公开(公告)号：US4708884A

公开(公告)日：1987-11-24

申请号：US875475

申请日：1986-06-18

申请人： Edwin A. Chandross ,  Robert E. Dean ,  Patrick K. Gallagher ,  Roland A. Levy ,  Frank Schrey ,  Gerald Smolinsky

发明人： Edwin A. Chandross ,  Robert E. Dean ,  Patrick K. Gallagher ,  Roland A. Levy ,  Frank Schrey ,  Gerald Smolinsky

IPC分类号： C23C16/40 ,  H01L21/316 ,  B05D3/14

CPC分类号： H01L21/02164 ,  C23C16/402 ,  H01L21/02129 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/31608 ,  H01L21/31612

摘要： Conformal layers of a silicon oxide, such as silicon dioxide, are deposited at temperatures below 600 degrees C. through the decomposition of compounds such as diacetoxyditertiarybutoxysilane. The required temperatures do not significantly affect temperature-sensitive structures. Therefore, it is possible to form silicon oxide regions in the processing of devices having these structures. More generally, lowered-temperature processing can be applied to the deposition of other materials which include silicon oxide. For example, borophosphosilicate glasses can be deposited by chemical vapor deposition processing involving flash-evaporation of a mixture of liquid precursor reagents.

摘要翻译： 诸如二氧化硅的氧化硅的保形层在低于600℃的温度下通过诸如二乙酰氧基二乙氧基丙氧基硅烷的化合物的分解沉积。 所需温度不会对温度敏感结构产生显着影响。 因此，可以在具有这些结构的器件的处理中形成氧化硅区域。 更一般地，降温处理可以应用于包括氧化硅的其它材料的沉积。 例如，硼磷硅酸盐玻璃可以通过化学气相沉积处理进行沉积，包括闪蒸蒸发液体前体试剂的混合物。

公开(公告)号：US4597985A

公开(公告)日：1986-07-01

申请号：US722433

申请日：1985-04-15

申请人： Edwin A. Chandross ,  Robert E. Dean ,  Gerald Smolinsky

发明人： Edwin A. Chandross ,  Robert E. Dean ,  Gerald Smolinsky

IPC分类号： C23C16/40 ,  H01L21/316 ,  B05D3/14

CPC分类号： H01L21/02164 ,  C23C16/402 ,  H01L21/02216 ,  H01L21/02271 ,  H01L21/02274 ,  H01L21/31608 ,  H01L21/31612

摘要： Conformal layers of a silicon oxide, such as silicon dioxide, are deposited at temperatures below 600 degrees C. through the decomposition of compounds such as diacetoxyditertiarybutoxysilane. The required temperatures do not significantly affect temperature-sensitive structures. Therefore, it is possible to form silicon oxide regions in the processing of devices having these structures.

摘要翻译： 诸如二氧化硅的氧化硅的保形层在低于600℃的温度下通过诸如二乙酰氧基二乙氧基丙氧基硅烷的化合物的分解沉积。 所需温度不会对温度敏感结构产生显着影响。 因此，可以在具有这些结构的器件的处理中形成氧化硅区域。

公开(公告)号：US4473455A

公开(公告)日：1984-09-25

申请号：US473261

申请日：1983-03-14

申请人： Robert E. Dean ,  James L. Fink

发明人： Robert E. Dean ,  James L. Fink

IPC分类号： C23C14/50 ,  H01L21/673 ,  C23C15/00

CPC分类号： H01L21/68728 ,  C23C14/50 ,  H01L21/68764 ,  H01L21/68771 ,  Y10S156/917 ,  Y10S269/903

摘要： At least three spring-mounted members disposed around the periphery of an aperture in a wafer-mounting plate are arranged to engage and securely hold edge portions of a semiconductor wafer to be processed. When the spring-mounted members are actuated toward the front side of the plate, a wafer can be freely moved into or out of the aperture from the back side of the plate by means of a vacuum chuck that contacts only the back side of the wafer. After a wafer to be held is inserted within the aperture, the actuated members are released. The released members move toward the back side of the plate and thereby engage the edges of the inserted wafer and exert radial holding forces thereon. The back side of a wafer so mounted is adapted to be brought into resilient engagement with a pedestal element in a processing chamber, thereby ensuring good thermal and electrical contact between the wafer and the pedestal element.

