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    Method of forming an inductor with continuous metal deposition
    1.
    发明申请
    Method of forming an inductor with continuous metal deposition 审中-公开
    形成具有连续金属沉积的电感器的方法

    公开(公告)号：US20050124131A1

    公开(公告)日：2005-06-09

    申请号：US11034932

    申请日：2005-01-13

    申请人： Chit Hweing ,  Lap Chan ,  Purakh Verma ,  Yelehanka Ramachandramurthy Pradeep ,  Sanford Chu

    发明人： Chit Hweing ,  Lap Chan ,  Purakh Verma ,  Yelehanka Ramachandramurthy Pradeep ,  Sanford Chu

    IPC分类号： H01F17/00 ,  H01L21/02 ,  H01L23/522 ,  H01L21/20 ,  H01L29/00

    CPC分类号： H01L28/10 ,  H01F17/0006 ,  H01L23/5227 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method is described to fabricate RF inductor devices on a silicon substrate. Low-k or other dielectric material is deposited and patterned to form inductor lower plate trenches. Trenches are lined with barrier film such as TaN, filled with copper, and excess metal planarized using chemical mechanical polishing (CMP). Second layer of a dielectric material is deposited and patterned to form via-hole/trenches. Via-hole/trench patterns are filled with barrier material, and the dielectric film in between the via-hole/trenches is etched to form a second set of trenches. These trenches are filled with copper and planarized. A third layer of a dielectric film is deposited and patterned to form via-hole/trenches. Via-hole/trenches are then filled with barrier material, and the dielectric film between via-hole/trench patterns etched to form a third set of trenches. These trenches are filled with copper metal and excess metal removed by CMP to form said RF inductor.

    摘要翻译： 描述了在硅衬底上制造RF电感器件的方法。 沉积低k或其他电介质材料并图案化以形成电感器下板沟槽。 沟槽衬有阻挡膜，如填充有铜的TaN和使用化学机械抛光（CMP）平坦化的多余金属。 介电材料的第二层被沉积并图案化以形成通孔/沟槽。 通孔/沟槽图案填充有阻挡材料，蚀刻通孔/沟槽之间的电介质膜以形成第二组沟槽。 这些沟槽用铜填充并平坦化。 电介质膜的第三层被沉积并图案化以形成通孔/沟槽。 然后用阻挡材料填充通孔/沟槽，蚀刻通孔/沟槽图案之间的电介质膜以形成第三组沟槽。 这些沟槽填充有铜金属，并通过CMP去除多余的金属以形成所述RF电感器。

    METHOD OF MAKING DIRECT CONTACT ON GATE BY USING DIELECTRIC STOP LAYER
    2.
    发明申请
    METHOD OF MAKING DIRECT CONTACT ON GATE BY USING DIELECTRIC STOP LAYER 失效
    通过使用介质停止层在门上制造直接接触的方法

    公开(公告)号：US20050059216A1

    公开(公告)日：2005-03-17

    申请号：US10664211

    申请日：2003-09-17

    申请人： Purakh Verma ,  Sanford Chu ,  Lap Chan ,  Yelehanka Ramachandramurthy Pradeep ,  Kai Shao ,  Jia Zheng

    发明人： Purakh Verma ,  Sanford Chu ,  Lap Chan ,  Yelehanka Ramachandramurthy Pradeep ,  Kai Shao ,  Jia Zheng

    IPC分类号： H01L21/00 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/4763 ,  H01L21/768 ,  H01L21/84 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： H01L21/76802 ,  H01L21/76829

    摘要： A CMOS RF device and a method to fabricate said device with low gate contact resistance are described. Conventional MOS transistor is first formed with isolation regions, poly-silicon gate structure, sidewall spacers around poly gate, and implanted source/drain with lightly and heavily doped regions. A silicon dioxide layer such as TEOS is deposited, planarized with chemical mechanical polishing (CMP) to expose the gate and treated with dilute HF etchant to recess the silicon dioxide layer below the surface of the gate. Silicon nitride is then deposited and planarized with CMP and then etched except around the gates, using a oversize poly-silicon gate mask. Inter-level dielectric mask is then deposited, contact holes etched, and contact metal is deposited to form the transistor. During contact hole etch over poly-silicon gate, silicon nitride around the poly gate acts as an etch stop. Resulting structure with direct gate contact achieves significantly reduced gate resistance and thereby improved noise performance at high frequency operation, increased unit power gain frequency (f.,), and reduced gate delay.

