公开(公告)号：US20090212021A1

公开(公告)日：2009-08-27

申请号：US11917453

申请日：2006-06-13

申请人： David D. Bernhard ,  Weihua Wang ,  Thomas H. Baum

发明人： David D. Bernhard ,  Weihua Wang ,  Thomas H. Baum

IPC分类号： B44C1/22 ,  C09K13/00 ,  C09K13/06 ,  C09K13/08

CPC分类号： H01L21/32134 ,  C23F1/26 ,  C23F1/28

摘要： An aqueous metal etching composition useful for removal of metals such as nickel, cobalt, titanium, tungsten, and alloys thereof, after formation of metal silicides via rapid thermal annealing during complementary metal-oxide-semiconductor (CMOS) transistor fabrication. The aqueous metal etching composition is also useful for selective removal of metal silicides and/or metal nitrides for wafer re-work. In one formulation, the aqueous metal etching composition contains oxalic acid, and a chloride-containing compound, and in other formulations, the composition contains an oxidizer, such as hydrogen peroxide, and a fluoride source, e.g., borofluoric acid. The composition in another specific formulation contains borofluoric acid and boric acid for effective etching of nickel, cobalt, titanium, tungsten, metal alloys, metal silicides and metal nitrides, without attacking the dielectric and the substrate.

摘要翻译： 在互补金属氧化物半导体（CMOS）晶体管制造中通过快速热退火形成金属硅化物之后，可用于去除诸如镍，钴，钛，钨及其合金的金属的含水金属蚀刻组合物。 含水金属蚀刻组合物还可用于选择性去除金属硅化物和/或金属氮化物用于晶片再加工。 在一种配方中，含水金属蚀刻组合物含有草酸和含氯化合物，并且在其它配方中，该组合物含有氧化剂，例如过氧化氢和氟化物源，例如硼氟酸。 另一具体制剂中的组合物含有硼氟酸和硼酸，用于有效地蚀刻镍，钴，钛，钨，金属合金，金属硅化物和金属氮化物，而不侵蚀电介质和基底。

公开(公告)号：US20090215659A1

公开(公告)日：2009-08-27

申请号：US11813497

申请日：2006-01-09

申请人： David W. Minsek ,  Weihua Wang ,  David D. Bernhard ,  Thomas H. Baum ,  Melissa K. Rath

发明人： David W. Minsek ,  Weihua Wang ,  David D. Bernhard ,  Thomas H. Baum ,  Melissa K. Rath

IPC分类号： G03F7/42

CPC分类号： G03F7/425 ,  G03F7/091

摘要： An aqueous-based composition and process for removing hardened photoresist and/or bottom anti-reflective coating (BARC) material from a microelectronic device having same thereon. The aqueous-based composition includes at least one chaotropic solute, at least one alkaline base, and deionized water. The composition achieves high-efficiency removal of hardened photoresist and/or BARC material in the manufacture of integrated circuitry without adverse effect to metal species on the substrate, such as copper, and without damage to low-k dielectric materials employed in the microelectronic device architecture.

摘要翻译： 一种水性组合物和从其上具有其的微电子器件去除硬化的光致抗蚀剂和/或底部抗反射涂层（BARC）材料的方法。 水基组合物包括至少一种离液序列溶质，至少一种碱性碱和去离子水。 组合物在集成电路的制造中实现了高效去除硬化的光致抗蚀剂和/或BARC材料，而不会对衬底（例如铜）上的金属物质产生不利影响，并且不损害在微电子器件结构中使用的低k电介质材料 。

公开(公告)号：US07994108B2

公开(公告)日：2011-08-09

申请号：US11813497

申请日：2006-01-09

申请人： David W. Minsek ,  Weihua Wang ,  David D. Bernhard ,  Thomas H. Baum ,  Melissa K. Rath

发明人： David W. Minsek ,  Weihua Wang ,  David D. Bernhard ,  Thomas H. Baum ,  Melissa K. Rath

IPC分类号： G03F7/32

CPC分类号： G03F7/425 ,  G03F7/091

摘要： An aqueous-based composition and process for removing hardened photoresist and/or bottom anti-reflective coating (BARC) material from a microelectronic device having same thereon. The aqueous-based composition includes at least one chaotropic solute, at least one alkaline base, and deionized water. The composition achieves high-efficiency removal of hardened photoresist and/or BARC material in the manufacture of integrated circuitry without adverse effect to metal species on the substrate, such as copper, and without damage to low-k dielectric materials employed in the microelectronic device architecture.

