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公开(公告)号：US08562271B2
公开(公告)日：2013-10-22
申请号：US12123329
申请日：2008-05-19
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译： 一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口 模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底 至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地连接，其中 第一和第二臂连杆具有不相等的长度。
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公开(公告)号：US20090003976A1
公开(公告)日：2009-01-01
申请号：US12123329
申请日：2008-05-19
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译： 一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口 模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底 至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地联接，其中 第一和第二臂连杆具有不相等的长度。
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公开(公告)号：US08678734B2
公开(公告)日：2014-03-25
申请号：US12897440
申请日：2010-10-04
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： B65G54/02 , B65G54/00 , H01L21/67 , H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。
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公开(公告)号：US07806643B2
公开(公告)日：2010-10-05
申请号：US11210918
申请日：2005-08-23
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于在负载端口接口处保持至少一个基板传输载体。 载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。
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公开(公告)号：US20090243413A1
公开(公告)日：2009-10-01
申请号：US12163996
申请日：2008-06-27
申请人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译： 一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子 其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合 所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平 转子轴承部分。
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公开(公告)号：US20080063496A1
公开(公告)日：2008-03-13
申请号：US11891835
申请日：2007-08-13
申请人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
发明人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
IPC分类号： B65G1/00
CPC分类号： H01L21/67733 , H01L21/67017 , H01L21/67126 , H01L21/67201 , H01L21/67276 , H01L21/67376 , H01L21/67379 , H01L21/67386 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67757 , H01L21/67766 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
摘要翻译： 根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分 定义旅行方向。 第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。 当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。 第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。
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公开(公告)号：US20070189880A1
公开(公告)日：2007-08-16
申请号：US11594365
申请日：2006-11-07
申请人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
发明人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , H01L21/67376 , H01L21/67386 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。
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公开(公告)号：US20070020081A1
公开(公告)日：2007-01-25
申请号：US11178830
申请日：2005-07-11
IPC分类号： B66C23/00
CPC分类号： B25J9/042 , B25J9/0087 , B25J9/08 , B25J9/10 , B25J9/104 , B25J18/04 , H01L21/67742 , Y10S901/15 , Y10S901/23 , Y10S901/28 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.
摘要翻译： 具有框架，驱动部和铰接臂的基板输送装置。 驱动部分具有至少一个电动机模块，其可选择用于从多个不同的可互换电动机模块放置在驱动部分中。 每个具有不同的预定特性。 铰接臂具有铰接接头。 臂连接到驱动部分用于铰接。 臂具有可从多个具有预定配置特性的不同臂配置中选择的可选配置。 通过选择用于放置在驱动部分中的至少一个电机模块来实现臂配置的选择。
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公开(公告)号：US20060088272A1
公开(公告)日：2006-04-27
申请号：US11207231
申请日：2005-08-19
申请人： Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Gerald Friedman , Michael Bufano
发明人： Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Gerald Friedman , Michael Bufano
IPC分类号： G02B6/00
CPC分类号： H01L21/67763 , H01L21/67326 , H01L21/67353 , H01L21/67369 , H01L21/67373 , H01L21/67376 , H01L21/67383 , H01L21/67389 , H01L21/67393 , H01L21/67772 , H01L21/67778 , H01L21/6779 , Y10S414/139
摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
摘要翻译： 提供了基板输送装置。 该装置具有外壳和门。 壳体适于在其中形成受控的环境。 壳体具有用于在壳体中保持至少一个基板的支撑。 壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。 门连接到壳体以封闭壳体中的基板传送开口。 壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。
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公开(公告)号：US20140341679A1
公开(公告)日：2014-11-20
申请号：US14223553
申请日：2014-03-24
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。
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