公开(公告)号：US5276725A

公开(公告)日：1994-01-04

申请号：US996508

申请日：1992-12-14

申请人： Eigo Kawakami ,  Minoru Yoshii ,  Shunichi Uzawa

发明人： Eigo Kawakami ,  Minoru Yoshii ,  Shunichi Uzawa

IPC分类号： G03F7/20 ,  G21K5/00

CPC分类号： G03F7/702

摘要： An exposure apparatus usable with a mask having a pattern and a wafer having a radiation-sensitive surface layer, for transferring with a radiation energy beam the pattern of the mask to the wafer, is disclosed. The apparatus includes a mask supporting member for supporting the mask; a wafer supporting member for supporting the wafer; a reflective member having a reflection surface and an indication pattern, the reflective member being supported by one of the mask supporting member and the wafer supporting member; an arrangement for projecting a beam, which is thinner than the radiation energy beam and which advances along or about the axis of the radiation energy beam, upon the reflective member; a device for observing a positional relationship between the indication pattern and a spot formed by projection of the thinner beam upon the reflective member; and a device for correcting a relationship between the indication pattern and the spot, on the basis of the observation.

摘要翻译： 公开了一种可用于具有图案的掩模和具有辐射敏感表面层的晶片的曝光装置，用于将辐射能量束将掩模的图案转印到晶片。 该装置包括用于支撑面罩的面罩支撑构件; 用于支撑晶片的晶片支撑构件; 反射构件，其具有反射面和指示图案，所述反射构件由所述面罩支撑构件和所述晶片支撑构件中的一个支撑; 用于投射比辐射能量束更薄并且沿辐射能量束的轴线或围绕辐射能量束的轴线前进的光束的反射构件的布置; 用于观察指示图案与通过将较薄光束投射在反射构件上形成的光斑之间的位置关系的装置; 以及用于基于观察来校正指示图案与斑点之间的关系的装置。

公开(公告)号：US4788596A

公开(公告)日：1988-11-29

申请号：US855732

申请日：1986-04-25

申请人： Eigo Kawakami ,  Yukichi Niwa ,  Mitsutoshi Ohwada ,  Yasuo Ogino ,  Minoru Yoshii ,  Shigeyuki Suda

发明人： Eigo Kawakami ,  Yukichi Niwa ,  Mitsutoshi Ohwada ,  Yasuo Ogino ,  Minoru Yoshii ,  Shigeyuki Suda

IPC分类号： H04N5/232 ,  H04N5/228

CPC分类号： H04N5/23254 ,  H04N5/23212 ,  H04N5/23248 ,  H04N5/23287

摘要： A characteristic point such as an image contrast of a target image in an image screen of an object produced by an image sensor is counted, a correlation between counts at two points in time is determined. A drive means for preventing vibration of an imaging lens is controlled in accordance with the correlation signal and imaging information such as in-focus or out-of-focus information.

摘要翻译： 计算特征点，例如由图像传感器产生的对象的图像画面中的目标图像的图像对比度，确定两个时间点的计数之间的相关性。 根据相关信号和诸如焦点内或焦点外信息的成像信息来控制用于防止成像镜头的振动的驱动装置。

公开(公告)号：US4780739A

公开(公告)日：1988-10-25

申请号：US900997

申请日：1986-08-27

申请人： Eigo Kawakami ,  Yukichi Niwa ,  Yasuo Ogino ,  Minoru Yoshii ,  Shigeyuki Suda ,  Mitsutoshi Ohwada

发明人： Eigo Kawakami ,  Yukichi Niwa ,  Yasuo Ogino ,  Minoru Yoshii ,  Shigeyuki Suda ,  Mitsutoshi Ohwada

IPC分类号： G02B27/64 ,  H04N5/232 ,  G03B7/08

CPC分类号： H04N5/23254 ,  G02B27/646 ,  H04N5/23248 ,  H04N5/23287 ,  G03B2217/005

摘要： An imaging device has detection means for detecting an image vibration of the imaging device and drive means for driving at least one of a photoelectric conversion device for converting a light of an object transmitted through a lens system of the imaging device to an electrical signal and the imaging device itself in a direction to cancel the vibration. For a high frequency image vibration, the vibration is compensated by using a piezoelectric device.

