Method of manufacturing a piezoelectric micro energy harvester
    4.
    发明授权
    Method of manufacturing a piezoelectric micro energy harvester 有权
    制造压电微能量收割机的方法

    公开(公告)号:US09293689B2

    公开(公告)日:2016-03-22

    申请号:US14066085

    申请日:2013-10-29

    摘要: A piezoelectric micro energy harvester and manufacturing method thereof, the method including: forming an insulation film on a substrate; patterning the insulation film and forming an electrode pad pattern, a center electrode pattern, and a side electrode pattern; forming an open cavity at an inside of the substrate for suspension of the center electrode pattern and the side electrode pattern; disposing a conductive film on the electrode pad pattern, the center electrode pattern, and the side electrode pattern and forming electrode pads, a center electrode, and a side electrode; and forming a piezoelectric film so as to cover a space between the center electrode and the side electrode and upper surfaces of the center electrode and the side electrode.

    摘要翻译: 一种压电微能量收集器及其制造方法,所述方法包括:在基板上形成绝缘膜; 图案化绝缘膜并形成电极焊盘图案,中心电极图案和侧面电极图案; 在所述基板的内部形成开放空腔,以悬浮所述中心电极图案和所述侧面电极图案; 在电极焊盘图形,中心电极图案和侧面电极图案上设置导电膜,形成电极焊盘,中心电极和侧面电极; 以及形成压电膜以覆盖中心电极和侧电极之间的空间以及中心电极和侧电极的上表面。