公开(公告)号：US07187254B2

公开(公告)日：2007-03-06

申请号：US10380985

申请日：2001-07-11

申请人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

发明人： Qingxin Su ,  Paul B. Kirby ,  Eiju Komuro ,  Masaaki Imura ,  Roger W. Whatmore

IPC分类号： H03H9/54

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

摘要： Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20). The arrangement of the resonators (10, 11) between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2×2, and hither order filters are described.

摘要翻译： 在共面波导线结构内串联（10）和平行（11）配置的多个薄膜体声波谐振器（10,11）提供了紧凑的梯形滤波器。 谐振器（10,11）形成在衬底（20）中的开口（28）上，并通过形成在衬底（20）上的一个或多个传输线连接到相关联的电路。 在共面线结构的接地和信号线之间的谐振器（10,11）的布置提供了使滤波器的面积最小化的手段。 在共面传输线结构内嵌入梯形滤波器消除了对引线键合的需要，从而简化了制造。 描述了2x2的实施例和两个阶次滤波器。

公开(公告)号：US07199504B2

公开(公告)日：2007-04-03

申请号：US10718799

申请日：2003-11-24

申请人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

发明人： Eiju Komuro ,  Masaaki Imura ,  Qingxin Su ,  Paul B. Kirby ,  Roger W. Whatmore

IPC分类号： H03H9/54

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H9/568

摘要： A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

摘要翻译： 梯形薄膜体声波谐振器（FBAR）滤波器包括两个串联FBAR和两个并联FBAR。 每个FBAR具有顶部电极，底部电极和夹在顶部和底部电极之间的压电层。 两个串联FBAR的顶部电极构成共面波导传输线的信号线的一部分。 两个串联FBAR的顶部电极连接到相关电路。 两个串联FBAR有一个共同的底部电极。

公开(公告)号：US07239067B2

公开(公告)日：2007-07-03

申请号：US10811812

申请日：2004-03-30

申请人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Masaaki Imura

发明人： Eiju Komuro ,  Hisatoshi Saitou ,  Takao Noguchi ,  Masaaki Imura

IPC分类号： H01L41/00 ,  H02N2/00 ,  H01B13/00

CPC分类号： H03H9/564 ,  H03H3/02

摘要： A method of manufacturing a piezoelectric thin film resonator forms, after forming a piezoelectric film on a substrate so as to cover a lower electrode formed on the substrate, an electrode material layer for forming an upper electrode above the piezoelectric film, forms a mask of a predetermined form on the electrode material layer, and then etches the electrode material layer to form the upper electrode. Before a step of forming the electrode material layer, a protective layer for protecting the piezoelectric film during etching of the electrode material layer is formed so as to cover at least a part of the piezoelectric film where the upper electrode is not formed, and the electrode material layer is then formed so as to cover the protective layer.

摘要翻译： 一种制造压电薄膜谐振器的方法，在基板上形成压电膜以覆盖形成在基板上的下电极之后，形成用于在压电膜上形成上电极的电极材料层，形成 在电极材料层上形成预定形状，然后蚀刻电极材料层以形成上部电极。 在形成电极材料层的步骤之前，形成用于在蚀刻电极材料层期间保护压电膜的保护层，以覆盖不形成上部电极的压电膜的至少一部分，并且电极 然后形成材料层以覆盖保护层。

公开(公告)号：US06977563B2

公开(公告)日：2005-12-20

申请号：US10670234

申请日：2003-09-26

申请人： Eiju Komuro ,  Masaaki Imura ,  Katsuhiko Gunji ,  Taku Takeishi ,  Roger William Whatmore ,  Joseph Edward Albert Southin

发明人： Eiju Komuro ,  Masaaki Imura ,  Katsuhiko Gunji ,  Taku Takeishi ,  Roger William Whatmore ,  Joseph Edward Albert Southin

IPC分类号： H03H3/02 ,  H03H3/04 ,  H03H9/02 ,  H03H9/17 ,  H03H9/56 ,  H03H9/58 ,  H03H9/70 ,  H03H9/00

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H9/02094 ,  H03H9/02149 ,  H03H9/173 ,  H03H9/174 ,  H03H2003/0428

摘要： A thin-film piezoelectric resonator including a piezoelectric thin film having piezoelectric characteristic, and an upper electrode and a lower electrode arranged on opposite surfaces of the piezoelectric thin film for applying an excitation voltage to the piezoelectric thin film, wherein: each of the upper electrode and the lower electrode includes a resonant portion, and a lead-out portion; and the electrode thickness of at least one part of the lead-out portion in at least one of the upper electrode and the lower electrode is larger than the electrode thickness of the resonant portion formed to be continued from the lead-out portion.

