Packaged MEMS device and method for making the same
    2.
    发明授权
    Packaged MEMS device and method for making the same 有权
    封装的MEMS器件及其制造方法

    公开(公告)号:US06519075B2

    公开(公告)日:2003-02-11

    申请号:US09769192

    申请日:2001-01-25

    IPC分类号: G02B2600

    摘要: A MEMs device comprises a component layer including a frame structure and at least one component movably coupled to the frame and an actuator layer including at least one conductive path and at least one actuator for moving the component. The component layer and the actuator layer are bonded together with solder or other materials in lateral alignment. Advantageously the layers are provided with metallization pads and are bonded together in lateral alignment with predetermined vertical gap spacing by solder bonds between the pads. In a preferred embodiment the MEMs device, however bonded, comprises a component layer, an actuator layer and an intervening spacer. The spacer provides the walls of a cavity between the component and the pertinent actuators to permit movement of the component. The walls cover the bulk of the peripheral boundary of the cavity to provide aerodynamic isolation. Advantageously the walls are conductive to provide electrostatic isolation. The device has particular utility in optical cross connection, variable attenuation and power gain equalization.

    摘要翻译: MEM器件包括包括框架结构的组件层和可移动地联接到框架的至少一个部件和包括至少一个导电路径的致动器层和用于移动部件的至少一个致动器。 组件层和致动器层用焊料或其它材料以横向对准结合在一起。 有利地,这些层设置有金属化焊盘,并且通过焊盘之间的焊接接合以预定的垂直间隙间隔横向对准地结合在一起。 在优选实施例中,MEM装置(然而粘合的)包括部件层,致动器层和中间间隔件。 间隔件提供组件和相关致动器之间的空腔的壁,以允许部件移动。 墙壁覆盖了空腔的周边边界的大部分,以提供空气动力隔离。 有利地,壁是导电的以提供静电隔离。 该器件在光交叉连接,可变衰减和功率增益均衡方面具有特殊的用途。

    Resiliently packaged MEMs device and method for making same
    3.
    发明授权
    Resiliently packaged MEMs device and method for making same 有权
    弹性封装的MEMs器件及其制造方法

    公开(公告)号:US06711317B2

    公开(公告)日:2004-03-23

    申请号:US09769193

    申请日:2001-01-25

    IPC分类号: G02B635

    摘要: In accordance with the invention, a MEMs device comprises a component layer, an actuator layer and an intervening spacer. The component layer, the spacer and the actuator layer are assembled at ambient temperature and held together in lateral alignment by resilient spring members. The spacer provides the walls of a cavity between a component and an actuator to permit movement of the component. The walls are advantageously conductive and cover the bulk of the peripheral boundary of the cavity to provide electrostatic isolation and aerodynamic isolation.

    摘要翻译: 根据本发明,MEMs器件包括组件层,致动器层和中间间隔件。 组件层,间隔件和致动器层在环境温度下组装并通过弹性弹簧构件横向对准地保持在一起。 间隔件在部件和致动器之间提供空腔的壁以允许部件移动。 壁有利地是导电的并且覆盖空腔的外围边界的大部分以提供静电隔离和空气动力隔离。

    Magnetically-packaged optical MEMs device
    4.
    发明授权
    Magnetically-packaged optical MEMs device 有权
    磁性封装的光学MEM器件

    公开(公告)号:US06574026B2

    公开(公告)日:2003-06-03

    申请号:US09731493

    申请日:2000-12-07

    IPC分类号: G02B2608

    摘要: In accordance with the invention, the component layer, the spacer and the actuator layer of a MEMs device are assembled at ambient temperature and held together in lateral alignment by upper and lower magnets. Such ambient temperature magnetic packaging greatly minimizes the undesirable exposure of the sensitive MEMs components to high temperatures. The resulting MEMs device exhibits the high dimensional accuracy and stability. In a preferred embodiment, the component layer comprises a layer of movable mirrors and a spacer aerodynamically and electrostatically isolates each mirror, minimizing cross-talk between adjacent mirrors.

    摘要翻译: 根据本发明,MEMs器件的元件层,间隔物和致动器层在环境温度下组装并通过上部和下部磁体横向对准地保持在一起。 这种环境温度磁性包装极大地最大限度地减少敏感MEM组分对高温的不良暴露。 所得到的MEMs器件具有高尺寸精度和稳定性。 在优选实施例中,组件层包括可移动反射镜层和间隔空间动力学和静电隔离每个反射镜,使相邻反射镜之间的串扰最小化。

    Target Detection Using a Single-Stranded, Self-Complementary, Triple-Stem DNA Probe
    10.
    发明申请
    Target Detection Using a Single-Stranded, Self-Complementary, Triple-Stem DNA Probe 审中-公开
    使用单链,自我互补的三重DNA探针进行目标检测

    公开(公告)号:US20110256637A1

    公开(公告)日:2011-10-20

    申请号:US13123577

    申请日:2009-10-13

    申请人: Hyongsok Soh Yi Xiao

    发明人: Hyongsok Soh Yi Xiao

    IPC分类号: G01N33/53 C07H21/00 C40B40/06

    摘要: Provided are novel single-stranded oligonucleotide probes that have a triple-stem configuration in the absence of target binding to the target binding sequence. The probes also have a fluorophore and a quencher. In the absence of target binding to the target binding sequence, these single-stranded oligonucleotide probes are capable of forming self-complementary duplexes such that the probe is in the triple-stem configuration and the fluorophore is positioned adjacent the quencher. In the presence of target binding to the target binding sequence, formation of the self-complementary duplexes is inhibited such that the probe is configured to position the fluorophore away from the quencher such that a signal of the fluorophore is detectable. Also provided are methods of using the probes.

    摘要翻译: 提供的是在不与靶结合序列靶结合的情况下具有三原子构型的新型单链寡核苷酸探针。 探针也具有荧光团和猝灭剂。 在目标结合靶结合序列不存在的情况下,这些单链寡核苷酸探针能够形成自身互补的双链体,使得探针处于三重茎构型并且荧光团邻近猝灭剂定位。 在目标结合靶结合序列的存在下,抑制自身互补双链体的形成,使得探针被配置为使荧光团远离猝灭剂使得荧光团的信号是可检测的。 还提供了使用探针的方法。