公开(公告)号：US08822952B2

公开(公告)日：2014-09-02

申请号：US13883764

申请日：2011-10-14

申请人： Daisuke Muto ,  Masanori Watanabe ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Masahiro Akatsu ,  Yusuke Tanba ,  Satoshi Okada

发明人： Daisuke Muto ,  Masanori Watanabe ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Masahiro Akatsu ,  Yusuke Tanba ,  Satoshi Okada

IPC分类号： H01J37/16 ,  H01J37/28 ,  H01J37/26 ,  G10K11/172

CPC分类号： H01J37/261 ,  G10K11/172 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0216

摘要： Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.

摘要翻译： 带电粒子束装置，其中提供专门用于包括带电粒子束装置的固有频率的第一频率范围的噪声吸收性能的第一噪声吸收器作为参考，或者提供专门用于第二个噪声吸收性能的第二噪声吸收器 包括在作为参考的盖子内产生的声驻波的频率或第一和第二噪声吸收器两者的频率范围被设置在带电粒子束装置的盖内。

公开(公告)号：US20130228686A1

公开(公告)日：2013-09-05

申请号：US13883764

申请日：2011-10-14

申请人： Daisuke Muto ,  Masanori Watanabe ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Masahiro Akatsu ,  Yusuke Tanba ,  Satoshi Okada

发明人： Daisuke Muto ,  Masanori Watanabe ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Masahiro Akatsu ,  Yusuke Tanba ,  Satoshi Okada

IPC分类号： H01J37/26

CPC分类号： H01J37/261 ,  G10K11/172 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/0216

摘要： Currently, there is no noise-proof cover, particularly noise-proof cover used in a clean room, which absorbs noise by a structure specialized for an estimated frequency of noise produced by environmental noise. Therefore, efficient noise absorption is still difficult.Accordingly, the invention provides a charged particle beam apparatus in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.

摘要翻译： 目前，没有防噪音的盖子，特别是在洁净室中使用的防噪声罩，其通过专门针对由环境噪声产生的噪声估计频率的结构吸收噪声。 因此，高效的噪声吸收仍然是困难的。 因此，本发明提供一种带电粒子束装置，其中提供专门用于包括带电粒子束装置的固有频率的第一频率范围的噪声吸收性能的第一噪声吸收器或者提供噪声吸收的第二噪声吸收器 专门用于包括在作为参考的盖子内产生的声驻波的频率或者第一和第二噪声吸收器两者的第二频率范围的性能被布置在带电粒子束装置的盖内。

公开(公告)号：US08653455B2

公开(公告)日：2014-02-18

申请号：US13375085

申请日：2010-06-03

申请人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

发明人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

IPC分类号： G01N23/00

CPC分类号： H01L21/6831 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12

摘要： The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle beam to deflect there. An electrode plate installed inside the specimen holding mechanism of electrostatic attraction type is formed of an inner and outer electrode plates arranged concentrically. The outer electrode plate is formed to have an outer diameter larger than that of the specimen. The dimensions of the electrode plates are determined so that an overlapping area of the outer electrode plate and the specimen is substantially equal to an area of the inner electrode plate. The inner electrode plate is impressed with a voltage of a positive polarity with respect to a reference voltage and of an arbitrary magnitude, and the outer electrode is impressed with a voltage of a negative polarity and of an arbitrary magnitude.

摘要翻译： 带电粒子束装置具有在试样的外边缘附近等待电位分布的对称性被扰乱的问题，被评估的物体导致带电粒子束在那里偏转。 安装在静电吸引型的检体保持机构内的电极板由同心配置的内外电极板形成。 外电极板的外径大于样品的外径。 确定电极板的尺寸，使得外部电极板和试样的重叠面积基本上等于内部电极板的面积。 内部电极板相对于参考电压和任意大小施加正极性的电压，并且外部电极施加负极性和任意大小的电压。

公开(公告)号：US20120145920A1

公开(公告)日：2012-06-14

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G21K5/10 ,  H02K41/02

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US08823309B2

公开(公告)日：2014-09-02

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G03B27/42 ,  H01L21/027

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US20120070066A1

公开(公告)日：2012-03-22

申请号：US13375085

申请日：2010-06-03

申请人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

发明人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

IPC分类号： G06K9/00

CPC分类号： H01L21/6831 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12

摘要： The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle beam to deflect there. An electrode plate installed inside the specimen holding mechanism of electrostatic attraction type is formed of an inner and outer electrode plates arranged concentrically. The outer electrode plate is formed to have an outer diameter larger than that of the specimen. The dimensions of the electrode plates are determined so that an overlapping area of the outer electrode plate and the specimen is substantially equal to an area of the inner electrode plate. The inner electrode plate is impressed with a voltage of a positive polarity with respect to a reference voltage and of an arbitrary magnitude, and the outer electrode is impressed with a voltage of a negative polarity and of an arbitrary magnitude.

