当相对大量的存储单元垂直地堆叠在半导体衬底上时使用电连接的多个垂直子串的过程伪像，否则会产生相对较差的功能性存储单元串 系列。

公开(公告)号：US20120003800A1

公开(公告)日：2012-01-05

申请号：US13165576

申请日：2011-06-21

申请人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

发明人： Changhyun Lee ,  Sunil Shim ,  Jaehoon Jang ,  Sunghoi Hur ,  Hansoo Kim ,  Kihyun Kim

IPC分类号： H01L21/8239

CPC分类号： G11C16/28 ,  G11C16/14 ,  H01L27/11551 ,  H01L27/11556 ,  H01L27/11578 ,  H01L29/7889 ,  H01L29/7926

摘要： Methods of forming nonvolatile memory devices according to embodiments of the invention include techniques to form highly integrated vertical stacks of nonvolatile memory cells. These vertical stacks of memory cells can utilize dummy memory cells to compensate for process artifacts that would otherwise yield relatively poor functioning memory cell strings when relatively large numbers of memory cells are stacked vertically on a semiconductor substrate using a plurality of vertical sub-strings electrically connected in series.

摘要翻译： 形成根据本发明的实施例的非易失性存储器件的方法包括形成非易失性存储器单元的高度集成的垂直堆叠的技术。 这些垂直堆叠的存储器单元可以利用虚拟存储器单元来补偿当相对大量的存储单元垂直地堆叠在半导体衬底上时使用电连接的多个垂直子串的过程伪像，否则会产生相对较差的功能性存储单元串 系列。

公开(公告)号：US10043816B2

公开(公告)日：2018-08-07

申请号：US14474867

申请日：2014-09-02

申请人： Kim Taekyung ,  Kwang Soo Seol ,  Seong Soon Cho ,  Sunghoi Hur ,  Jintae Kang

发明人： Kim Taekyung ,  Kwang Soo Seol ,  Seong Soon Cho ,  Sunghoi Hur ,  Jintae Kang

IPC分类号： H01L21/8238 ,  H01L21/336 ,  H01L21/4763 ,  H01L27/1157 ,  H01L29/423 ,  H01L27/11519 ,  H01L27/11582 ,  H01L29/792

摘要： A semiconductor memory device includes a stack of word lines and insulating patterns. Cell pillars extend vertically through the stack of word lines and insulating patterns with memory cells being formed at the junctions of the cell pillars and the word lines. A ratio of the thickness of the word lines to the thickness of immediately neighboring insulating patterns is different at different locations along one or more of the cell pillars. Related methods of manufacturing and systems are also disclosed.