    摘要翻译： 描述CMOS RF器件和制造具有低栅极接触电阻的所述器件的方法。 传统的MOS晶体管首先形成有隔离区域，多晶硅栅极结构，围绕多晶硅栅极的侧壁隔离物以及具有轻掺杂和重掺杂区域的注入源极/漏极。 沉积诸如TEOS的二氧化硅层，通过化学机械抛光（CMP）平坦化以暴露栅极，并用稀的HF蚀刻剂处理以使位于栅极表面下方的二氧化硅层凹陷。 然后将氮化硅沉积并用CMP平坦化，然后使用超大型多晶硅栅极掩模在栅极周围进行蚀刻。 然后沉积层间电介质掩模，蚀刻接触孔，并沉积接触金属以形成晶体管。 在多晶硅栅极的接触孔蚀刻期间，多晶硅周围的氮化硅作为蚀刻停止。 具有直接栅极接触的所得结构实现了显着降低的栅极电阻，从而改善了高频操作时的噪声性能，增加的单位功率增益频率（f。）和减小的栅极延迟。

    Method of making direct contact on gate by using dielectric stop layer
    5.
    发明申请
    Method of making direct contact on gate by using dielectric stop layer 有权
    通过使用介电阻挡层在栅极上直接接触的方法

    公开(公告)号：US20050136573A1

    公开(公告)日：2005-06-23

    申请号：US11045958

    申请日：2005-01-28

    申请人： Purakh Rajverma ,  Sanford Chu ,  Lap Chan ,  Yelehanka Ramachandramurthy Pradeep ,  Kai Shao ,  Jia Zheng

    发明人： Purakh Rajverma ,  Sanford Chu ,  Lap Chan ,  Yelehanka Ramachandramurthy Pradeep ,  Kai Shao ,  Jia Zheng

    IPC分类号： H01L21/00 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/4763 ,  H01L21/768 ,  H01L21/84 ,  H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L31/119

    CPC分类号： H01L21/76802 ,  H01L21/76829

    摘要： A CMOS RF device and a method to fabricate said device with low gate contact resistance are described. Conventional MOS transistor is first formed with isolation regions, poly-silicon gate structure, sidewall spacers around poly gate, and implanted source/drain with lightly and heavily doped regions. A silicon dioxide layer such as TEOS is deposited, planarized with chemical mechanical polishing (CMP) to expose the gate and treated with dilute HF etchant to recess the silicon dioxide layer below the surface of the gate. Silicon nitride is then deposited and planarized with CMP and then etched except around the gates, using a oversize poly-silicon gate mask. Inter-level dielectric mask is then deposited, contact holes etched, and contact metal is deposited to form the transistor. During contact hole etch over poly-silicon gate, silicon nitride around the poly gate acts as an etch stop. Resulting structure with direct gate contact achieves significantly reduced gate resistance and thereby improved noise performance at high frequency operation, increased unit power gain frequency (fmax), and reduced gate delay.

    摘要翻译： 描述CMOS RF器件和制造具有低栅极接触电阻的所述器件的方法。 传统的MOS晶体管首先形成有隔离区域，多晶硅栅极结构，围绕多晶硅栅极的侧壁隔离物以及具有轻掺杂和重掺杂区域的注入源极/漏极。 沉积诸如TEOS的二氧化硅层，通过化学机械抛光（CMP）平坦化以暴露栅极，并用稀的HF蚀刻剂处理以使位于栅极表面下方的二氧化硅层凹陷。 然后将氮化硅沉积并用CMP平坦化，然后使用超大型多晶硅栅极掩模在栅极周围进行蚀刻。 然后沉积层间电介质掩模，蚀刻接触孔，并沉积接触金属以形成晶体管。 在多晶硅栅极的接触孔蚀刻期间，多晶硅周围的氮化硅作为蚀刻停止。 具有直接栅极接触的所得结构实现了显着降低的栅极电阻，从而改善了高频操作下的噪声性能，增加的单位功率增益频率（f max）和减小的栅极延迟。

    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks
    6.
    发明申请
    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks 有权
    通过在电感器件和模拟块周围形成沟道来减少衬底效应的过程

    公开(公告)号：US20050009357A1

    公开(公告)日：2005-01-13

    申请号：US10909523

    申请日：2004-08-02

    申请人： Lap Chan ,  Sanford Chu ,  Chit Ng ,  Purakh Verma ,  Jia Zheng ,  Johnny Chew ,  Choon Sia

    发明人： Lap Chan ,  Sanford Chu ,  Chit Ng ,  Purakh Verma ,  Jia Zheng ,  Johnny Chew ,  Choon Sia