摘要翻译： 设置在晶片安装板的孔周围的至少三个弹簧安装构件被布置成接合并牢固地保持待加工的半导体晶片的边缘部分。 当弹簧安装构件朝向板的前侧致动时，通过仅接触晶片背面的真空卡盘，可以使晶片从板的背面自由地移入或移出孔 。 将要保持的晶片插入孔内之后，致动构件被释放。 释放的构件朝向板的背面移动，从而接合插入的晶片的边缘并在其上施加径向保持力。 如此安装的晶片的背面适于与处理室中的基座元件弹性接合，从而确保晶片和基座元件之间良好的热和电接触。

公开(公告)号：US5446853A

公开(公告)日：1995-08-29

申请号：US622922

申请日：1991-01-18

申请人： Robert E. Dean ,  Steven C. Cacka ,  Douglas P. Schaefer ,  Hossein F. Sevvom ,  Robert A. Brumnet

发明人： Robert E. Dean ,  Steven C. Cacka ,  Douglas P. Schaefer ,  Hossein F. Sevvom ,  Robert A. Brumnet

IPC分类号： G06F13/10 ,  G06F3/06 ,  G11B20/10 ,  G11B27/00 ,  G06F13/00

CPC分类号： G06F3/0601 ,  G11B20/10 ,  G11B27/002 ,  G06F2003/0691 ,  G11B2020/10916

摘要： A track image read/write head buffer provides a buffer memory for each read/write head in the rotating media data storage system so that a seek request from the processor can be handled as soon as the beginning of the requested data record is positioned below the associated read/write head. The data image of the entire data storage track that contains the requested data record stored on the rotating media is read from the rotating media by the read/write head and stored in the track image read/write head buffer independent of the availability of a data communication path to the processor. Thus, the read data operation need not be synchronized with the availability of a data communication path to the processor and the requested data record is retrieved from the rotating media as soon as the data record is properly positioned. In no case is the data retrieval time greater than one revolution of the rotating media. The error correction codes written on the rotating media to protect the integrity of the requested data are maintained since they are stored in the read/write head buffer along with the data record.

摘要翻译： 轨道图像读/写头缓冲器为旋转介质数据存储系统中的每个读/写头提供缓冲存储器，使得一旦所请求的数据记录的开始位于 相关的读/写头。 存储在旋转介质上的包含请求的数据记录的整个数据存储轨道的数据图像由读/写头从旋转介质中读取，并且独立于数据的可用性被存储在轨迹图像读/写头缓冲器中 到处理器的通信路径。 因此，读取数据操作不需要与处理器的数据通信路径的可用性同步，并且一旦数据记录被正确定位，则从旋转介质检索所请求的数据记录。 在任何情况下，数据检索时间大于旋转介质的一转。 写入在旋转介质上以保护所请求数据的完整性的纠错码被保留，因为它们与数据记录一起存储在读/写头缓冲器中。

公开(公告)号：US09468164B2

公开(公告)日：2016-10-18

申请号：US15051261

申请日：2016-02-23

申请人： Robert E. Dean ,  Todd R. Hall

发明人： Robert E. Dean ,  Todd R. Hall

IPC分类号： A01G25/16 ,  B05B12/02 ,  B05B12/04 ,  B05B15/02 ,  B05B15/00

CPC分类号： A01G25/165 ,  A01G25/16 ,  B05B15/00 ,  Y10T137/0419 ,  Y10T137/4238

摘要： An automated irrigation purge system utilizes a pressure purge method of discharging compressed air from a reservoir through selected irrigation zones with feedback from pressure switches to determine when to open and close each zone valve. No programming or user interaction is required beyond starting the system. The system can operate with a wide variety of irrigation systems, with varying number of zones, pipe lengths, pipe diameters, number and variety of sprinkler heads or outlets, and terrain slope. The system tracks the pressure transition time from high pressure to low pressure for each zone as it is blown out. When the current transition time is within a specified range from the previous transition time, the system knows the water has been sufficiently purged from that zone. The purge system can protect the irrigation system from high-pressure conditions, handle multiple error conditions, and maintain water valve settings during power loss.