摘要翻译： 包括具有压电特性的压电薄膜的薄膜压电谐振器和布置在压电薄膜的相对表面上的上电极和下电极，用于向压电薄膜施加激励电压，其中：每个上电极 并且所述下电极包括谐振部分和引出部分; 并且上电极和下电极中的至少一个中的引出部分的至少一部分的电极厚度大于形成为从引出部分继续的谐振部分的电极厚度。

公开(公告)号：US07003875B2

公开(公告)日：2006-02-28

申请号：US10968976

申请日：2004-10-21

申请人： Masaaki Imura ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

发明人： Masaaki Imura ,  Kenji Inoue ,  Eiju Komuro ,  Hisatoshi Saitou

IPC分类号： H05K3/02 ,  B44C1/22 ,  H01L4/04

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H2003/0428 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

摘要翻译： 一种制造压电谐振器的方法，包括：在压电膜14上形成上电极层20的第一步骤，用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤，以便 具有上电极的形状，除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤，去除抗蚀剂21的第四步骤，第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b，以及除去抗蚀剂22的第七步骤。

公开(公告)号：US20070221296A1

公开(公告)日：2007-09-27

申请号：US11568823

申请日：2005-06-24

申请人： Yasushi Enokido ,  Atsushi Sakamoto ,  Chikara Ishizaka ,  Takeshi Masuda ,  Masaaki Imura

发明人： Yasushi Enokido ,  Atsushi Sakamoto ,  Chikara Ishizaka ,  Takeshi Masuda ,  Masaaki Imura

IPC分类号： H01F1/00 ,  B22F1/00

CPC分类号： C22C1/0441 ,  B22F2009/041 ,  B22F2998/00 ,  B22F2998/10 ,  H01F1/0536 ,  H01F1/0577 ,  H01F41/0266 ,  B22F3/02 ,  B22F2202/05 ,  B22F9/04 ,  B22F1/0059 ,  B22F3/10

摘要： Provided is a rare earth sintered magnet which can attain a high residual magnetic flux density without causing a drop in coercive force or mechanical strength. The above-described problems are resolved by a rare earth sintered magnet which includes a sintered body whose carbon amount as determined by mass spectrometry is between 500 and 1,500 ppm, wherein a cv-value of the carbon amount on a rupture plane thereof is no greater than 200. The production method for this rare earth sintered magnet includes the steps of: preparing a compacted body by compressing in a magnetic field a raw material alloy powder has a carbon amount of no greater than 1,200 ppm as determined by mass spectrometry, and a Cmax/Cmin value of 15 or less wherein Cmax and Cmin respectively represent a maximum value and a minimum value of X-ray intensity of characteristic X-rays of carbon as determined by EPMA (Electron Probe Micro Analyzer); and sintering the compacted body.

摘要翻译： 提供一种可以获得高残留磁通密度而不会导致矫顽力或机械强度降低的稀土烧结磁体。 上述问题由包括通过质谱法测定的碳量为500〜1500ppm的烧结体的稀土类烧结磁体解决，其中其断裂面上碳量的cv值不大 该稀土类烧结磁体的制造方法包括以下步骤：通过在磁场中压缩制备压实体，通过质谱法测定碳原子数不超过1200ppm的原料合金粉末， Cmax / Cmin值为15以下，其中Cmax和Cmin分别表示由EPMA（Electron Probe Micro Analyzer）测定的碳的特征X射线的X射线强度的最大值和最小值; 并烧结压实体。

公开(公告)号：US20100127611A1

公开(公告)日：2010-05-27

申请号：US12451640

申请日：2008-05-20

申请人： Masaaki Imura ,  Mamoru Kubosaka ,  Toshimasa Kanai

发明人： Masaaki Imura ,  Mamoru Kubosaka ,  Toshimasa Kanai

IPC分类号： H01K1/02 ,  H01J9/02

CPC分类号： C23C14/086 ,  C23C14/08 ,  G02B1/115 ,  G02F1/13439 ,  G02F2201/083 ,  G02F2201/307 ,  G02F2201/38 ,  G02F2203/11

摘要： To provide a transparent electrode having high infrared light transmittance that is used in an optical communication device using infrared light, particularly infrared light near 1.55 μm, the transparent electrode of the present invention includes a transparent conductive film, and the extinction coefficient of the transparent conductive film at a wavelength of 1.55 μm is equal to or less than 0.5.

摘要翻译： 本发明的透明电极为了提供使用红外线的光通信装置，特别是1.55μm附近的红外光的透光性高的透明电极，其透明导电膜的消光系数 波长1.55μm的膜等于或小于0.5。

公开(公告)号：US20100020402A1

公开(公告)日：2010-01-28

申请号：US12439383

申请日：2007-08-30

申请人： Masaaki Imura ,  Toshimasa Kanai ,  Koji Ikegami

发明人： Masaaki Imura ,  Toshimasa Kanai ,  Koji Ikegami

IPC分类号： G02B1/11

CPC分类号： G02B1/16 ,  G02B1/11 ,  G02B1/116 ,  G02F1/133502 ,  G02F2201/38

摘要： An object of the present invention is to provide a multilayer film that can make large the amount of outgoing light from a liquid crystal device such as liquid crystal display element and liquid crystal aberration compensating element and at the same time, can realize a high contract in a liquid crystal display element. The multilayer film of the present invention is a multilayer film which is formed on an inner side of a transparent substrate and contains a transparent electrically-conductive film and an orientation film, in which an antireflection film is provided at least either between the transparent substrate and the transparent electrically-conductive film or between the transparent electrically-conductive film and the orientation film.

摘要翻译： 本发明的目的是提供一种能够使来自液晶显示元件和液晶像差补偿元件等液晶装置的出射光量大的多层膜，同时可实现高合同 液晶显示元件。 本发明的多层膜是在透明基板的内侧形成的透明导电膜和取向膜的多层膜，其中，在透明基板和透明基板之间至少设置有防反射膜， 透明导电膜或透明导电膜和取向膜之间。