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    Method of manufacturing a crater-style capacitor for high-voltage radio-frequency applications
    2.
    发明授权
    Method of manufacturing a crater-style capacitor for high-voltage radio-frequency applications 失效
    制造用于高压射频应用的火山口式电容器的方法

    公开(公告)号：US06546607B1

    公开(公告)日：2003-04-15

    申请号：US09541863

    申请日：2000-04-03

    申请人： Robert K. Crawford ,  J. Gerson Goldberg

    发明人： Robert K. Crawford ,  J. Gerson Goldberg

    IPC分类号： H01G700

    CPC分类号： H01G4/00 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49146 ,  Y10T29/49155 ,  Y10T29/49165

    摘要： A method for forming a crater-style sampling capacitor. The capacitor includes a dielectric having a smooth crater shaped input electrode on a first surface and output and guard electrodes on a second surface. A sampling capacitor is defined by the input and output electrodes, and a guard capacitor is defined by the input and guard electrodes. The edge of input electrode is positioned below the first surface to increase surface flash over voltage, further, the input electrode is curved to eliminate corona discharge at edges of the input electrode and to reduce self-heating to negligible levels. The apparatus is suitable for high-voltage radio-frequency applications, such as a mass spectrometer, or other high-voltage applications that require an accurate sampling capacitor for amplitude control and accurate sampling of radio-frequency wave-forms.

    摘要翻译： 一种形成火山口式采样电容器的方法。 电容器包括在第一表面上具有平滑的凹坑形输入电极的电介质，并在第二表面上输出和保护电极。 采样电容器由输入和输出电极定义，保护电容由输入和保护电极限定。 输入电极的边缘位于第一表面下方以增加表面闪光过电压，此外，输入电极是弯曲的，以消除输入电极边缘处的电晕放电，并将自加热降低到可忽略的水平。 该装置适用于高压射频应用，如质谱仪或其他高压应用，需要精确的采样电容器进行幅度控制和射频波形的精确采样。