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公开(公告)号：US08912711B1
公开(公告)日：2014-12-16
申请号：US12820761
申请日：2010-06-22
申请人： David T. Chang , Tsung-Yuan Hsu
发明人： David T. Chang , Tsung-Yuan Hsu
IPC分类号： H01L41/053 , H03H9/02
CPC分类号： H03H9/02102 , H01P1/127 , H01P7/082 , H03H9/02377 , H03H9/19
摘要： In an embodiment, a thermal stress resistant resonator is disclosed. The thermal stress resistant resonator may include or comprise a piezoelectric member having one or more non-linear piezoelectric support members extending there from.
摘要翻译： 在一个实施例中，公开了一种耐热应力谐振器。 耐热应力谐振器可以包括或包括具有从其延伸的一个或多个非线性压电支撑构件的压电构件。
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公开(公告)号：US08242865B1
公开(公告)日：2012-08-14
申请号：US12352914
申请日：2009-01-13
申请人： David T. Chang , Tsung-Yuan Hsu
发明人： David T. Chang , Tsung-Yuan Hsu
IPC分类号： H01H51/22
CPC分类号： H01H55/00
摘要： A micromachined switch is provided including a base substrate, a bond pad on the base substrate, a cantilever arm connected to the bond pad, the cantilever arm having a conductive via from the bond pad, a first actuation electrode on the base substrate, and a second actuation electrode on the cantilever arm connected to the bond pad by way of the conductive via, positioned such that an actuation voltage applied between the first actuation electrode and the second actuation electrode will deform the cantilever arm, wherein the first actuation electrode is facing a side of the cantilever arm opposite the second actuation electrode.
摘要翻译： 提供一种微加工开关，包括基底基板，基底基板上的接合焊盘，连接到接合焊盘的悬臂，悬臂臂具有来自接合焊盘的导电通孔，基底基板上的第一致动电极和 悬臂上的第二致动电极通过导电通孔连接到接合焊盘，定位成使得施加在第一致动电极和第二致动电极之间的致动电压将使悬臂变形，其中第一致动电极面向 悬臂的一侧与第二致动电极相对。
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公开(公告)号：US08246846B1
公开(公告)日：2012-08-21
申请号：US12889687
申请日：2010-09-24
申请人： David T. Chang , Tsung-Yuan Hsu
发明人： David T. Chang , Tsung-Yuan Hsu
IPC分类号： C23F3/00
CPC分类号： H03H9/462 , H01H59/0009 , H03H9/465 , H03H2009/241
摘要： A method for fabricating integrated MEMS switches and filters includes forming cavities in a silicon substrate, metalizing a first pattern on a quartz substrate to form first switch and filter elements, bonding the quartz substrate to the silicon substrate so that the first switch and filter elements are located within one of the cavities, thinning the quartz substrate, forming conductive vias in the quartz substrate, metalizing a second pattern on a second surface of the quartz substrate to form second switch and filter elements, etching the quartz substrate to separate MEMS switches from filters, forming protrusions on a host substrate, metalizing a third metal pattern on the host substrate to form metal anchors and third switch elements, compression bonding the metal anchors on the host substrate to second switch and filter elements, forming signal lines to integrate the MEMS switches and filters and removing the silicon substrate.
