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17 条记录 (耗时 0.027 秒)

    Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof
    1.
    发明授权
    Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof 有权
    极紫外光（EUV）光掩模及其制造方法

    公开(公告)号：US08764995B2

    公开(公告)日：2014-07-01

    申请号：US12858159

    申请日：2010-08-17

    申请人： Ching-Hsu Chang ,  Hung-Chun Wang ,  Boren Luo ,  Wen-Chun Huang ,  Ru-Gun Liu

    发明人： Ching-Hsu Chang ,  Hung-Chun Wang ,  Boren Luo ,  Wen-Chun Huang ,  Ru-Gun Liu

    IPC分类号： G03F1/24 ,  G03F1/80

    CPC分类号： G03F1/58 ,  G03F1/24

    摘要： Embodiments of EUV photomasks and methods for forming a EUV photomask are provided. The method comprises providing a substrate, a reflective layer, a capping layer, a hard mask layer, and forming an opening therein. An absorber layer is then filled in the opening and over the top surface of the hard mask layer. A planarizing process is provided to remove the absorber layer above the top surface of the hard mask layer and form an absorber in the opening, wherein the absorber is substantially co-planar with the top surface of the hard mask layer.

    摘要翻译： 提供EUV光掩模的实施例和形成EUV光掩模的方法。 该方法包括提供衬底，反射层，覆盖层，硬掩模层，以及在其中形成开口。 然后将吸收层填充在硬掩模层的开口中和上表面上。 提供平面化处理以去除硬掩模层的顶表面之上的吸收层，并在开口中形成吸收体，其中吸收体与硬掩模层的顶表面基本上共面。

    TARGET-BASED DUMMY INSERTION FOR SEMICONDUCTOR DEVICES
    3.
    发明申请
    TARGET-BASED DUMMY INSERTION FOR SEMICONDUCTOR DEVICES 有权
    用于半导体器件的基于目标的DUMMY插入

    公开(公告)号：US20130061196A1

    公开(公告)日：2013-03-07

    申请号：US13227118

    申请日：2011-09-07

    申请人： Ying-Chou Cheng ,  Boren Luo ,  Wen-Hao Liu ,  Tsong-Hua Ou ,  Chih-Wei Hsu ,  Wen-Chun Huang ,  Ru-Gun Liu

    发明人： Ying-Chou Cheng ,  Boren Luo ,  Wen-Hao Liu ,  Tsong-Hua Ou ,  Chih-Wei Hsu ,  Wen-Chun Huang ,  Ru-Gun Liu

    IPC分类号： G06F17/50

    CPC分类号： G06F17/5068 ,  G06F2217/12 ,  G06F2217/80 ,  Y02P90/265

    摘要： The present disclosure provides integrated circuit methods for target-based dummy insertion. A method includes providing an integrated circuit (IC) design layout, and providing a thermal model for simulating thermal effect on the IC design layout, the thermal model including optical simulation and silicon calibration. The method further includes providing a convolution of the thermal model and the IC design layout to generate a thermal image profile of the IC design layout, defining a thermal target for optimizing thermal uniformity across the thermal image profile, comparing the thermal target and the thermal image profile to determine a difference data, and performing thermal dummy insertion to the IC design layout based on the difference data to provide a target-based IC design layout.

    摘要翻译： 本公开提供了用于基于目标的虚拟插入的集成电路方法。 一种方法包括提供集成电路（IC）设计布局，并提供用于模拟IC设计布局热效应的热模型，热模型包括光学仿真和硅校准。 该方法还包括提供热模型和IC设计布局的卷积以产生IC设计布局的热图像轮廓，定义用于优化热图像轮廓的热均匀性的热目标，比较热目标和热图像 以确定差异数据，并且基于差异数据对IC设计布局进行热假插入以提供基于目标的IC设计布局。

    MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION
    4.
    发明申请
    MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION 有权
    电子设计自动化模型进口

    公开(公告)号：US20110231804A1

    公开(公告)日：2011-09-22

    申请号：US13116981

    申请日：2011-05-26

    申请人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    发明人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    IPC分类号： G06F17/50

    CPC分类号： G06F17/50

    摘要： Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility.

    摘要翻译： 公开了以安全格式提供处理参数的方法和系统。 一方面，公开了一种向设计设备提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建模型; 将模型转换为相应的一组内核; 将所述内核集合转换成相应的矩阵集合; 并将该组矩阵传送到设计设施。 另一方面，公开了一种用于提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建一个处理模型; 将处理模型加密成与多个EDA工具一起使用的格式; 并将加密的处理模型格式传送到设计设施。

    Model import for electronic design automation
    6.
    发明授权
    Model import for electronic design automation 有权
    电子设计自动化模型导入

    公开(公告)号：US08352888B2

    公开(公告)日：2013-01-08

    申请号：US13116958

    申请日：2011-05-26

    申请人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    发明人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    IPC分类号： G06F17/50

    CPC分类号： G06F17/50

    摘要： Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility.

    摘要翻译： 公开了以安全格式提供处理参数的方法和系统。 一方面，公开了一种向设计设备提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建模型; 将模型转换为相应的一组内核; 将所述内核集合转换成相应的矩阵集合; 并将该组矩阵传送到设计设施。 另一方面，公开了一种用于提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建一个处理模型; 将处理模型加密成与多个EDA工具一起使用的格式; 并将加密的处理模型格式传送到设计设施。

    MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION
    8.
    发明申请
    MODEL IMPORT FOR ELECTRONIC DESIGN AUTOMATION 有权

    公开(公告)号：US20110230998A1

    公开(公告)日：2011-09-22

    申请号：US13116958

    申请日：2011-05-26

    申请人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    发明人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    IPC分类号： G06F19/00

    CPC分类号： G06F17/50

    摘要： Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility.

    Model import for electronic design automation
    10.
    发明授权
    Model import for electronic design automation 有权
    电子设计自动化模型导入

    公开(公告)号：US08214772B2

    公开(公告)日：2012-07-03

    申请号：US13116981

    申请日：2011-05-26

    申请人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    发明人： Ru-Gun Liu ,  Chih-Ming Lai ,  Wen-Chun Huang ,  Boren Luo ,  I-Chang Shin ,  Yao-Ching Ku ,  Cliff Hou

    IPC分类号： G06F17/50

    CPC分类号： G06F17/50

    摘要： Methods and systems for providing processing parameters in a secure format are disclosed. In one aspect, a method for providing semiconductor fabrication processing parameters to a design facility is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a model from the set of processing parameters; converting the model into a corresponding set of kernels; converting the set of kernels into a corresponding set of matrices; and communicating the set of matrices to the design facility. In another aspect, a method for providing semiconductor fabrication processing parameters is disclosed. The method comprises providing a set of processing parameters of a fabrication facility; creating a processing model from the set of processing parameters; encrypting the processing model into a format for use with a plurality of EDA tools; and communicating the encrypted processing model format to a design facility.

    摘要翻译： 公开了以安全格式提供处理参数的方法和系统。 一方面，公开了一种向设计设备提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建模型; 将模型转换为相应的一组内核; 将所述内核集合转换成相应的矩阵集合; 并将该组矩阵传送到设计设施。 另一方面，公开了一种用于提供半导体制造处理参数的方法。 该方法包括提供制造设施的一组处理参数; 从一组处理参数创建一个处理模型; 将处理模型加密成与多个EDA工具一起使用的格式; 并将加密的处理模型格式传送到设计设施。