摘要翻译： 一种水性组合物和从其上具有其的微电子器件去除硬化的光致抗蚀剂和/或底部抗反射涂层（BARC）材料的方法。 水基组合物包括至少一种离液序列溶质，至少一种碱性碱和去离子水。 组合物在集成电路的制造中实现了高效去除硬化的光致抗蚀剂和/或BARC材料，而不会对衬底（例如铜）上的金属物质产生不利影响，并且不损害在微电子器件结构中使用的低k电介质材料 。

公开(公告)号：US08016956B2

公开(公告)日：2011-09-13

申请号：US11912146

申请日：2006-04-07

申请人： Bo Zhang ,  Deqian Zhao ,  Mingxiang Pan ,  Weihua Wang

发明人： Bo Zhang ,  Deqian Zhao ,  Mingxiang Pan ,  Weihua Wang

IPC分类号： C22C45/00

CPC分类号： C22C45/00

摘要： The present invention concerns a Ce-base amorphous metallic plastics being CeaAlbMc, in which 55≦a≦75, 5≦b≦25, 10≦c≦25, and a+b+c=100; said M is Co, Cu or Ni. Otherwise the metallic plastics could be CedAleCufZg, in which 55≦d≦75, 5≦e≦15, 15≦f≦25, 0.01≦g≦10, and d+e+f+g=100; said Z is one element selected from Co, Fe, Hf, Mg, Mo, Nb, Sc, Ta, Ti, W, Zn and Zr. The metallic plastic could also be CehAliCujNik, in which 55≦h≦75, 5≦i≦15, 15≦j≦25, 0.01≦k

摘要翻译： 本发明涉及一种Ce基非晶态金属塑料，它是CeaAlbMc，其中55和nlE; a＆nlE; 75,5和nlE; b＆nlE; 25,10和nlE; c＆nlE; 25和a + b + c = 100; 所说的M是Co，Cu或Ni。 否则金属塑料可以是CedAleCufZg，其中55和nlE; d＆nlE; 75,5和nlE; e＆nlE; 15,15和nlE; f＆nlE; 25,0.01和nlE; g＆nlE; 10和d + e + f + g = 100; 所述Z是选自Co，Fe，Hf，Mg，Mo，Nb，Sc，Ta，Ti，W，Zn和Zr中的一种元素。 金属塑料也可以是CehAliCujNik，其中55和nlE; h＆nlE; 75,5和nlE; i＆nlE; 15,15和nlE; j＆nlE; 25,0.01＆nlE; k <5，并且h + i + j + k = 100。 Ce基非晶金属塑料具有较低的玻璃化转变温度和宽的超冷却液相面积，因此具有高的热稳定性。 该材料可以在非常低的温度下变形，成形和压印加工成所需的非晶合金制品作为热塑性塑料。

公开(公告)号：US20100012003A1

公开(公告)日：2010-01-21

申请号：US12176337

申请日：2008-07-19

申请人： Yuming Huang ,  Wanduan Huang ,  Ailian Wang ,  Yuzhu Huang ,  Yuling Huang ,  Yujian Huang ,  Weihua Wang

发明人： Yuming Huang ,  Wanduan Huang ,  Ailian Wang ,  Yuzhu Huang ,  Yuling Huang ,  Yujian Huang ,  Weihua Wang

IPC分类号： E05G1/02

CPC分类号： E05G1/02

摘要： The security class or burglary resistant capability of a safe is determined by the safe's weakest parts: combinations lock, key lock, keyboard, LCD screen, card reader, fingerprint scanner, etc (referred as weak parts below). The results of an attack to the safe include opening safe door, digging holes on safe door or body, or dysfunction of the above weak parts. The corresponding consequences are: Objects deposited inside the safe are stolen or destroyed. Even if those objects stay intact, the safe owner is no longer able to operate the safe. A new design method about safe is disclosed in this invention. The new safe has no weak parts on its surface. It's obvious that weak parts are easier to destroy than safe door and body, which is why they are called weak parts. For safes without weak parts on their surface, these weak parts (in user's hand or inside safe) are not so easy to be attacked on. The GSA class or UL Certification is improved for the new safe. Users will find the new safe is more secure and convenient to use. The design method applies to other security containers and doors.

摘要翻译： 安全防护等级或防盗功能由安全防护装置的最弱部分决定：组合锁，钥匙锁，键盘，液晶屏，读卡器，指纹扫描仪等（以下简称为弱部）。 对保险箱的攻击结果包括打开安全门，在安全门或身体上挖洞，或上述弱部分的功能障碍。 相应的后果是：存放在保险柜内的物品被盗或被毁坏。 即使这些物品保持原样，安全所有者也不再能够操作保险箱。 本发明公开了一种关于安全性的新设计方法。 新的保险箱表面没有薄弱的部件。 很明显，弱部件比安全的门和身体容易破坏，这就是为什么它们被称为弱部件。 对于表面没有弱部件的保险箱，这些弱部件（用户手中或内部安全）并不容易受到攻击。 GSA类或UL认证被改进为新的安全。 用户会发现新的保险箱更安全，更方便使用。 该设计方法适用于其他安全集装箱和门。

