Method for making magnetic write head
    1.
    发明申请
    Method for making magnetic write head 失效
    磁头写入方法

    公开(公告)号:US20070017087A1

    公开(公告)日:2007-01-25

    申请号:US11186174

    申请日:2005-07-21

    IPC分类号: G11B5/127

    摘要: After defining the P2 pole of a magnetic read head, alumina is deposited over it and planarized by CMP, with the portion of the alumina overlaying the ABS region of the P2 pole subsequently being masked by a photoresist layer and with the portions of the alumina overlaying the flare area, back gap region, and center tap regions of the P2 pole not being masked. A reactive ion mill is performed to expose the flare area, back gap region, and center tap regions of the P2 pole by removing the alumina over these portions, so that subsequent steps such as forming a layer of coiled conductors, forming a return pole, and forming stud connections along with removing the respective seed layers can be executed with the ABS region protected by the alumina and with the flare area, back gap region, and center tap region exposed.

    摘要翻译: 在定义磁读头的P2极之后,将氧化铝沉积在其上并通过CMP平坦化,其中覆盖P2极的ABS区域的氧化铝的部分随后被光致抗蚀剂层掩蔽,并且氧化铝的部分覆盖 P2极的光斑区域,背隙区域和中心抽头区域不被掩蔽。 通过在这些部分上除去氧化铝,进行反应离子磨,以暴露P2极的火炬区域,后隙区域和中心抽头区域,从而形成后续步骤,例如形成线圈导体层,形成返回极, 并且可以利用由氧化铝保护的ABS区域和暴露的火炬区域,后隙区域和中心抽头区域来执行形成螺柱连接以及移除相应的种子层。

    P1 write pole with shoulder formation and method of fabrication
    3.
    发明申请
    P1 write pole with shoulder formation and method of fabrication 失效
    P1写杆与肩部形成和制造方法

    公开(公告)号:US20060171069A1

    公开(公告)日:2006-08-03

    申请号:US11046740

    申请日:2005-01-31

    IPC分类号: G11B5/147

    CPC分类号: G11B5/1871 G11B5/3116

    摘要: A magnetic disk drive head is disclosed including a write head, which includes a P1 layer having a pedestal portion, a gap layer formed on the P1 layer, and a P2 layer formed on the gap layer. The P1 layer includes a shoulder formation having a neck portion and a beveled portion. Also disclosed is a disk drive having a write head with a P1 layer with shoulder formation, and a method for fabricating a write pole for a magnetic recording head having a P1 layer with shoulder formation.

    摘要翻译: 公开了一种包括写头的磁盘驱动器头,该写头包括具有基座部分的P 1层,在P 1层上形成的间隙层和形成在间隙层上的P 2层。 P 1层包括具有颈部和斜面部分的肩部结构。 还公开了一种具有具有肩部形成的P 1层的写入头的磁盘驱动器,以及用于制造具有具有肩部形成的P 1层的磁性记录头的写入磁极的方法。

    Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording
    4.
    发明申请
    Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording 失效
    用于制造用于垂直磁记录的磁通引​​导层的侧屏蔽的方法

    公开(公告)号:US20070146931A1

    公开(公告)日:2007-06-28

    申请号:US11317917

    申请日:2005-12-22

    IPC分类号: G11B5/147

    摘要: A magnetic head for use in a perpendicular recording system having a novel shield structure that provides exceptional magnetic shielding from extraneous magnetic fields such as from a write coil, shaping layer or return pole of the write head. The shield structure is constructed to have a bottom or leading surface that is generally coplanar with the bottom or leading surface of the shaping layer, but all or a portion of the shield structure is not as thick as the shaping layer so as to have a top surface that does not extend to the same elevation (in a trailing direction) as that of the shaping layer. Making the shields extend to a lower level than the shaping layer improves magnetic performance by reducing flux leakage from the write pole, and also provides manufacturing advantages, such as during the manufacturing of the write pole. These manufacturing advantages include the advantage of having the shields covered with a protective layer of, for example, alumina during the ion milling of the write pole.