摘要翻译： 一种成像装置具有用于检测成像装置的图像振动的检测装置和用于驱动用于将通过成像装置的透镜系统传输的物体的光转换成电信号的光电转换装置中的至少一个的驱动装置， 成像装置本身在消除振动的方向上。 对于高频图像振动，通过使用压电装置来补偿振动。

公开(公告)号：US5519686A

公开(公告)日：1996-05-21

申请号：US438079

申请日：1995-05-08

申请人： Yoshihiro Yanagisawa ,  Yuko Morikawa ,  Hiroshi Matsuda ,  Haruki Kawada ,  Kunihiro Sakai ,  Hisaaki Kawade ,  Ken Eguchi ,  Eigo Kawakami ,  Toshimitsu Kawasa ,  Minoru Yoshii ,  Kenji Saitoh ,  Akihiko Yamano ,  Hiroyasu Nose

发明人： Yoshihiro Yanagisawa ,  Yuko Morikawa ,  Hiroshi Matsuda ,  Haruki Kawada ,  Kunihiro Sakai ,  Hisaaki Kawade ,  Ken Eguchi ,  Eigo Kawakami ,  Toshimitsu Kawasa ,  Minoru Yoshii ,  Kenji Saitoh ,  Akihiko Yamano ,  Hiroyasu Nose

IPC分类号： G01B7/00 ,  G01D5/244 ,  G01D5/245 ,  G01Q10/00 ,  G01Q20/04 ,  G01Q60/00 ,  G01Q60/10 ,  G01Q70/06 ,  G11B9/00 ,  G11B7/00

CPC分类号： G01D5/244 ,  G01B7/003 ,  G01D5/2451 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1481 ,  B82Y10/00 ,  G01Q10/06 ,  G01Q60/16 ,  G01Q80/00 ,  G11B9/1472 ,  Y10S977/851 ,  Y10S977/861 ,  Y10S977/947

摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.

摘要翻译： 编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测 当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

公开(公告)号：US5721721A

公开(公告)日：1998-02-24

申请号：US589473

申请日：1996-01-22

申请人： Yoshihiro Yanagisawa ,  Yuko Morikawa ,  Hiroshi Matsuda ,  Haruki Kawada ,  Kunihiro Sakai ,  Hisaaki Kawade ,  Ken Eguchi ,  Eigo Kawakami ,  Toshimitsu Kawase ,  Minoru Yoshii ,  Kenji Saitoh ,  Akihiko Yamano ,  Hiroyasu Nose

发明人： Yoshihiro Yanagisawa ,  Yuko Morikawa ,  Hiroshi Matsuda ,  Haruki Kawada ,  Kunihiro Sakai ,  Hisaaki Kawade ,  Ken Eguchi ,  Eigo Kawakami ,  Toshimitsu Kawase ,  Minoru Yoshii ,  Kenji Saitoh ,  Akihiko Yamano ,  Hiroyasu Nose

IPC分类号： G01B7/00 ,  G01D5/244 ,  G01D5/245 ,  G01Q10/00 ,  G01Q20/04 ,  G01Q60/00 ,  G01Q60/10 ,  G01Q70/06 ,  G11B9/00 ,  G11B7/00

CPC分类号： G01D5/244 ,  G01B7/003 ,  G01D5/2451 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1481 ,  B82Y10/00 ,  G01Q10/06 ,  G01Q60/16 ,  G01Q80/00 ,  G11B9/1472 ,  Y10S977/851 ,  Y10S977/861 ,  Y10S977/947

摘要： An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; an electrically conductive probe having a tip disposed opposed to the reference scale; wherein the reference scale and the probe are relatively movable in a direction different from the opposing direction of the tip of the probe and the reference scale; a portion for applying an electrical voltage to between the reference scale and the probe; a portion for detecting a change in a tunnel current between the reference scale and the probe, to between which the electric voltage is applied by the voltage applying portion at the time of the relative movement between the scale and the probe, the detecting portion detecting the change in the tunnel current when the probe passes a position opposed to a surface step of the reference scale; and portion for detecting the amount of the relative movement between the scale and probe, on the basis of the detection by the change detecting portion.