摘要翻译： 一种用于制造集成的MEMS开关和滤波器的方法包括在硅衬底中形成空腔，将石英衬底上的第一图案金属化以形成第一开关和滤波器元件，将石英衬底接合到硅衬底，使得第一开关和滤波器元件 位于一个空腔内，使石英衬底变薄，在石英衬底中形成导电通孔，在石英衬底的第二表面上金属化第二图案以形成第二开关和滤光元件，蚀刻石英衬底以将MEMS开关与过滤器分离 在主机基板上形成突起，在主机基板上形成金属化第三金属图案以形成金属锚和第三开关元件，将主机基板上的金属锚固件压接到第二开关和滤波元件，形成信号线以集成MEMS开关 并过滤并去除硅衬底。
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公开(公告)号：US07253709B1
公开(公告)日：2007-08-07
申请号：US10961732
申请日：2004-10-07
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0068 , Y10T29/49105 , Y10T29/49117 , Y10T29/49155 , Y10T29/49204
摘要： Apparatus for a micro-electro-mechanical switch that provides for latching switching action. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. To latch the switch, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage to the electrodes on the substrate and the cantilever arm is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
摘要翻译： 用于微电机械开关的装置，其提供闭锁开关动作。 开关具有设置在基板上的悬臂，该悬臂可以沿正交方向移动以锁定和解锁。 为了锁定开关，悬臂由梳驱动致动器向后移动，然后由设置在基板和悬臂上的电极拉下。 然后梳梳驱动致动器开关被释放，并且悬臂臂向前移动以通过基板上的鸽尾结构捕获。 当去除基板和悬臂上的电极的电压时，悬臂通过尾尾结构保持在适当位置。 通过启动梳齿驱动执行机构将悬臂移动离开鸽尾结构，开关被解锁。 一旦从鸽尾结构中释放出来，悬臂就会弹出。
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公开(公告)号：US08485417B1
公开(公告)日：2013-07-16
申请号：US13470082
申请日：2012-05-11
申请人： David T. Chang , Tsung-Yuan Hsu
发明人： David T. Chang , Tsung-Yuan Hsu
CPC分类号： H01H55/00
摘要： A micromachined switch is provided including a base substrate, a bond pad on the base substrate, a cantilever arm connected to the bond pad, the cantilever arm having a conductive via from the bond pad, a first actuation electrode on the base substrate, and a second actuation electrode on the cantilever arm connected to the bond pad by way of the conductive via, positioned such that an actuation voltage applied between the first actuation electrode and the second actuation electrode will deform the cantilever arm, wherein the first actuation electrode is facing a side of the cantilever arm opposite the second actuation electrode.
摘要翻译： 提供一种微加工开关，包括基底基板，基底基板上的接合焊盘，连接到接合焊盘的悬臂，悬臂臂具有来自接合焊盘的导电通孔，基底基板上的第一致动电极和 悬臂上的第二致动电极通过导电通孔连接到接合焊盘，定位成使得施加在第一致动电极和第二致动电极之间的致动电压将使悬臂变形，其中第一致动电极面向 悬臂的一侧与第二致动电极相对。
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公开(公告)号：US07830227B1
公开(公告)日：2010-11-09
申请号：US12233232
申请日：2008-09-18
申请人： David T. Chang , Tsung-Yuan Hsu
发明人： David T. Chang , Tsung-Yuan Hsu
CPC分类号： H03H9/462 , H01H59/0009 , H03H9/465 , H03H2009/241
摘要： A method for fabricating integrated MEMS switches and filters includes forming cavities in a silicon substrate, metalizing a first pattern on a quartz substrate to form first switch and filter elements, bonding the quartz substrate to the silicon substrate so that the first switch and filter elements are located within one of the cavities, thinning the quartz substrate, forming conductive vias in the quartz substrate, metalizing a second pattern on a second surface of the quartz substrate to form second switch and filter elements, etching the quartz substrate to separate MEMS switches from filters, forming protrusions on a host substrate, metalizing a third metal pattern on the host substrate to form metal anchors and third switch elements, compression bonding the metal anchors on the host substrate to second switch and filter elements, forming signal lines to integrate the MEMS switches and filters and removing the silicon substrate.
摘要翻译： 一种用于制造集成的MEMS开关和滤波器的方法包括在硅衬底中形成空腔，将石英衬底上的第一图案金属化以形成第一开关和滤波器元件，将石英衬底接合到硅衬底，使得第一开关和滤波器元件 位于一个空腔内，使石英衬底变薄，在石英衬底中形成导电通孔，在石英衬底的第二表面上金属化第二图案以形成第二开关和滤光元件，蚀刻石英衬底以将MEMS开关与过滤器分离 在主机基板上形成突起，在主机基板上形成金属化第三金属图案以形成金属锚和第三开关元件，将主机基板上的金属锚固件压接到第二开关和滤波元件，形成信号线以集成MEMS开关 并过滤并去除硅衬底。
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7.发明授权Method of fabricating an RF MEMS switch with spring-loaded latching mechanism 有权制造具有弹簧加载闭锁机构的RF MEMS开关的方法公开(公告)号：US07653985B1
公开(公告)日：2010-02-02
申请号：US11823443
申请日：2007-06-27
CPC分类号： H01H59/0009 , H01H2001/0068 , Y10T29/49105 , Y10T29/49117 , Y10T29/49155 , Y10T29/49204
摘要： Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
摘要翻译： 公开了用于制造微机电开关的方法。 开关具有设置在基板上的悬臂，该悬臂可以沿正交方向移动以锁定和解锁。 为了锁定，悬臂由梳驱动致动器向后移动，然后由设置在基板和悬臂上的电极拉下。 然后梳梳驱动致动器开关被释放，并且悬臂臂向前移动以通过基板上的鸽尾结构捕获。 当电压被去除时，悬臂由鸠尾结构保持在适当位置。 通过启动梳齿驱动执行机构将悬臂移动离开鸽尾结构，开关被解锁。 一旦从鸽尾结构中释放出来，悬臂就会弹出。
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8.发明授权公开(公告)号：US07346083B2
公开(公告)日：2008-03-18
申请号：US09829781
申请日：2001-04-10
申请人： Tsung-Yuan Hsu , Willie Ng , Daniel Yap
发明人： Tsung-Yuan Hsu , Willie Ng , Daniel Yap
IPC分类号： H01S3/10
CPC分类号： H01S5/12 , H01S3/083 , H01S5/1071 , H01S5/146
摘要： A laser system and method for self-injection locking. The system includes a laser having a laser output at a frequency ωo. An optical port provides a portion of the laser output at the port and a modulator, coupled to the port, is driven by a RF signal at a frequency ωm generates two sidebands at ωo±ωm. A filter passes one of the two sidebands; and an optical path couples an output of the filter to the laser for injection locking.