    IPC分类号： H01L21/20 ,  H01L21/265 ,  H01L21/302 ,  H01L21/461 ,  H01L21/764

    CPC分类号： H01L21/764 ,  H01L21/26506

    摘要： A first method of reducing semiconductor device substrate effects comprising the following steps. O+or O2+are selectively implanted into a silicon substrate to form a silicon-damaged silicon oxide region. One or more devices are formed over the silicon substrate proximate the silicon-damaged silicon oxide region within at least one upper dielectric layer. A passivation layer is formed over the at least one upper dielectric layer. The passivation layer and the at least one upper dielectric layer are patterned to form a trench exposing a portion of the silicon substrate over the silicon-damaged silicon oxide region. The silicon-damaged silicon oxide region is selectively etched to form a channel continuous and contiguous with the trench whereby the channel reduces the substrate effects of the one or more semiconductor devices. A second method of reducing substrate effects under analog devices includes forming an analog device on a SOI substrate and then selectively etching the silicon oxide layer of the SOI substrate to form a channel at least partially underlying the analog device.

    摘要翻译： 降低半导体器件衬底效应的第一种方法包括以下步骤。 O +或O 2 +被选择性地注入到硅衬底中以形成硅损坏的氧化硅区域。 在硅衬底附近，在至少一个上部电介质层内的硅损坏的氧化硅区域附近形成一个或多个器件。 在所述至少一个上介电层上形成钝化层。 图案化钝化层和至少一个上电介质层以形成在硅损坏的氧化硅区域上暴露硅衬底的一部分的沟槽。 选择性地蚀刻硅损坏的氧化硅区域以形成与沟槽连续且邻接的沟道，由此沟道减小了一个或多个半导体器件的衬底效应。 减少模拟器件下的衬底效应的第二种方法包括在SOI衬底上形成模拟器件，然后选择性地蚀刻SOI衬底的氧化硅层，以形成至少部分在模拟器件下面的沟道。

    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks
    7.
    发明授权
    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks 有权
    通过在电感器件和模拟块周围形成沟道来减少衬底效应的过程

    公开(公告)号：US07250669B2

    公开(公告)日：2007-07-31

    申请号：US10909523

    申请日：2004-08-02

    申请人： Lap Chan ,  Sanford Chu ,  Chit Hwei Ng ,  Purakh Verma ,  Jia Zhen Zheng ,  Johnny Chew ,  Choon Beng Sia

    发明人： Lap Chan ,  Sanford Chu ,  Chit Hwei Ng ,  Purakh Verma ,  Jia Zhen Zheng ,  Johnny Chew ,  Choon Beng Sia

    IPC分类号： H01L29/00

    CPC分类号： H01L21/764 ,  H01L21/26506

    摘要： A first method of reducing semiconductor device substrate effects comprising the following steps. O+or O2+are selectively implanted into a silicon substrate to form a silicon-damaged silicon oxide region. One or more devices are formed over the silicon substrate proximate the silicon-damaged silicon oxide region within at least one upper dielectric layer. A passivation layer is formed over the at least one upper dielectric layer. The passivation layer and the at least one upper dielectric layer are patterned to form a trench exposing a portion of the silicon substrate over the silicon-damaged silicon oxide region. The silicon-damaged silicon oxide region is selectively etched to form a channel continuous and contiguous with the trench whereby the channel reduces the substrate effects of the one or more semiconductor devices. A second method of reducing substrate effects under analog devices includes forming an analog device on a SOI substrate and then selectively etching the silicon oxide layer of the SOI substrate to form a channel at least partially underlying the analog device.

    摘要翻译： 降低半导体器件衬底效应的第一种方法包括以下步骤。 选择性地注入到硅衬底中以形成硅损坏的氧化硅区域。 在硅衬底附近，在至少一个上部电介质层内的硅损坏的氧化硅区域附近形成一个或多个器件。 在所述至少一个上介电层上形成钝化层。 图案化钝化层和至少一个上电介质层以形成在硅损坏的氧化硅区域上暴露硅衬底的一部分的沟槽。 选择性地蚀刻硅损坏的氧化硅区域以形成与沟槽连续且邻接的沟道，由此沟道减小了一个或多个半导体器件的衬底效应。 减少模拟器件下的衬底效应的第二种方法包括在SOI衬底上形成模拟器件，然后选择性地蚀刻SOI衬底的氧化硅层，以形成至少部分在模拟器件下面的沟道。

    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks
    8.
    发明授权
    Process to reduce substrate effects by forming channels under inductor devices and around analog blocks 失效
    通过在电感器件和模拟块周围形成沟道来减少衬底效应的过程