公开(公告)号：US5341479A

公开(公告)日：1994-08-23

申请号：US778301

申请日：1991-10-16

申请人： Robert E. Dean ,  Steven C. Cacka ,  Douglas P. Schaefer ,  Hossein F. Sevvom ,  Robert A. Brumnet

发明人： Robert E. Dean ,  Steven C. Cacka ,  Douglas P. Schaefer ,  Hossein F. Sevvom ,  Robert A. Brumnet

IPC分类号： G06F3/06 ,  G11B19/02 ,  G11B20/10 ,  G11B20/12 ,  G11B27/30 ,  G06F13/00

CPC分类号： G06F3/0601 ,  G11B19/02 ,  G11B20/10 ,  G11B20/12 ,  G11B27/3027 ,  G06F2003/0691 ,  G11B2020/10916

摘要： The address mark triggered read/write head buffer provides a buffer memory for each read/write head in the rotating media data storage system that stores the entire track of data that includes the requested data record. Thus, the address mark triggered read/write head buffer retrieves the requested data record independent of the control module so that a seek request from the processor can be handled as soon as the beginning of the next data record stored on the track is positioned below the associated read/write head. The entire track is thereby staged faster on the average than the time to retrieve the requested data record. The address mark triggered read/write head buffer includes an address mark detection circuit to identify the beginning of the data field in each data record. The address mark is a predetermined data pattern of n bits that is written on the track a predetermined distance in advance of the data field of the data record. The address mark detection circuit compares the n data bits most recently read from the track with this predetermined data pattern of n bits as stored in memory. Once a match is detected, the buffer is enabled to store the next data record written on the track and all subsequent data records on the track.

摘要翻译： 地址标记触发的读/写头缓冲器为旋转介质数据存储系统中的每个读/写头提供缓冲存储器，其存储包括所请求的数据记录的整个数据轨迹。 因此，地址标记触发的读/写头缓冲器独立于控制模块检索所请求的数据记录，使得一旦存储在轨道上的下一个数据记录的开始位于 相关的读/写头。 因此，整个轨道的平均时间比检索所请求的数据记录的时间更快。 地址标记触发的读/写头缓冲器包括一个地址标记检测电路，以识别每个数据记录中数据字段的开始。 地址标记是在数据记录的数据字段之前预定距离上写入轨道的n位的预定数据模式。 地址标记检测电路将最近从磁道读出的n个数据位与存储在存储器中的n位的这种预定数据模式进行比较。 一旦检测到匹配，缓冲区就可以存储写在轨道上的下一个数据记录和轨道上的所有后续数据记录。

公开(公告)号：US4529353A

公开(公告)日：1985-07-16

申请号：US461531

申请日：1983-01-27

申请人： Robert E. Dean ,  Edward A. Dein

发明人： Robert E. Dean ,  Edward A. Dein

IPC分类号： B65G47/91 ,  H01L21/677 ,  H01L21/683 ,  H01L21/687 ,  B65G47/90

CPC分类号： H01L21/6838 ,  B65G47/91 ,  H01L21/67778 ,  Y10S414/137 ,  Y10S414/141

摘要： Compact apparatus characterized by cleanliness of operation, high throughput and low cost is designed for automatically loading and unloading wafer-carrying trays that are designed to be mounted in the reaction chamber of a processing system. A key component of the apparatus comprises a unique wafer vacuum chuck.

摘要翻译： 设计具有操作清洁度高，生产量高，成本低的紧凑型设备，用于自动装载和卸载被设计成安装在处理系统的反应室中的晶片托盘。 该装置的关键部件包括独特的晶片真空卡盘。

公开(公告)号：US4185202A

公开(公告)日：1980-01-22

申请号：US857380

申请日：1977-12-05

申请人： Robert E. Dean ,  Dan Maydan ,  Joseph M. Moran ,  Gary N. Taylor

发明人： Robert E. Dean ,  Dan Maydan ,  Joseph M. Moran ,  Gary N. Taylor

IPC分类号： H01L21/30 ,  G03F7/20 ,  G21K5/02 ,  A61K27/02 ,  A61N5/00 ,  C08J1/02 ,  G21G5/00

CPC分类号： G03F7/70866 ,  G03F7/2039 ,  G03F7/70933

摘要： X-ray lithographic systems as heretofore constructed include a low-attenuation chamber for propagating x-rays from a source toward a mask member that is positioned in close proximity to a resist-coated wafer. Both the mask and the wafer are included in the chamber which typically is either filled with helium or evacuated to a pressure less than about 10.sup.-2 Torr. In accordance with this invention, an x-ray lithographic system is constructed to enable establishment in the wafer-to-mask region of a controlled atmosphere that is separate and distinct from that maintained in the low-attenuation chamber. In this way, an improved lithographic system with advantageous throughput and other characteristics is realized.