摘要翻译： 编码器包括具有形成在预定位置处的表面台阶的导电参考标尺; 导电探针，其具有与参考标尺相对设置的尖端; 其中所述参考标尺和所述探针在与所述探针的尖端和所述参考标尺的相反方向不同的方向上相对移动; 用于将电压施加到参考标尺和探针之间的部分; 用于检测参考标尺和探针之间的隧道电流变化的部分，在标尺和探头之间的相对移动时由电压施加部施加电压，检测部分检测 当探针经过与参考刻度的表面台阶相对的位置时隧道电流的变化; 以及用于根据变化检测部分的检测来检测标尺和探针之间的相对移动量的部分。

公开(公告)号：US20130027714A1

公开(公告)日：2013-01-31

申请号：US13554800

申请日：2012-07-20

申请人： Minoru Yoshii ,  Eiichi Fujii

发明人： Minoru Yoshii ,  Eiichi Fujii

IPC分类号： G01B9/02 ,  H01S5/00 ,  H01S3/10

CPC分类号： H01S5/143 ,  G01B9/02004 ,  G01B9/02091 ,  H01S3/08063 ,  H01S3/105 ,  H01S5/02284 ,  H01S5/0683 ,  H01S5/142 ,  H01S5/4062 ,  H01S5/4068

摘要： A light source device capable of varying a light oscillation wavelength includes a plurality of optical gain media, a dispersing element, and a wavelength selecting element. The optical gain media amplify light, and have gain wavelength bands that partially overlap and different maximum gain wavelengths. The dispersing element is formed of a single element. Each of light beams emitted from the optical gain media is incident on the dispersing element. The dispersing element disperses the light beams emitted from the optical gain media into light beams of different wavelengths. The wavelength selecting element selects a light beam of a predetermined wavelength from the light beams of different wavelengths into which the light beams emitted from the optical gain media are dispersed by the dispersing element. The light source device emits the light beam of the predetermined wavelength selected by the wavelength selecting element.

摘要翻译： 能够改变光振荡波长的光源装置包括多个光学增益介质，分散元件和波长选择元件。 光增益介质放大光，并且具有部分重叠的增益波长带和不同的最大增益波长。 分散元件由单一元件形成。 从光学增益介质发射的每束光束入射到分散元件上。 分散元件将从光学增益介质发射的光束分散成不同波长的光束。 波长选择元件从由光学增益介质发射的光束被分散元件分散的不同波长的光束中选择预定波长的光束。 光源装置发射由波长选择元件选择的预定波长的光束。

公开(公告)号：US5834767A

公开(公告)日：1998-11-10

申请号：US790798

申请日：1997-01-30

申请人： Masanobu Hasegawa ,  Minoru Yoshii ,  Kyoichi Miyazaki

发明人： Masanobu Hasegawa ,  Minoru Yoshii ,  Kyoichi Miyazaki

IPC分类号： G01B11/00 ,  G01B11/26 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/7026

摘要： A detecting system for detecting a surface position of an object, includes a light source, a first grating having a light collecting function, wherein the first grating is illuminated with light from the light source, a second grating having a light collecting function, a first optical system for imaging the first grating onto the object in a direction oblique to the surface of the object, a second optical system for re-imaging the image of the first grating, on the surface of the object, onto the second grating, wherein a moire fringe is produced by the second grating and the re-imaged image of the first grating, and a photodetector for detecting a position of a converged point of convergent light as produced by the moire fringe, wherein the surface position information of the object is determined on the basis of information related to the converged point position as detected by the photodetector.

摘要翻译： 一种用于检测物体的表面位置的检测系统，包括光源，具有聚光功能的第一光栅，其中第一光栅被来自光源的光照射，具有光收集功能的第二光栅，第一光栅 光学系统，用于将物体上的第一光栅成像到物体表面上的方向上;第二光学系统，用于将物体表面上的第一光栅的图像重新成像到第二光栅上，其中， 莫尔条纹由第二光栅和第一光栅的再成像图像产生，以及光电检测器，用于检测由莫尔条纹产生的会聚光的会聚点的位置，其中确定物体的表面位置信息 基于与由光检测器检测到的会聚点位置有关的信息。