摘要翻译： 带电粒子束装置具有在试样的外边缘附近等待电位分布的对称性被扰乱的问题，被评估的物体导致带电粒子束在那里偏转。 安装在静电吸引型的检体保持机构内的电极板由同心配置的内外电极板形成。 外电极板的外径大于样品的外径。 确定电极板的尺寸，使得外部电极板和试样的重叠面积基本上等于内部电极板的面积。 内部电极板相对于参考电压和任意大小施加正极性的电压，并且外部电极施加负极性和任意大小的电压。

公开(公告)号：US08076651B2

公开(公告)日：2011-12-13

申请号：US12415720

申请日：2009-03-31

申请人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

发明人： Masahiro Koyama ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

公开(公告)号：US20090250625A1

公开(公告)日：2009-10-08

申请号：US12415720

申请日：2009-03-31

申请人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

发明人： Masahiro KOYAMA ,  Hironori Ogawa ,  Nobuo Shibata ,  Masaru Matsushima ,  Toshinori Kobayashi ,  Shuichi Nakagawa

IPC分类号： G21K5/10

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/202 ,  H01J2237/2485 ,  H01L21/68

摘要： A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.

摘要翻译： 试样台装置具有制动结构，其可以产生足以停止试样台的制动力，同时保持可移动台不增加其重量。 试样台装置具有固定在X基座上并表示X方向的导向结构的X导件，由X导向件限制的X台沿X方向移动的X导件，具有固定到X台的可动部的X致动器， X制动器固定在X底座上并表示X台的制动结构。 控制器执行定位控制，其中通过将X制动器推压到X工作台的底面上来产生制动力，以在试样台停止之后停止试样台并关闭X致动器的伺服控制。

公开(公告)号：US06943945B2

公开(公告)日：2005-09-13

申请号：US10825131

申请日：2004-04-16

申请人： Shuichi Nakagawa ,  Eiichi Seya

发明人： Shuichi Nakagawa ,  Eiichi Seya

IPC分类号： G01N23/225 ,  G02B21/26 ,  H01J37/20 ,  H01L21/68

CPC分类号： G02B21/26

摘要： A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1, an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7, and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1, the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1. Additionally, a slide unit 14 is disposed on the third table 4, the slide unit 14 being movable in the X direction and connected with the Y table 3.

摘要翻译： 用于显微镜的双轴平台，具有减小的振动，并且适于增加平台传送速度能够设置在室内而不改变地面投影面积。 XY台包括基座1，可以通过X馈送螺钉7在基座1上沿X方向移动的X台2和支撑在X台2上并可沿Y方向移动的Y台3 。 第三台4设置在基座1上，第三台可以通过位于基座1上的Y形进给螺钉8沿Y方向移动。 此外，滑动单元14设置在第三工作台4上，滑动单元14可沿X方向移动并与Y工作台3连接。

公开(公告)号：US06266508B1

公开(公告)日：2001-07-24

申请号：US09504798

申请日：2000-02-15

申请人： Shuichi Nakagawa ,  Hiroshi Goto ,  Tateki Oka

发明人： Shuichi Nakagawa ,  Hiroshi Goto ,  Tateki Oka

IPC分类号： G03G1508

CPC分类号： G03G15/065 ,  G03G2215/00042 ,  G03G2215/0634

摘要： A developing apparatus according to the present invention comprises a developer carrying member for holding a developer and introducing the developer into a developing area opposite to the image carrying member at a required distance; a voltage applying device for applying an AC voltage to the developer carrying member; and a resistor inserted between the developer applying device and the developer carrying member, the AC voltage applied to the developer carrying member from the voltage applying device through the resistor being composed of a rectangular wave, and a time period during which a voltage, which is exerted in the direction in which the developer is fed to the image carrying member, in the AC voltage is less than 50% of a time period during which the AC voltage is exerted.

摘要翻译： 根据本发明的显影装置包括用于保持显影剂的显影剂承载构件并将显影剂以所需距离引入与图像承载构件相对的显影区域中; 用于向显影剂承载构件施加AC电压的电压施加装置; 以及插在显影剂施加装置和显影剂承载构件之间的电阻器，通过由矩形波构成的电阻器从电压施加装置施加到显影剂承载构件的AC电压，以及电压是 施加在显影剂被馈送到图像承载构件的方向上的交流电压小于施加交流电压的时间段的50％。