摘要翻译： 一种用于自我注射锁定的激光系统和方法。 该系统包括具有频率ωα的激光输出的激光器。 光端口提供端口处的激光输出的一部分，并且耦合到端口的调制器由频率ωm的RF信号驱动，产生ωΩ的两个边带， / SUB>±omega 。 滤波器通过两个边带之一; 并且光路将滤波器的输出耦合到用于注入锁定的激光器。
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9.发明授权公开(公告)号：US07345866B1
公开(公告)日：2008-03-18
申请号：US11128407
申请日：2005-05-13
申请人： Tsung-Yuan Hsu , David Chang
发明人： Tsung-Yuan Hsu , David Chang
IPC分类号： H01G5/00
CPC分类号： H01G5/18
摘要： A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a second capacitance plate mounted thereon. The method includes applying a first actuation voltage to deform the cantilever assembly until the dielectric element contacts the second capacitance plate leaving a gap therebetween, and applying a second actuation voltage larger than the first actuation voltage to further deform the cantilever assembly to reduce the gap between the dielectric element and the second capacitance plate.
摘要翻译： 提供一种方法，其连续地改变具有安装在基部上的悬臂组件的MEMS变容二极管的电容，所述悬臂组件具有安装在其上的第一电容板和介质元件，并且所述基座部分具有安装在其上的第二电容板。 该方法包括施加第一致动电压以使悬臂组件变形，直到电介质元件接触第二电容板，在第二电容板之间留有间隙，并施加大于第一致动电压的第二致动电压，以进一步使悬臂组件变形，以减小悬臂组件之间的间隙 电介质元件和第二电容板。
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10.发明授权Optically controlled RF MEMS switch array for reconfigurable broadband reflective antennas 有权用于可重构宽带反射天线的光控RF MEMS开关阵列公开(公告)号：US06417807B1
公开(公告)日：2002-07-09
申请号：US09845033
申请日：2001-04-27
申请人： Hui-Pin Hsu , Tsung-Yuan Hsu
发明人： Hui-Pin Hsu , Tsung-Yuan Hsu
IPC分类号： H01Q136
CPC分类号： H01Q15/148 , H01H59/0009 , H01Q1/38 , H01Q3/247 , H01Q9/14 , H01Q9/285
摘要： A method and apparatus for reconfiguring an antenna array by optical control of MEMS switches. A light source is provided to direct light to individual optically sensitive elements which control delivery of actuating bias voltage to the MEMS switches. The light source is preferably separated from the antenna array by a structure which conducts the controlling illumination but provides a high impedance electromagnetically reflective surface which reflects electromagnetic radiation over the antenna operating frequency range with small phase shift, and which is disposed very close to the antenna array. Optically sensitive elements preferably include photoresistive elements, which are best formed in the substrate upon which the MEM switches are formed, and may include photovoltaic elements.
摘要翻译： 一种用于通过MEMS开关的光学控制来重新配置天线阵列的方法和装置。 提供光源以将光引导到单独的光敏元件，其控制致动偏置电压到MEMS开关的传递。 光源优选地通过传导控制照明的结构与天线阵列分离，但是提供了一种高阻抗电磁反射表面，其反射电磁辐射在具有小相移的天线工作频率范围内，并且非常靠近天线 数组。 光敏元件优选地包括光致抗蚀剂元件，其最好形成在其上形成有MEM开关的衬底中，并且可以包括光电元件。
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