利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

30 条记录 (耗时 0.028 秒)

    Gas cabinet including integrated effluent scrubber
    7.
    发明授权
    Gas cabinet including integrated effluent scrubber 失效
    燃气柜包括综合污水洗涤器

    公开(公告)号：US07018448B2

    公开(公告)日：2006-03-28

    申请号：US10694648

    申请日：2003-10-28

    申请人： Michael J. Wodjenski ,  Jose I. Arno

    发明人： Michael J. Wodjenski ,  Jose I. Arno

    IPC分类号： B01D53/04

    CPC分类号： B01D53/0446 ,  B01D53/0454 ,  B01D2253/104 ,  B01D2253/11 ,  B01D2253/202 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/40009 ,  B01D2259/402 ,  B01D2259/4525

    摘要： A gas cabinet assembly for dispensing of gas to a process facility such as a semiconductor manufacturing tool. A purge gas dry scrubber is integrated with the gas flow circuitry and a venturi pump in the gas cabinet. Purge gas is flowed through the flow circuitry in the gas cabinet subsequent to on-stream dispensing of process gas through such flow circuitry, and forms a purge effluent including the residual process gas. The purge effluent is flowed through a dry scrubber unit to sorptively remove the process gas species from the purge effluent. The resultant process gas-depleted purge effluent is vented from the gas cabinet, e.g., into the ducting of the house exhaust system of the process facility. Monitoring of the relative depletion of the dry scrubbing medium in the dry scrubber may be carried out with endpoint detection, e.g., using colorimetric change techniques, toxic gas monitor devices, or PLC/CPU arrangements.

    摘要翻译： 一种用于将气体分配到诸如半导体制造工具的处理设备的气柜组件。 吹扫气干燥洗涤器与气体流路和气柜中的文丘里泵集成。 在通过这种流动电路的流程分配工艺气体之后，吹扫气体通过气体柜中的流动回路流动，并形成包括剩余工艺气体的净化流出物。 清洗流出物流过干洗单元以从吹扫流出物中吸附去除工艺气体物质。 所得到的工艺废气净化流出物从气柜排出，例如进入处理设备的房屋排气系统的管道。 干洗涤器中干洗涤介质的相对耗尽的监测可以通过终点检测进行，例如使用比色改变技术，有毒气体监测装置或PLC / CPU装置。