公开(公告)号：US20100291689A1

公开(公告)日：2010-11-18

申请号：US12293483

申请日：2007-03-14

申请人： Robert M. Strongin ,  Onur Alptürk ,  Oleksandr Rusin ,  Sayo O. Fakayode ,  Jorge O. Escobedo Cordova ,  Weihua Wang ,  Isiah M. Warner ,  William E. Crowe ,  Vladimir Král

发明人： Robert M. Strongin ,  Onur Alptürk ,  Oleksandr Rusin ,  Sayo O. Fakayode ,  Jorge O. Escobedo Cordova ,  Weihua Wang ,  Isiah M. Warner ,  William E. Crowe ,  Vladimir Král

IPC分类号： G01N33/48 ,  G01N33/92 ,  G01N33/574 ,  C07F5/00 ,  C07C251/00

CPC分类号： G01N33/57449 ,  Y10T436/143333

摘要： A group of water-soluble salophene-lanthanide complexes and other salophene-metal complexes are useful for purposes including: (i) detecting neutral carbohydrates at physiologically-relevant pH, (ii) the selective detection of gangliosides, and (iii) the selective detection of lysophosphatidic acid (LPA) in the presence of phosphatidic acid. The selective detection of LPA is useful in diagnosing ovarian and other cancers.

摘要翻译： 一组水溶性樟脑磺酸镧系元素配合物和其他的三环素金属络合物可用于：（i）在生理相关pH下检测中性碳水化合物，（ii）选择性检测神经节苷脂，和（iii）选择性检测 的磷脂酸存在下的溶血磷脂酸（LPA）。 LPA的选择性检测可用于诊断卵巢癌和其他癌症。

公开(公告)号：US20090135132A1

公开(公告)日：2009-05-28

申请号：US11944629

申请日：2007-11-25

申请人： Yuming Huang ,  Weihua Wang ,  Yujian Huang

发明人： Yuming Huang ,  Weihua Wang ,  Yujian Huang

IPC分类号： G09G5/00 ,  G06F3/041

CPC分类号： G09G3/20 ,  G09G2340/0407 ,  G09G2340/145

摘要： A portable display system for an electronic device is invented, which consists of a portable display and a pair of eye glasses. The size of the display is small for easy carrying, for example, the display can fit in to a hand. The resolution of the display is changeable, for example, it can be lower than one hundred by one hundred for normal cell phone usage. It can be as high as thousands by thousands to show HDTV, movie, and web browsing. When the display is in its low resolution mode, naked eyes can see the display content without problem. When the display is in its high resolution mode, the pair of glasses, which enlarges the display content a few times, is needed. There may be, depending of application, multiple resolution modes between the lowest and the highest.The display system may allow interactive input from users. For example, a user is surfing the Internet using a cell phone, via the pair of glasses. When the user wants to follow a link, the user's finger taps the link on the display. If the area touched by the finger tip contains exactly one link, the link is followed and a new web page is shown. However, since the display content is magnified by the glasses, the area touched by the finger tip may contain other links besides the link. At this time, the display magnifies the area to allow the finger tip to pin point to a unique link. What the user sees is that the area touched by the finger tip is enlarged more than other parts of the display not touched by the finger tip. If the user does not tap again for some time, for example, a few seconds, the enlargement for the area disappears. On the other hand, if the user taps again and the area touched by the finger tip contains multiple links still, the area is magnified further. Other input media apart from web links, include but not limits to, software button, menu, list, keyboard, etc.The invention is not about a resolution changeable display, nor about a pair of magnifying glasses. The invention is about a set of compatible displays and a pair of glasses, which work together to enable people use or enjoy visual content usually based on large size display.

公开(公告)号：US20050241948A1

公开(公告)日：2005-11-03

申请号：US10836546

申请日：2004-04-30

申请人： Jianwen Han ,  MacKenzie King ,  Weihua Wang ,  Glenn Tom ,  Jay Jung

发明人： Jianwen Han ,  MacKenzie King ,  Weihua Wang ,  Glenn Tom ,  Jay Jung

IPC分类号： C25D3/38 ,  C25D5/18 ,  C25D21/12 ,  C25D21/14 ,  G01N27/26 ,  G01N27/42

CPC分类号： C25D5/18 ,  C25D1/00 ,  C25D3/38 ,  C25D21/12 ,  C25D21/14 ,  G01N27/42 ,  H05K3/188 ,  H05K2203/163

摘要： The present invention relates in general to real-time analysis of electrochemical deposition (ECD) metal plating solutions, for the purpose of reducing plating defects and achieving high quality metal deposition. The present invention provides various new electrochemical analytical cell designs for reducing cross-contamination and increasing analytical signal strength. The present invention also provides improved plating protocols for increasing potential signal strength and reducing the time required for each measurement cycle. Further, the present invention provides new methods and algorithms for simultaneously determining concentrations of suppressor, accelerator, and leveler in a sample ECD solution within three experimental runs. A particularly preferred embodiment of the present invention provides a method for simultaneously determining concentrations of all three organic additives within a single experimental run by using a single analytical cell, while interactions between such additives are properly accounted for.