    公开(公告)号：US06869884B2

    公开(公告)日：2005-03-22

    申请号：US10225828

    申请日：2002-08-22

    申请人： Lap Chan ,  Sanford Chu ,  Chit Hwei Ng ,  Purakh Verma ,  Jia Zhen Zheng ,  Johnny Chew ,  Choon Beng Sia

    发明人： Lap Chan ,  Sanford Chu ,  Chit Hwei Ng ,  Purakh Verma ,  Jia Zhen Zheng ,  Johnny Chew ,  Choon Beng Sia

    IPC分类号： H01L21/20 ,  H01L21/265 ,  H01L21/302 ,  H01L21/461 ,  H01L21/764

    CPC分类号： H01L21/764 ,  H01L21/26506

    摘要： A first method of reducing semiconductor device substrate effects comprising the following steps. O+ or O2+ are selectively implanted into a silicon substrate to form a silicon-damaged silicon oxide region. One or more devices are formed over the silicon substrate proximate the silicon-damaged silicon oxide region within at least one upper dielectric layer. A passivation layer is formed over the at least one upper dielectric layer. The passivation layer and the at least one upper dielectric layer are patterned to form a trench exposing a portion of the silicon substrate over the silicon-damaged silicon oxide region. The silicon-damaged silicon oxide region is selectively etched to form a channel continuous and contiguous with the trench whereby the channel reduces the substrate effects of the one or more semiconductor devices. A second method of reducing substrate effects under analog devices includes forming an analog device on a SOI substrate and then selectively etching the silicon oxide layer of the SOI substrate to form a channel at least partially underlying the analog device.

    摘要翻译： 降低半导体器件衬底效应的第一种方法包括以下步骤。 O +或O 2 +被选择性地注入到硅衬底中以形成硅损坏的氧化硅区域。 在硅衬底附近，在至少一个上部电介质层内的硅损坏的氧化硅区域附近形成一个或多个器件。 在所述至少一个上介电层上形成钝化层。 图案化钝化层和至少一个上电介质层以形成在硅损坏的氧化硅区域上暴露硅衬底的一部分的沟槽。 选择性地蚀刻硅损坏的氧化硅区域以形成与沟槽连续且邻接的沟道，由此沟道减小了一个或多个半导体器件的衬底效应。 减少模拟器件下的衬底效应的第二种方法包括在SOI衬底上形成模拟器件，然后选择性地蚀刻SOI衬底的氧化硅层，以形成至少部分在模拟器件下面的沟道。

    Method to form self-aligned source/drain CMOS device on insulated staircase oxide
    9.
    发明授权
    Method to form self-aligned source/drain CMOS device on insulated staircase oxide 失效
    在绝缘阶梯氧化物上形成自对准源极/漏极CMOS器件的方法

    公开(公告)号：US06541327B1

    公开(公告)日：2003-04-01

    申请号：US09760123

    申请日：2001-01-16

    申请人： Lap Chan ,  Elgin Quek ,  Ravi Sundaresan ,  Yang Pan ,  James Yong Meng Lee ,  Ying Keung Leung ,  Yelehanka Ramachandramurthy Pradeep ,  Jia Zhen Zheng

    发明人： Lap Chan ,  Elgin Quek ,  Ravi Sundaresan ,  Yang Pan ,  James Yong Meng Lee ,  Ying Keung Leung ,  Yelehanka Ramachandramurthy Pradeep ,  Jia Zhen Zheng

    IPC分类号： H01L218238

    CPC分类号： H01L29/66492 ,  H01L21/823814 ,  H01L29/41783 ,  H01L29/665 ,  H01L29/66575

    摘要： A method to form elevated source/drain (S/D) over staircase shaped openings in insulating layers. A gate structure is formed over a substrate. The gate structure is preferably comprised of a gate dielectric layer, gate electrode, first spacers, and hard mask. A first insulating layer is formed over the substrate and the gate structure. A resist layer is formed having an opening over the gate structure and over a lateral area adjacent to the gate structure. We etch the insulating layer through the opening in the resist layer. The etching removes a first thickness of the insulating layer to form a source/drain (S/D) opening. We remove the first spacers and hardmask to form a source/drain (S/D) contact opening. We implant ions into the substrate through the source/drain (S/D) contact opening to form lightly doped drain regions. We form second spacers on the sidewalls of the gate electrode and the gate dielectric and on the sidewalls of the insulating layer in the source/drain (S/D) contact opening and the source/drain (S/D) opening. A conductive layer is deposited over the gate electrode, the insulating layer. The conductive layer is planarized to exposed the insulating layer to form elevated source/drain (S/D) blocks on a staircase shape insulating layer.

