公开(公告)号：US11713252B2

公开(公告)日：2023-08-01

申请号：US17396389

申请日：2021-08-06

Applicant: Entegris, Inc.

Inventor： Troy Scoggins ,  Rex Gerald Sheppard ,  Abuagela H. Rashed ,  Jonathan Loyd Burr

IPC: C01B32/956 ,  H01L21/02 ,  H01L21/324 ,  C04B41/87 ,  C04B35/52 ,  C04B41/00 ,  C04B41/50 ,  C01B32/97 ,  C01B32/21 ,  H01L29/16 ,  C04B111/00

CPC classification number: C01B32/956 ,  C01B32/21 ,  C01B32/97 ,  C04B35/522 ,  C04B41/009 ,  C04B41/5059 ,  C04B41/87 ,  H01L21/02425 ,  H01L21/02529 ,  H01L21/02612 ,  H01L21/324 ,  H01L29/1606 ,  H01L29/1608 ,  C04B2111/00405 ,  C04B2235/3826 ,  C04B2235/658 ,  C04B2235/6581 ,  C04B2235/72 ,  C04B2235/722 ,  C04B2235/726 ,  C04B2235/727 ,  C04B2235/728 ,  C04B2235/75 ,  C04B2235/77 ,  C04B2235/786 ,  C04B2235/9607 ,  C04B41/009 ,  C04B35/522 ,  C04B38/00 ,  C04B41/5059 ,  C04B41/4529 ,  C04B41/4556

Abstract: A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material. Such material may be formed by contacting a precursor graphite article with silicon monoxide (SiO) gas under chemical reaction conditions that are effective to convert an exterior portion of the precursor graphite article to a silicon carbide matrix material in which graphite is present in inclusions therein, and wherein the silicon carbide matrix material and interior bulk graphite material interpenetrate one another at an interfacial region therebetween. Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.

公开(公告)号：US11117806B2

公开(公告)日：2021-09-14

申请号：US15753109

申请日：2016-08-18

Applicant: Entegris, Inc.

Inventor： Troy Scoggins ,  Rex Gerald Sheppard ,  Abuagela H. Rashed ,  Jonathan Loyd Burr

IPC: C01B32/956 ,  H01L21/02 ,  H01L21/324 ,  C04B41/87 ,  C04B35/52 ,  C04B41/00 ,  C04B41/50 ,  C01B32/97 ,  C01B32/21 ,  H01L29/16 ,  C04B111/00

Abstract: A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material. Such material may be formed by contacting a precursor graphite article with silicon monoxide (SiO) gas under chemical reaction conditions that are effective to convert an exterior portion of the precursor graphite article to a silicon carbide matrix material in which graphite is present in inclusions therein, and wherein the silicon carbide matrix material and interior bulk graphite material interpenetrate one another at an interfacial region therebetween. Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.

公开(公告)号：US20190077690A1

公开(公告)日：2019-03-14

申请号：US15743080

申请日：2016-07-08

Applicant: ENTEGRIS, INC.

Inventor： Troy Scoggins ,  Rex Gerald Sheppard

IPC: C03B11/06 ,  C23C16/32 ,  C23C16/40 ,  C23C16/06 ,  C23C16/455 ,  C23C14/06 ,  C23C14/08

Abstract: Precision glass molds are described, which are formed by coating a mold made from high purity, fine grain sized graphite, with a coating including titanium. In various implementations, the titanium coating is overcoated with yttria (Y2O3) to provide a high precision glass mold of superior performance character. The resultant glass molds can be used to form glass articles having a highly smooth finish, for high precision applications such as consumer electronic device applications, medical instruments, and optical devices. The use of high purity, fine grain size graphite allows molds to be machined at low cost, thereby eliminating the need to fabricate a metal mold that must be coated with multiple layers including metal diffusion barrier layers to meet operational requirements for such precision applications.

公开(公告)号：US20240101462A1

公开(公告)日：2024-03-28

申请号：US18372467

申请日：2023-09-25

Applicant: ENTEGRIS, INC.

Inventor： Troy Scoggins ,  Rex Gerald Sheppard

IPC: C03B11/06 ,  C03B40/00 ,  C04B41/00 ,  C04B41/52 ,  C04B41/89 ,  C23C14/06 ,  C23C14/08 ,  C23C16/06 ,  C23C16/32 ,  C23C16/40 ,  C23C16/455

CPC classification number: C03B11/06 ,  C03B40/00 ,  C04B41/009 ,  C04B41/52 ,  C04B41/89 ,  C23C14/0635 ,  C23C14/08 ,  C23C16/06 ,  C23C16/32 ,  C23C16/40 ,  C23C16/45525 ,  C03B2215/05 ,  C03B2215/11 ,  C03B2215/12 ,  C03B2215/16 ,  C03B2215/31 ,  C03B2215/32

Abstract: Precision glass molds are described, which are formed by coating a mold made from high purity, fme grain sized graphite, with a coating including titanium. In various implementations, the titanium coating is overcoated with yttria (Y2O3) to provide a high precision glass mold of superior performance character. The resultant glass molds can be used to form glass articles having a highly smooth finish, for high precision applications such as consumer electronic device applications, medical instruments, and optical devices. The use of high purity, fme grain size graphite allows molds to be machined at low cost, thereby eliminating the need to fabricate a metal mold that must be coated with multiple layers including metal diffusion barrier layers to meet operational requirements for such precision applications.

公开(公告)号：US10882774B2

公开(公告)日：2021-01-05

申请号：US16137730

申请日：2018-09-21

Applicant: Entegris, Inc.

Inventor： Troy Scoggins ,  Rex Gerald Sheppard ,  Carlo Waldfried

IPC: C03B11/08 ,  C23C16/455 ,  C23C16/40 ,  C23C28/04 ,  C23C28/00 ,  C03B40/00

Abstract: Described are glass-forming molds made of a graphite mold body and a coating formed by atomic layer deposition, with the coating being made of alumina or a combination of alumina and yttria.

公开(公告)号：US10707488B2

公开(公告)日：2020-07-07

申请号：US15620141

申请日：2017-06-12

Applicant: Entegris, Inc.

Inventor： Troy Scoggins ,  Mackenzie King ,  Rex Gerald Sheppard

IPC: H01M4/587 ,  H01M10/0525 ,  H01G11/42 ,  H01G11/34 ,  H01G11/86 ,  H01G11/06 ,  C01B32/20 ,  H01G11/44 ,  H01G11/24

Abstract: A carbon material is described, having utility for fabricating an electrode of an electrochemical energy device, wherein the carbon material includes a particulate carbon having a particle size d50 in a range of from 1 to 15 μm, a bulk density in a range of from 0.3 g/cc to 1.2 g/cc, a surface area as measured by nitrogen BET surface area determination at 25° C. that does not exceed 10 m2/g, and an impurity content of less than 3000 ppm by weight, based on weight of the carbon material. Such carbon material may be utilized in amorphous or graphitic form in an electrode of an electrochemical energy device, such as a negative electrode of a lithium-ion battery or a lithium-ion hybrid capacitor.

公开(公告)号：US20190084862A1

公开(公告)日：2019-03-21

申请号：US16137730

申请日：2018-09-21

Applicant: Entegris, Inc.

Inventor： Troy SCOGGINS ,  Rex Gerald Sheppard ,  Carlo Waldfried

IPC: C03B11/08 ,  C23C16/455 ,  C23C16/40

Abstract: Described are glass-forming molds made of a graphite mold body and a coating formed by atomic layer deposition, with the coating being made of alumina or a combination of alumina and yttria.