摘要翻译： 本发明一般涉及电化学沉积（ECD）金属电镀溶液的实时分析，以减少电镀缺陷并实现高质量的金属沉积。 本发明提供用于减少交叉污染和增加分析信号强度的各种新的电化学分析池设计。 本发明还提供改进的电镀方案，用于增加潜在的信号强度并减少每个测量周期所需的时间。 此外，本发明提供了用于在三个实验运行中同时测定样品ECD溶液中的抑制剂，促进剂和矫味剂的浓度的新方法和算法。 本发明的一个特别优选的实施方案提供了一种通过使用单一分析电池同时测定单个实验运行中所有三种有机添加剂的浓度的方法，同时适当地考虑了这些添加剂之间的相互作用。

公开(公告)号：US20050236280A1

公开(公告)日：2005-10-27

申请号：US10833193

申请日：2004-04-27

申请人： Jianwen Han ,  Mackenzie King ,  Weihua Wang

发明人： Jianwen Han ,  Mackenzie King ,  Weihua Wang

IPC分类号： G01N27/26 ,  G01N27/38 ,  G01N27/49

CPC分类号： G01N27/49 ,  G01N27/38

摘要： Cyclic electric potential is employed for measuring copper and sulfuric acid concentration in an electrochemical copper-plating solution. Such cyclic electric potential is further employed for cleaning electrode surface in an electrochemical analytical cell.

摘要翻译： 循环电位用于测量电化学镀铜溶液中的铜和硫酸浓度。 这种循环电位进一步用于清洁电化学分析池中的电极表面。

公开(公告)号：US20100118139A1

公开(公告)日：2010-05-13

申请号：US12176358

申请日：2008-07-19

申请人： Yuming Huang ,  Wanduan Huang ,  Ailian Wang ,  Yuzhu Huang ,  Yuling Huang ,  Yujian Huang ,  Weihua Wang

发明人： Yuming Huang ,  Wanduan Huang ,  Ailian Wang ,  Yuzhu Huang ,  Yuling Huang ,  Yujian Huang ,  Weihua Wang

IPC分类号： H04N7/18

CPC分类号： G02B27/0101 ,  A63F13/02 ,  G02B2027/014 ,  G02C11/10

摘要： A portable device to detect the spin of table tennis ball is invented. The device helps a user to figure out the spin of a coming table tennis ball during a table tennis game. It is composed of a camera lens to acquire sequential images, an image processing chip to extract features of the table tennis ball and to calculate the direction and strength of the spin, and a mechanism to inform the user about the spin through certain methods.One kind of the product design for the device, is to embed an integrated module into a pair of normal glasses. The integrated module consists of a mini camera lens, an image processing chip, a button battery and switch. The output of the module controls the LED lights located inside the frame of the glasses. For example of 8 points LED, the positions of 0, 3, 6, and 9 o'clock correspond to top spin, right spin, back spin, and left spin, respectively (refer FIG. 1 through FIG. 4). The centers of those position pairs correspond to top right spin, back right spin, back left spin, and top left spin respectively (refer FIG. 5 through FIG. 8). The brightness of the LED lights corresponds to the strength of the spin. Normal eyes perceive all the LED lights inside the frame, especially when they emit light.

摘要翻译： 发明了一种用于检测乒乓球旋转的便携式装置。 该设备帮助用户在乒乓球比赛期间弄清楚即将到来的乒乓球的旋转。 它由相机镜头组成以获取顺序图像，图像处理芯片以提取乒乓球的特征并计算旋转的方向和强度，以及通过某些方法通知用户旋转旋转的机构。 一种设备的产品设计，是将一个集成的模块嵌入到一双普通的眼镜中。 集成模块由迷你相机镜头，图像处理芯片，纽扣电池和开关组成。 模块的输出控制位于眼镜框架内的LED灯。 例如8点LED，0,3,6,9点的位置分别对应于顶旋，右旋，后旋和左旋（参照图1至图4）。 这些位置对的中心分别对应于右上旋转，右后旋转，左后旋转和左上旋转（参见图5至图8）。 LED灯的亮度对应于旋转的强度。 正常的眼睛感觉到框架内的所有LED灯，特别是当它们发光时。