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公开(公告)号：US20090016855A1
公开(公告)日：2009-01-15
申请号：US12123365
申请日：2008-05-19
申请人： Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Fong
发明人： Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Fong
IPC分类号： B65G53/34
CPC分类号： H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译： 一种基板处理工具，其包括形成至少一个可分隔室的框架，该隔离室被构造成保持受控气氛，至少两个基板支撑件，位于所述至少一个可隔离室的每一个内，所述至少两个基板支撑件中的每个基板支撑件彼此堆叠 并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元，使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。
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公开(公告)号：US08272825B2
公开(公告)日：2012-09-25
申请号：US12123365
申请日：2008-05-19
申请人： Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
发明人： Christopher Hofmeister , Martin R. Elliot , Alexander Krupyshev , Joseph Hallisey , Joseph A. Kraus , William Fosnight , Craig J. Carbone , Jeffrey C. Blahnik , Ho Yin Owen Fong
IPC分类号： B65G49/07
CPC分类号： H01L21/67098 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： A substrate processing tool including a frame forming at least one isolatable chamber configured to hold a controlled atmosphere, at least two substrate supports located within each of the at least one isolatable chamber, each of the at least two substrate supports being stacked one above the other and configured to hold a respective substrate and a cooling unit communicably coupled to the at least two substrate supports such that the at least two substrate supports and cooling unit effect simultaneous conductive cooling of each of the respective substrates located on the at least two substrate supports.
摘要翻译： 一种基板处理工具，其包括形成至少一个可分隔室的框架，该隔离室被构造成保持受控气氛，至少两个基板支撑件，位于所述至少一个可隔离室的每一个内，所述至少两个基板支撑件中的每个基板支撑件彼此堆叠 并且被配置为保持相应的基板和可通信地联接到所述至少两个基板支撑件的冷却单元，使得所述至少两个基板支撑件和冷却单元对位于所述至少两个基板支撑件上的各个基板的每个基板进行同时导电冷却。
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公开(公告)号：US20120223597A1
公开(公告)日：2012-09-06
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： H02K41/02
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US20090162179A1
公开(公告)日：2009-06-25
申请号：US12330780
申请日：2008-12-09
IPC分类号： B65G35/00
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67727 , H01L21/67742 , H01L21/67766
摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.
摘要翻译： 用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统 输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。
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公开(公告)号：US08562271B2
公开(公告)日：2013-10-22
申请号：US12123329
申请日：2008-05-19
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译： 一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口 模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底 至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地连接，其中 第一和第二臂连杆具有不相等的长度。
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公开(公告)号：US08960099B2
公开(公告)日：2015-02-24
申请号：US12330780
申请日：2008-12-09
IPC分类号： B60L13/04 , H01L21/67 , H01L21/677
CPC分类号： H01L21/67161 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67709 , H01L21/67727 , H01L21/67742 , H01L21/67766
摘要： A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.
摘要翻译： 用于输送装置的驱动系统包括连接到输送装置的多个永磁体，暴露于多个永磁体中的至少一个的磁场的多个静止绕组，用于给固定绕组通电以提供磁性的控制系统 输送装置上的力，以及靠近运输装置的至少一侧的铁磁部件的布置，用于提供传送装置的提升，俯仰和滚动的被动稳定。
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公开(公告)号：US20090003976A1
公开(公告)日：2009-01-01
申请号：US12123329
申请日：2008-05-19
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译： 一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口 模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底 至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地联接，其中 第一和第二臂连杆具有不相等的长度。
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公开(公告)号：US08803513B2
公开(公告)日：2014-08-12
申请号：US13412392
申请日：2012-03-05
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US08129984B2
公开(公告)日：2012-03-06
申请号：US12163716
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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公开(公告)号：US20090224750A1
公开(公告)日：2009-09-10
申请号：US12163716
申请日：2008-06-27
申请人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
发明人： Martin Hosek , Christopher Hofmeister , John F. Zettler , Alexander Krupyshev , Sergei Syssoev , Krzystof Majczak
IPC分类号： G01B7/14
CPC分类号： G01B7/003
摘要： An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.
摘要翻译： 一种装置，包括控制器，与具有可移动部分和传送路径的控制器通信的工件传送装置，以及多维位置测量装置，其包括至少一个固定在可移动部分上的场产生压板和至少一个定位的传感器组 沿着传送路径并与控制器通信，场产生压板被配置为用于位置测量并推动可移动部分，所述至少一个传感器组中的每个传感器被配置为沿着对应于一个传感器的单个轴提供一个输出信号 基于所述至少一个传感器组中的至少一个传感器的一个输出信号，所述多个传感器组中的所述多个传感器组中的所述多个传感器组中的至少一个传感器的一个输出信号被配置为计算所述可移动部分的多维位置， 包括平面位置和间隙测量的三维位置。
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