公开(公告)号：US5750294A

公开(公告)日：1998-05-12

申请号：US685464

申请日：1996-07-24

申请人： Masanobu Hasegawa ,  Minoru Yoshii ,  Seiji Takeuchi

发明人： Masanobu Hasegawa ,  Minoru Yoshii ,  Seiji Takeuchi

IPC分类号： G03B27/72 ,  G03F7/20 ,  G03F7/207 ,  G03F7/22 ,  G03F9/00 ,  G03F9/02 ,  H01L21/027

CPC分类号： G03F7/70558 ,  G03F7/70241 ,  G03F7/70591 ,  G03F7/70641

摘要： Disclosed is a method of determining a best focus position or best exposure amount of a projection lens in an arrangement wherein a reticle is placed on a plane perpendicular to an optical axis of the projection lens, wherein a pattern having periodicity in a predetermined direction is provided on a surface of the reticle, wherein the pattern is transferred to a photosensitive substrate by the projection lens to form a printed pattern thereon. The method includes providing the pattern by using a plurality of zigzag openings of a constant line width, extending in a direction perpendicular to the predetermined direction and being arrayed with a constant periodicity along that direction, transferring the pattern to the photosensitive substrate sequentially with different focus positions to form plural printed patterns thereon, imaging the printed patterns upon an image pickup surface of photoelectrically converting means; calculating, from an imagewise signal produced by the photoelectrically converting means, information related to one frequency component of zigzag lines, constituting an outline of an image of the zigzag opening, and determining the best focus position on the basis of the information.

摘要翻译： 公开了一种确定投影透镜的最佳聚焦位置或最佳曝光量的方法，其中将掩模版放置在垂直于投影透镜的光轴的平面上，其中提供了沿预定方向具有周期性的图案 在掩模版的表面上，其中通过投影透镜将图案转印到感光基板上，以在其上形成印刷图案。 该方法包括通过使用在垂直于预定方向的方向上延伸的恒定线宽度的多个之字形开口来提供图案，并沿着该方向以恒定的周期排列，以不同的焦点依次传送图案到感光基片 在其上形成多个印刷图案的位置，将印刷图案成像在光电转换装置的图像拾取表面上; 根据由光电转换装置产生的成像信号，计算与Z字形线的一个频率分量有关的信息，构成Z字形开口的图像的轮廓，并根据该信息确定最佳对焦位置。

公开(公告)号：US5729290A

公开(公告)日：1998-03-17

申请号：US473333

申请日：1995-06-07

申请人： Jun Tokumitsu ,  Masayoshi Sekine ,  Toshiaki Kondo ,  Koji Takahashi ,  Isao Harigaya ,  Minoru Yoshii ,  Shigeyuki Suda

发明人： Jun Tokumitsu ,  Masayoshi Sekine ,  Toshiaki Kondo ,  Koji Takahashi ,  Isao Harigaya ,  Minoru Yoshii ,  Shigeyuki Suda

IPC分类号： G02B27/64 ,  H04N5/232

CPC分类号： H04N5/23254 ,  G02B27/646 ,  H04N5/23212 ,  H04N5/23248 ,  H04N5/23267 ,  H04N5/23287

摘要： A movement detection device for detecting movement of an image incident on an image sensing device and for compensating for that movement includes movement detection circuitry for detecting the movement of the image from image signals output from the image sensing device. Correction circuitry is provided for electrically correcting the movement of the image based on an output of the movement detection circuitry. A filter is provided for receiving the corrected image signals output from the correction circuitry, and for performing a filter processing operation on the corrected image signals to compensate for degradation of image resolution due to the movement of the image.

公开(公告)号：US5340992A

公开(公告)日：1994-08-23

申请号：US978524

申请日：1992-11-18

申请人： Masakazu Matsugu ,  Minoru Yoshii ,  Naoto Abe

发明人： Masakazu Matsugu ,  Minoru Yoshii ,  Naoto Abe

IPC分类号： G03F9/00 ,  G01N21/86 ,  G01V9/04

CPC分类号： G03F9/7076

摘要： A device for detecting a relative positional relationship between first and second objects is disclosed. The device includes light source for projecting light to the first and second objects; photodetecting system for detecting light from one of the first and second objects illuminated by the light source system, the photodetecting system having a light receiving surface and producing a signal corresponding to the light intensity at each point on the light receiving surface; and position detecting system for detecting the relative position of the first and second objects, on the basis of signals from the photodetecting system, wherein the position detecting system is arranged to adjust signals corresponding to different points on the light receiving surface of the photodetecting system, by using different weight coefficients and to detect the relative position of the first and second objects on the basis of the adjusted signals.

摘要翻译： 公开了一种用于检测第一和第二物体之间的相对位置关系的装置。 该装置包括用于将光投射到第一和第二物体的光源; 用于检测来自由光源系统照射的第一和第二物体之一的光的光电检测系统，所述光电检测系统具有光接收表面，并且产生与所述光接收表面上的每个点处的光强度相对应的信号; 以及位置检测系统，用于基于来自光电检测系统的信号检测第一和第二物体的相对位置，其中位置检测系统被布置成调节与光检测系统的光接收表面上的不同点对应的信号， 通过使用不同的权重系数，并且基于经调整的信号来检测第一和第二对象的相对位置。