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公开(公告)号：US07057741B1
公开(公告)日：2006-06-06
申请号：US09543604
申请日：2000-04-05
IPC分类号： G01B9/02
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02072 , G01B9/0209 , G01B11/0675 , G01B2210/56 , G01B2290/30 , G01N21/9501
摘要： A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.
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公开(公告)号：US20080278732A1
公开(公告)日：2008-11-13
申请号：US11702876
申请日：2007-02-05
IPC分类号： G01B11/02
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02072 , G01B9/0209 , G01B11/0675 , G01B2210/56 , G01B2290/30 , G01N21/9501
摘要： A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes-means for stitching scans together, providing for smaller and less expensive optical elements.
摘要翻译： 提供了用于检查诸如半导体晶片的样本的系统。 该系统使用衍射光栅扫描双面样品，该衍射光栅将第n阶（n> 0）波阵面扩大并通过到样品表面，以及光束每个通道的反射表面。 优选地使用两个通道和两个反射表面，并且使用第二衍射光栅将波前组合并传递到具有期望的纵横比的相机系统。 该系统优选地包括滤波不需要的声波和地震振动的阻尼装置，包括扫描样本的第一部分的光学装置和用于将样本平移或旋转到平行或旋转装置的位置，其中光学装置可以扫描剩余的 样本的一部分。 该系统还包括用于将扫描拼接在一起的装置，为更小且更便宜的光学元件提供。
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公开(公告)号：US20060126076A1
公开(公告)日：2006-06-15
申请号：US11157341
申请日：2005-07-12
IPC分类号： G01B11/02
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02072 , G01B9/0209 , G01B11/0675 , G01B2210/56 , G01B2290/30 , G01N21/9501
摘要： A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.
摘要翻译： 提供了用于检查诸如半导体晶片的样本的系统。 该系统使用衍射光栅扫描双面样品，该衍射光栅将第n阶（n> 0）波阵面扩大并通过到样品表面，以及光束每个通道的反射表面。 优选地使用两个通道和两个反射表面，并且使用第二衍射光栅将波前组合并传递到具有期望的纵横比的相机系统。 该系统优选地包括滤波不需要的声波和地震振动的阻尼装置，包括扫描样本的第一部分的光学装置和用于将样本平移或旋转到平行或旋转装置的位置，其中光学装置可以扫描剩余的 样本的一部分。 该系统还包括用于将扫描拼接在一起的装置，为更小且更便宜的光学元件提供。
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公开(公告)号：US07173715B2
公开(公告)日：2007-02-06
申请号：US11157341
申请日：2005-07-12
IPC分类号： G01B9/02
CPC分类号： G01B11/06 , G01B9/02021 , G01B9/02072 , G01B9/0209 , G01B11/0675 , G01B2210/56 , G01B2290/30 , G01N21/9501
摘要： A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for each channel of the light beam. Two channels and two reflective surfaces are preferably employed, and the wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio. The system preferably comprises a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching scans together, providing for smaller and less expensive optical elements.
摘要翻译： 提供了用于检查诸如半导体晶片的样本的系统。 该系统使用衍射光栅扫描双面样品，该衍射光栅将第n阶（n> 0）波阵面扩大并通过到样品表面，以及光束每个通道的反射表面。 优选地使用两个通道和两个反射表面，并且使用第二衍射光栅将波前组合并传递到具有期望的纵横比的相机系统。 该系统优选地包括滤波不需要的声波和地震振动的阻尼装置，包括扫描样本的第一部分的光学装置和用于将样本平移或旋转到平行或旋转装置的位置，其中光学装置可以扫描剩余的 样本的一部分。 该系统还包括用于将扫描拼接在一起的装置，为更小且更便宜的光学元件提供。
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5.发明申请METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION OF A SUBSTRATE 有权用于测量基板的形状或厚度信息的方法和装置公开(公告)号：US20100208272A1
公开(公告)日：2010-08-19
申请号：US12388487
申请日：2009-02-18
申请人： Shouhong Tang , George Kren , Dieter Mueller , Brian Haas , Daniel Kavaldjiev
发明人： Shouhong Tang , George Kren , Dieter Mueller , Brian Haas , Daniel Kavaldjiev
IPC分类号： G01B11/02
CPC分类号： G01B9/02021 , G01B9/02027 , G01B9/02057 , G01B9/02072 , G01B9/0209 , G01B11/306
摘要： An interferometer system and method may be used to measure substrate thickness or shape. The system may include two spaced apart reference flats having that form an optical cavity between two parallel reference surfaces. A substrate holder may be configured to place the substrate in the cavity with first and second substrate surfaces substantially parallel with corresponding first and second reference surfaces such that a space between the first or second substrate surface is three millimeters or less from a corresponding one of the reference surfaces or a damping surface. Interferometer devices may be located on diametrically opposite sides of the cavity and optically coupled thereto. The interferometers can map variations in spacing between the substrate surfaces and the reference surfaces, respectively, through interference of light optically coupled to and from to the cavity via the interferometer devices.