    摘要翻译: 一种用于垂直记录系统的磁头,其具有新的屏蔽结构,其提供例如来自写入磁头的写入线圈,成形层或返回磁极的外部磁场的卓越的磁屏蔽。 屏蔽结构被构造成具有与成形层的底部或前表面大致共面的底部或前表面,但是屏蔽结构的全部或一部分不像成形层那样厚,以便具有顶部 表面不延伸到与成形层相同的高度(在拖尾方向上)。 使屏蔽层延伸到比成形层更低的水平,通过减小来自写入极的磁通泄漏来提高磁性能,并且还提供制造优点,例如在写入磁极的制造期间。 这些制造优点包括在写入极的离子铣削期间使屏蔽覆盖有例如氧化铝的保护层的优点。

    Method for reducing pole height loss in the formation of a write pole for a magnetic write head
    5.
    发明授权
    Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
    降低写入磁头写磁极的磁极高度损失的方法

    公开(公告)号:US07263762B2

    公开(公告)日:2007-09-04

    申请号:US10957038

    申请日:2004-09-30

    IPC分类号: G11B5/127 G11B5/187

    摘要: A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.

    摘要翻译: 本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。 该方法包括在薄膜基板上形成导电层,在导电层上形成光致抗蚀剂层,并在光刻胶层中形成沟槽。 然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。 此外,该方法包括电镀,同时向薄膜基板施加电压,其中去除电隔离种子层,并且沟槽填充有电镀材料,去除光致抗蚀剂层,以及去除薄膜上的导电层的暴露部分 基质。

    Magnetic head having notched first magnetic pole
    8.
    发明申请
    Magnetic head having notched first magnetic pole 有权
    磁头具有切口第一磁极

    公开(公告)号:US20070183092A1

    公开(公告)日:2007-08-09

    申请号:US11347356

    申请日:2006-02-03

    IPC分类号: G11B5/147

    摘要: A multi-step process for notching the P1 pole of the write head element of a magnetic head. In a first step following the fabrication of the P2 pole tip, a layer of protective material is deposited on the approximately vertical side surfaces of the P2 pole tip. Thereafter, a first ion milling step, utilizing a species such as argon, is performed to mill through the write gap layer and to notch into the P1 pole layer therebelow. The removal of redeposited material from the side surfaces of the P2 pole tip is thereafter accomplished and the protective material formed on the side surfaces of the P2 pole tip protects the P2 pole tip during the redeposition clean up step. Thereafter, the protective material is removed from the side surfaces of the P2 pole tip, and a second ion milling step is performed to further notch the P1 pole material.

    摘要翻译: 用于切割磁头的写入头元件的P1极的多步骤过程。 在制造P2极尖之后的第一步骤中,在P2极尖的大致垂直侧表面上沉积有一层保护材料。 此后,进行利用物质如氩的第一离子研磨步骤,通过写入间隙层研磨并陷入其下方的P1极层。 然后,从P2极尖端的侧面去除再沉积材料,并且形成在P2极端部的侧表面上的保护材料在再沉积清洁步骤期间保护P2极尖。 然后,从P2极端部的侧面除去保护材料,进行第二离子研磨工序,进一步切断P1极材料。

    Method for reducing pole height loss in the formation of a write pole for a magnetic write head
    9.
    发明申请
    Method for reducing pole height loss in the formation of a write pole for a magnetic write head 失效
    降低写入磁头写磁极的磁极高度损失的方法

    公开(公告)号:US20060070232A1

    公开(公告)日:2006-04-06

    申请号:US10957038

    申请日:2004-09-30

    IPC分类号: G11B5/187

    摘要: A method for reducing plated pole height loss in the formation of a write pole for a magnetic write head is disclosed. The method includes forming a conductive layer on a thin film substrate, forming a photoresist layer on the conductive layer and forming a trench in the photoresist layer. A thick seed layer is then placed on the trench and on the photoresist layer surface using a collimator. Moreover, the process includes plating while applying a voltage to the thin film substrate where the electrically isolated seed layer is removed and the trench is filled with plating material, removing the photoresist layer, and removing the exposed portions of the conductive layer on the thin film substrate.

    摘要翻译: 本发明公开了一种在形成写磁头写磁极时降低电极高度损耗的方法。 该方法包括在薄膜基板上形成导电层,在导电层上形成光致抗蚀剂层,并在光刻胶层中形成沟槽。 然后使用准直器将厚的种子层放置在沟槽和光致抗蚀剂层表面上。 此外,该方法包括电镀,同时向薄膜基板施加电压,其中去除电隔离种子层,并且沟槽填充有电镀材料,去除光致抗蚀剂层,以及去除薄膜上的导电层的暴露部分 基质。