Apparatus for monitoring gas and plasma process equipment including the same

    公开(公告)号:US10153141B2

    公开(公告)日:2018-12-11

    申请号:US14621739

    申请日:2015-02-13

    IPC分类号: H01J37/32 G01N33/00 G01N21/64

    摘要: Provided is an apparatus for monitoring a gas and plasma process equipment including the same. The apparatus includes: a housing including a gas inflow hole, a gas discharge hole, and windows; a light source disposed adjacent to one of the windows outside the housing to provide source light to a gas supplied between the gas inflow hole and the gas discharge hole; a sensor disposed adjacent to the other of the windows outside the housing to detect fluorescence emitted from the gas by the source light; and a coil disposed in the housing between the gas inflow hole and the gas discharge hole to heat and decompose the gas between the light source and the sensor, thereby increasing the fluorescence emitted from the gas.

    Silicon solar cell
    7.
    发明授权
    Silicon solar cell 有权
    硅太阳能电池

    公开(公告)号:US09397248B2

    公开(公告)日:2016-07-19

    申请号:US14291146

    申请日:2014-05-30

    摘要: A solar cell includes a first electrode; a lower light absorption layer disposed on the first electrode; an upper light absorption layer disposed on the lower light absorption layer; and an intermediate reflector layer provided between the lower light absorption layer and the upper light absorption layer, the intermediate reflector layer being comprised of copper oxide. The intermediate reflector layer includes a plurality of copper oxide layers including a lower copper oxide layer making contact with the lower light absorption layer, an upper copper oxide layer making contact with the upper light absorption layer, and an intermediate copper oxide layer provided between the lower copper oxide layer and the upper copper oxide layer. The plurality of copper oxide layers have respective oxygen amounts that gradually increase from the upper copper oxide layer to the lower copper oxide layer.

    摘要翻译: 太阳能电池包括第一电极; 设置在所述第一电极上的下部光吸收层; 设置在下部光吸收层上的上部光吸收层; 以及设置在下部光吸收层和上部光吸收层之间的中间反射层,中间反射层由氧化铜构成。 中间反射层包括多个铜氧化物层,包括与下部光吸收层接触的下部氧化铜层,与上部光吸收层接触的上部氧化铜层,以及设置在下部光吸收层之间的中间氧化铜层 铜氧化物层和上部氧化铜层。 多个氧化铜层具有从上部氧化铜层向下部氧化铜层逐渐增加的氧量。