    摘要翻译： 一种在绝缘层中的阶梯形开口形成升高的源极/漏极（S / D）的方法。 栅极结构形成在衬底上。 栅极结构优选由栅极电介质层，栅电极，第一间隔物和硬掩模组成。 在衬底和栅极结构之上形成第一绝缘层。 形成抗蚀剂层，其具有在栅极结构上方的开口以及与栅极结构相邻的横向区域。 我们通过抗蚀剂层中的开口蚀刻绝缘层。 蚀刻去除绝缘层的第一厚度以形成源极/漏极（S / D）开口。 我们移除第一个垫片和硬掩模以形成一个源极/漏极（S / D）接触开口。 我们通过源极/漏极（S / D）接触开口将离子注入到衬底中，以形成轻掺杂的漏极区。 我们在源极/漏极（S / D）接触开口和源极/漏极（S / D）开口中的栅电极和栅极电介质的侧壁和绝缘层的侧壁上形成第二间隔物。 在栅电极，绝缘层上沉积导电层。 导电层被平坦化以暴露绝缘层，以在阶梯形绝缘层上形成升高的源极/漏极（S / D）块。

    Method to control the channel length of a vertical transistor by first forming channel using selective epi and source/drain using implantation
    10.
    发明授权
    Method to control the channel length of a vertical transistor by first forming channel using selective epi and source/drain using implantation 失效
    通过使用选择性外延和使用注入的源极/漏极首先形成沟道来控制垂直晶体管的沟道长度的方法

    公开(公告)号：US06436770B1

    公开(公告)日：2002-08-20

    申请号：US09721720

    申请日：2000-11-27

    申请人： Ying Keung Leung ,  Yelehanka Ramachandramurthy Pradeep ,  Jia Zhen Zheng ,  Lap Chan ,  Elgin Quek ,  Ravi Sundaresan ,  Yang Pan ,  James Yong Meng Lee

    发明人： Ying Keung Leung ,  Yelehanka Ramachandramurthy Pradeep ,  Jia Zhen Zheng ,  Lap Chan ,  Elgin Quek ,  Ravi Sundaresan ,  Yang Pan ,  James Yong Meng Lee

    IPC分类号： H01L21332

    CPC分类号： H01L29/7827 ,  H01L29/42356 ,  H01L29/66666

    摘要： A method for a vertical MOS transistor whose vertical channel width can be accurately defined and controlled. Isolation regions are formed in a substrate. The isolation regions defining an active area. Then, we form a source region in the active area. A dielectric layer is formed over the active area and the isolation regions. We form a barrier layer over the dielectric layer. We form an opening in the barrier layer. A gate layer is formed in the opening. We form an insulating layer over the conductive layer and the barrier layer. We form a gate opening through the insulating layer, the gate layer and the dielectric layer to expose the source region. Gate dielectric spacers are formed over the sidewalls of the gate layer. Then, we form a conductive plug filling the gate opening. The insulating layer is removed. We form a drain region in top and side portions of the conductive plug and form doped gate regions in the gate layer. The remaining portions of the conductive plug comprise a channel region. A channel length is between the top of the source region and the drain region. We form an interlevel dielectric layer over the barrier layer, the gate layer, and the conductive plug. Contacts are formed through the interlevel dielectric layer to the doped gate regions, the drain region and the source region.

    摘要翻译： 一种垂直MOS晶体管的方法，其垂直沟道宽度可以被精确地限定和控制。 在衬底中形成隔离区。 隔离区限定有效区域。 然后，我们在活动区域​​中形成一个源区域。 在有源区域和隔离区域上形成介电层。 我们在电介质层上形成阻挡层。 我们在屏障层形成一个开口。 在开口中形成栅极层。 我们在导电层和阻挡层上形成绝缘层。 我们通过绝缘层，栅极层和电介质层形成栅极开口以暴露源极区域。 栅极电介质隔离物形成在栅极层的侧壁上。 然后，我们形成一个填充门开口的导电塞。 绝缘层被去除。 我们在导电插塞的顶部和侧部形成漏极区，并在栅极层中形成掺杂的栅极区。 导电插塞的其余部分包括沟道区域。 沟道长度在源极区域的顶部和漏极区域之间。 我们在阻挡层，栅极层和导电插塞上形成层间电介质层。 通过层间介质层与掺杂栅极区，漏极区和源极区形成触点。