Robust protective layer for MTJ devices
    1.
    发明申请
    Robust protective layer for MTJ devices 审中-公开
    坚固的MTJ设备保护层

    公开(公告)号:US20070080381A1

    公开(公告)日:2007-04-12

    申请号:US11248965

    申请日:2005-10-12

    IPC分类号: H01L29/94

    摘要: MTJ devices commonly degrade when subjected to the heat treatments required by subsequent further processing. This problem has been overcome by protecting the MTJ's sidewalls with a two layer laminate. The first layer is laid down under oxygen-free conditions, no attempt being made to replace any oxygen that is lost during the deposition. This is followed immediately by the deposition of the second layer (usually, but not mandatorily, of the same material as the first layer) in the presence of some oxygen.

    摘要翻译: 当经过后续进一步处理所需的热处理时,MTJ装置通常会降解。 通过用双层层压板保护MTJ的侧壁已经克服了这个问题。 第一层被放置在无氧条件下,没有试图取代沉积过程中损失的任何氧气。 这是在存在一些氧气的情况下立即通过沉积第二层(通常但不强制地与第一层相同的材料)沉积。

    Junction stability and yield for spin valve heads
    4.
    发明授权
    Junction stability and yield for spin valve heads 失效
    自旋阀头的结点稳定性和产量

    公开(公告)号:US06879474B2

    公开(公告)日:2005-04-12

    申请号:US10718878

    申请日:2003-11-21

    摘要: The possibility of shorting between a spin valve and its underlying magnetic shield layer can be largely eliminated by choosing the bottom spin valve structure. However, doing so causes the hard longitudinal bias that is standard for all such devices to degrade. The present invention overcomes this problem by inserting a thin NiCr, Ni, Fe, or Cr layer between the antiferromagnetic layer and the longitudinal bias layers. This provides a smoother surface for the bias layers to be deposited onto, thereby removing structural distortions to the longitudinal bias layer that would otherwise be present. A process for manufacturing the structure is also described.

    摘要翻译: 通过选择底部自旋阀结构,可以大大消除自旋阀与其下面的磁屏蔽层之间短路的可能性。 然而,这样做会导致所有这些设备的标准硬的纵向偏差降级。 本发明通过在反铁磁层和纵向偏置层之间插入薄的NiCr,Ni,Fe或Cr层来克服这个问题。 这为偏压层沉积提供了更平滑的表面,从而消除了否则将存在的纵向偏置层的结构变形。 还描述了用于制造该结构的方法。

    Process for manufacturing a spin valve recording head
    9.
    发明授权
    Process for manufacturing a spin valve recording head 失效
    制造旋转阀记录头的方法

    公开(公告)号:US06668443B2

    公开(公告)日:2003-12-30

    申请号:US09917347

    申请日:2001-07-30

    IPC分类号: G11B5127

    摘要: The possibility of shorting between a spin valve and its underlying magnetic shield layer can be largely eliminated by choosing the bottom spin valve structure. However, doing so causes the hard longitudinal bias that is standard for all such devices to degrade. The present invention overcomes this problem by inserting a thin NiCr, Ni, Fe, or Cr layer between the antiferromagnetic layer and the longitudinal bias layers. This provides a smoother surface for the bias layers to be deposited onto, thereby removing structural distortions to the longitudinal bias layer that would otherwise be present. A process for manufacturing the structure is also described.

    摘要翻译: 通过选择底部自旋阀结构,可以大大消除自旋阀与其下面的磁屏蔽层之间短路的可能性。 然而,这样做会导致所有这些设备的标准硬的纵向偏差降级。 本发明通过在反铁磁层和纵向偏置层之间插入薄的NiCr,Ni,Fe或Cr层来克服这个问题。 这为偏压层沉积提供了更平滑的表面,从而消除了否则将存在的纵向偏置层的结构变形。 还描述了用于制造该结构的方法。