摘要翻译： 干涉仪系统和方法可用于测量衬底厚度或形状。 该系统可以包括两个间隔开的参考平面，其具有在两个平行参考表面之间形成光腔。 衬底保持器可以被配置为将衬底放置在空腔中，其中第一和第二衬底表面基本上平行于相应的第一和第二参考表面，使得第一或第二衬底表面之间的空间距离相应的一个 参考表面或阻尼表面。 干涉仪装置可以位于空腔的径向相对的两侧并与之光耦合。 干涉仪可以分别通过经由干涉仪装置光耦合到腔体的光的干涉来映射衬底表面和参考表面之间的间隔的变化。
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6.发明授权Rigid, one-piece, biaxially stretched shaped body of synthetic resin and method for making the same 失效合成树脂刚性，单件，双轴拉伸成形体及其制造方法
公开(公告)号：US4371575A
公开(公告)日：1983-02-01
申请号：US264300
申请日：1981-05-18
申请人： Klaus Kerk , Dieter Mueller , Bernd Oleiko
发明人： Klaus Kerk , Dieter Mueller , Bernd Oleiko
CPC分类号： B29C61/02 , B29D25/00 , E04B1/32 , E04B7/102 , E04D13/03 , B29L2031/772 , E04B2001/3217 , E04B2001/3258 , E04B2001/3264 , Y10S428/91 , Y10T428/24628
摘要： What is disclosed is a rigid, one-piece, shaped body, made of a biaxially stretched synthetic resin in the form of a sheet at least 1 mm thick, the edge of which does not lie in a single plane, and the surface of which is smaller than a flat initial surface enclosed by the edge and preferably approximates the mathematically minimum surface enclosed by the edge, is suitable according to the invention as a lightweight building element having high resistance to buckling. The new shaped bodies are made by shaping a flat sheet of biaxially stretched synthetic resin at least 1 mm thick, while in the thermoelastic state, so that the edge of the sheet is brought into a configuration which does not lie in one plane, and the surface enclosed by the edge is allowed to shrink back partially while in the thermoelastic state, whereby a shrinkage of the edge of the sheet is prevented by clamping the edge, and the resulting shaped body is cooled below the softening temperature before the edge clamping is loosened.
摘要翻译： PCT No.PCT / EP80 / 00125 Sec。 371日期：1981年5月18日 102（e）日期1981年5月18日PCT提交1980年11月4日PCT公布。 公开号WO81 / 01304 日期：1981年5月14日。公开的是一种刚性的，单件式的成形体，其由双轴拉伸的合成树脂制成，其厚度至少为1mm，其边缘不在单个平面 ，并且其表面小于由边缘包围的平坦初始表面，并且优选地近似由边缘包围的数学上最小表面，根据本发明，作为具有高抗屈曲性的轻质建筑元件是合适的。 新的成形体通过在热弹性状态下成形为至少1mm厚的双轴拉伸合成树脂的平片制成，使得片材的边缘处于不在一个平面中的构造，并且 由边缘包围的表面在热弹性状态下允许部分收缩，由此通过夹紧边缘来防止片材边缘的收缩，并且在边缘夹紧松开之前将所得成形体冷却到软化温度以下 。
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7.发明申请SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF A SPECIMEN USING RADIATION IN THE TERAHERTZ RANGE 审中-公开用于确定在TERAHERTZ范围内使用辐射的样本的一个或多个特征的系统和方法公开(公告)号：US20100235114A1
公开(公告)日：2010-09-16
申请号：US12401029
申请日：2009-03-10
申请人： Ady Levy , Samuel Ngai , Christopher F. Bevis , Stefano Concina , John Fielden , Walter Mieher , Dieter Mueller , Neil Richardson , Dan Wack , Larry Wagner
发明人： Ady Levy , Samuel Ngai , Christopher F. Bevis , Stefano Concina , John Fielden , Walter Mieher , Dieter Mueller , Neil Richardson , Dan Wack , Larry Wagner
CPC分类号： G01N21/9505 , G01N21/3581 , H01L22/12
摘要： Systems and methods for determining one or more characteristics of a specimen using radiation in the terahertz range are provided. One system includes an illumination subsystem configured to illuminate the specimen with radiation. The system also includes a detection subsystem configured to detect radiation propagating from the specimen in response to illumination of the specimen and to generate output responsive to the detected radiation. The detected radiation includes radiation in the terahertz range. In addition, the system includes a processor configured to determine the one or more characteristics of the specimen using the output.