摘要翻译： 如前所述构造的X射线光刻系统包括用于将X射线从源极传递到靠近抗蚀剂涂覆晶片的掩模构件的低衰减室。 掩模和晶片都包括在通常用氦填充或抽空到小于约10-2乇的压力的室中。 根据本发明，x射线光刻系统被构造成使得能够建立与被保持在低衰减室中的受控气氛分开且不同的受控气氛的晶片到掩模区域。 以这种方式，实现了具有有利吞吐量和其它特性的改进的光刻系统。

公开(公告)号：US06370878B1

公开(公告)日：2002-04-16

申请号：US09727921

申请日：2000-11-30

申请人： Robert E. Dean ,  Norm Peschke ,  Anton Scholten ,  Kenneth M. Rush, Jr. ,  Mihail Penev ,  Thomas D. Prevish

发明人： Robert E. Dean ,  Norm Peschke ,  Anton Scholten ,  Kenneth M. Rush, Jr. ,  Mihail Penev ,  Thomas D. Prevish

IPC分类号： F01K2506

CPC分类号： H01M8/04373 ,  H01M8/04022 ,  H01M8/04126 ,  H01M8/0432 ,  H01M8/04701 ,  H01M8/04738 ,  H01M8/04768 ,  H01M8/04776 ,  H01M8/04828

摘要： A fuel cell system includes a fuel cell stack, which during operation generates electrical energy by reacting a first stream of reactant gas and a second stream of reactant gas. The fuel cell stack also produces a fuel cell exhaust stream. An oxidizer unit is positioned to receive the fuel cell exhaust stream and oxidize at least a part of the fuel cell exhaust stream during operation, to produce an oxidizer exhaust stream. A heat recovery system is positioned to receive the oxidizer exhaust stream. The heat recovery system transfers at least some heat from the oxidizer exhaust stream to an input stream to generate a heated stream of water. In some embodiments, a temperature sensor is positioned to sense the temperature of the heated input stream. A control system maintains the heated stream of water at a target temperature based on the sensed temperature by controlling the amount of the heat from the oxidizer exhaust stream that is transferred to the input stream.

摘要翻译： 燃料电池系统包括燃料电池堆，其在操作期间通过使第一反应气流和第二反应气流反应而产生电能。 燃料电池堆还产生燃料电池排气流。 定位氧化器单元以接收燃料电池排气流并在操作期间氧化至少一部分燃料电池排气流，以产生氧化剂废气流。 定位热回收系统以接收氧化剂排气流。 热回收系统将来自氧化剂排气流的至少一些热量输送到输入流以产生加热的水流。 在一些实施例中，温度传感器被定位成感测加热的输入流的温度。 控制系统通过控制来自转移到输入流的氧化剂排出流的热量，基于感测到的温度将加热的水流维持在目标温度。

公开(公告)号：US5235689A

公开(公告)日：1993-08-10

申请号：US535784

申请日：1990-06-11

申请人： Dennis L. Baker ,  Robert E. Dean ,  Steven R. Kemp

发明人： Dennis L. Baker ,  Robert E. Dean ,  Steven R. Kemp

IPC分类号： G06F3/06 ,  G06F13/40

CPC分类号： G06F3/0601 ,  G06F13/4022 ,  G06F2003/0692 ,  G06F2003/0694

摘要： The dual port disk drive interface circuit enables a plurality of dual port disk drives to be interconnected with a plurality of control units in a manner that is transparent to both the dual port disk drives and the control unit. The dual port disk drive interface circuit is interposed between the two channels from n control units and the dual ports of m dual port disk drives to switchably interconnect each control unit with an available dual port disk drive. The interface circuit intercepts the control signals that are generated by both the control units and the dual port disk drives and modifies these control signals to emulate the interconnection of each control unit with a dedicated dual port disk drive. The interface circuit controls the routing of data between the control unit and the available ports on the plurality of dual port disk drives to multiply the number of ports available on the dual port disk drive without modification of the control unit or the dual port disk drive.

摘要翻译： 双端口磁盘驱动器接口电路使得多个双端口磁盘驱动器可以以对双端口磁盘驱动器和控制单元都是透明的方式与多个控制单元互连。 双端口磁盘驱动器接口电路插入在来自n个控制单元的两个通道和m个双端口磁盘驱动器的双端口之间，以可互换地将每个控制单元与可用的双端口磁盘驱动器互连。 接口电路拦截由控制单元和双端口磁盘驱动器产生的控制信号，并修改这些控制信号，以模拟每个控制单元与专用双端口磁盘驱动器的互连。 接口电路控制控制单元与多个双端口磁盘驱动器上的可用端口之间的数据路由，以增加双端口磁盘驱动器上可用端口的数量，而无需修改控制单元或双端口磁盘驱动器。