摘要翻译： 提供了使用太赫兹范围内的辐射来确定样本的一个或多个特征的系统和方法。 一个系统包括被配置为用辐射照射样本的照明子系统。 该系统还包括检测子系统，该检测子系统被配置为响应于样本的照射来检测从样本传播的辐射，并响应于检测到的辐射产生输出。 检测到的辐射包括太赫兹范围内的辐射。 另外，该系统包括配置成使用该输出来确定样本的一个或多个特性的处理器。
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公开(公告)号：US07505144B2
公开(公告)日：2009-03-17
申请号：US10968711
申请日：2004-10-18
IPC分类号： G01B9/02
CPC分类号： G01B11/306 , G01N21/9501
摘要： A system and method for in-line inspection of specimens such as semiconductor wafers is provided. The system provides scanning of sections of specimens having predetermined standardized characteristics using a diffraction grating that widens and passes nth order (n>0) wave fronts to the specimen surface and a reflective surface for the transmitted light beam. Light energy is transmitted in a narrow swath across the portion of the surface having the standardized features. The wavefronts are combined using a second diffraction grating and passed to a camera system having a desired aspect ratio.
摘要翻译： 提供了一种用于在线检查诸如半导体晶片的样品的系统和方法。 该系统使用将第n阶（n> 0）波阵面加宽并通过到试样表面的衍射光栅和用于透射光束的反射表面，来提供具有预定标准化特征的试样部分的扫描。 光能在狭窄的条中穿过具有标准化特征的部分表面。 使用第二衍射光栅将波前组合并传递到具有所需纵横比的相机系统。
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公开(公告)号：US07465817B2
公开(公告)日：2008-12-16
申请号：US10535834
申请日：2003-11-20
IPC分类号： C07F9/02
摘要： The present invention relates to a phospholipid dreivative having a substituted or unsubstituted polyhydroxylated aliphatic carbocycle attached to the sn-1 or sn-2 position of the glycerol backbone, a pharmaceutical composition comprising said phospholipid, a method for preparing said phospholipid and a medicament comprising said phospholipid.
摘要翻译： 本发明涉及具有连接到甘油骨架的sn-1或sn-2位上的取代或未取代的多羟基化脂族碳环的磷脂衍生物，包含所述磷脂的药物组合物，制备所述磷脂的方法和包含所述磷脂的药物 磷脂
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公开(公告)号：US20050097774A1
公开(公告)日：2005-05-12
申请号：US10980741
申请日：2004-11-03
申请人： Dieter Mueller
发明人： Dieter Mueller
CPC分类号： D21F7/008
摘要： A steam blower box unit having a steam blower box for applying steam to a passing material web, especially a paper or board web, and having a withdrawal device at least partly integrated in the steam blower box. The steam blower box, located opposite the material web in an operating position, can be moved out of its operating position laterally via the withdrawal device, that is to say generally transversely with respect to the web running direction, and can be moved into this operating position again from its lateral position. In this case, preferably the entire steam blower box can be moved appropriately via the withdrawal device.
摘要翻译： 一种蒸汽鼓风机箱，其具有用于将蒸汽施加到通过的材料幅材，特别是纸或纸幅上的蒸汽鼓风机，并且具有至少部分地集成在蒸汽鼓风机箱中的取出装置。 在操作位置处与材料腹板相对的蒸汽鼓风机箱可以通过取出装置横向移出其操作位置，也就是说相对于纸幅运行方向大致横向移动，并且可以移动到该操作中 从侧面位置再次位置。 在这种情况下，优选地，整个蒸汽鼓风机可以经由抽出装置适当地移动。
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